JPH09511688A - レーザー誘起破壊及び切断形状を制御する方法 - Google Patents
レーザー誘起破壊及び切断形状を制御する方法Info
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- JPH09511688A JPH09511688A JP7526364A JP52636495A JPH09511688A JP H09511688 A JPH09511688 A JP H09511688A JP 7526364 A JP7526364 A JP 7526364A JP 52636495 A JP52636495 A JP 52636495A JP H09511688 A JPH09511688 A JP H09511688A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
- A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
- A61F9/007—Methods or devices for eye surgery
- A61F9/008—Methods or devices for eye surgery using laser
- A61F9/00825—Methods or devices for eye surgery using laser for photodisruption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/54—Glass
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Surgery (AREA)
- Veterinary Medicine (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Heart & Thoracic Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Biomedical Technology (AREA)
- Ophthalmology & Optometry (AREA)
- Electromagnetism (AREA)
- Vascular Medicine (AREA)
- Otolaryngology (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.パルス・レーザービームを用いた材料のレーザー誘起破壊(LIB)の方法で あって、当該材料のフルエンス破壊閾値とレーザーパルス幅との関係において、 その勾配の急速かつ明瞭な変化が一定のレーザー・パルス幅値で生じることを特 徴とするものであって、当該方法が、 a)各パルスのパルス幅が上記一定のレーザーパルス幅値以下のパルス幅である ような単一ないし複数のレーザーパルスのビームを生成し、かつ b)当該ビームの焦点を材料表面若しくはその下の一点にもつような前記方法。 2.請求項1による方法であって、材料が金属であり、パルス幅が10〜10,000フ ェムトセカンドであり、ビーム・エネルギーが1ナノジュール〜1マイクロジュ ールであるもの。 3.請求項1による方法であって、レーザービームによってスポットが画定され 、かつ当該ビームの横型ガウス・プロフィールの特徴が、ビームスポットないし その近傍におけるフルエンスが閾値フルエンスよりも大きく、これによるレーザ ー誘起破壊が当該スポット内の部域の切断であるもの。 4.請求項3による方法であって、当該スポットサイズが基本波長サイズよりも 小さな直径の切断空洞を提供する回折限定スポットサイズであるもの。 5.請求項1による方法であって、当該材料がレーザーの波長の点から透明であ り、パルス幅が10〜10,000フェムトセカンドであり、当該ビームのエネルギーが 10ナノジュール〜1ミリジュールであるもの。 6.請求項1による方法であって、材料が生物組織であり、パルス幅が10〜10,0 00フェムトセカンドであり、当該ビームのエネルギーが10ナノジュール〜1ミリ ジュールであるもの。 7.請求項1による方法であって、パルス幅の関数としての材料の切断(LIB)閾 値を計測し、かつ切断(LIB)閾値がパルス幅の平方根としてスケーリング則に従 わなくなる点を決定することによって一定のパルス幅が得られるもの。 8.請求項1による方法であって、当該レーザービームのエネルギーが10ナノジ ュールから1ミリジュールの範囲にあるもの。 9.請求項1による方法であって、当該レーザービームのフルエンスが平方セン チ当たり100 ミリジュールから平方センチ当たり100 ジュールまでの範囲内にあ るもの。 10.請求項1による方法であって、当該レーザービームによって材料内部ない しその表面にひとつのスポットが画定され、かつLIB により当該スポットの部域 よりも小さなサイズの部域が切断されるもの。 11.請求項1による方法であって、当該レーザービームの波長が200 ナノメー タから2ミクロンの範囲にあるもの。 12.請求項1による方法であって、当該パルス幅が数ピコセカンドからフェム トセカンドまでの範囲にあるもの。 13.請求項1による方法であって、当該破壊に化学的及び物理的な変化が含ま れるもの。 14.請求項1による方法であって、当該破壊に化学的及び物理的な破壊が含ま れるもの。 15.請求項1による方法であって、当該破壊に分解が含まれるもの。 16.請求項1による方法であって、当該破壊に切断が含まれるもの。 17.請求項1による方法であって、当該破壊に蒸発が含まれるもの。 18.請求項1による方法であって、当該スポットサイズが柔軟な絞りによって 1から100 ミクロンまでの範囲で変動するもの。 19.請求項1による方法であって、当該マスクが光路の途中に 置かれて当該ビームの一部を閉塞することによって所望の幾何学形状のビームと するもの。 20.請求項1による方法であって、当該レーザーの操作モードが非TEMoo であ るもの。 21.下記のものを含むレーザー誘起破壊方法、すなわち、 a)各パルスが、レーザーパルス幅(T)の関数としてのフルエンス破壊閾値(Fth) の曲線の勾配変化に対応するパルス幅値以下のパルス幅を有するような連続する パルスを含む単一ないし複数のレーザーパルスのビームを生成し、当該変化が当 該曲線の第一部分と第二部分の間の一点で発生し、当該第一部分はFth値がパル ス幅の平方根(T1/2)に従って変動するような比較的長いパルス幅の範囲にわたり 、当該第二部分がFth、対T勾配が当該第一部分とは異なり、かつ当該第一部分と 比較して短いパルス幅の範囲にわたるもの、並びに b)当該ビームの焦点を材料の表面ないし表面下の一点に合わせるような方法。 22.請求項21による方法であって、更に a)パルス幅起動点の同定、 b)レーザービームの初期起動点を材料の表面ないし表面下に合わせること、 c)横方向に一定光路に沿って当該ビームを走査すること、 を含むような方法。 23.請求項21による方法であって、更に a)パルス幅起動点の同定、 b)レーザービームの初期起動点を材料の表面ないし表面下に合わせること、 c)材料の長手方向の一定光路に沿ってレイリー・レンジよりも浅い深度まで当 該ビームを走査すること、 を含むような方法。 24.請求項21による方法であって、当該破壊に化学的及び物理的な変化が含ま れるもの。 25.請求項21による方法であって、当該破壊に化学的及び物理的な変化が含ま れるもの。 26.請求項21による方法であって、当該破壊に分解が含まれるもの。 27.請求項21による方法であって、当該破壊に切断が含まれるもの。 28.請求項21による方法であって、当該破壊に蒸発が含まれるもの。 29.材料をレーザー誘起破壊する方法であって、以下のものを含むもの。すな わち、 a)選択された材料につき、レーザーパルス幅の関数としてのフルエンス破壊閾 値(Fth)の特性曲線を決定すること、 b)当該材料のFthに対するパルス幅の特性曲線の勾配の急速かつ明確な変化に 対応するような当該曲線上のパルス幅値を同定すること、 c)単一ないし複数のレーザーパルスのビームを生成し、当該ビームが当該勾配 の当該明瞭な変化に対応する当該パルス幅値以下のパルス幅を有する連続するパ ルスから成り、かつ d)当該ビームの焦点を材料表面ないし表面下に合わせること。 30.請求項29による方法であって、更に下記のものを含むような方法。すなわ ち、 a)パルス幅始動点の同定、 b)レーザービーム初期始動点を材料の表面ないし表面下に合わせること、 c)当該ビームを横方向の一定光路に沿って走査すること。 31.請求項29による方法であって、更に下記のものを含むような方法。すなわ ち、 a)パルス幅始動点の同定、 b)レーザービーム初期始動点を材料の表面ないし表面下に合わせること、 c)当該ビームを材料の長手方向の一定光路に沿ってレイリー・レンジよりも浅 い深度まで走査すること。 32.請求項29による方法であって、当該破壊に化学的及び物理的な変化が含ま れるもの。 33.請求項29による方法であって、当該破壊に化学的及び物理的な破壊が含ま れるもの。 34.請求項29による方法であって、当該破壊に分解が含まれるの。 35.請求項29による方法であって、当該破壊に切断が含まれるもの。 36.請求項29による方法であって、当該破壊に蒸発が含まれるもの。 37.請求項1、2、5、6、21及び29のうちのいずれかひとつによる方法であ って、当該ビームが一定の持続時間の短い光パルスを発生する手段、当該光パル スの時間を延長する手段、固体増幅媒体を含む当該時間延長光パルスを増幅する 手段並びに当該増幅パルスを所望の持続時間に再圧縮する手段、を含むチャープ ・パルス増幅(CPA)手段によって得られるような方法。 38.請求項1による方法であって、レーザービームのf値を変更することによ り1から100 ミクロンまでの範囲でスポットサイズを変動させるもの。 39.請求項1による方法であって、標的の位置を変更することにより1〜100 ミクロンまでの範囲でスポットサイズを変動させるもの。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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US224,961 | 1988-07-26 | ||
US08/224,961 | 1994-04-08 | ||
US08/224,961 US5656186A (en) | 1994-04-08 | 1994-04-08 | Method for controlling configuration of laser induced breakdown and ablation |
PCT/US1995/003863 WO1995027587A1 (en) | 1994-04-08 | 1995-03-29 | Method for controlling configuration of laser induced breakdown and ablation |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2001363495A Division JP3824522B2 (ja) | 1994-04-08 | 2001-11-29 | レーザー誘起破壊及び切断形状を制御する方法 |
Publications (2)
Publication Number | Publication Date |
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JPH09511688A true JPH09511688A (ja) | 1997-11-25 |
JP3283265B2 JP3283265B2 (ja) | 2002-05-20 |
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP52636495A Expired - Lifetime JP3283265B2 (ja) | 1994-04-08 | 1995-03-29 | レーザー誘起破壊及び切断形状を制御する方法 |
JP2001363495A Expired - Lifetime JP3824522B2 (ja) | 1994-04-08 | 2001-11-29 | レーザー誘起破壊及び切断形状を制御する方法 |
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JP2001363495A Expired - Lifetime JP3824522B2 (ja) | 1994-04-08 | 2001-11-29 | レーザー誘起破壊及び切断形状を制御する方法 |
Country Status (8)
Country | Link |
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US (2) | US5656186A (ja) |
EP (1) | EP0754103B1 (ja) |
JP (2) | JP3283265B2 (ja) |
AT (1) | ATE159880T1 (ja) |
AU (1) | AU684633B2 (ja) |
CA (1) | CA2186451C (ja) |
DE (1) | DE69500997T2 (ja) |
WO (1) | WO1995027587A1 (ja) |
Cited By (10)
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JP2002154846A (ja) * | 2000-11-17 | 2002-05-28 | National Institute Of Advanced Industrial & Technology | ガラス基板の加工方法 |
JP2006130903A (ja) * | 2004-11-05 | 2006-05-25 | Lg Phillips Lcd Co Ltd | フェムト秒レーザーを用いた基板の切断方法 |
WO2006093017A1 (ja) * | 2005-03-02 | 2006-09-08 | Sumitomo Electric Industries, Ltd. | レーザーアブレーションによる材料の加工方法とその加工方法により加工された材料 |
JP2007527732A (ja) * | 2003-06-02 | 2007-10-04 | カール ツァイス メディテック エージー | フェムト秒ファイバーレーザーによる眼科手術処置のための装置と方法 |
JP2007527731A (ja) * | 2003-06-02 | 2007-10-04 | カール ツァイス メディテック エージー | 材料の精密加工のための方法と装置 |
JP2008515634A (ja) * | 2004-05-28 | 2008-05-15 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 |
WO2012073868A1 (ja) * | 2010-11-30 | 2012-06-07 | 三洋電機株式会社 | 光電変換装置及びその製造方法 |
JP2015092605A (ja) * | 2011-06-15 | 2015-05-14 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | レーザスクライビング・プラズマエッチングによるデバイスの個片化用のインサイチュー蒸着マスク層 |
JP2017516550A (ja) * | 2014-05-22 | 2017-06-22 | バーフェリヒト ゲゼルシャフト ミット ベシュレンクテル ハフツング | エネルギーに関係したレーザーパルスパラメータを設定する技法 |
WO2022239517A1 (ja) * | 2021-05-14 | 2022-11-17 | 浜松ホトニクス株式会社 | レーザ加工装置、レーザ加工方法、及び、データ生成方法 |
Families Citing this family (458)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6489589B1 (en) | 1994-02-07 | 2002-12-03 | Board Of Regents, University Of Nebraska-Lincoln | Femtosecond laser utilization methods and apparatus and method for producing nanoparticles |
DE29505985U1 (de) * | 1995-04-06 | 1995-07-20 | Bestenlehrer, Alexander, 91074 Herzogenaurach | Vorrichtung zum Bearbeiten, insbesondere zum Polieren und Strukturieren von beliebigen 3D-Formflächen mittels eines Laserstrahls |
US6150630A (en) * | 1996-01-11 | 2000-11-21 | The Regents Of The University Of California | Laser machining of explosives |
US5720894A (en) * | 1996-01-11 | 1998-02-24 | The Regents Of The University Of California | Ultrashort pulse high repetition rate laser system for biological tissue processing |
US5761111A (en) * | 1996-03-15 | 1998-06-02 | President And Fellows Of Harvard College | Method and apparatus providing 2-D/3-D optical information storage and retrieval in transparent materials |
US7655002B2 (en) | 1996-03-21 | 2010-02-02 | Second Sight Laser Technologies, Inc. | Lenticular refractive surgery of presbyopia, other refractive errors, and cataract retardation |
DE69722673T2 (de) * | 1996-03-25 | 2004-02-05 | Nippon Sheet Glass Co., Ltd. | Laserherstellungsverfahren für Glassubstrate und so hergestellte Mikrolinsenmatrizen |
US6022309A (en) * | 1996-04-24 | 2000-02-08 | The Regents Of The University Of California | Opto-acoustic thrombolysis |
US20060095097A1 (en) * | 1996-10-30 | 2006-05-04 | Provectus Devicetech, Inc. | Treatment of pigmented tissue using optical energy |
US7353829B1 (en) | 1996-10-30 | 2008-04-08 | Provectus Devicetech, Inc. | Methods and apparatus for multi-photon photo-activation of therapeutic agents |
US7036516B1 (en) * | 1996-10-30 | 2006-05-02 | Xantech Pharmaceuticals, Inc. | Treatment of pigmented tissues using optical energy |
US6165649A (en) * | 1997-01-21 | 2000-12-26 | International Business Machines Corporation | Methods for repair of photomasks |
US6392683B1 (en) | 1997-09-26 | 2002-05-21 | Sumitomo Heavy Industries, Ltd. | Method for making marks in a transparent material by using a laser |
DE19745294A1 (de) * | 1997-10-14 | 1999-04-15 | Biotronik Mess & Therapieg | Verfahren zur Herstellung feinstrukturierter medizintechnischer Implantate |
US6268586B1 (en) * | 1998-04-30 | 2001-07-31 | The Regents Of The University Of California | Method and apparatus for improving the quality and efficiency of ultrashort-pulse laser machining |
FR2781707B1 (fr) * | 1998-07-30 | 2000-09-08 | Snecma | Procede d'usinage par laser excimere de trous ou de formes a profil variable |
