JPH0313304B2 - - Google Patents

Info

Publication number
JPH0313304B2
JPH0313304B2 JP55099956A JP9995680A JPH0313304B2 JP H0313304 B2 JPH0313304 B2 JP H0313304B2 JP 55099956 A JP55099956 A JP 55099956A JP 9995680 A JP9995680 A JP 9995680A JP H0313304 B2 JPH0313304 B2 JP H0313304B2
Authority
JP
Japan
Prior art keywords
thin plate
pattern
mask
thin
reinforcing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55099956A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5726163A (en
Inventor
Minoru Tanaka
Hitoshi Kubota
Susumu Aiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9995680A priority Critical patent/JPS5726163A/ja
Publication of JPS5726163A publication Critical patent/JPS5726163A/ja
Publication of JPH0313304B2 publication Critical patent/JPH0313304B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP9995680A 1980-07-23 1980-07-23 Mask for forming thin film and its manufacture Granted JPS5726163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9995680A JPS5726163A (en) 1980-07-23 1980-07-23 Mask for forming thin film and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9995680A JPS5726163A (en) 1980-07-23 1980-07-23 Mask for forming thin film and its manufacture

Publications (2)

Publication Number Publication Date
JPS5726163A JPS5726163A (en) 1982-02-12
JPH0313304B2 true JPH0313304B2 (US20030199744A1-20031023-C00003.png) 1991-02-22

Family

ID=14261136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9995680A Granted JPS5726163A (en) 1980-07-23 1980-07-23 Mask for forming thin film and its manufacture

Country Status (1)

Country Link
JP (1) JPS5726163A (US20030199744A1-20031023-C00003.png)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170074A (ja) * 1982-03-31 1983-10-06 Hoxan Corp 太陽電池のダイレクトマスキング方式による表面電極蒸着形成方法とその蒸着形成用具
JP4364957B2 (ja) * 1998-10-22 2009-11-18 北陸電気工業株式会社 蒸着マスク
KR100469252B1 (ko) * 2002-04-12 2005-02-02 엘지전자 주식회사 쉐도우 마스크 및 그를 이용한 풀칼라 유기 ｅｌ 표시소자
KR100813832B1 (ko) * 2002-05-31 2008-03-17 삼성에스디아이 주식회사 증착용 마스크 프레임 조립체와 이의 제조방법
JP4126648B2 (ja) * 2002-07-01 2008-07-30 日立金属株式会社 メタルマスク用部材の製造方法
JP4170179B2 (ja) * 2003-01-09 2008-10-22 株式会社 日立ディスプレイズ 有機ｅｌパネルの製造方法および有機ｅｌパネル
JP4547130B2 (ja) * 2003-01-30 2010-09-22 株式会社アルバック 蒸着マスクの製造方法
JP2008041327A (ja) * 2006-08-02 2008-02-21 Showa Denko Kk マスクおよびマスクを使用した表示素子ならびにマスクを使用した表示素子の製造方法
JP5379717B2 (ja) * 2010-02-24 2013-12-25 株式会社アルバック 蒸着用マスク
KR101442941B1 (ko) * 2010-03-09 2014-09-22 샤프 가부시키가이샤 증착 마스크, 증착장치 및 증착방법
JP6051876B2 (ja) * 2013-01-11 2016-12-27 大日本印刷株式会社 メタルマスクおよびメタルマスクの製造方法
JP6468480B2 (ja) * 2014-01-31 2019-02-13 大日本印刷株式会社 蒸着マスクの製造方法および蒸着マスク
JP6515520B2 (ja) * 2014-12-15 2019-05-22 大日本印刷株式会社 蒸着マスクの製造方法、蒸着マスクを作製するために用いられる金属板および蒸着マスク
KR101674506B1 (ko) * 2015-08-10 2016-11-10 에이피시스템 주식회사 복합 가공 방법을 이용한 섀도우 마스크의 제조방법 및 이에 의해 제조된 섀도우 마스크
US10727409B2 (en) * 2016-09-13 2020-07-28 Lg Innotek Co., Ltd. Metal plate for deposition mask, and deposition mask and manufacturing method therefor
US11773477B2 (en) 2018-12-25 2023-10-03 Dai Nippon Printing Co., Ltd. Deposition mask
JP7406717B2 (ja) * 2018-12-25 2023-12-28 大日本印刷株式会社 蒸着マスク

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4313689Y1 (US20030199744A1-20031023-C00003.png) * 1965-10-28 1968-06-11
JPS4727897U (US20030199744A1-20031023-C00003.png) * 1971-04-15 1972-11-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4313689Y1 (US20030199744A1-20031023-C00003.png) * 1965-10-28 1968-06-11
JPS4727897U (US20030199744A1-20031023-C00003.png) * 1971-04-15 1972-11-29

Also Published As

Publication number Publication date
JPS5726163A (en) 1982-02-12

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