JPH08306678A - 半導体装置の製造方法及び半導体装置 - Google Patents

半導体装置の製造方法及び半導体装置

Info

Publication number
JPH08306678A
JPH08306678A JP7109585A JP10958595A JPH08306678A JP H08306678 A JPH08306678 A JP H08306678A JP 7109585 A JP7109585 A JP 7109585A JP 10958595 A JP10958595 A JP 10958595A JP H08306678 A JPH08306678 A JP H08306678A
Authority
JP
Japan
Prior art keywords
film
oxide film
silicon
silicon substrate
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7109585A
Other languages
English (en)
Japanese (ja)
Inventor
Hideo Miura
英生 三浦
Shuji Ikeda
修二 池田
Norio Suzuki
範夫 鈴木
Naoto Saito
直人 斉藤
Asao Nishimura
朝雄 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7109585A priority Critical patent/JPH08306678A/ja
Priority to TW085105149A priority patent/TW326099B/zh
Priority to PCT/JP1996/001193 priority patent/WO1996036073A1/ja
Priority to KR1019970707841A priority patent/KR19990008315A/ko
Priority to MYPI96001700A priority patent/MY132186A/en
Priority to IN824CA1996 priority patent/IN187708B/en
Publication of JPH08306678A publication Critical patent/JPH08306678A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10W10/012—
    • H10P14/60—
    • H10W10/13—

Landscapes

  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Formation Of Insulating Films (AREA)
JP7109585A 1995-05-08 1995-05-08 半導体装置の製造方法及び半導体装置 Pending JPH08306678A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP7109585A JPH08306678A (ja) 1995-05-08 1995-05-08 半導体装置の製造方法及び半導体装置
TW085105149A TW326099B (en) 1995-05-08 1996-04-30 Semiconductor device and the process of manufacturing the same
PCT/JP1996/001193 WO1996036073A1 (fr) 1995-05-08 1996-05-01 Dispositif a semi-conducteur et sa fabrication
KR1019970707841A KR19990008315A (ko) 1995-05-08 1996-05-01 반도체장치 및 그 제조방법
MYPI96001700A MY132186A (en) 1995-05-08 1996-05-06 Semiconductor device and process for producing the same.
IN824CA1996 IN187708B (cg-RX-API-DMAC10.html) 1995-05-08 1996-05-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7109585A JPH08306678A (ja) 1995-05-08 1995-05-08 半導体装置の製造方法及び半導体装置

Publications (1)

Publication Number Publication Date
JPH08306678A true JPH08306678A (ja) 1996-11-22

Family

ID=14514002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7109585A Pending JPH08306678A (ja) 1995-05-08 1995-05-08 半導体装置の製造方法及び半導体装置

Country Status (6)

Country Link
JP (1) JPH08306678A (cg-RX-API-DMAC10.html)
KR (1) KR19990008315A (cg-RX-API-DMAC10.html)
IN (1) IN187708B (cg-RX-API-DMAC10.html)
MY (1) MY132186A (cg-RX-API-DMAC10.html)
TW (1) TW326099B (cg-RX-API-DMAC10.html)
WO (1) WO1996036073A1 (cg-RX-API-DMAC10.html)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139263A (en) * 1975-05-28 1976-12-01 Hitachi Ltd Method of selective oxidation of silicon substrate
JPS5249771A (en) * 1975-10-17 1977-04-21 Matsushita Electric Ind Co Ltd Process for production of semiconductor device
JPS5739551A (en) * 1980-08-21 1982-03-04 Seiko Epson Corp Manufacture of selectively oxidized mask
JPH0628282B2 (ja) * 1984-09-19 1994-04-13 ソニー株式会社 半導体装置の製造方法
JP3403210B2 (ja) * 1992-02-14 2003-05-06 富士通株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
WO1996036073A1 (fr) 1996-11-14
IN187708B (cg-RX-API-DMAC10.html) 2002-06-08
KR19990008315A (ko) 1999-01-25
MY132186A (en) 2007-09-28
TW326099B (en) 1998-02-01

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