DE69500997T2 - Verfahren zum konfigurationsteuern von laserinduziertem zerstören und abtragen - Google Patents

Verfahren zum konfigurationsteuern von laserinduziertem zerstören und abtragen

Info

Publication number
DE69500997T2
DE69500997T2 DE69500997T DE69500997T DE69500997T2 DE 69500997 T2 DE69500997 T2 DE 69500997T2 DE 69500997 T DE69500997 T DE 69500997T DE 69500997 T DE69500997 T DE 69500997T DE 69500997 T2 DE69500997 T2 DE 69500997T2
Authority
DE
Germany
Prior art keywords
laser
pulse width
mask
pulse
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69500997T
Other languages
English (en)
Other versions
DE69500997D1 (de
Inventor
Gerard Mourou
Detao Du
Subrata Dutta
Victor Elner
Ron Kurtz
Paul Lichter
Xinbing Liu
Peter Pronko
Jeffrey Squier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan
Original Assignee
University of Michigan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22842948&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69500997(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by University of Michigan filed Critical University of Michigan
Application granted granted Critical
Publication of DE69500997D1 publication Critical patent/DE69500997D1/de
Publication of DE69500997T2 publication Critical patent/DE69500997T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
    • A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00825—Methods or devices for eye surgery using laser for photodisruption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/10—Aluminium or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass
DE69500997T 1994-04-08 1995-03-29 Verfahren zum konfigurationsteuern von laserinduziertem zerstören und abtragen Expired - Lifetime DE69500997T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/224,961 US5656186A (en) 1994-04-08 1994-04-08 Method for controlling configuration of laser induced breakdown and ablation
PCT/US1995/003863 WO1995027587A1 (en) 1994-04-08 1995-03-29 Method for controlling configuration of laser induced breakdown and ablation

Publications (2)

Publication Number Publication Date
DE69500997D1 DE69500997D1 (de) 1997-12-11
DE69500997T2 true DE69500997T2 (de) 1998-04-30

Family

ID=22842948

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69500997T Expired - Lifetime DE69500997T2 (de) 1994-04-08 1995-03-29 Verfahren zum konfigurationsteuern von laserinduziertem zerstören und abtragen

Country Status (8)

Country Link
US (2) US5656186A (de)
EP (1) EP0754103B1 (de)
JP (2) JP3283265B2 (de)
AT (1) ATE159880T1 (de)
AU (1) AU684633B2 (de)
CA (1) CA2186451C (de)
DE (1) DE69500997T2 (de)
WO (1) WO1995027587A1 (de)

