JP2008515634A - 異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 - Google Patents
異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 Download PDFInfo
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- JP2008515634A JP2008515634A JP2007515377A JP2007515377A JP2008515634A JP 2008515634 A JP2008515634 A JP 2008515634A JP 2007515377 A JP2007515377 A JP 2007515377A JP 2007515377 A JP2007515377 A JP 2007515377A JP 2008515634 A JP2008515634 A JP 2008515634A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
- B23K2101/35—Surface treated articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
Abstract
【選択図】図1
Description
Claims (10)
- レーザグループの異なるレーザのそれぞれから放出され、対象試料素材の処理の前にパルス幅および最大パワー値によって決まる公称パルスエネルギ値によって特徴付けられるレーザ出力パルスで対象試料の処理された領域についての特定の特性メトリックを安定して満たす方法であって、
対象試料のレーザで処理された領域についての特性メトリックを特定すること、
前記レーザ出力パルスによって処理される対象試料の領域が前記特定された特性メトリックに合うエネルギ値に調整すべく、前記グループのレーザ毎に、前記レーザ出力パルスの公称パルスエネルギ値を調整することを含む方法。 - 前記グループ内の各レーザは、一連の前記レーザ出力パルスを放出し、さらに、前記調整されたエネルギ値からの偏差の検出に応答して前記対象試料の関連する領域を処理するために前記レーザの一以上の連続するレーザ出力パルス数を変更することを含む、請求項1に記載の方法。
- 対象試料の前記レーザ処理は、前記対象試料の前記領域の一つにビアを形成する、請求項1に記載の方法。
- 前記対象試料は金属被覆によって覆われた主表面を有する除去可能な対象素材を含み、特性メトリックのうちの1つは、前記ビアの形成のために前記除去可能な対象素材を除去するときの前記金属皮膜の状態を含む、請求項3に記載の方法。
- 特定の出力性能仕様範囲内で動作し、それぞれが公称エネルギ値および実際のパルス幅によって特徴付けられた一連の出力パルスを放つレーザから放出されるレーザ出力パルスによって対象試料の処理される領域についての特定の特性メトリックを安定して満たす方法であって、
前記対象試料へのレーザ処理が終了したとき該対象試料の前記領域に合うメトリックの品質を特定すること、
前記対象試料の前記領域の処理のための計算されたエネルギ値を一連の出力パルスに与えるべく前記レーザ出力パルスの公称エネルギ値に、前記レーザパルスの実際のパルス幅から導き出されたパラメータを乗じることにより、スケーリングすることを含む方法。 - 対象試料の前記レーザ処理は、前記領域にビアを形成する、請求項6に記載の方法。
- 前記対象試料は金属被覆によって覆われた主表面を有する除去可能な素材を含み、前記特性メトリックは、前記ビアの形成のために前記除去可能な素材を除去するときの前記金属皮膜の状態を含む、請求項8に記載の方法。
- 対象試料を処理するためのパルス化された対象試料処理レーザビームを放出するについて特定の特性メトリックを安定して満たす方法であって、
前記レーザから放出された公称パルス化ビームのパルス幅および最大パワー値から導き出される当該公称パルス化ビームの公称パルスエネルギ値を決めること、および
対象試料処理用の前記特性メトリックに対応したスケール化されたレーザパルスエネルギのパルス化レーザビームを生成すべくパラメータによって前記公称パルスエネルギ値をスケーリングすることを含み、
前記パラメータはF/√・τで表され、ここでFは対象領域に入射する前記公称パルス化ビームの前記レーザパルスの最大パワー値から計算されたフルエンスであり、また、τは前記公称パルス化ビームの前記パルスのパルス幅であることを特徴とする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US57522804P | 2004-05-28 | 2004-05-28 | |
US11/131,432 US7985942B2 (en) | 2004-05-28 | 2005-05-17 | Method of providing consistent quality of target material removal by lasers having different output performance characteristics |
PCT/US2005/018676 WO2005119860A2 (en) | 2004-05-28 | 2005-05-26 | Method of providing consistent quality of target material removal by lasers having different output performance characteristics |
Related Child Applications (1)
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---|---|---|---|
JP2013025942A Division JP5635139B2 (ja) | 2004-05-28 | 2013-02-13 | 異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 |
Publications (1)
Publication Number | Publication Date |
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JP2008515634A true JP2008515634A (ja) | 2008-05-15 |
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Family Applications (2)
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JP2007515377A Pending JP2008515634A (ja) | 2004-05-28 | 2005-05-26 | 異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 |
