DE19723074C2 - Automatische Verwölbungskompensation für eine laminographische Schaltungsplatinenuntersuchung - Google Patents
Automatische Verwölbungskompensation für eine laminographische SchaltungsplatinenuntersuchungInfo
- Publication number
- DE19723074C2 DE19723074C2 DE19723074A DE19723074A DE19723074C2 DE 19723074 C2 DE19723074 C2 DE 19723074C2 DE 19723074 A DE19723074 A DE 19723074A DE 19723074 A DE19723074 A DE 19723074A DE 19723074 C2 DE19723074 C2 DE 19723074C2
- Authority
- DE
- Germany
- Prior art keywords
- image
- plane
- ray
- sectional
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007689 inspection Methods 0.000 title description 4
- 238000012360 testing method Methods 0.000 claims description 103
- 238000003384 imaging method Methods 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 32
- 238000010191 image analysis Methods 0.000 claims description 20
- 238000004458 analytical method Methods 0.000 claims description 15
- 230000005855 radiation Effects 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims 7
- 230000000149 penetrating effect Effects 0.000 claims 5
- 230000033001 locomotion Effects 0.000 description 27
- 229910000679 solder Inorganic materials 0.000 description 13
- 238000005259 measurement Methods 0.000 description 10
- 238000011835 investigation Methods 0.000 description 9
- 230000007547 defect Effects 0.000 description 8
- 230000001360 synchronised effect Effects 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000003491 array Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004807 localization Effects 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
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- 238000003860 storage Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- MCVAAHQLXUXWLC-UHFFFAOYSA-N [O-2].[O-2].[S-2].[Gd+3].[Gd+3] Chemical group [O-2].[O-2].[S-2].[Gd+3].[Gd+3] MCVAAHQLXUXWLC-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002591 computed tomography Methods 0.000 description 1
- 238000011960 computer-aided design Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000002601 radiography Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000010187 selection method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 210000004916 vomit Anatomy 0.000 description 1
- 230000008673 vomiting Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/419—Imaging computed tomograph
Landscapes
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pulmonology (AREA)
- Radiology & Medical Imaging (AREA)
- Theoretical Computer Science (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/713,379 US5687209A (en) | 1995-04-11 | 1996-09-13 | Automatic warp compensation for laminographic circuit board inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE19723074A1 DE19723074A1 (de) | 1998-03-26 |
| DE19723074C2 true DE19723074C2 (de) | 2002-09-05 |
Family
ID=24865904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19723074A Expired - Fee Related DE19723074C2 (de) | 1996-09-13 | 1997-06-02 | Automatische Verwölbungskompensation für eine laminographische Schaltungsplatinenuntersuchung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5687209A (OSRAM) |
| JP (1) | JPH10104174A (OSRAM) |
| DE (1) | DE19723074C2 (OSRAM) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE29623488U1 (de) * | 1995-11-06 | 1998-09-17 | Macrotron Process Technologies GmbH, 81829 München | Schaltungsanordnung zur Prüfung von Lötstellen |
| JPH09172299A (ja) * | 1995-12-20 | 1997-06-30 | Matsushita Electric Ind Co Ltd | 基板認識装置 |
| US5646733A (en) | 1996-01-29 | 1997-07-08 | Medar, Inc. | Scanning phase measuring method and system for an object at a vision station |
| US6028910A (en) * | 1998-01-19 | 2000-02-22 | Foster-Miller, Inc. | High resolution areal tomosynthesis |
