JPS6018926A - ペレツトボンデイング装置 - Google Patents

ペレツトボンデイング装置

Info

Publication number
JPS6018926A
JPS6018926A JP58126051A JP12605183A JPS6018926A JP S6018926 A JPS6018926 A JP S6018926A JP 58126051 A JP58126051 A JP 58126051A JP 12605183 A JP12605183 A JP 12605183A JP S6018926 A JPS6018926 A JP S6018926A
Authority
JP
Japan
Prior art keywords
pellet
bonding
sensor
image
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58126051A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566015B2 (enExample
Inventor
Makoto Ariga
有賀　誠
Satoru Haraguchi
原口　哲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP58126051A priority Critical patent/JPS6018926A/ja
Publication of JPS6018926A publication Critical patent/JPS6018926A/ja
Publication of JPH0566015B2 publication Critical patent/JPH0566015B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W72/073—
    • H10W72/07337—
    • H10W90/736—

Landscapes

  • Die Bonding (AREA)
JP58126051A 1983-07-13 1983-07-13 ペレツトボンデイング装置 Granted JPS6018926A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58126051A JPS6018926A (ja) 1983-07-13 1983-07-13 ペレツトボンデイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58126051A JPS6018926A (ja) 1983-07-13 1983-07-13 ペレツトボンデイング装置

Publications (2)

Publication Number Publication Date
JPS6018926A true JPS6018926A (ja) 1985-01-31
JPH0566015B2 JPH0566015B2 (enExample) 1993-09-20

Family

ID=14925427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58126051A Granted JPS6018926A (ja) 1983-07-13 1983-07-13 ペレツトボンデイング装置

Country Status (1)

Country Link
JP (1) JPS6018926A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6386528A (ja) * 1986-09-30 1988-04-16 Toshiba Corp ダイボンデイング装置
JPS63138218A (ja) * 1986-11-17 1988-06-10 テクトロニックス・インコーポレイテッド 光検出装置
JPH0239545A (ja) * 1988-07-29 1990-02-08 Sharp Corp ダイボンダ
JP2007180232A (ja) * 2005-12-27 2007-07-12 Toshiba Corp ボンディング装置及び半導体装置の製造方法
JP2011054634A (ja) * 2009-08-31 2011-03-17 Toppan Forms Co Ltd 塗布量検出装置及び塗布量検出方法
JP2025510502A (ja) * 2022-02-25 2025-04-15 アプライド マテリアルズ インコーポレイテッド チップツーウエハアライメント精度のランツーラン最適化のための機械学習及び統合計測

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164545A (en) * 1980-05-21 1981-12-17 Hitachi Ltd Pellet bonding inspection and device therefor
JPS57169250A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Bonding method for pellet

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164545A (en) * 1980-05-21 1981-12-17 Hitachi Ltd Pellet bonding inspection and device therefor
JPS57169250A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Bonding method for pellet

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6386528A (ja) * 1986-09-30 1988-04-16 Toshiba Corp ダイボンデイング装置
JPS63138218A (ja) * 1986-11-17 1988-06-10 テクトロニックス・インコーポレイテッド 光検出装置
JPH0239545A (ja) * 1988-07-29 1990-02-08 Sharp Corp ダイボンダ
JP2007180232A (ja) * 2005-12-27 2007-07-12 Toshiba Corp ボンディング装置及び半導体装置の製造方法
JP2011054634A (ja) * 2009-08-31 2011-03-17 Toppan Forms Co Ltd 塗布量検出装置及び塗布量検出方法
JP2025510502A (ja) * 2022-02-25 2025-04-15 アプライド マテリアルズ インコーポレイテッド チップツーウエハアライメント精度のランツーラン最適化のための機械学習及び統合計測

Also Published As

Publication number Publication date
JPH0566015B2 (enExample) 1993-09-20

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