JP3012926B1 (ja) * | 1998-09-21 | 2000-02-28 | 工業技術院長 | 透明材料のレーザー微細加工法 |
IL127388A0 (en) * | 1998-12-03 | 1999-10-28 | Universal Crystal Ltd | Material processing applications of lasers using optical breakdown |
US6333485B1 (en) | 1998-12-11 | 2001-12-25 | International Business Machines Corporation | Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam |
US7649153B2 (en) | 1998-12-11 | 2010-01-19 | International Business Machines Corporation | Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed laser beam |
US6285002B1 (en) | 1999-05-10 | 2001-09-04 | Bryan Kok Ann Ngoi | Three dimensional micro machining with a modulated ultra-short laser pulse |
US6555781B2 (en) | 1999-05-10 | 2003-04-29 | Nanyang Technological University | Ultrashort pulsed laser micromachining/submicromachining using an acoustooptic scanning device with dispersion compensation |
DE10029110B4 (de) * | 1999-06-15 | 2006-05-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren für die Materialbearbeitung und Verwendung desselben |
US6760973B1 (en) * | 1999-06-30 | 2004-07-13 | Canon Kabushiki Kaisha | Laser working method and method for producing ink jet recording head |
SG90732A1 (en) * | 1999-06-30 | 2002-08-20 | Canon Kk | Laser processing method, method for manufacturing ink jet recording head using such method of manufacture, and ink jet recording head manufactured by such method of manufacture |
JP2001071168A (ja) * | 1999-06-30 | 2001-03-21 | Canon Inc | レーザ加工方法、該レーザ加工方法を用いたインクジェット記録ヘッドの製造方法、該製造方法で製造されたインクジェット記録ヘッド |
US6977137B2 (en) | 1999-07-29 | 2005-12-20 | Corning Incorporated | Direct writing of optical devices in silica-based glass using femtosecond pulse lasers |
US6573026B1 (en) | 1999-07-29 | 2003-06-03 | Corning Incorporated | Femtosecond laser writing of glass, including borosilicate, sulfide, and lead glasses |
AU7091500A (en) * | 1999-08-30 | 2001-03-26 | Board Of Regents University Of Nebraska Lincoln | Three-dimensional electrical interconnects |
JP2001100145A (ja) | 1999-09-29 | 2001-04-13 | Sunx Ltd | レーザマーカ |
US6796148B1 (en) | 1999-09-30 | 2004-09-28 | Corning Incorporated | Deep UV laser internally induced densification in silica glasses |
JP4774146B2 (ja) * | 1999-12-23 | 2011-09-14 | パナソニック株式会社 | レーザを用いて波長より小さなピッチで穴を開けるための方法および装置 |
US7838794B2 (en) | 1999-12-28 | 2010-11-23 | Gsi Group Corporation | Laser-based method and system for removing one or more target link structures |
US20040134894A1 (en) * | 1999-12-28 | 2004-07-15 | Bo Gu | Laser-based system for memory link processing with picosecond lasers |
US7723642B2 (en) * | 1999-12-28 | 2010-05-25 | Gsi Group Corporation | Laser-based system for memory link processing with picosecond lasers |
US6340806B1 (en) | 1999-12-28 | 2002-01-22 | General Scanning Inc. | Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train |
US6281471B1 (en) | 1999-12-28 | 2001-08-28 | Gsi Lumonics, Inc. | Energy-efficient, laser-based method and system for processing target material |
CN1276495C (zh) | 2000-01-10 | 2006-09-20 | 电子科学工业公司 | 以具超短脉冲宽度的激光脉冲的脉冲串处理存储器链路的激光器系统及方法 |
US20030222324A1 (en) * | 2000-01-10 | 2003-12-04 | Yunlong Sun | Laser systems for passivation or link processing with a set of laser pulses |
US20060141681A1 (en) * | 2000-01-10 | 2006-06-29 | Yunlong Sun | Processing a memory link with a set of at least two laser pulses |
US7671295B2 (en) * | 2000-01-10 | 2010-03-02 | Electro Scientific Industries, Inc. | Processing a memory link with a set of at least two laser pulses |
US6887804B2 (en) | 2000-01-10 | 2005-05-03 | Electro Scientific Industries, Inc. | Passivation processing over a memory link |
US6552301B2 (en) * | 2000-01-25 | 2003-04-22 | Peter R. Herman | Burst-ultrafast laser machining method |
AU2001228239A1 (en) * | 2000-01-27 | 2001-08-07 | National Research Council Of Canada | Method and apparatus for repair of defects in materials with short laser pulses |
US6341009B1 (en) | 2000-02-24 | 2002-01-22 | Quantronix Corporation | Laser delivery system and method for photolithographic mask repair |
US6582857B1 (en) * | 2000-03-16 | 2003-06-24 | International Business Machines Corporation | Repair of masks to promote adhesion of patches |
US6433303B1 (en) * | 2000-03-31 | 2002-08-13 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus using laser pulses to make an array of microcavity holes |
US6841788B1 (en) * | 2000-08-03 | 2005-01-11 | Ascend Instruments, Inc. | Transmission electron microscope sample preparation |
JP4659300B2 (ja) | 2000-09-13 | 2011-03-30 | 浜松ホトニクス株式会社 | レーザ加工方法及び半導体チップの製造方法 |
US6492615B1 (en) * | 2000-10-12 | 2002-12-10 | Scimed Life Systems, Inc. | Laser polishing of medical devices |
JP2004513355A (ja) * | 2000-11-13 | 2004-04-30 | ミクマクモ アンパーツゼルスカブ | レーザアブレーション |
DE10106809A1 (de) * | 2001-02-14 | 2002-09-19 | Siemens Ag | Verfahren zur Herstellung eines Lochs in einem Körper, insbesondere eines Einspritzlochs in einem Kraftstoffinjektor |
EP1372552B1 (de) * | 2001-03-27 | 2017-03-01 | WaveLight GmbH | Vorrichtung zur bearbeitung und diagnose von augengewebe |
US6777645B2 (en) * | 2001-03-29 | 2004-08-17 | Gsi Lumonics Corporation | High-speed, precision, laser-based method and system for processing material of one or more targets within a field |
WO2002090036A1 (en) * | 2001-05-10 | 2002-11-14 | Vanderbilt University | Method and apparatus for laser ablative modification of dielectric surfaces |
DE10125206B4 (de) * | 2001-05-14 | 2005-03-10 | Forschungsverbund Berlin Ev | Verfahren zur direkten Mikrostrukturierung von Materialien |
GB0116113D0 (en) * | 2001-06-30 | 2001-08-22 | Hewlett Packard Co | Tilt correction of electronic images |
US6566626B2 (en) | 2001-07-03 | 2003-05-20 | Laserglass Ltd. | Method and apparatus for generating color images in a transparent medium |
US6720526B2 (en) | 2001-07-31 | 2004-04-13 | Siemens Automotive Corporation | Method and apparatus to form dimensionally consistent orifices and chamfers by laser using spatial filters |
US6768850B2 (en) | 2001-08-16 | 2004-07-27 | Translume, Inc. | Method of index trimming a waveguide and apparatus formed of the same |
JP2003305585A (ja) | 2001-09-11 | 2003-10-28 | Seiko Epson Corp | レーザー加工方法および加工装置 |
US6577448B2 (en) | 2001-09-25 | 2003-06-10 | Siemens Dematic Electronic Assembly Systems, Inc. | Laser system by modulation of power and energy |
US20030062126A1 (en) * | 2001-10-03 | 2003-04-03 | Scaggs Michael J. | Method and apparatus for assisting laser material processing |
US20040001523A1 (en) * | 2001-11-20 | 2004-01-01 | Kevin Holsinger | Optimizing power for second laser |
US6853655B2 (en) * | 2001-11-20 | 2005-02-08 | Spectra Physics, Inc. | System for improved power control |
US20050078730A1 (en) * | 2001-11-20 | 2005-04-14 | Kevin Holsinger | Optimizing power for second laser |
JP2005512814A (ja) * | 2001-12-17 | 2005-05-12 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 少なくとも2つのレーザパルスの組によるメモリリンクの処理 |
US7994450B2 (en) * | 2002-01-07 | 2011-08-09 | International Business Machines Corporation | Debris minimization and improved spatial resolution in pulsed laser ablation of materials |
US20040089642A1 (en) * | 2002-01-15 | 2004-05-13 | Christensen C. Paul | Method and system for laser marking a gemstone |
DE10202036A1 (de) * | 2002-01-18 | 2003-07-31 | Zeiss Carl Meditec Ag | Femtosekunden Lasersystem zur präzisen Bearbeitung von Material und Gewebe |
JP4124417B2 (ja) † | 2002-02-13 | 2008-07-23 | 独立行政法人科学技術振興機構 | ピコ秒レーザーによるホログラムの製造方法 |
US20050109747A1 (en) * | 2002-02-25 | 2005-05-26 | Alexander Dennis R. | Laser scribing and machining of materials |
US8247731B2 (en) * | 2002-02-25 | 2012-08-21 | Board Of Regents Of The University Of Nebraska | Laser scribing and machining of materials |
US6864457B1 (en) | 2002-02-25 | 2005-03-08 | The Board Of Regents Of The University Of Nebraska | Laser machining of materials |
ATE493226T1 (de) | 2002-03-12 | 2011-01-15 | Hamamatsu Photonics Kk | Verfahren zum schneiden eines bearbeiteten objekts |
TWI326626B (en) | 2002-03-12 | 2010-07-01 | Hamamatsu Photonics Kk | Laser processing method |
US8268704B2 (en) | 2002-03-12 | 2012-09-18 | Hamamatsu Photonics K.K. | Method for dicing substrate |
US6951995B2 (en) * | 2002-03-27 | 2005-10-04 | Gsi Lumonics Corp. | Method and system for high-speed, precise micromachining an array of devices |
FR2837733B1 (fr) * | 2002-03-28 | 2005-01-14 | Centre Nat Etd Spatiales | Procede et dispositif d'ablation d'une couche de couverture recouvrant une surface a mettre a nu |
WO2003082507A2 (en) | 2002-03-28 | 2003-10-09 | Gsi Lumonics Corporation | Method and system for high-speed, precise micromachining an array of devices |
US6617543B1 (en) * | 2002-04-11 | 2003-09-09 | Shih-Sheng Yang | Method of making pattern for decorative piece |
US6957004B2 (en) * | 2002-05-03 | 2005-10-18 | Oplink Communications, Inc. | Passive connectivity of waveguides for optical components |
US6950591B2 (en) * | 2002-05-16 | 2005-09-27 | Corning Incorporated | Laser-written cladding for waveguide formations in glass |
US20030215872A1 (en) * | 2002-05-20 | 2003-11-20 | Clark-Mxr, Inc. | Screening apparatus and method for making |
US20030215815A1 (en) * | 2002-05-20 | 2003-11-20 | Clark William G. | Screening method |
US6960813B2 (en) * | 2002-06-10 | 2005-11-01 | New Wave Research | Method and apparatus for cutting devices from substrates |
US6580054B1 (en) * | 2002-06-10 | 2003-06-17 | New Wave Research | Scribing sapphire substrates with a solid state UV laser |
US6664501B1 (en) * | 2002-06-13 | 2003-12-16 | Igor Troitski | Method for creating laser-induced color images within three-dimensional transparent media |
