JPH0513017Y2 - - Google Patents

Info

Publication number
JPH0513017Y2
JPH0513017Y2 JP1985152649U JP15264985U JPH0513017Y2 JP H0513017 Y2 JPH0513017 Y2 JP H0513017Y2 JP 1985152649 U JP1985152649 U JP 1985152649U JP 15264985 U JP15264985 U JP 15264985U JP H0513017 Y2 JPH0513017 Y2 JP H0513017Y2
Authority
JP
Japan
Prior art keywords
gate electrode
gate
metal layer
conductive metal
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985152649U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6260049U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985152649U priority Critical patent/JPH0513017Y2/ja
Publication of JPS6260049U publication Critical patent/JPS6260049U/ja
Application granted granted Critical
Publication of JPH0513017Y2 publication Critical patent/JPH0513017Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985152649U 1985-10-04 1985-10-04 Expired - Lifetime JPH0513017Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985152649U JPH0513017Y2 (en:Method) 1985-10-04 1985-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985152649U JPH0513017Y2 (en:Method) 1985-10-04 1985-10-04

Publications (2)

Publication Number Publication Date
JPS6260049U JPS6260049U (en:Method) 1987-04-14
JPH0513017Y2 true JPH0513017Y2 (en:Method) 1993-04-06

Family

ID=31070819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985152649U Expired - Lifetime JPH0513017Y2 (en:Method) 1985-10-04 1985-10-04

Country Status (1)

Country Link
JP (1) JPH0513017Y2 (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2548160B2 (ja) * 1987-01-09 1996-10-30 松下電子工業株式会社 半導体装置
WO2004107383A1 (ja) * 2003-01-09 2004-12-09 Matsushita Electric Industrial Co., Ltd. Misfet
US8367508B2 (en) * 2010-04-09 2013-02-05 International Business Machines Corporation Self-aligned contacts for field effect transistor devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113375A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Insulated gate type field effect semiconductor device
JPS6089974A (ja) * 1983-10-24 1985-05-20 Toshiba Corp 半導体装置

Also Published As

Publication number Publication date
JPS6260049U (en:Method) 1987-04-14

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