JPS62115838A - ウエハ−マ−ク検出方法 - Google Patents

ウエハ−マ−ク検出方法

Info

Publication number
JPS62115838A
JPS62115838A JP25698685A JP25698685A JPS62115838A JP S62115838 A JPS62115838 A JP S62115838A JP 25698685 A JP25698685 A JP 25698685A JP 25698685 A JP25698685 A JP 25698685A JP S62115838 A JPS62115838 A JP S62115838A
Authority
JP
Japan
Prior art keywords
mark
inker
semiconductor
semiconductor element
photoelectric sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25698685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0584669B2 (enrdf_load_stackoverflow
Inventor
Kimio Okamoto
公男 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP25698685A priority Critical patent/JPS62115838A/ja
Publication of JPS62115838A publication Critical patent/JPS62115838A/ja
Publication of JPH0584669B2 publication Critical patent/JPH0584669B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP25698685A 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法 Granted JPS62115838A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25698685A JPS62115838A (ja) 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25698685A JPS62115838A (ja) 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法

Publications (2)

Publication Number Publication Date
JPS62115838A true JPS62115838A (ja) 1987-05-27
JPH0584669B2 JPH0584669B2 (enrdf_load_stackoverflow) 1993-12-02

Family

ID=17300137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25698685A Granted JPS62115838A (ja) 1985-11-15 1985-11-15 ウエハ−マ−ク検出方法

Country Status (1)

Country Link
JP (1) JPS62115838A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299352A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd プロ−ブ装置
JPH02275249A (ja) * 1989-04-14 1990-11-09 Matsushita Electric Ind Co Ltd 端末電気給湯器の制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215830A (ja) * 1985-07-12 1987-01-24 Matsushita Electronics Corp ウエハ−マ−キング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215830A (ja) * 1985-07-12 1987-01-24 Matsushita Electronics Corp ウエハ−マ−キング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299352A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd プロ−ブ装置
JPH02275249A (ja) * 1989-04-14 1990-11-09 Matsushita Electric Ind Co Ltd 端末電気給湯器の制御装置

Also Published As

Publication number Publication date
JPH0584669B2 (enrdf_load_stackoverflow) 1993-12-02

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