JPH0556666B2 - - Google Patents
Info
- Publication number
- JPH0556666B2 JPH0556666B2 JP59200886A JP20088684A JPH0556666B2 JP H0556666 B2 JPH0556666 B2 JP H0556666B2 JP 59200886 A JP59200886 A JP 59200886A JP 20088684 A JP20088684 A JP 20088684A JP H0556666 B2 JPH0556666 B2 JP H0556666B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- terminal
- electrode
- transistor device
- film transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 36
- 239000010408 film Substances 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 14
- 230000005611 electricity Effects 0.000 description 12
- 230000003068 static effect Effects 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59200886A JPS6179259A (ja) | 1984-09-26 | 1984-09-26 | 薄膜トランジスタ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59200886A JPS6179259A (ja) | 1984-09-26 | 1984-09-26 | 薄膜トランジスタ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6179259A JPS6179259A (ja) | 1986-04-22 |
JPH0556666B2 true JPH0556666B2 (pt) | 1993-08-20 |
Family
ID=16431878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59200886A Granted JPS6179259A (ja) | 1984-09-26 | 1984-09-26 | 薄膜トランジスタ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6179259A (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010147032A1 (ja) * | 2009-06-18 | 2010-12-23 | シャープ株式会社 | 半導体装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0592227A3 (en) * | 1992-10-07 | 1995-01-11 | Sharp Kk | Manufacture of a thin film transistor and production of a liquid crystal display device. |
US5796116A (en) * | 1994-07-27 | 1998-08-18 | Sharp Kabushiki Kaisha | Thin-film semiconductor device including a semiconductor film with high field-effect mobility |
JPH10288950A (ja) * | 1997-04-14 | 1998-10-27 | Casio Comput Co Ltd | 液晶表示装置 |
TW457690B (en) | 1999-08-31 | 2001-10-01 | Fujitsu Ltd | Liquid crystal display |
EP2073255B1 (en) * | 2007-12-21 | 2016-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Diode and display device comprising the diode |
JP5407638B2 (ja) * | 2009-07-28 | 2014-02-05 | セイコーエプソン株式会社 | アクティブマトリクス基板、電気光学装置、及び電子機器 |
JP6022118B2 (ja) | 2014-04-30 | 2016-11-09 | シャープ株式会社 | アクティブマトリクス基板及び当該アクティブマトリクス基板を備える表示装置 |
JP2019197128A (ja) | 2018-05-09 | 2019-11-14 | 三菱電機株式会社 | 表示装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56153588A (en) * | 1980-04-25 | 1981-11-27 | Toshiba Corp | Storage device |
JPS58180054A (ja) * | 1982-04-15 | 1983-10-21 | Seiko Epson Corp | マトリツクス画像表示装置 |
JPS5991479A (ja) * | 1982-11-17 | 1984-05-26 | セイコーエプソン株式会社 | アクテイブマトリクス基板 |
JPS59166984A (ja) * | 1983-03-14 | 1984-09-20 | 三菱電機株式会社 | マトリクス型液晶表示装置の製造方法 |
-
1984
- 1984-09-26 JP JP59200886A patent/JPS6179259A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56153588A (en) * | 1980-04-25 | 1981-11-27 | Toshiba Corp | Storage device |
JPS58180054A (ja) * | 1982-04-15 | 1983-10-21 | Seiko Epson Corp | マトリツクス画像表示装置 |
JPS5991479A (ja) * | 1982-11-17 | 1984-05-26 | セイコーエプソン株式会社 | アクテイブマトリクス基板 |
JPS59166984A (ja) * | 1983-03-14 | 1984-09-20 | 三菱電機株式会社 | マトリクス型液晶表示装置の製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010147032A1 (ja) * | 2009-06-18 | 2010-12-23 | シャープ株式会社 | 半導体装置 |
JP5406295B2 (ja) * | 2009-06-18 | 2014-02-05 | シャープ株式会社 | 半導体装置 |
US8921857B2 (en) | 2009-06-18 | 2014-12-30 | Sharp Kabushiki Kaisha | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6179259A (ja) | 1986-04-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
EXPY | Cancellation because of completion of term | ||
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |