JPH0527996B2 - - Google Patents
Info
- Publication number
- JPH0527996B2 JPH0527996B2 JP1013185A JP1013185A JPH0527996B2 JP H0527996 B2 JPH0527996 B2 JP H0527996B2 JP 1013185 A JP1013185 A JP 1013185A JP 1013185 A JP1013185 A JP 1013185A JP H0527996 B2 JPH0527996 B2 JP H0527996B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- source
- semiconductor substrate
- metal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 20
- 239000012535 impurity Substances 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 14
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/4175—Source or drain electrodes for field effect devices for lateral devices where the connection to the source or drain region is done through at least one part of the semiconductor substrate thickness, e.g. with connecting sink or with via-hole
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1087—Substrate region of field-effect devices of field-effect transistors with insulated gate characterised by the contact structure of the substrate region, e.g. for controlling or preventing bipolar effect
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1013185A JPS61170068A (ja) | 1985-01-23 | 1985-01-23 | Mosトランジスタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1013185A JPS61170068A (ja) | 1985-01-23 | 1985-01-23 | Mosトランジスタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61170068A JPS61170068A (ja) | 1986-07-31 |
JPH0527996B2 true JPH0527996B2 (fr) | 1993-04-22 |
Family
ID=11741730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1013185A Granted JPS61170068A (ja) | 1985-01-23 | 1985-01-23 | Mosトランジスタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61170068A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5023196A (en) * | 1990-01-29 | 1991-06-11 | Motorola Inc. | Method for forming a MOSFET with substrate source contact |
EP0469158B1 (fr) * | 1990-02-22 | 1996-12-27 | Nkk Corporation | Detecteur magnetique de defauts pour mince bande en acier |
US5512821A (en) * | 1991-06-04 | 1996-04-30 | Nkk Corporation | Method and apparatus for magnetically detecting defects in an object with compensation for magnetic field shift by means of a compensating coil |
-
1985
- 1985-01-23 JP JP1013185A patent/JPS61170068A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61170068A (ja) | 1986-07-31 |
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