JPH0248202Y2 - - Google Patents
Info
- Publication number
- JPH0248202Y2 JPH0248202Y2 JP1985155792U JP15579285U JPH0248202Y2 JP H0248202 Y2 JPH0248202 Y2 JP H0248202Y2 JP 1985155792 U JP1985155792 U JP 1985155792U JP 15579285 U JP15579285 U JP 15579285U JP H0248202 Y2 JPH0248202 Y2 JP H0248202Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vacuum chuck
- workpiece
- receiving
- receiving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985155792U JPH0248202Y2 ( ) | 1985-10-14 | 1985-10-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985155792U JPH0248202Y2 ( ) | 1985-10-14 | 1985-10-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6265142U JPS6265142U ( ) | 1987-04-22 |
JPH0248202Y2 true JPH0248202Y2 ( ) | 1990-12-18 |
Family
ID=31076813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985155792U Expired JPH0248202Y2 ( ) | 1985-10-14 | 1985-10-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0248202Y2 ( ) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2801489B2 (ja) * | 1992-12-17 | 1998-09-21 | 古河電気工業株式会社 | リングフレーム自動洗浄装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994353A (ja) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | 半導体ウエハ保持装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58129638U (ja) * | 1982-02-24 | 1983-09-02 | 富士通株式会社 | ウエハ支持機構 |
-
1985
- 1985-10-14 JP JP1985155792U patent/JPH0248202Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994353A (ja) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | 半導体ウエハ保持装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6265142U ( ) | 1987-04-22 |
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