JPS53120389A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53120389A
JPS53120389A JP3628877A JP3628877A JPS53120389A JP S53120389 A JPS53120389 A JP S53120389A JP 3628877 A JP3628877 A JP 3628877A JP 3628877 A JP3628877 A JP 3628877A JP S53120389 A JPS53120389 A JP S53120389A
Authority
JP
Japan
Prior art keywords
production
polycrystalline
semiconductor device
electrodes
capacity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3628877A
Other languages
Japanese (ja)
Inventor
Kazunari Shirai
Takashi Yabu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3628877A priority Critical patent/JPS53120389A/en
Publication of JPS53120389A publication Critical patent/JPS53120389A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Abstract

PURPOSE:To make insulation and isolation of polycrystalline Si electrodes for capacity and polycrystalline Si gate electrodes for transfer sufficient by covering the edge portions of the polycrystalline Si electrodes for capacity with a thick SiO2 film.
JP3628877A 1977-03-30 1977-03-30 Production of semiconductor device Pending JPS53120389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3628877A JPS53120389A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3628877A JPS53120389A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53120389A true JPS53120389A (en) 1978-10-20

Family

ID=12465593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3628877A Pending JPS53120389A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53120389A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952879A (en) * 1982-09-20 1984-03-27 Matsushita Electronics Corp Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952879A (en) * 1982-09-20 1984-03-27 Matsushita Electronics Corp Manufacture of semiconductor device
JPH0454390B2 (en) * 1982-09-20 1992-08-31 Matsushita Electronics Corp

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