JP2013025942A Expired - Fee Related JP5635139B2 (ja) | 2004-05-28 | 2013-02-13 | 異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013025942A Expired - Fee Related JP5635139B2 (ja) | 2004-05-28 | 2013-02-13 | 異なる出力特性のレーザによる対象素材の除去についての安定した品質を提供する方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7985942B2 (ja) |
JP (2) | JP2008515634A (ja) |
KR (1) | KR101147799B1 (ja) |
CN (1) | CN101427427B (ja) |
DE (1) | DE112005001225T5 (ja) |
GB (1) | GB2429422B (ja) |
TW (1) | TWI357842B (ja) |
WO (1) | WO2005119860A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010528865A (ja) * | 2007-05-31 | 2010-08-26 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 複数のレーザ波長及びパルス幅による穴あけ加工 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7605343B2 (en) * | 2006-05-24 | 2009-10-20 | Electro Scientific Industries, Inc. | Micromachining with short-pulsed, solid-state UV laser |
US8198566B2 (en) * | 2006-05-24 | 2012-06-12 | Electro Scientific Industries, Inc. | Laser processing of workpieces containing low-k dielectric material |
US8710402B2 (en) * | 2007-06-01 | 2014-04-29 | Electro Scientific Industries, Inc. | Method of and apparatus for laser drilling holes with improved taper |
JP5192213B2 (ja) * | 2007-11-02 | 2013-05-08 | 株式会社ディスコ | レーザー加工装置 |
US8173931B2 (en) * | 2008-06-13 | 2012-05-08 | Electro Scientific Industries, Inc. | Automatic recipe management for laser processing a work piece |
US20100078418A1 (en) * | 2008-09-26 | 2010-04-01 | Electro Scientific Industries, Inc. | Method of laser micro-machining stainless steel with high cosmetic quality |
US8648277B2 (en) * | 2011-03-31 | 2014-02-11 | Electro Scientific Industries, Inc. | Laser direct ablation with picosecond laser pulses at high pulse repetition frequencies |
WO2014085660A1 (en) * | 2012-11-29 | 2014-06-05 | Corning Incorporated | Sacrificial cover layers for laser drilling substrates and methods thereof |
US10410883B2 (en) | 2016-06-01 | 2019-09-10 | Corning Incorporated | Articles and methods of forming vias in substrates |
US10794679B2 (en) | 2016-06-29 | 2020-10-06 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
US10134657B2 (en) | 2016-06-29 | 2018-11-20 | Corning Incorporated | Inorganic wafer having through-holes attached to semiconductor wafer |
US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
US10580725B2 (en) | 2017-05-25 | 2020-03-03 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
CN109648192A (zh) * | 2018-12-10 | 2019-04-19 | 成都莱普科技有限公司 | 激光钻孔机能量控制方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09511688A (ja) * | 1994-04-08 | 1997-11-25 | ザ リージェンツ オブ ザ ユニバーシティー オブ ミシガン | レーザー誘起破壊及び切断形状を制御する方法 |
US6229114B1 (en) * | 1999-09-30 | 2001-05-08 | Xerox Corporation | Precision laser cutting of adhesive members |
JP2002335063A (ja) * | 2001-05-09 | 2002-11-22 | Hitachi Via Mechanics Ltd | プリント基板の穴あけ加工方法および装置 |
US6639177B2 (en) * | 2001-03-29 | 2003-10-28 | Gsi Lumonics Corporation | Method and system for processing one or more microstructures of a multi-material device |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2002A (en) * | 1841-03-12 | Tor and planter for plowing | ||
GB2290411A (en) | 1994-06-15 | 1995-12-20 | Zeiss Stiftung | Laser and adapter for mounting it on a surgical microscope |
JPH1099980A (ja) | 1996-09-30 | 1998-04-21 | Toshiba Corp | 積層部材の加工方法 |
DE19734732A1 (de) * | 1996-12-10 | 1998-06-18 | Wavelight Laser Technologie Gm | Vorrichtung für die Behandlung von Körpersubstanzen |