US20040017431A1 (en) * | 2002-07-23 | 2004-01-29 | Yosuke Mizuyama | Laser processing method and laser processing apparatus using ultra-short pulse laser |
US6815638B2 (en) * | 2002-07-25 | 2004-11-09 | Matsushita Electric Industrial Co., Ltd. | Method of determining a minimum pulse width for a short pulse laser system |
WO2004013900A2 (en) * | 2002-08-05 | 2004-02-12 | Research Foundation Of The State University Of New York | System and method for manufacturing embedded conformal electronics |
US7474919B2 (en) | 2002-08-29 | 2009-01-06 | The Regents Of The University Of Michigan | Laser-based method and system for enhancing optical breakdown |
DE10250015B3 (de) * | 2002-10-25 | 2004-09-16 | Universität Kassel | Adaptive, rückkopplungsgesteuerte Materialbearbeitung mit ultrakurzen Laserpulsen |
TWI520269B (zh) | 2002-12-03 | 2016-02-01 | Hamamatsu Photonics Kk | Cutting method of semiconductor substrate |
US6822190B2 (en) * | 2002-12-12 | 2004-11-23 | 3M Innovative Properties Company | Optical fiber or waveguide lens |
US6852946B2 (en) * | 2002-12-20 | 2005-02-08 | Caterpillar Inc | Laser-induced plasma micromachining |
US6995336B2 (en) * | 2003-01-29 | 2006-02-07 | The Regents Of The University Of Michigan | Method for forming nanoscale features |
US20050064137A1 (en) * | 2003-01-29 | 2005-03-24 | Hunt Alan J. | Method for forming nanoscale features and structures produced thereby |
US6979798B2 (en) * | 2003-03-07 | 2005-12-27 | Gsi Lumonics Corporation | Laser system and method for material processing with ultra fast lasers |
FR2852250B1 (fr) | 2003-03-11 | 2009-07-24 | Jean Luc Jouvin | Fourreau de protection pour canule, un ensemble d'injection comportant un tel fourreau et aiguille equipee d'un tel fourreau |
DE60315515T2 (de) | 2003-03-12 | 2007-12-13 | Hamamatsu Photonics K.K., Hamamatsu | Laserstrahlbearbeitungsverfahren |
US7391557B1 (en) * | 2003-03-28 | 2008-06-24 | Applied Photonics Worldwide, Inc. | Mobile terawatt femtosecond laser system (MTFLS) for long range spectral sensing and identification of bioaerosols and chemical agents in the atmosphere |
US6777647B1 (en) | 2003-04-16 | 2004-08-17 | Scimed Life Systems, Inc. | Combination laser cutter and cleaner |
US7086931B2 (en) * | 2003-04-18 | 2006-08-08 | Tdk Corporation | Magnetic head bar holding unit, lapping device, and method of lapping medium-opposing surface of thin-film magnetic head |
US20050000952A1 (en) * | 2003-05-19 | 2005-01-06 | Harter Donald J. | Focusless micromachining |
US7361171B2 (en) | 2003-05-20 | 2008-04-22 | Raydiance, Inc. | Man-portable optical ablation system |
WO2004105100A2 (en) * | 2003-05-20 | 2004-12-02 | Raydiance, Inc. | Trains of ablation pulses from multiple optical amplifiers |
DE10333770A1 (de) * | 2003-07-22 | 2005-02-17 | Carl Zeiss Meditec Ag | Verfahren zur Materialbearbeitung mit Laserimpulsen grosser spektraler Bandbreite und Vorrichtung zur Durchführung des Verfahrens |
ATE529064T1 (de) | 2003-08-04 | 2011-11-15 | Koninkl Philips Electronics Nv | Vorrichtung zum kürzen von haaren mittels laserinduzierten optischen abbauwirkungen |
US8173929B1 (en) | 2003-08-11 | 2012-05-08 | Raydiance, Inc. | Methods and systems for trimming circuits |
US7367969B2 (en) * | 2003-08-11 | 2008-05-06 | Raydiance, Inc. | Ablative material removal with a preset removal rate or volume or depth |
US9022037B2 (en) | 2003-08-11 | 2015-05-05 | Raydiance, Inc. | Laser ablation method and apparatus having a feedback loop and control unit |
US20050167405A1 (en) * | 2003-08-11 | 2005-08-04 | Richard Stoltz | Optical ablation using material composition analysis |
US7143769B2 (en) * | 2003-08-11 | 2006-12-05 | Richard Stoltz | Controlling pulse energy of an optical amplifier by controlling pump diode current |
US20050065502A1 (en) * | 2003-08-11 | 2005-03-24 | Richard Stoltz | Enabling or blocking the emission of an ablation beam based on color of target |
US7115514B2 (en) | 2003-10-02 | 2006-10-03 | Raydiance, Inc. | Semiconductor manufacturing using optical ablation |
US8921733B2 (en) * | 2003-08-11 | 2014-12-30 | Raydiance, Inc. | Methods and systems for trimming circuits |
JP4563097B2 (ja) * | 2003-09-10 | 2010-10-13 | 浜松ホトニクス株式会社 | 半導体基板の切断方法 |
US7170030B2 (en) * | 2003-09-12 | 2007-01-30 | International Business Machines Corporation | Method and apparatus for repair of reflective photomasks |
JP2005118821A (ja) * | 2003-10-16 | 2005-05-12 | Olympus Corp | 超短パルスレーザ加工方法 |
US7049543B2 (en) * | 2003-11-07 | 2006-05-23 | The Regents Of The University Of California | Method of defining features on materials with a femtosecond laser |
DE10354025B4 (de) * | 2003-11-19 | 2022-03-24 | Carl Zeiss Meditec Ag | Adapter zum mechanischen Koppeln einer Laserbearbeitungsvorrichtung mit einem Objekt |
US7633033B2 (en) | 2004-01-09 | 2009-12-15 | General Lasertronics Corporation | Color sensing for laser decoating |
JP4644797B2 (ja) * | 2004-01-28 | 2011-03-02 | 国立大学法人京都大学 | レーザ照射方法及び装置、微細加工方法及び装置、並びに薄膜形成方法及び装置 |
US7413847B2 (en) | 2004-02-09 | 2008-08-19 | Raydiance, Inc. | Semiconductor-type processing for solid-state lasers |
US20050191771A1 (en) * | 2004-03-01 | 2005-09-01 | Ming Li | Ultrafast laser direct writing method for modifying existing microstructures on a submicron scale |
US20050199599A1 (en) * | 2004-03-09 | 2005-09-15 | Xinghua Li | Method of fabrication of hermetically sealed glass package |
DE102004015142B3 (de) * | 2004-03-27 | 2005-12-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung optischer Bauteile |
US7491909B2 (en) * | 2004-03-31 | 2009-02-17 | Imra America, Inc. | Pulsed laser processing with controlled thermal and physical alterations |
US7486705B2 (en) | 2004-03-31 | 2009-02-03 | Imra America, Inc. | Femtosecond laser processing system with process parameters, controls and feedback |
US8816244B2 (en) * | 2004-04-13 | 2014-08-26 | Boston Scientific Scimed, Inc. | Inverted stent cutting process |
JP4631044B2 (ja) * | 2004-05-26 | 2011-02-16 | 国立大学法人北海道大学 | レーザ加工方法および装置 |
US7060933B2 (en) * | 2004-06-08 | 2006-06-13 | Igor Troitski | Method and laser system for production of laser-induced images inside and on the surface of transparent material |
WO2005123324A1 (fr) | 2004-06-08 | 2005-12-29 | Tag Heuer Sa | Procede de fabrication d’une piece micro- ou nanomecanique par une etape d’ablation laser a l’aide d’un femtolaser |
US7879410B2 (en) * | 2004-06-09 | 2011-02-01 | Imra America, Inc. | Method of fabricating an electrochemical device using ultrafast pulsed laser deposition |
US7885311B2 (en) * | 2007-03-27 | 2011-02-08 | Imra America, Inc. | Beam stabilized fiber laser |
US20060000814A1 (en) * | 2004-06-30 | 2006-01-05 | Bo Gu | Laser-based method and system for processing targeted surface material and article produced thereby |
US7584756B2 (en) | 2004-08-17 | 2009-09-08 | Amo Development, Llc | Apparatus and method for correction of aberrations in laser system optics |
US20060054604A1 (en) * | 2004-09-10 | 2006-03-16 | Saunders Richard J | Laser process to produce drug delivery channel in metal stents |
US20060091124A1 (en) * | 2004-11-02 | 2006-05-04 | Igor Troitski | Method for transformation of color images into point arrangement for production of laser-induced color images inside transparent materials |
US7169687B2 (en) * | 2004-11-03 | 2007-01-30 | Intel Corporation | Laser micromachining method |
US7349452B2 (en) | 2004-12-13 | 2008-03-25 | Raydiance, Inc. | Bragg fibers in systems for the generation of high peak power light |
US20060151704A1 (en) * | 2004-12-30 | 2006-07-13 | Cordingley James J | Laser-based material processing methods, system and subsystem for use therein for precision energy control |
CN101132880B (zh) | 2004-12-30 | 2011-02-16 | R·J·德韦恩·米勒 | 利用红外波长范围中的脉冲热沉积进行激光选择性切割用于直接驱动烧蚀 |
US8394084B2 (en) | 2005-01-10 | 2013-03-12 | Optimedica Corporation | Apparatus for patterned plasma-mediated laser trephination of the lens capsule and three dimensional phaco-segmentation |
US20060191884A1 (en) * | 2005-01-21 | 2006-08-31 | Johnson Shepard D | High-speed, precise, laser-based material processing method and system |
US7528342B2 (en) * | 2005-02-03 | 2009-05-05 | Laserfacturing, Inc. | Method and apparatus for via drilling and selective material removal using an ultrafast pulse laser |
US20060175312A1 (en) * | 2005-02-10 | 2006-08-10 | Igor Troitski | Method and system for production of dynamic laser-induced images inside gaseous medium |
US7284396B2 (en) * | 2005-03-01 | 2007-10-23 | International Gemstone Registry Inc. | Method and system for laser marking in the volume of gemstones such as diamonds |
DE102005014433B3 (de) * | 2005-03-24 | 2006-10-05 | Xtreme Technologies Gmbh | Verfahren und Anordnung zur effizienten Erzeugung von kurzwelliger Strahlung auf Basis eines lasererzeugten Plasmas |
US7611966B2 (en) * | 2005-05-05 | 2009-11-03 | Intel Corporation | Dual pulsed beam laser micromachining method |
US20060255020A1 (en) * | 2005-05-16 | 2006-11-16 | Igor Troitski | Method for production of laser-induced images inside liquids |
US7386019B2 (en) | 2005-05-23 | 2008-06-10 | Time-Bandwidth Products Ag | Light pulse generating apparatus and method |
DE102005027355A1 (de) * | 2005-06-13 | 2006-12-14 | Femtotechnologies Gmbh | Verfahren zum Bearbeiten eines organischen Materials |
US20060285071A1 (en) * | 2005-06-21 | 2006-12-21 | Bausch & Lomb Incorporated | Femtosecond laser micromachining of a contact lens and a contact lens manufactured thereby |
DE102005032041A1 (de) * | 2005-07-08 | 2007-01-18 | Carl Zeiss Meditec Ag | Vorrichtung und Verfahren zum Ändern einer optischen und/oder mechanischen Eigenschaft einer in ein Auge implantierten Linse |
US8135050B1 (en) | 2005-07-19 | 2012-03-13 | Raydiance, Inc. | Automated polarization correction |