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10029110B4 (de) * 1999-06-15 2006-05-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren für die Materialbearbeitung und Verwendung desselben
DE102005049281A1 (de) * 2005-10-14 2007-04-19 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung
DE102007019815A1 (de) 2007-04-26 2008-10-30 Carl Zeiss Meditec Ag Augenhornhaut-Transplantation
DE102007019814A1 (de) 2007-04-26 2008-10-30 Carl Zeiss Meditec Ag Nachbehandlung bei augenchirurgischer Refraktionskorrektur
DE102007053281A1 (de) 2007-11-08 2009-05-14 Carl Zeiss Meditec Ag Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges, Verfahren zum Erzeugen von Steuerdaten dafür und Verfahren zur operativen Fehlsichtigkeitskorrektur eines Auges
DE102007053283A1 (de) 2007-11-08 2009-05-14 Carl Zeiss Meditec Ag Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges, Verfahren zum Erzeugen von Steuerdaten dafür und Verfahren zur operativen Fehlsichtigkeitskorrektur eines Auges
DE102008017293A1 (de) 2008-04-04 2009-10-08 Carl Zeiss Meditec Ag Verfahren zum Erzeugen von Steuerdaten für die Augenchirurgie sowie augenchirurgische Behandlungsvorrichtung und -verfahren
DE102009005482A1 (de) 2009-01-21 2010-07-22 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zum Erzeugen von Steuerdaten zur operativen Fehlsichtigkeitskorrektur eines Auges
DE102009009382A1 (de) 2009-02-18 2010-08-19 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zum Erzeugen von Steuerdaten zur operativen Fehlsichtigkeitskorrektur eines Auges und Fehlsichtigkeitskorrekturverfahren
EP2298255A1 (de) 2006-11-10 2011-03-23 Carl Zeiss Meditec AG Planungseinrichtung zum Vorbereiten von Steuerdaten für eine Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur, Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur und Verfahren zum Vorbereiten von Steuerdaten dafür
DE102010031348A1 (de) 2010-07-14 2012-01-19 Carl Zeiss Meditec Ag Steuerdatenerzeugung für die augenchirurgische Fehlsichtigkeitsbehandlung
EP2529712A1 (de) 2006-11-10 2012-12-05 Carl Zeiss Meditec AG Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges und Verfahren zum Erzeugen von Steuerdaten dafür
DE102012014769A1 (de) 2011-07-22 2013-01-24 Carl Zeiss Meditec Ag Fortsetzung von unterbrochenen augenchirurgischen Schnitten
DE102011108645A1 (de) 2011-07-22 2013-01-24 Carl Zeiss Meditec Ag "Nachbehandlung bei augenchirurgischer Refraktionskorrektur"
DE102011083928A1 (de) 2011-09-30 2013-04-04 Carl Zeiss Meditec Ag Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges, Verfahren zum Erzeugen von Steuerdaten dafür und Verfahren zur operativen Fehlsichtigkeitskorrektur eines Auges
WO2013057318A1 (de) 2011-10-21 2013-04-25 Carl Zeiss Meditec Ag Erzeugung von schnittflächen in einem transparenten material mittels optischer strahlung
DE102011085047A1 (de) 2011-10-21 2013-04-25 Carl Zeiss Meditec Ag Erzeugung von Schnitten in einem transparenten Material mittels optischer Strahlung
US8623038B2 (en) 2007-04-26 2014-01-07 Carl Zeiss Meditec Ag Re-treatment for ophthalmic correction of refraction
DE102012018421A1 (de) 2012-09-14 2014-03-20 Carl Zeiss Meditec Ag Augenchirurgische Refraktionskorrektur
US8685006B2 (en) 2006-11-10 2014-04-01 Carl Zeiss Meditec Ag Treatment apparatus for surgical correction of defective eyesight, method of generating control data therefore, and method for surgical correction of defective eyesight
DE102013218415A1 (de) 2012-09-14 2014-04-10 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102012022081A1 (de) 2012-11-08 2014-05-08 Carl Zeiss Meditec Ag Nachbehandlung bei augenchirurgischer Refrationskorrektur
DE102012022079A1 (de) 2012-11-08 2014-05-08 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102012022080A1 (de) 2012-11-08 2014-05-08 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102013004688A1 (de) 2013-03-13 2014-09-18 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102013219788A1 (de) 2013-09-30 2015-04-16 Carl Zeiss Meditec Ag Intra-Cornealer Ring
DE102014014566A1 (de) 2014-09-29 2016-03-31 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102014014567A1 (de) 2014-09-29 2016-03-31 Carl Zeiss Meditec Ag Erzeugung von speziellen Schnitten in einem transparenten Material mittels optischer Strahlung
DE102014014565A1 (de) 2014-09-29 2016-03-31 Carl Zeiss Meditec Ag Erzeugung von Schnitten in einem transparenten Material mittels optischer Strahlung
DE102015218909A1 (de) 2015-09-30 2017-03-30 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102016218564A1 (de) 2015-09-30 2017-03-30 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102016208011A1 (de) 2016-05-10 2017-11-16 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102016208012A1 (de) 2016-05-10 2017-11-16 Carl Zeiss Meditec Ag Augenchirurgisches Verfahren
DE102016116267A1 (de) 2016-08-01 2018-02-01 Carl Zeiss Meditec Ag Vorrichtung zur operativen Fehlsichtigkeitskorrektur eines Auges und Verfahren zum Erzeugen von Steuerdaten hierfür
WO2018202771A1 (de) 2017-05-04 2018-11-08 Carl Zeiss Meditec Ag Nachbehandlung bei augenchirurgischer refraktionskorrektur
DE102018216507A1 (de) 2017-09-29 2019-04-04 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung
US10675183B2 (en) 2014-09-29 2020-06-09 Carl Zeiss Meditec Ag Creating cuts in a transparent material using optical radiation
WO2021048114A1 (de) 2019-09-10 2021-03-18 Carl Zeiss Meditec Ag Augenchirurgische behandlungsvorrichtung
WO2021048115A1 (de) 2019-09-10 2021-03-18 Carl Zeiss Meditec Ag Augenchirurgische behandlungsvorrichtung
WO2021048116A1 (de) 2019-09-10 2021-03-18 Carl Zeiss Meditec Ag Augenchirurgische behandlungsvorrichtung
DE102006053118B4 (de) 2006-11-10 2022-02-17 Carl Zeiss Meditec Ag Planungseinrichtung zum Vorbereiten von Steuerdaten für eine Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur, Behandlungsvorrichtung zur operativen Fehlsichtigkeitskorrektur und Verfahren zum Vorbereiten von Steuerdaten dafür
DE102021124087A1 (de) 2021-09-17 2023-03-23 Carl Zeiss Meditec Ag Korrektur der Refraktion eines Auges durch Hornhautmodifikation

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EP0754103B1 (de) 1997-11-05
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AU2274195A (en) 1995-10-30
JP3283265B2 (ja) 2002-05-20
JPH09511688A (ja) 1997-11-25
JP3824522B2 (ja) 2006-09-20
US5656186A (en) 1997-08-12
AU684633B2 (en) 1997-12-18
CA2186451C (en) 2009-06-02
DE69500997D1 (de) 1997-12-11
ATE159880T1 (de) 1997-11-15
CA2186451A1 (en) 1995-10-19
EP0754103A1 (de) 1997-01-22

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