US6333485B1 (en) * | 1998-12-11 | 2001-12-25 | International Business Machines Corporation | Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam |
CN1211862C (zh) | 1999-04-07 | 2005-07-20 | 壳牌太阳能股份有限公司 | 衬底薄膜烧蚀方法及其设备 |
TW503143B (en) * | 2000-10-06 | 2002-09-21 | Hitachi Via Mechanics Ltd | Method and apparatus for drilling printed wiring boards |
JP4634692B2 (ja) | 2001-01-31 | 2011-02-16 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | レーザ処理方法 |
US6864457B1 (en) | 2002-02-25 | 2005-03-08 | The Board Of Regents Of The University Of Nebraska | Laser machining of materials |
DE10209617C1 (de) | 2002-03-05 | 2003-08-07 | Siemens Ag | Laserbeschriftungsverfahren |
US6809291B1 (en) * | 2002-08-30 | 2004-10-26 | Southeastern Universities Research Assn., Inc. | Process for laser machining and surface treatment |
JP2004114094A (ja) | 2002-09-26 | 2004-04-15 | Kyocera Corp | プリプレグシートのレーザによる穿孔方法 |
US6979798B2 (en) | 2003-03-07 | 2005-12-27 | Gsi Lumonics Corporation | Laser system and method for material processing with ultra fast lasers |
JP2006224174A (ja) | 2005-02-21 | 2006-08-31 | Sumitomo Heavy Ind Ltd | レーザ加工装置及びパルスエネルギのしきい値設定方法 |
-
2005
- 2005-05-17 US US11/131,432 patent/US7985942B2/en not_active Expired - Fee Related
- 2005-05-26 WO PCT/US2005/018676 patent/WO2005119860A2/en active Application Filing
- 2005-05-26 KR KR1020067024607A patent/KR101147799B1/ko not_active IP Right Cessation
- 2005-05-26 DE DE112005001225T patent/DE112005001225T5/de not_active Withdrawn
- 2005-05-26 JP JP2007515377A patent/JP2008515634A/ja active Pending
- 2005-05-26 CN CN2005800173851A patent/CN101427427B/zh not_active Expired - Fee Related
- 2005-05-26 GB GB0623282A patent/GB2429422B/en not_active Expired - Fee Related
- 2005-05-27 TW TW094117475A patent/TWI357842B/zh not_active IP Right Cessation
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2013
- 2013-02-13 JP JP2013025942A patent/JP5635139B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09511688A (ja) * | 1994-04-08 | 1997-11-25 | ザ リージェンツ オブ ザ ユニバーシティー オブ ミシガン | レーザー誘起破壊及び切断形状を制御する方法 |
US6229114B1 (en) * | 1999-09-30 | 2001-05-08 | Xerox Corporation | Precision laser cutting of adhesive members |
US6639177B2 (en) * | 2001-03-29 | 2003-10-28 | Gsi Lumonics Corporation | Method and system for processing one or more microstructures of a multi-material device |
JP2002335063A (ja) * | 2001-05-09 | 2002-11-22 | Hitachi Via Mechanics Ltd | プリント基板の穴あけ加工方法および装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010528865A (ja) * | 2007-05-31 | 2010-08-26 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 複数のレーザ波長及びパルス幅による穴あけ加工 |
Also Published As
Publication number | Publication date |
---|---|
TWI357842B (en) | 2012-02-11 |
US7985942B2 (en) | 2011-07-26 |
TW200603930A (en) | 2006-02-01 |
GB2429422B (en) | 2008-06-11 |
US20050265408A1 (en) | 2005-12-01 |
JP5635139B2 (ja) | 2014-12-03 |
CN101427427A (zh) | 2009-05-06 |
GB0623282D0 (en) | 2007-01-03 |
WO2005119860A3 (en) | 2009-04-09 |
CN101427427B (zh) | 2012-03-21 |
KR101147799B1 (ko) | 2012-05-18 |
JP2013099792A (ja) | 2013-05-23 |
GB2429422A (en) | 2007-02-28 |
WO2005119860A2 (en) | 2005-12-15 |
DE112005001225T5 (de) | 2007-06-28 |
KR20070019741A (ko) | 2007-02-15 |
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