JPH0475664B2 - - Google Patents
Info
- Publication number
- JPH0475664B2 JPH0475664B2 JP55176824A JP17682480A JPH0475664B2 JP H0475664 B2 JPH0475664 B2 JP H0475664B2 JP 55176824 A JP55176824 A JP 55176824A JP 17682480 A JP17682480 A JP 17682480A JP H0475664 B2 JPH0475664 B2 JP H0475664B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- channel mos
- mos transistors
- basic
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 21
- 239000010410 layer Substances 0.000 description 16
- 238000009792 diffusion process Methods 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/118—Masterslice integrated circuits
- H01L27/11803—Masterslice integrated circuits using field effect technology
- H01L27/11807—CMOS gate arrays
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17682480A JPS57100746A (en) | 1980-12-15 | 1980-12-15 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17682480A JPS57100746A (en) | 1980-12-15 | 1980-12-15 | Semiconductor integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57100746A JPS57100746A (en) | 1982-06-23 |
JPH0475664B2 true JPH0475664B2 (fr) | 1992-12-01 |
Family
ID=16020477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17682480A Granted JPS57100746A (en) | 1980-12-15 | 1980-12-15 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57100746A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6047441A (ja) * | 1983-08-26 | 1985-03-14 | Fujitsu Ltd | 半導体集積回路 |
JPS6139549A (ja) * | 1984-07-30 | 1986-02-25 | Hitachi Ltd | 半導体集積回路装置 |
JP2614844B2 (ja) * | 1986-02-28 | 1997-05-28 | 日本電気アイシーマイコンシステム株式会社 | 半導体集積回路 |
DE69034088T2 (de) * | 1989-04-19 | 2004-02-05 | Seiko Epson Corp. | Halbleiteranordnung |
EP0523967B1 (fr) * | 1991-07-18 | 1999-09-22 | Fujitsu Limited | Arrangement de transistors pour former une cellule de base dans un dispositif de circuit intégré à semi-conducteur du type pré-diffusé et dispositif de circuit intégré à semi-conducteur du type pré-diffusé |
JP2671835B2 (ja) * | 1994-10-20 | 1997-11-05 | 日本電気株式会社 | スパッタ装置とその装置を用いた半導体装置の製造方法 |
-
1980
- 1980-12-15 JP JP17682480A patent/JPS57100746A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57100746A (en) | 1982-06-23 |
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