| US6314201B1 (en) | 1998-10-16 | 2001-11-06 | Agilent Technologies, Inc. | Automatic X-ray determination of solder joint and view delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography |
| US6363298B1 (en) * | 1998-10-23 | 2002-03-26 | Chrysler Corporation | Method and apparatus for generating tool paths |
| US6201850B1 (en) | 1999-01-26 | 2001-03-13 | Agilent Technologies, Inc. | Enhanced thickness calibration and shading correction for automatic X-ray inspection |
| US6292530B1 (en) * | 1999-04-29 | 2001-09-18 | General Electric Company | Method and apparatus for reconstructing image data acquired by a tomosynthesis x-ray imaging system |
| US7013038B1 (en) * | 1999-11-08 | 2006-03-14 | Teradyne, Inc. | Method for inspecting a BGA joint |
| US6996265B1 (en) * | 1999-11-08 | 2006-02-07 | Teradyne, Inc. | Inspection method utilizing vertical slice imaging |
| JP3517388B2 (ja) * | 2000-06-14 | 2004-04-12 | 新光電気工業株式会社 | バンプの検査方法及びバンプの検査装置 |
| AU2000264047A1 (en) * | 2000-06-19 | 2002-01-02 | Cyberoptics Corporation | Automatic inspection system with x-ray imaging |
| US6373917B1 (en) * | 2000-08-30 | 2002-04-16 | Agilent Technologies, Inc. | Z-axis elimination in an X-ray laminography system using image magnification for Z plane adjustment |
| US6671349B1 (en) | 2000-11-13 | 2003-12-30 | Olganix Corporation | Tomosynthesis system and registration method |
| US6748046B2 (en) * | 2000-12-06 | 2004-06-08 | Teradyne, Inc. | Off-center tomosynthesis |
| US7562350B2 (en) * | 2000-12-15 | 2009-07-14 | Ricoh Company, Ltd. | Processing system and method using recomposable software |
| US6324249B1 (en) | 2001-03-21 | 2001-11-27 | Agilent Technologies, Inc. | Electronic planar laminography system and method |
| DE10160398B4 (de) * | 2001-12-10 | 2004-11-11 | Dieffenbacher Gmbh + Co. Kg | Verfahren und Vorrichtung zur Prüfung einer Matte aus Biomassepartikeln |
| US6853744B2 (en) * | 2001-12-14 | 2005-02-08 | Agilent Technologies, Inc. | System and method for confirming electrical connection defects |
| US6847900B2 (en) * | 2001-12-17 | 2005-01-25 | Agilent Technologies, Inc. | System and method for identifying solder joint defects |
| EP1459094B1 (en) * | 2001-12-21 | 2012-04-04 | Koninklijke Philips Electronics N.V. | Method for localizing a target in an object |
| US6850589B2 (en) * | 2002-03-27 | 2005-02-01 | Agilent Technologies, Inc. | Tomography of curved surfaces |
| JP4184694B2 (ja) * | 2002-04-05 | 2008-11-19 | 株式会社ブリヂストン | タイヤのｘ線検査方法及びその装置 |
| US7092484B1 (en) | 2002-06-14 | 2006-08-15 | Iowa State University Research Foundation, Inc. | Model-assisted reconstruction of volumetric data |
| WO2004049256A2 (en) * | 2002-11-13 | 2004-06-10 | Digitome Corporation | Ray tracing kernel calibration |
| US6738450B1 (en) | 2002-12-10 | 2004-05-18 | Agilent Technologies, Inc. | System and method for cost-effective classification of an object under inspection |
| US20040263862A1 (en) * | 2003-06-24 | 2004-12-30 | Amparan Alfonso Benjamin | Detecting peripheral points of reflected radiation beam spots for topographically mapping a surface |
| US7326025B2 (en) * | 2004-05-04 | 2008-02-05 | Texas Instruments Incorporated | System for detecting warped carriers and associated methods |
| JP3913253B2 (ja) | 2004-07-30 | 2007-05-09 | キヤノン株式会社 | 光半導体装置およびその製造方法 |
| JP4636500B2 (ja) * | 2005-03-28 | 2011-02-23 | 名古屋電機工業株式会社 | Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム |
| DE102005020149A1 (de) * | 2005-04-29 | 2006-11-09 | Yxlon International X-Ray Gmbh | Verfahren zur automatischen Fehlererkennung in Prüfteilen mittels einer Röntgenprüfanlage |
| US7225051B1 (en) * | 2005-08-04 | 2007-05-29 | Magnecomp Corporation | Closed-loop feedback for maximizing Cpk in progressive forming operations |
| US20070189460A1 (en) * | 2006-02-15 | 2007-08-16 | Buck Dean C | Precise x-ray inspection system |
