JPH0584669B2 - - Google Patents

Info

Publication number
JPH0584669B2
JPH0584669B2 JP60256986A JP25698685A JPH0584669B2 JP H0584669 B2 JPH0584669 B2 JP H0584669B2 JP 60256986 A JP60256986 A JP 60256986A JP 25698685 A JP25698685 A JP 25698685A JP H0584669 B2 JPH0584669 B2 JP H0584669B2
Authority
JP
Japan
Prior art keywords
mark
semiconductor
rejection
photoelectric sensor
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60256986A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62115838A (ja
Inventor
Kimio Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP25698685A priority Critical patent/JPS62115838A/ja
Publication of JPS62115838A publication Critical patent/JPS62115838A/ja
Publication of JPH0584669B2 publication Critical patent/JPH0584669B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP25698685A 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法 Granted JPS62115838A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25698685A JPS62115838A (ja) 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25698685A JPS62115838A (ja) 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法

Publications (2)

Publication Number Publication Date
JPS62115838A JPS62115838A (ja) 1987-05-27
JPH0584669B2 true JPH0584669B2 (enrdf_load_stackoverflow) 1993-12-02

Family

ID=17300137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25698685A Granted JPS62115838A (ja) 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法

Country Status (1)

Country Link
JP (1) JPS62115838A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750730B2 (ja) * 1987-05-29 1995-05-31 東京エレクトロン株式会社 プロ−ブ装置
JPH02275249A (ja) * 1989-04-14 1990-11-09 Matsushita Electric Ind Co Ltd 端末電気給湯器の制御装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215830A (ja) * 1985-07-12 1987-01-24 Matsushita Electronics Corp ウエハ−マ−キング装置

Also Published As

Publication number Publication date
JPS62115838A (ja) 1987-05-27

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