DE102005039833A1 (de) * | 2005-08-22 | 2007-03-01 | Rowiak Gmbh | Vorrichtung und Verfahren zur Materialtrennung mit Laserpulsen |
US20070045255A1 (en) * | 2005-08-23 | 2007-03-01 | Klaus Kleine | Laser induced plasma machining with an optimized process gas |
US20070045252A1 (en) * | 2005-08-23 | 2007-03-01 | Klaus Kleine | Laser induced plasma machining with a process gas |
US9138913B2 (en) * | 2005-09-08 | 2015-09-22 | Imra America, Inc. | Transparent material processing with an ultrashort pulse laser |
DE102006042280A1 (de) * | 2005-09-08 | 2007-06-06 | IMRA America, Inc., Ann Arbor | Bearbeitung von transparentem Material mit einem Ultrakurzpuls-Laser |
US7245419B2 (en) | 2005-09-22 | 2007-07-17 | Raydiance, Inc. | Wavelength-stabilized pump diodes for pumping gain media in an ultrashort pulsed laser system |
US8092446B2 (en) * | 2005-10-14 | 2012-01-10 | Carl Zeiss Meditec Ag | Device and method for material processing by means of laser radiation |
DE102005049281A1 (de) * | 2005-10-14 | 2007-04-19 | Carl Zeiss Meditec Ag | Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung |
US8553735B2 (en) * | 2005-10-14 | 2013-10-08 | Carl Zeiss Meditec Ag | Device and method for material processing by means of laser radiation |
US7308171B2 (en) | 2005-11-16 | 2007-12-11 | Raydiance, Inc. | Method and apparatus for optical isolation in high power fiber-optic systems |
ES2374819T3 (es) * | 2005-11-17 | 2012-02-22 | Wavelight Gmbh | Disposición para realizar tratamientos quirúrgicos con láser del ojo. |
US9072589B2 (en) | 2005-11-17 | 2015-07-07 | Wavelight Gmbh | Assembly and method for performing surgical laser treatments of the eye |
US7436866B2 (en) | 2005-11-30 | 2008-10-14 | Raydiance, Inc. | Combination optical isolator and pulse compressor |
JP4804911B2 (ja) * | 2005-12-22 | 2011-11-02 | 浜松ホトニクス株式会社 | レーザ加工装置 |
CN100354670C (zh) * | 2005-12-29 | 2007-12-12 | 中国科学院上海光学精密机械研究所 | 光纤连接器的制造方法 |
US20070156230A1 (en) | 2006-01-04 | 2007-07-05 | Dugan Stephen R | Stents with radiopaque markers |
US8262646B2 (en) | 2006-01-20 | 2012-09-11 | Lensar, Inc. | System and method for providing the shaped structural weakening of the human lens with a laser |
US9545338B2 (en) | 2006-01-20 | 2017-01-17 | Lensar, Llc. | System and method for improving the accommodative amplitude and increasing the refractive power of the human lens with a laser |
US9889043B2 (en) | 2006-01-20 | 2018-02-13 | Lensar, Inc. | System and apparatus for delivering a laser beam to the lens of an eye |
US10842675B2 (en) | 2006-01-20 | 2020-11-24 | Lensar, Inc. | System and method for treating the structure of the human lens with a laser |
US7444049B1 (en) | 2006-01-23 | 2008-10-28 | Raydiance, Inc. | Pulse stretcher and compressor including a multi-pass Bragg grating |
US8189971B1 (en) | 2006-01-23 | 2012-05-29 | Raydiance, Inc. | Dispersion compensation in a chirped pulse amplification system |
US9130344B2 (en) | 2006-01-23 | 2015-09-08 | Raydiance, Inc. | Automated laser tuning |
US8232687B2 (en) | 2006-04-26 | 2012-07-31 | Raydiance, Inc. | Intelligent laser interlock system |
US20070215575A1 (en) * | 2006-03-15 | 2007-09-20 | Bo Gu | Method and system for high-speed, precise, laser-based modification of one or more electrical elements |
US7822347B1 (en) | 2006-03-28 | 2010-10-26 | Raydiance, Inc. | Active tuning of temporal dispersion in an ultrashort pulse laser system |
US9018562B2 (en) * | 2006-04-10 | 2015-04-28 | Board Of Trustees Of Michigan State University | Laser material processing system |
US7608308B2 (en) * | 2006-04-17 | 2009-10-27 | Imra America, Inc. | P-type semiconductor zinc oxide films process for preparation thereof, and pulsed laser deposition method using transparent substrates |
US7605343B2 (en) | 2006-05-24 | 2009-10-20 | Electro Scientific Industries, Inc. | Micromachining with short-pulsed, solid-state UV laser |
US20070272666A1 (en) * | 2006-05-25 | 2007-11-29 | O'brien James N | Infrared laser wafer scribing using short pulses |
US8624157B2 (en) * | 2006-05-25 | 2014-01-07 | Electro Scientific Industries, Inc. | Ultrashort laser pulse wafer scribing |
US20130325104A1 (en) | 2006-05-26 | 2013-12-05 | Abbott Cardiovascular Systems Inc. | Stents With Radiopaque Markers |
US8535372B1 (en) | 2006-06-16 | 2013-09-17 | Abbott Cardiovascular Systems Inc. | Bioabsorbable stent with prohealing layer |
US7759607B2 (en) * | 2006-06-20 | 2010-07-20 | Optical Analytics, Inc. | Method of direct Coulomb explosion in laser ablation of semiconductor structures |
US8128688B2 (en) | 2006-06-27 | 2012-03-06 | Abbott Cardiovascular Systems Inc. | Carbon coating on an implantable device |
FR2903032B1 (fr) * | 2006-06-29 | 2008-10-17 | Ecole Polytechnique Etablissem | "procede et dispositif d'usinage d'une cible par faisceau laser femtoseconde." |
US20080006524A1 (en) * | 2006-07-05 | 2008-01-10 | Imra America, Inc. | Method for producing and depositing nanoparticles |
US7823263B2 (en) | 2006-07-11 | 2010-11-02 | Abbott Cardiovascular Systems Inc. | Method of removing stent islands from a stent |
US20080082088A1 (en) | 2006-09-05 | 2008-04-03 | Intralase Corp. | System and method for resecting corneal tissue |
US20080058841A1 (en) | 2006-09-05 | 2008-03-06 | Kurtz Ronald M | System and method for marking corneal tissue in a transplant procedure |
US7887532B2 (en) * | 2006-09-05 | 2011-02-15 | Amo Development, Llc. | System and method for resecting corneal tissue using non-continuous initial incisions |
US20080077238A1 (en) | 2006-09-21 | 2008-03-27 | Advanced Medical Optics, Inc. | Intraocular lenses for managing glare, adhesion, and cell migration |
US8568478B2 (en) | 2006-09-21 | 2013-10-29 | Abbott Medical Optics Inc. | Intraocular lenses for managing glare, adhesion, and cell migration |
US20100049180A1 (en) * | 2007-10-19 | 2010-02-25 | Lockheed Martin Corporation | System and method for conditioning animal tissue using laser light |
US8685006B2 (en) | 2006-11-10 | 2014-04-01 | Carl Zeiss Meditec Ag | Treatment apparatus for surgical correction of defective eyesight, method of generating control data therefore, and method for surgical correction of defective eyesight |
DE102006053118B4 (de) | 2006-11-10 | 2022-02-17 | Carl Zeiss Meditec Ag | Planungseinrichtung zum Vorbereiten von Steuerdaten für eine Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur, Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur und Verfahren zum Vorbereiten von Steuerdaten dafür |
EP4342436A3 (de) | 2006-11-10 | 2024-05-29 | Carl Zeiss Meditec AG | Laserbasierte behandlungsvorrichtung zur operativen fehlsichtigkeitskorrektur |
EP2088977B9 (de) | 2006-11-10 | 2016-11-23 | Carl Zeiss Meditec AG | Behandlungsvorrichtung zur operativen fehlsichtigkeitskorrektur eines auges und verfahren zum erzeugen von steuerdaten zur operativen fehlsichtigkeitskorrektur eines auges |
US20100038825A1 (en) * | 2006-12-21 | 2010-02-18 | Mcdonald Joel P | Methods of forming microchannels by ultrafast pulsed laser direct-write processing |
EP2111251B1 (en) | 2007-01-19 | 2018-09-12 | Joseph Neev | Devices for generation of subsurface micro-disruptions for biomedical applications |
US10588694B1 (en) | 2007-01-19 | 2020-03-17 | Joseph Neev | Devices and methods for generation of subsurface micro-disruptions for biomedical applications |
US20080187684A1 (en) * | 2007-02-07 | 2008-08-07 | Imra America, Inc. | Method for depositing crystalline titania nanoparticles and films |
CN101631522B (zh) | 2007-03-13 | 2014-11-05 | 眼科医疗公司 | 用于创建眼睛手术和松弛切口的装置 |
US8202268B1 (en) | 2007-03-18 | 2012-06-19 | Lockheed Martin Corporation | Method and multiple-mode device for high-power short-pulse laser ablation and CW cauterization of bodily tissues |
ES2338051T3 (es) * | 2007-03-19 | 2010-05-03 | Wavelight Ag | Sistema laser pspservador de los ojos para cirugia refractiva. |
US8536483B2 (en) | 2007-03-22 | 2013-09-17 | General Lasertronics Corporation | Methods for stripping and modifying surfaces with laser-induced ablation |
DE102007019814A1 (de) | 2007-04-26 | 2008-10-30 | Carl Zeiss Meditec Ag | Nachbehandlung bei augenchirurgischer Refraktionskorrektur |
DE102007019815A1 (de) | 2007-04-26 | 2008-10-30 | Carl Zeiss Meditec Ag | Augenhornhaut-Transplantation |
US8623038B2 (en) | 2007-04-26 | 2014-01-07 | Carl Zeiss Meditec Ag | Re-treatment for ophthalmic correction of refraction |
US20080273559A1 (en) * | 2007-05-04 | 2008-11-06 | Ekspla Ltd. | Multiple Output Repetitively Pulsed Laser |
US7767272B2 (en) | 2007-05-25 | 2010-08-03 | Imra America, Inc. | Method of producing compound nanorods and thin films |
US8116341B2 (en) * | 2007-05-31 | 2012-02-14 | Electro Scientific Industries, Inc. | Multiple laser wavelength and pulse width process drilling |
US8710402B2 (en) * | 2007-06-01 | 2014-04-29 | Electro Scientific Industries, Inc. | Method of and apparatus for laser drilling holes with improved taper |
DE102007028042B3 (de) * | 2007-06-14 | 2008-08-07 | Universität Zu Lübeck | Verfahren zur Laserbearbeitung transparenter Materialien |
US7901452B2 (en) | 2007-06-27 | 2011-03-08 | Abbott Cardiovascular Systems Inc. | Method to fabricate a stent having selected morphology to reduce restenosis |
US7955381B1 (en) | 2007-06-29 | 2011-06-07 | Advanced Cardiovascular Systems, Inc. | Polymer-bioceramic composite implantable medical device with different types of bioceramic particles |
US20090013527A1 (en) * | 2007-07-11 | 2009-01-15 | International Business Machines Corporation | Collapsable connection mold repair method utilizing femtosecond laser pulse lengths |
US20090045179A1 (en) * | 2007-08-15 | 2009-02-19 | Ellen Marie Kosik Williams | Method and system for cutting solid materials using short pulsed laser |
WO2009033110A2 (en) * | 2007-09-05 | 2009-03-12 | Lensx Lasers, Inc. | Laser-induced protection shield in laser surgery |
