JPH0566015B2 - - Google Patents

Info

Publication number
JPH0566015B2
JPH0566015B2 JP58126051A JP12605183A JPH0566015B2 JP H0566015 B2 JPH0566015 B2 JP H0566015B2 JP 58126051 A JP58126051 A JP 58126051A JP 12605183 A JP12605183 A JP 12605183A JP H0566015 B2 JPH0566015 B2 JP H0566015B2
Authority
JP
Japan
Prior art keywords
pellet
bonding
cavity
package
center position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58126051A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6018926A (ja
Inventor
Makoto Ariga
Satoru Haraguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP58126051A priority Critical patent/JPS6018926A/ja
Publication of JPS6018926A publication Critical patent/JPS6018926A/ja
Publication of JPH0566015B2 publication Critical patent/JPH0566015B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W72/073—
    • H10W72/07337—
    • H10W90/736—

Landscapes

  • Die Bonding (AREA)
JP58126051A 1983-07-13 1983-07-13 ペレツトボンデイング装置 Granted JPS6018926A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58126051A JPS6018926A (ja) 1983-07-13 1983-07-13 ペレツトボンデイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58126051A JPS6018926A (ja) 1983-07-13 1983-07-13 ペレツトボンデイング装置

Publications (2)

Publication Number Publication Date
JPS6018926A JPS6018926A (ja) 1985-01-31
JPH0566015B2 true JPH0566015B2 (enExample) 1993-09-20

Family

ID=14925427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58126051A Granted JPS6018926A (ja) 1983-07-13 1983-07-13 ペレツトボンデイング装置

Country Status (1)

Country Link
JP (1) JPS6018926A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6386528A (ja) * 1986-09-30 1988-04-16 Toshiba Corp ダイボンデイング装置
US4769534A (en) * 1986-11-17 1988-09-06 Tektronix, Inc. Optical detector with storage effects reduction
JPH0775238B2 (ja) * 1988-07-29 1995-08-09 シャープ株式会社 ダイボンダ
JP5022598B2 (ja) * 2005-12-27 2012-09-12 株式会社東芝 ボンディング装置及び半導体装置の製造方法
JP5468848B2 (ja) * 2009-08-31 2014-04-09 トッパン・フォームズ株式会社 塗布量検出装置及び塗布量検出方法
US20230274987A1 (en) * 2022-02-25 2023-08-31 Applied Materials, Inc. Machine learning & integrated metrology for run-to-run optimization of chip-to-wafer alignment accuracy

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164545A (en) * 1980-05-21 1981-12-17 Hitachi Ltd Pellet bonding inspection and device therefor
JPS57169250A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Bonding method for pellet

Also Published As

Publication number Publication date
JPS6018926A (ja) 1985-01-31

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