| WO2007121989A2 (de) * | 2006-04-25 | 2007-11-01 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschunge E.V. | Vorrichtung und verfahren zum erzeugen einer zweidimensionalen darstellung eines beliebig innerhalb eines objekts angeordneten objektabschnitts |
| US20080089567A1 (en) * | 2006-10-11 | 2008-04-17 | Eliasson Tracy K | Artifact reduction in an x-ray imaging system |
| US7529336B2 (en) * | 2007-05-31 | 2009-05-05 | Test Research, Inc. | System and method for laminography inspection |
| US8331525B2 (en) | 2007-10-01 | 2012-12-11 | Pratt & Whitney Rocketdyne, Inc. | Characteristic X-ray computed laminography system for home made explosives (HME) detection |
| WO2009078415A1 (ja) * | 2007-12-17 | 2009-06-25 | Uni-Hite System Corporation | Ｘ線検査装置および方法 |
| GB0817487D0 (en) * | 2008-09-24 | 2008-10-29 | Durham Scient Crystals Ltd | Radiographic data interpretation |
| JP5559471B2 (ja) * | 2008-11-11 | 2014-07-23 | 浜松ホトニクス株式会社 | 放射線検出装置、放射線画像取得システム、放射線検査システム、及び放射線検出方法 |
| EP2256069A1 (en) * | 2009-05-29 | 2010-12-01 | Mettler-Toledo Safeline X-Ray Limited | Conveyor chain for a radiographic inspection system and radiographic inspection system |
| KR101096366B1 (ko) * | 2009-11-27 | 2011-12-20 | 한국원자력연구원 | 스테레오 엑스레이 투과검사 시스템 |
| JP5559551B2 (ja) * | 2010-01-19 | 2014-07-23 | 株式会社サキコーポレーション | 検査装置 |
| WO2012169374A1 (ja) * | 2011-06-08 | 2012-12-13 | 村田機械株式会社 | ワーク処理システム |
| US9733193B2 (en) * | 2015-03-12 | 2017-08-15 | Proton Products International Limited | Measurement of industrial products manufactured by extrusion techniques |
| JP7373840B2 (ja) * | 2019-10-03 | 2023-11-06 | 株式会社 システムスクエア | 検査装置 |
| JP2023053558A (ja) * | 2021-10-01 | 2023-04-13 | 株式会社サキコーポレーション | 検査装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5291535A (en) * | 1987-10-30 | 1994-03-01 | Four Pi Systems Corporation | Method and apparatus for detecting excess/insufficient solder defects |
| EP0683389A1 (en) * | 1994-05-12 | 1995-11-22 | Kabushiki Kaisha Toshiba | Laminograph and inspection and repair device using the same |
| DE19604802A1 (de) * | 1995-04-11 | 1996-10-24 | Hewlett Packard Co | System und Verfahren für eine Schichtbildaufnahme mit durchgehender linearer Abtastung |
Family Cites Families (96)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2511853A (en) * | 1950-06-20 | Radiographic scanning unit | ||
| US2720596A (en) * | 1955-10-11 | Spiral laminagraph | ||
| FR812792A (fr) * | 1935-11-01 | 1937-05-18 | Philips Nv | Procédé et dispositif radiographique permettant de représenter des objets en coupe à l'aide de rayons chi |
| US2259708A (en) * | 1937-06-14 | 1941-10-21 | Schiebold Ernst | Testing materials by x-ray |
| BE468984A (OSRAM) * | 1939-11-02 | |||
| US2667585A (en) * | 1951-02-15 | 1954-01-26 | Hartford Nat Bank & Trust Co | Device for producing screening images of body sections |
| DE1033844B (de) * | 1951-09-04 | 1958-07-10 | Ialicenciaia Talalmanyokat Ert | Roentgenapparat fuer Bewegungsbestrahlung |
| BE533316A (OSRAM) * | 1953-11-14 | |||
| NL207028A (OSRAM) * | 1956-05-09 | |||
| CH355225A (de) * | 1958-01-22 | 1961-06-30 | Foerderung Forschung Gmbh | Verfahren und Einrichtung zum Kontrollieren und Korrigieren der Lage des durch einen Kathodenstrahl erzeugten Brennflecks auf der Antikathode einer Röntgenröhre |
| DE1138617B (de) * | 1960-01-22 | 1962-10-25 | Zuder Di G Zurli & Dr A De Reg | Vorrichtung zur Durchfuehrung von Roentgenaufnahmen, insbesondere von Schichtaufnahmen |
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- 1997-09-05 JP JP9241418A patent/JPH10104174A/ja not_active Ceased
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Also Published As
| Publication number | Publication date |
|---|---|
| DE19723074A1 (de) | 1998-03-26 |
| JPH10104174A (ja) | 1998-04-24 |
| US5687209A (en) | 1997-11-11 |
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