US9456925B2 (en) | 2007-09-06 | 2016-10-04 | Alcon Lensx, Inc. | Photodisruptive laser treatment of the crystalline lens |
WO2009033107A2 (en) * | 2007-09-06 | 2009-03-12 | Lensx Lasers, Inc. | Photodisruptive treatment of crystalline lens |
EP2826436B1 (en) | 2007-09-06 | 2018-03-28 | Alcon LenSx, Inc. | Precise targeting of surgical photodisruption |
WO2009036098A2 (en) * | 2007-09-10 | 2009-03-19 | Lensx Lasers, Inc. | Apparatus, systems and techniques for interfacing with an eye in laser surgery |
JP2010538704A (ja) * | 2007-09-10 | 2010-12-16 | アルコン レンゼックス, インコーポレーテッド | 重力場における有効なレーザ光破壊手術 |
US20090137993A1 (en) * | 2007-09-18 | 2009-05-28 | Kurtz Ronald M | Methods and Apparatus for Integrated Cataract Surgery |
US20090137991A1 (en) * | 2007-09-18 | 2009-05-28 | Kurtz Ronald M | Methods and Apparatus for Laser Treatment of the Crystalline Lens |
JP2011502585A (ja) * | 2007-11-02 | 2011-01-27 | アルコン レンゼックス, インコーポレーテッド | 術後の眼の光学的性能を改善するための方法および装置 |
US20090118716A1 (en) * | 2007-11-07 | 2009-05-07 | Intralase, Inc. | System and method for scanning a pulsed laser beam |
US8632526B2 (en) | 2007-11-07 | 2014-01-21 | Amo Development, Llc | System and method of interfacing a surgical laser with an eye |
US8142423B2 (en) | 2007-11-07 | 2012-03-27 | Amo Development, Llc. | System and method for incising material |
DE102007053283B4 (de) | 2007-11-08 | 2019-08-29 | Carl Zeiss Meditec Ag | Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges und Verfahren zum Erzeugen von Steuerdaten dafür |
DE102007053281A1 (de) | 2007-11-08 | 2009-05-14 | Carl Zeiss Meditec Ag | Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges, Verfahren zum Erzeugen von Steuerdaten dafür und Verfahren zur operativen Fehlsichtigkeitskorrektur eines Auges |
US8231612B2 (en) * | 2007-11-19 | 2012-07-31 | Amo Development Llc. | Method of making sub-surface photoalterations in a material |
US7903326B2 (en) | 2007-11-30 | 2011-03-08 | Radiance, Inc. | Static phase mask for high-order spectral phase control in a hybrid chirped pulse amplifier system |
US9108270B2 (en) | 2008-01-02 | 2015-08-18 | Amo Development, Llc | System and method for scanning a pulsed laser beam |
US9101446B2 (en) | 2008-01-02 | 2015-08-11 | Intralase Corp. | System and method for scanning a pulsed laser beam |
PT3363415T (pt) | 2008-01-09 | 2019-11-05 | Alcon Lensx Inc | Fragmentação curva de tecido por laser fotodisruptivo |
EP2248097A2 (en) * | 2008-01-09 | 2010-11-10 | Lensx Lasers, Inc. | Ophthalmic surgical systems with automated billing mechanism |
DE102008005053A1 (de) | 2008-01-18 | 2009-07-30 | Rowiak Gmbh | Laserkorrektur von Sehfehlern an der natürlichen Augenlinse |
CN105583526B (zh) | 2008-03-21 | 2018-08-17 | Imra美国公司 | 基于激光的材料加工方法和系统 |
US20090246413A1 (en) * | 2008-03-27 | 2009-10-01 | Imra America, Inc. | Method for fabricating thin films |
US20090246530A1 (en) * | 2008-03-27 | 2009-10-01 | Imra America, Inc. | Method For Fabricating Thin Films |
CA2736908C (en) * | 2008-04-01 | 2018-10-02 | Amo Development, Llc | System and method of iris-pupil contrast enhancement |
AU2009231690B2 (en) * | 2008-04-01 | 2014-01-30 | Amo Development Llc. | Corneal implant system, interface, and method |
AU2009231687B2 (en) * | 2008-04-01 | 2014-10-30 | Amo Development, Llc | Ophthalmic laser apparatus, system, and method with high resolution imaging |
DE102008017293B4 (de) | 2008-04-04 | 2019-11-14 | Carl Zeiss Meditec Ag | Verfahren zum Erzeugen von Steuerdaten für die Augenchirurgie sowie augenchirurgische Behandlungsvorrichtung und -verfahren |
US10543123B2 (en) | 2008-04-28 | 2020-01-28 | Joseph Neev | Devices and methods for generation of subsurface micro-disruptions for opthalmic surgery and opthalmic applications |
WO2009137494A1 (en) * | 2008-05-05 | 2009-11-12 | Applied Spectra, Inc. | Laser ablation apparatus and method |
US9061369B2 (en) * | 2009-11-03 | 2015-06-23 | Applied Spectra, Inc. | Method for real-time optical diagnostics in laser ablation and laser processing of layered and structured materials |
US20090289382A1 (en) * | 2008-05-22 | 2009-11-26 | Raydiance, Inc. | System and method for modifying characteristics of a contact lens utilizing an ultra-short pulsed laser |
WO2011123124A1 (en) | 2010-03-31 | 2011-10-06 | Colorado State University Research Foundation | Liquid-gas interface plasma device |
US8994270B2 (en) | 2008-05-30 | 2015-03-31 | Colorado State University Research Foundation | System and methods for plasma application |
EP2926769A1 (en) | 2008-06-27 | 2015-10-07 | AMO Development, LLC | Intracorneal inlay, system, and method |
US10493559B2 (en) * | 2008-07-09 | 2019-12-03 | Fei Company | Method and apparatus for laser machining |
EP2308116A2 (en) * | 2008-07-24 | 2011-04-13 | Koninklijke Philips Electronics N.V. | Device and method for lighting |
US8480659B2 (en) | 2008-07-25 | 2013-07-09 | Lensar, Inc. | Method and system for removal and replacement of lens material from the lens of an eye |
US8500723B2 (en) | 2008-07-25 | 2013-08-06 | Lensar, Inc. | Liquid filled index matching device for ophthalmic laser procedures |
US8125704B2 (en) | 2008-08-18 | 2012-02-28 | Raydiance, Inc. | Systems and methods for controlling a pulsed laser by combining laser signals |
DE102008044977A1 (de) * | 2008-08-29 | 2010-07-08 | Starmedtec Gmbh | Multifunktionales Lasergerät |
US20100082017A1 (en) | 2008-09-26 | 2010-04-01 | Advanced Medical Optics, Inc. | Laser modification of intraocular lens |
US9257142B2 (en) * | 2008-10-14 | 2016-02-09 | Asahi Kasei E-Materials Corporation | Heat-reactive resist material, layered product for thermal lithography using the material, and method of manufacturing a mold using the material and layered product |
JP5454080B2 (ja) * | 2008-10-23 | 2014-03-26 | 住友電気工業株式会社 | レーザ加工方法およびレーザ加工装置 |
US8498538B2 (en) | 2008-11-14 | 2013-07-30 | Raydiance, Inc. | Compact monolithic dispersion compensator |
US8852175B2 (en) | 2008-11-21 | 2014-10-07 | Amo Development Llc | Apparatus, system and method for precision depth measurement |
WO2010060443A1 (de) * | 2008-11-26 | 2010-06-03 | Wavelight Ag | System für die ophthalmologie oder dermatologie |
US8168961B2 (en) | 2008-11-26 | 2012-05-01 | Fei Company | Charged particle beam masking for laser ablation micromachining |
US8740890B2 (en) * | 2008-11-26 | 2014-06-03 | Wavelight Ag | Systems and hand pieces for use in ophthalmology or dermatology |
US8388609B2 (en) * | 2008-12-01 | 2013-03-05 | Amo Development, Llc. | System and method for multibeam scanning |
DE102009005482A1 (de) | 2009-01-21 | 2010-07-22 | Carl Zeiss Meditec Ag | Vorrichtung und Verfahren zum Erzeugen von Steuerdaten zur operativen Fehlsichtigkeitskorrektur eines Auges |
EP2393628B1 (en) * | 2009-02-03 | 2017-06-21 | Abbott Cardiovascular Systems Inc. | Improved laser cutting system |
US8461478B2 (en) * | 2009-02-03 | 2013-06-11 | Abbott Cardiovascular Systems, Inc. | Multiple beam laser system for forming stents |
EP2393625A1 (en) * | 2009-02-03 | 2011-12-14 | Abbott Cardiovascular Systems Inc. | Improved laser cutting process for forming stents |
EP2395955B1 (en) | 2009-02-09 | 2018-08-01 | AMO Development, LLC | System for intrastromal refractive correction |
DE102009009382A1 (de) | 2009-02-18 | 2010-08-19 | Carl Zeiss Meditec Ag | Vorrichtung und Verfahren zum Erzeugen von Steuerdaten zur operativen Fehlsichtigkeitskorrektur eines Auges und Fehlsichtigkeitskorrekturverfahren |
JP5573832B2 (ja) | 2009-02-25 | 2014-08-20 | 日亜化学工業株式会社 | 半導体素子の製造方法 |
EP2236109B1 (de) * | 2009-04-02 | 2014-10-22 | SIE AG, Surgical Instrument Engineering | System zum Definieren von Schnitten in Augengewebe |
US9411938B2 (en) * | 2009-04-02 | 2016-08-09 | Sie Ag, Surgical Instrument Engineering | System for defining cuts in eye tissue |
JP2010257730A (ja) * | 2009-04-24 | 2010-11-11 | Ushio Inc | 高圧放電ランプおよび高圧放電ランプの製造方法 |
US9254536B2 (en) * | 2009-05-15 | 2016-02-09 | Paul Hoff | Method and apparatus for controlled laser ablation of material |
US8730570B2 (en) | 2009-07-01 | 2014-05-20 | Calmar Optcom, Inc. | Optical pulse compressing based on chirped fiber bragg gratings for pulse amplification and fiber lasers |
EP2456383B1 (en) | 2009-07-23 | 2017-05-03 | Koninklijke Philips N.V. | Optical blade and hair cutting device |
US8758332B2 (en) | 2009-07-24 | 2014-06-24 | Lensar, Inc. | Laser system and method for performing and sealing corneal incisions in the eye |
US8617146B2 (en) | 2009-07-24 | 2013-12-31 | Lensar, Inc. | Laser system and method for correction of induced astigmatism |
EP2456384B1 (en) | 2009-07-24 | 2023-09-20 | LENSAR, Inc. | System for providing laser shot patterns to the lens of an eye |
CN102639078B (zh) | 2009-07-24 | 2015-10-21 | 能斯雅有限公司 | 一种为眼睛晶状体实施激光雷达辅助手术的系统和方法 |
US8382745B2 (en) | 2009-07-24 | 2013-02-26 | Lensar, Inc. | Laser system and method for astigmatic corrections in association with cataract treatment |
US20110028957A1 (en) * | 2009-07-29 | 2011-02-03 | Lensx Lasers, Inc. | Optical System for Ophthalmic Surgical Laser |
US9504608B2 (en) | 2009-07-29 | 2016-11-29 | Alcon Lensx, Inc. | Optical system with movable lens for ophthalmic surgical laser |
US8262647B2 (en) * | 2009-07-29 | 2012-09-11 | Alcon Lensx, Inc. | Optical system for ophthalmic surgical laser |
US8267925B2 (en) * | 2009-07-29 | 2012-09-18 | Alcon Lensx, Inc. | Optical system for ophthalmic surgical laser |
US8524139B2 (en) | 2009-08-10 | 2013-09-03 | FEI Compay | Gas-assisted laser ablation |
US8435437B2 (en) * | 2009-09-04 | 2013-05-07 | Abbott Cardiovascular Systems Inc. | Setting laser power for laser machining stents from polymer tubing |
DE102009042199B4 (de) * | 2009-09-18 | 2014-01-02 | Anton Kasenbacher | Laserstrahl-Ausrichteinheit und Laserbearbeitungsgerät zur Bearbeitung eines Materials |
