JPH0454390B2 - - Google Patents

Info

Publication number
JPH0454390B2
JPH0454390B2 JP57164664A JP16466482A JPH0454390B2 JP H0454390 B2 JPH0454390 B2 JP H0454390B2 JP 57164664 A JP57164664 A JP 57164664A JP 16466482 A JP16466482 A JP 16466482A JP H0454390 B2 JPH0454390 B2 JP H0454390B2
Authority
JP
Japan
Prior art keywords
film
gate
polysilicon
insulating film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57164664A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5952879A (ja
Inventor
Jun Fukuchi
Seiji Ueda
Akira Takeishi
Kunihiko Asahi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP57164664A priority Critical patent/JPS5952879A/ja
Publication of JPS5952879A publication Critical patent/JPS5952879A/ja
Publication of JPH0454390B2 publication Critical patent/JPH0454390B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
JP57164664A 1982-09-20 1982-09-20 半導体装置の製造方法 Granted JPS5952879A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57164664A JPS5952879A (ja) 1982-09-20 1982-09-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57164664A JPS5952879A (ja) 1982-09-20 1982-09-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5952879A JPS5952879A (ja) 1984-03-27
JPH0454390B2 true JPH0454390B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-31

Family

ID=15797466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57164664A Granted JPS5952879A (ja) 1982-09-20 1982-09-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5952879A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61134196U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-08 1986-08-21
JPS61139091U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-18 1986-08-28
JPS61239659A (ja) * 1985-04-16 1986-10-24 Nec Corp Ｍｉｓ型半導体記憶装置の製造方法
JP2503406B2 (ja) * 1985-12-20 1996-06-05 日本電気株式会社 半導体装置の製造方法
US5225378A (en) * 1990-11-16 1993-07-06 Tokyo Electron Limited Method of forming a phosphorus doped silicon film

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134678A (en) * 1974-09-18 1976-03-24 Matsushita Electric Ind Co Ltd Handotaisochi no seizohoho
JPS53120389A (en) * 1977-03-30 1978-10-20 Fujitsu Ltd Production of semiconductor device
JPS5430785A (en) * 1977-08-12 1979-03-07 Fujitsu Ltd Manufacture of semiconductor device
JPS603779B2 (ja) * 1978-06-07 1985-01-30 松下電器産業株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5952879A (ja) 1984-03-27

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