JP5365799B2 (ja) | 2009-10-23 | 2013-12-11 | ウシオ電機株式会社 | 高圧放電ランプおよび高圧放電ランプの製造方法 |
US9492322B2 (en) | 2009-11-16 | 2016-11-15 | Alcon Lensx, Inc. | Imaging surgical target tissue by nonlinear scanning |
US8506559B2 (en) * | 2009-11-16 | 2013-08-13 | Alcon Lensx, Inc. | Variable stage optical system for ophthalmic surgical laser |
US8357196B2 (en) * | 2009-11-18 | 2013-01-22 | Abbott Medical Optics Inc. | Mark for intraocular lenses |
US20130256286A1 (en) * | 2009-12-07 | 2013-10-03 | Ipg Microsystems Llc | Laser processing using an astigmatic elongated beam spot and using ultrashort pulses and/or longer wavelengths |
FR2954720B1 (fr) * | 2009-12-24 | 2012-02-10 | Commissariat Energie Atomique | Procede et dispositif de soudage laser et faisceau d'electrons en penetration totale |
US8568471B2 (en) | 2010-01-30 | 2013-10-29 | Abbott Cardiovascular Systems Inc. | Crush recoverable polymer scaffolds |
US8808353B2 (en) | 2010-01-30 | 2014-08-19 | Abbott Cardiovascular Systems Inc. | Crush recoverable polymer scaffolds having a low crossing profile |
EP2531089B1 (en) | 2010-02-01 | 2023-04-05 | LENSAR, Inc. | Purkinjie image-based alignment of suction ring in ophthalmic applications |
US8265364B2 (en) | 2010-02-05 | 2012-09-11 | Alcon Lensx, Inc. | Gradient search integrated with local imaging in laser surgical systems |
US8540173B2 (en) * | 2010-02-10 | 2013-09-24 | Imra America, Inc. | Production of fine particles of functional ceramic by using pulsed laser |
US8414564B2 (en) | 2010-02-18 | 2013-04-09 | Alcon Lensx, Inc. | Optical coherence tomographic system for ophthalmic surgery |
US9054479B2 (en) * | 2010-02-24 | 2015-06-09 | Alcon Lensx, Inc. | High power femtosecond laser with adjustable repetition rate |
US20110206071A1 (en) * | 2010-02-24 | 2011-08-25 | Michael Karavitis | Compact High Power Femtosecond Laser with Adjustable Repetition Rate |
US8953651B2 (en) | 2010-02-24 | 2015-02-10 | Alcon Lensx, Inc. | High power femtosecond laser with repetition rate adjustable according to scanning speed |
CN102905839B (zh) | 2010-03-30 | 2016-03-09 | Imra美国公司 | 基于激光的材料加工装置和方法 |
EP2552340A4 (en) | 2010-03-31 | 2015-10-14 | Univ Colorado State Res Found | PLASMA DEVICE WITH LIQUID GAS INTERFACE |
US8834462B2 (en) | 2010-06-01 | 2014-09-16 | Covidien Lp | System and method for sensing tissue characteristics |
US8679394B2 (en) | 2010-06-10 | 2014-03-25 | Abbott Cardiovascular Systems Inc. | Laser system and processing conditions for manufacturing bioabsorbable stents |
US8398236B2 (en) | 2010-06-14 | 2013-03-19 | Alcon Lensx, Inc. | Image-guided docking for ophthalmic surgical systems |
US8845624B2 (en) | 2010-06-25 | 2014-09-30 | Alcon LexSx, Inc. | Adaptive patient interface |
US10112257B1 (en) | 2010-07-09 | 2018-10-30 | General Lasertronics Corporation | Coating ablating apparatus with coating removal detection |
DE102010031348B4 (de) | 2010-07-14 | 2022-10-13 | Carl Zeiss Meditec Ag | Steuerdatenerzeugung für die augenchirurgische Fehlsichtigkeitsbehandlung |
WO2012021748A1 (en) | 2010-08-12 | 2012-02-16 | Raydiance, Inc. | Polymer tubing laser micromachining |
US8556511B2 (en) | 2010-09-08 | 2013-10-15 | Abbott Cardiovascular Systems, Inc. | Fluid bearing to support stent tubing during laser cutting |
US9120181B2 (en) | 2010-09-16 | 2015-09-01 | Coherent, Inc. | Singulation of layered materials using selectively variable laser output |
US9532708B2 (en) | 2010-09-17 | 2017-01-03 | Alcon Lensx, Inc. | Electronically controlled fixation light for ophthalmic imaging systems |
US9233025B2 (en) | 2010-09-25 | 2016-01-12 | Gregory John Roy Spooner | Laser apparatus and method for refractive surgery |
US8554037B2 (en) | 2010-09-30 | 2013-10-08 | Raydiance, Inc. | Hybrid waveguide device in powerful laser systems |
USD694890S1 (en) | 2010-10-15 | 2013-12-03 | Lensar, Inc. | Laser system for treatment of the eye |
USD695408S1 (en) | 2010-10-15 | 2013-12-10 | Lensar, Inc. | Laser system for treatment of the eye |
ES2937241T3 (es) | 2010-10-15 | 2023-03-27 | Lensar Inc | Sistema y método de iluminación controlada por barrido de estructuras dentro de un ojo |
US10463541B2 (en) | 2011-03-25 | 2019-11-05 | Lensar, Inc. | System and method for correcting astigmatism using multiple paired arcuate laser generated corneal incisions |
US8648277B2 (en) * | 2011-03-31 | 2014-02-11 | Electro Scientific Industries, Inc. | Laser direct ablation with picosecond laser pulses at high pulse repetition frequencies |
US8459794B2 (en) | 2011-05-02 | 2013-06-11 | Alcon Lensx, Inc. | Image-processor-controlled misalignment-reduction for ophthalmic systems |
US9089401B2 (en) | 2011-05-06 | 2015-07-28 | Alcon Lensx, Inc. | Adjusting ophthalmic docking system |
US9622913B2 (en) | 2011-05-18 | 2017-04-18 | Alcon Lensx, Inc. | Imaging-controlled laser surgical system |
US8537866B2 (en) * | 2011-05-20 | 2013-09-17 | Calmar Optcom, Inc. | Generating laser pulses of narrow spectral linewidth based on chirping and stretching of laser pulses and subsequent power amplification |
JP5849307B2 (ja) * | 2011-06-01 | 2016-01-27 | 国立大学法人大阪大学 | 歯科用治療装置 |
US9521949B2 (en) | 2011-06-23 | 2016-12-20 | Amo Development, Llc | Ophthalmic range finding |
AU2012272677C1 (en) | 2011-06-23 | 2019-05-02 | Amo Development, Llc | Ophthalmic range finding |
DE102011108645A1 (de) | 2011-07-22 | 2013-01-24 | Carl Zeiss Meditec Ag | "Nachbehandlung bei augenchirurgischer Refraktionskorrektur" |
DE102012014769A1 (de) | 2011-07-22 | 2013-01-24 | Carl Zeiss Meditec Ag | Fortsetzung von unterbrochenen augenchirurgischen Schnitten |
US8726483B2 (en) | 2011-07-29 | 2014-05-20 | Abbott Cardiovascular Systems Inc. | Methods for uniform crimping and deployment of a polymer scaffold |
US8939967B2 (en) | 2011-08-03 | 2015-01-27 | Alcon Lensx, Inc. | Patient interface defogger |
US8398238B1 (en) | 2011-08-26 | 2013-03-19 | Alcon Lensx, Inc. | Imaging-based guidance system for ophthalmic docking using a location-orientation analysis |
WO2013039668A1 (en) | 2011-09-14 | 2013-03-21 | Fianium, Inc. | Methods and apparatus pertaining to picosecond pulsed fiber based lasers |
US10239160B2 (en) | 2011-09-21 | 2019-03-26 | Coherent, Inc. | Systems and processes that singulate materials |
DE102011083928A1 (de) | 2011-09-30 | 2013-04-04 | Carl Zeiss Meditec Ag | Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges, Verfahren zum Erzeugen von Steuerdaten dafür und Verfahren zur operativen Fehlsichtigkeitskorrektur eines Auges |
WO2013055741A1 (en) | 2011-10-12 | 2013-04-18 | Imra America, Inc. | Apparatus for high contrast optical signaling, and exemplary applications |
DE102011085046A1 (de) | 2011-10-21 | 2013-04-25 | Carl Zeiss Meditec Ag | Erzeugung von Schnittflächen in einem transparenten Material mittels optischer Strahlung |
DE102011085047A1 (de) | 2011-10-21 | 2013-04-25 | Carl Zeiss Meditec Ag | Erzeugung von Schnitten in einem transparenten Material mittels optischer Strahlung |
US9393154B2 (en) | 2011-10-28 | 2016-07-19 | Raymond I Myers | Laser methods for creating an antioxidant sink in the crystalline lens for the maintenance of eye health and physiology and slowing presbyopia development |
CN104254428B (zh) | 2011-12-07 | 2016-12-07 | 通用原子公司 | 用于激光制造加工的方法和系统 |
US9023016B2 (en) | 2011-12-19 | 2015-05-05 | Alcon Lensx, Inc. | Image processor for intra-surgical optical coherence tomographic imaging of laser cataract procedures |
US9066784B2 (en) | 2011-12-19 | 2015-06-30 | Alcon Lensx, Inc. | Intra-surgical optical coherence tomographic imaging of cataract procedures |
US9044304B2 (en) | 2011-12-23 | 2015-06-02 | Alcon Lensx, Inc. | Patient interface with variable applanation |
US8908739B2 (en) | 2011-12-23 | 2014-12-09 | Alcon Lensx, Inc. | Transverse adjustable laser beam restrictor |
DE102012202519A1 (de) * | 2012-02-17 | 2013-08-22 | Carl Zeiss Microscopy Gmbh | Verfahren und Vorrichtungen zur Präparation mikroskopischer Proben mit Hilfe von gepulstem Licht |
WO2013126653A1 (en) | 2012-02-22 | 2013-08-29 | Amo Development, Llc | Preformed lens systems and methods |
US10357850B2 (en) | 2012-09-24 | 2019-07-23 | Electro Scientific Industries, Inc. | Method and apparatus for machining a workpiece |
US9828278B2 (en) | 2012-02-28 | 2017-11-28 | Electro Scientific Industries, Inc. | Method and apparatus for separation of strengthened glass and articles produced thereby |
US9895771B2 (en) | 2012-02-28 | 2018-02-20 | General Lasertronics Corporation | Laser ablation for the environmentally beneficial removal of surface coatings |
JP2015511571A (ja) | 2012-02-28 | 2015-04-20 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 強化ガラスの分離のための方法及び装置並びにこれにより生成された製品 |
US8852177B2 (en) | 2012-03-09 | 2014-10-07 | Alcon Lensx, Inc. | Spatio-temporal beam modulator for surgical laser systems |
US10182943B2 (en) | 2012-03-09 | 2019-01-22 | Alcon Lensx, Inc. | Adjustable pupil system for surgical laser systems |
DE102012007272B4 (de) | 2012-04-12 | 2013-10-24 | Wavelight Gmbh | Lasereinrichtung und Verfahren zur Konfiguration einer solchen Lasereinrichtung |
JP6000700B2 (ja) * | 2012-07-10 | 2016-10-05 | 株式会社ディスコ | レーザー加工方法 |
WO2014022681A1 (en) | 2012-08-01 | 2014-02-06 | Gentex Corporation | Assembly with laser induced channel edge and method thereof |
DE102013218415A1 (de) | 2012-09-14 | 2014-04-10 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
DE102012018421A1 (de) | 2012-09-14 | 2014-03-20 | Carl Zeiss Meditec Ag | Augenchirurgische Refraktionskorrektur |
DE102012022081A1 (de) | 2012-11-08 | 2014-05-08 | Carl Zeiss Meditec Ag | Nachbehandlung bei augenchirurgischer Refrationskorrektur |
DE102012022079A1 (de) | 2012-11-08 | 2014-05-08 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
DE102012022080A1 (de) | 2012-11-08 | 2014-05-08 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
US9991090B2 (en) | 2012-11-15 | 2018-06-05 | Fei Company | Dual laser beam system used with an electron microscope and FIB |
EP2754524B1 (de) | 2013-01-15 | 2015-11-25 | Corning Laser Technologies GmbH | Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie |
US10335315B2 (en) | 2013-02-01 | 2019-07-02 | Alcon Lensx, Inc. | Bi-radial patient interface |
CN105144346B (zh) | 2013-02-21 | 2017-12-15 | 恩耐公司 | 多层结构的激光刻图 |
US10464172B2 (en) | 2013-02-21 | 2019-11-05 | Nlight, Inc. | Patterning conductive films using variable focal plane to control feature size |
US9842665B2 (en) | 2013-02-21 | 2017-12-12 | Nlight, Inc. | Optimization of high resolution digitally encoded laser scanners for fine feature marking |
CN105122387B (zh) | 2013-02-21 | 2019-01-11 | 恩耐公司 | 非烧蚀性激光图案化 |
FR3002687B1 (fr) * | 2013-02-26 | 2015-03-06 | Soitec Silicon On Insulator | Procede de traitement d une structure |
US9532826B2 (en) | 2013-03-06 | 2017-01-03 | Covidien Lp | System and method for sinus surgery |
CN103143841B (zh) * | 2013-03-08 | 2014-11-26 | 西北工业大学 | 一种利用皮秒激光加工孔的方法 |
DE102013004688A1 (de) | 2013-03-13 | 2014-09-18 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
US9555145B2 (en) | 2013-03-13 | 2017-01-31 | Covidien Lp | System and method for biofilm remediation |
US10092393B2 (en) | 2013-03-14 | 2018-10-09 | Allotex, Inc. | Corneal implant systems and methods |
US9878399B2 (en) * | 2013-03-15 | 2018-01-30 | Jian Liu | Method and apparatus for welding dissimilar material with a high energy high power ultrafast laser |
EP2781296B1 (de) | 2013-03-21 | 2020-10-21 | Corning Laser Technologies GmbH | Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser |
DE102013219788A1 (de) | 2013-09-30 | 2015-04-16 | Carl Zeiss Meditec Ag | Intra-Cornealer Ring |
EP2868422A1 (de) * | 2013-10-29 | 2015-05-06 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Bauteils sowie optische Bestrahlungsvorrichtung |
US9517963B2 (en) | 2013-12-17 | 2016-12-13 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
US10442719B2 (en) | 2013-12-17 | 2019-10-15 | Corning Incorporated | Edge chamfering methods |
US20150165560A1 (en) | 2013-12-17 | 2015-06-18 | Corning Incorporated | Laser processing of slots and holes |
US10086597B2 (en) | 2014-01-21 | 2018-10-02 | General Lasertronics Corporation | Laser film debonding method |
US10220472B2 (en) * | 2014-01-30 | 2019-03-05 | Lasx Industries, Inc | Modeling of laser output from a pulsed laser to achieve a consistent cutting process |
US9351826B2 (en) | 2014-04-13 | 2016-05-31 | Szymon Suckewer | Cataract removal using ultra-short pulse lasers |
US10069271B2 (en) | 2014-06-02 | 2018-09-04 | Nlight, Inc. | Scalable high power fiber laser |
US10618131B2 (en) | 2014-06-05 | 2020-04-14 | Nlight, Inc. | Laser patterning skew correction |
GB2527553B (en) | 2014-06-25 | 2017-08-23 | Fianium Ltd | Laser processing |
EP3166895B1 (en) | 2014-07-08 | 2021-11-24 | Corning Incorporated | Methods and apparatuses for laser processing materials |
EP3169635B1 (en) | 2014-07-14 | 2022-11-23 | Corning Incorporated | Method and system for forming perforations |
KR20170028943A (ko) * | 2014-07-14 | 2017-03-14 | 코닝 인코포레이티드 | 조정가능한 레이저 빔 촛점 라인을 사용하여 투명한 재료를 처리하는 방법 및 시스템 |
JP6788571B2 (ja) | 2014-07-14 | 2020-11-25 | コーニング インコーポレイテッド | 界面ブロック、そのような界面ブロックを使用する、ある波長範囲内で透過する基板を切断するためのシステムおよび方法 |
WO2016010943A2 (en) | 2014-07-14 | 2016-01-21 | Corning Incorporated | Method and system for arresting crack propagation |
CN105720463B (zh) | 2014-08-01 | 2021-05-14 | 恩耐公司 | 光纤和光纤传输的激光器中的背向反射保护与监控 |
DE102014014565A1 (de) | 2014-09-29 | 2016-03-31 | Carl Zeiss Meditec Ag | Erzeugung von Schnitten in einem transparenten Material mittels optischer Strahlung |
WO2016050779A1 (de) | 2014-09-29 | 2016-04-07 | Carl Zeiss Meditec Ag | Erzeugung von schnitten in einem transparenten material mittels optischer strahlung |
DE102014014566A1 (de) | 2014-09-29 | 2016-03-31 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
DE102014014567A1 (de) | 2014-09-29 | 2016-03-31 | Carl Zeiss Meditec Ag | Erzeugung von speziellen Schnitten in einem transparenten Material mittels optischer Strahlung |
EP3206829B1 (en) * | 2014-10-13 | 2019-01-09 | Evana Technologies, UAB | Method of laser processing for substrate cleaving or dicing through forming "spike-like" shaped damage structures |
KR102138964B1 (ko) | 2014-11-19 | 2020-07-28 | 트룸프 레이저-운트 시스템테크닉 게엠베하 | 비대칭 광학 빔 정형을 위한 시스템 |
DE102014116958B9 (de) | 2014-11-19 | 2017-10-05 | Trumpf Laser- Und Systemtechnik Gmbh | Optisches System zur Strahlformung eines Laserstrahls, Laserbearbeitungsanlage, Verfahren zur Materialbearbeitung und Verwenden einer gemeinsamen langgezogenen Fokuszone zur Lasermaterialbearbeitung |
DE102014116957A1 (de) | 2014-11-19 | 2016-05-19 | Trumpf Laser- Und Systemtechnik Gmbh | Optisches System zur Strahlformung |
WO2016115017A1 (en) | 2015-01-12 | 2016-07-21 | Corning Incorporated | Laser cutting of thermally tempered substrates using the multi photon absorption method |
US9837783B2 (en) | 2015-01-26 | 2017-12-05 | Nlight, Inc. | High-power, single-mode fiber sources |
US9999527B2 (en) | 2015-02-11 | 2018-06-19 | Abbott Cardiovascular Systems Inc. | Scaffolds having radiopaque markers |
US10632534B2 (en) * | 2015-02-26 | 2020-04-28 | Purdue Research Foundation | Processes for producing and treating thin-films composed of nanomaterials |
EP3274306B1 (en) | 2015-03-24 | 2021-04-14 | Corning Incorporated | Laser cutting and processing of display glass compositions |
US10050404B2 (en) | 2015-03-26 | 2018-08-14 | Nlight, Inc. | Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss |
WO2016160391A1 (en) | 2015-03-27 | 2016-10-06 | Corning Incorporated | Gas permeable window and method of fabricating the same |
US9700443B2 (en) | 2015-06-12 | 2017-07-11 | Abbott Cardiovascular Systems Inc. | Methods for attaching a radiopaque marker to a scaffold |
US10520671B2 (en) | 2015-07-08 | 2019-12-31 | Nlight, Inc. | Fiber with depressed central index for increased beam parameter product |
US20170022100A1 (en) | 2015-07-24 | 2017-01-26 | Corning Incorporated | Glass bumps on glass articles and methods of laser-induced growth |
US9359252B1 (en) | 2015-07-24 | 2016-06-07 | Corning Incorporated | Methods for controlled laser-induced growth of glass bumps on glass articles |
US10449090B2 (en) | 2015-07-31 | 2019-10-22 | Allotex, Inc. | Corneal implant systems and methods |
DE102016218564A1 (de) | 2015-09-30 | 2017-03-30 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
DE102015218909A1 (de) | 2015-09-30 | 2017-03-30 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
WO2017091606A1 (en) | 2015-11-23 | 2017-06-01 | Nlight, Inc. | Predictive modification of laser diode drive current waveform in high power laser systems |
US10569365B2 (en) * | 2015-11-23 | 2020-02-25 | The Boeing Company | Method for preparing a fluid flow surface |
EP3380266B1 (en) | 2015-11-23 | 2021-08-11 | NLIGHT, Inc. | Fine-scale temporal control for laser material processing |
JP6803728B2 (ja) * | 2015-12-15 | 2020-12-23 | ポリプラスチックス株式会社 | 残留応力算出方法 |
US10295820B2 (en) | 2016-01-19 | 2019-05-21 | Nlight, Inc. | Method of processing calibration data in 3D laser scanner systems |
DE102016208011A1 (de) | 2016-05-10 | 2017-11-16 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
DE102016208012A1 (de) | 2016-05-10 | 2017-11-16 | Carl Zeiss Meditec Ag | Augenchirurgisches Verfahren |
DE102016116267A1 (de) | 2016-08-01 | 2018-02-01 | Carl Zeiss Meditec Ag | Vorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges und Verfahren zum Erzeugen von Steuerdaten hierfür |
EP3507057A1 (en) | 2016-08-30 | 2019-07-10 | Corning Incorporated | Laser processing of transparent materials |
US10732439B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Fiber-coupled device for varying beam characteristics |
US10730785B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Optical fiber bending mechanisms |
US10295845B2 (en) | 2016-09-29 | 2019-05-21 | Nlight, Inc. | Adjustable beam characteristics |
KR102078294B1 (ko) | 2016-09-30 | 2020-02-17 | 코닝 인코포레이티드 | 비-축대칭 빔 스폿을 이용하여 투명 워크피스를 레이저 가공하기 위한 기기 및 방법 |
WO2018081031A1 (en) | 2016-10-24 | 2018-05-03 | Corning Incorporated | Substrate processing station for laser-based machining of sheet-like glass substrates |
US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
CN110651218B (zh) | 2017-04-04 | 2022-03-01 | 恩耐公司 | 用于检流计扫描仪校准的设备、系统和方法 |
DE102017207529A1 (de) | 2017-05-04 | 2018-11-08 | Carl Zeiss Meditec Ag | Nachbehandlung bei augenchirurgischer Refraktionskorrektur |
US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
DE102018216507A1 (de) | 2017-09-29 | 2019-04-04 | Carl Zeiss Meditec Ag | Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung |
US20190233321A1 (en) * | 2018-01-26 | 2019-08-01 | Corning Incorporated | Liquid-assisted laser micromachining of transparent dielectrics |
FR3098300B1 (fr) * | 2019-07-01 | 2021-06-11 | Univ Bourgogne | Dispositif de production de CO2gazeux à partir de carbonates pour analyse isotopique (δ13C et δ18O) sur site et procédé associé. |
DE102019004848A1 (de) * | 2019-07-12 | 2021-01-14 | RoBoTec PTC GmbH | Vorrichtung und Verfahren zum Vermehren von Pflanzen |
DE102019213735A1 (de) | 2019-09-10 | 2021-03-11 | Carl Zeiss Meditec Ag | Augenchirurgische Behandlungsvorrichtung |
DE102019213737A1 (de) | 2019-09-10 | 2021-03-11 | Carl Zeiss Meditec Ag | Augenchirurgische Behandlungsvorrichtung |
DE102019213736A1 (de) | 2019-09-10 | 2021-03-11 | Carl Zeiss Meditec Ag | Augenchirurgische Behandlungsvorrichtung |
CA3105312A1 (en) | 2020-01-06 | 2021-07-06 | Institut National De La Recherche Scientifique | Optical system and method for metallurgical extraction and refining |
WO2022216805A1 (en) | 2021-04-06 | 2022-10-13 | Scarselli Bruno | Asset verification system and methods of using same |
DE102021124087A1 (de) | 2021-09-17 | 2023-03-23 | Carl Zeiss Meditec Ag | Korrektur der Refraktion eines Auges durch Hornhautmodifikation |
CN114178683B (zh) * | 2021-12-01 | 2022-08-30 | 西安交通大学 | 一种复合激光高效加工非均质材料的方法 |
Family Cites Families (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3720213A (en) * | 1971-02-05 | 1973-03-13 | Coherent Radiation | Laser photocoagulator |
US4001840A (en) * | 1974-10-07 | 1977-01-04 | Precision Instrument Co. | Non-photographic, digital laser image recording |
GB1540064A (en) * | 1975-07-08 | 1979-02-07 | Atomic Energy Authority Uk | Laser removal of material from workpieces |
US4114018A (en) * | 1976-09-30 | 1978-09-12 | Lasag Ag | Method for ablating metal workpieces with laser radiation |
US4289378A (en) * | 1978-06-21 | 1981-09-15 | Ernst Remy | Apparatus for adjusting the focal point of an operating laser beam focused by an objective |
US4464761A (en) * | 1981-12-18 | 1984-08-07 | Alfano Robert R | Chromium-doped beryllium aluminum silicate laser systems |
US4712543A (en) * | 1982-01-20 | 1987-12-15 | Baron Neville A | Process for recurving the cornea of an eye |
DE3245939C2 (de) * | 1982-12-11 | 1985-12-19 | Fa. Carl Zeiss, 7920 Heidenheim | Vorrichtung zur Erzeugung eines Bildes des Augenhintergrundes |
DE3462568D1 (en) * | 1983-10-28 | 1987-04-09 | Gretag Ag | Laser device for processing work pieces |
US5219343A (en) * | 1983-11-17 | 1993-06-15 | Visx Incorporated | Apparatus for performing ophthalmogolical surgery |
US5207668A (en) * | 1983-11-17 | 1993-05-04 | Visx Incorporated | Method for opthalmological surgery |
US4665913A (en) * | 1983-11-17 | 1987-05-19 | Lri L.P. | Method for ophthalmological surgery |
US4729372A (en) * | 1983-11-17 | 1988-03-08 | Lri L.P. | Apparatus for performing ophthalmic laser surgery |
DE3342531A1 (de) * | 1983-11-24 | 1985-06-05 | Max Planck Gesellschaft | Verfahren und einrichtung zum erzeugen von kurz dauernden, intensiven impulsen elektromagnetischer strahlung im wellenlaengenbereich unter etwa 100 nm |
DE3422144A1 (de) * | 1984-06-14 | 1985-12-19 | Josef Prof. Dr. 6900 Heidelberg Bille | Geraet zur darstellung flaechenhafter bereiche des menschlichen auges |
DE3422143A1 (de) * | 1984-06-14 | 1985-12-19 | Josef Prof. Dr. Bille | Geraet zur wafer-inspektion |
DE3424825A1 (de) * | 1984-07-06 | 1986-02-06 | Gerd Prof. Dr.-Ing. 6101 Roßdorf Herziger | Verfahren und einrichtung zum bearbeiten von werkstuecken mittels laserstrahl |
DE3427611A1 (de) * | 1984-07-26 | 1988-06-09 | Bille Josef | Laserstrahl-lithograph |
IL75998A0 (en) * | 1984-08-07 | 1985-12-31 | Medical Laser Research & Dev C | Laser system for providing target tissue specific energy deposition |
JPS6293095A (ja) * | 1985-10-18 | 1987-04-28 | Matsushita Electric Ind Co Ltd | レ−ザ加工装置 |
CA1284823C (en) * | 1985-10-22 | 1991-06-11 | Kenneth K. York | Systems and methods for creating rounded work surfaces by photoablation |
EP0263193A1 (de) * | 1986-10-04 | 1988-04-13 | Helmut K. Pinsch GmbH & Co. | Verfahren und Vorrichtung zur Steigerung des Wohlbefindens eines Lebewesens |
US4764930A (en) * | 1988-01-27 | 1988-08-16 | Intelligent Surgical Lasers | Multiwavelength laser source |
US4901718A (en) * | 1988-02-02 | 1990-02-20 | Intelligent Surgical Lasers | 3-Dimensional laser beam guidance system |
US4848340A (en) * | 1988-02-10 | 1989-07-18 | Intelligent Surgical Lasers | Eyetracker and method of use |
US4881808A (en) * | 1988-02-10 | 1989-11-21 | Intelligent Surgical Lasers | Imaging system for surgical lasers |
DE3809211A1 (de) * | 1988-03-18 | 1989-10-05 | Max Planck Gesellschaft | Verfahren zur ablation von polymeren kunststoffen mittels ultrakurzer laserstrahlungsimpulse |
US4907586A (en) * | 1988-03-31 | 1990-03-13 | Intelligent Surgical Lasers | Method for reshaping the eye |
EP0365754B1 (en) * | 1988-10-28 | 1994-11-09 | International Business Machines Corporation | Enhandement of ultraviolet laser ablation and etching of organic solids |
US5269778A (en) * | 1988-11-01 | 1993-12-14 | Rink John L | Variable pulse width laser and method of use |
US5098426A (en) * | 1989-02-06 | 1992-03-24 | Phoenix Laser Systems, Inc. | Method and apparatus for precision laser surgery |
US4942586A (en) * | 1989-04-25 | 1990-07-17 | Intelligent Surgical Lasers Inc. | High power diode pumped laser |
US4988348A (en) * | 1989-05-26 | 1991-01-29 | Intelligent Surgical Lasers, Inc. | Method for reshaping the cornea |
DE3934587C2 (de) * | 1989-10-17 | 1998-11-19 | Bosch Gmbh Robert | Verfahren zum Herstellen von mittels Laserstrahlung erzeugter, hochpräziser Durchgangsbohrungen in Werkstücken |
US5062702A (en) * | 1990-03-16 | 1991-11-05 | Intelligent Surgical Lasers, Inc. | Device for mapping corneal topography |
JP3150322B2 (ja) * | 1990-05-18 | 2001-03-26 | 株式会社日立製作所 | レーザによる配線切断加工方法及びレーザ加工装置 |
US5312396A (en) * | 1990-09-06 | 1994-05-17 | Massachusetts Institute Of Technology | Pulsed laser system for the surgical removal of tissue |
DE4119024C2 (de) * | 1991-06-10 | 1996-04-04 | Technolas Laser Technik Gmbh | Vorrichtung zur schonenden und exakten Photoablation für photorefraktive Chirurgie |
US5289407A (en) * | 1991-07-22 | 1994-02-22 | Cornell Research Foundation, Inc. | Method for three dimensional optical data storage and retrieval |
US5280491A (en) * | 1991-08-02 | 1994-01-18 | Lai Shui T | Two dimensional scan amplifier laser |
US5235606A (en) * | 1991-10-29 | 1993-08-10 | University Of Michigan | Amplification of ultrashort pulses with nd:glass amplifiers pumped by alexandrite free running laser |
US5984916A (en) * | 1993-04-20 | 1999-11-16 | Lai; Shui T. | Ophthalmic surgical laser and method |
US5454902A (en) * | 1991-11-12 | 1995-10-03 | Hughes Aircraft Company | Production of clean, well-ordered CdTe surfaces using laser ablation |
US5348018A (en) * | 1991-11-25 | 1994-09-20 | Alfano Robert R | Method for determining if tissue is malignant as opposed to non-malignant using time-resolved fluorescence spectroscopy |
US5246435A (en) * | 1992-02-25 | 1993-09-21 | Intelligent Surgical Lasers | Method for removing cataractous material |
JP2600096B2 (ja) * | 1992-10-06 | 1997-04-16 | 名古屋大学長 | 表面微量欠陥の定量方法 |
US5335258A (en) * | 1993-03-31 | 1994-08-02 | The United States Of America As Represented By The Secretary Of The Navy | Submicrosecond, synchronizable x-ray source |
US5558789A (en) * | 1994-03-02 | 1996-09-24 | University Of Florida | Method of applying a laser beam creating micro-scale surface structures prior to deposition of film for increased adhesion |
-
1994
- 1994-04-08 US US08/224,961 patent/US5656186A/en not_active Ceased
-
1995
- 1995-03-29 AT AT95916130T patent/ATE159880T1/de active
- 1995-03-29 JP JP52636495A patent/JP3283265B2/ja not_active Expired - Lifetime
- 1995-03-29 EP EP95916130A patent/EP0754103B1/en not_active Expired - Lifetime
- 1995-03-29 AU AU22741/95A patent/AU684633B2/en not_active Expired
- 1995-03-29 WO PCT/US1995/003863 patent/WO1995027587A1/en active IP Right Grant
- 1995-03-29 CA CA002186451A patent/CA2186451C/en not_active Expired - Lifetime
- 1995-03-29 DE DE69500997T patent/DE69500997T2/de not_active Expired - Lifetime
-
1999
- 1999-08-04 US US09/366,685 patent/USRE37585E1/en not_active Expired - Lifetime
-
2001
- 2001-11-29 JP JP2001363495A patent/JP3824522B2/ja not_active Expired - Lifetime
Cited By (14)
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JP2002154846A (ja) * | 2000-11-17 | 2002-05-28 | National Institute Of Advanced Industrial & Technology | ガラス基板の加工方法 |
JP4512786B2 (ja) * | 2000-11-17 | 2010-07-28 | 独立行政法人産業技術総合研究所 | ガラス基板の加工方法 |
JP2007527732A (ja) * | 2003-06-02 | 2007-10-04 | カール ツァイス メディテック エージー | フェムト秒ファイバーレーザーによる眼科手術処置のための装置と方法 |
JP2007527731A (ja) * | 2003-06-02 | 2007-10-04 | カール ツァイス メディテック エージー | 材料の精密加工のための方法と装置 |
JP2008515634A (ja) * | 2004-05-28 | 2008-05-15 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 |
JP2006130903A (ja) * | 2004-11-05 | 2006-05-25 | Lg Phillips Lcd Co Ltd | フェムト秒レーザーを用いた基板の切断方法 |
US7767555B2 (en) | 2004-11-05 | 2010-08-03 | Lg. Display Co., Ltd. | Method for cutting substrate using femtosecond laser |
WO2006093017A1 (ja) * | 2005-03-02 | 2006-09-08 | Sumitomo Electric Industries, Ltd. | レーザーアブレーションによる材料の加工方法とその加工方法により加工された材料 |
WO2012073868A1 (ja) * | 2010-11-30 | 2012-06-07 | 三洋電機株式会社 | 光電変換装置及びその製造方法 |
JP5119376B2 (ja) * | 2010-11-30 | 2013-01-16 | パナソニック株式会社 | 光電変換装置及びその製造方法 |
US9202957B2 (en) | 2010-11-30 | 2015-12-01 | Panasonic Intellectual Property Management Co., Ltd. | Photoelectric converter device and method for its manufacture |
JP2015092605A (ja) * | 2011-06-15 | 2015-05-14 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | レーザスクライビング・プラズマエッチングによるデバイスの個片化用のインサイチュー蒸着マスク層 |
JP2017516550A (ja) * | 2014-05-22 | 2017-06-22 | バーフェリヒト ゲゼルシャフト ミット ベシュレンクテル ハフツング | エネルギーに関係したレーザーパルスパラメータを設定する技法 |
WO2022239517A1 (ja) * | 2021-05-14 | 2022-11-17 | 浜松ホトニクス株式会社 | レーザ加工装置、レーザ加工方法、及び、データ生成方法 |
Also Published As
Publication number | Publication date |
---|---|
WO1995027587A1 (en) | 1995-10-19 |
AU2274195A (en) | 1995-10-30 |
AU684633B2 (en) | 1997-12-18 |
JP3283265B2 (ja) | 2002-05-20 |
CA2186451C (en) | 2009-06-02 |
EP0754103A1 (en) | 1997-01-22 |
USRE37585E1 (en) | 2002-03-19 |
CA2186451A1 (en) | 1995-10-19 |
JP3824522B2 (ja) | 2006-09-20 |
US5656186A (en) | 1997-08-12 |
DE69500997T2 (de) | 1998-04-30 |
EP0754103B1 (en) | 1997-11-05 |
DE69500997D1 (de) | 1997-12-11 |
JP2002205179A (ja) | 2002-07-23 |
ATE159880T1 (de) | 1997-11-15 |
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