JPS6265142U - - Google Patents

Info

Publication number
JPS6265142U
JPS6265142U JP15579285U JP15579285U JPS6265142U JP S6265142 U JPS6265142 U JP S6265142U JP 15579285 U JP15579285 U JP 15579285U JP 15579285 U JP15579285 U JP 15579285U JP S6265142 U JPS6265142 U JP S6265142U
Authority
JP
Japan
Prior art keywords
workpiece
receiving
vacuum chuck
jig
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15579285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248202Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985155792U priority Critical patent/JPH0248202Y2/ja
Publication of JPS6265142U publication Critical patent/JPS6265142U/ja
Application granted granted Critical
Publication of JPH0248202Y2 publication Critical patent/JPH0248202Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP1985155792U 1985-10-14 1985-10-14 Expired JPH0248202Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985155792U JPH0248202Y2 ( ) 1985-10-14 1985-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985155792U JPH0248202Y2 ( ) 1985-10-14 1985-10-14

Publications (2)

Publication Number Publication Date
JPS6265142U true JPS6265142U ( ) 1987-04-22
JPH0248202Y2 JPH0248202Y2 ( ) 1990-12-18

Family

ID=31076813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985155792U Expired JPH0248202Y2 ( ) 1985-10-14 1985-10-14

Country Status (1)

Country Link
JP (1) JPH0248202Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188304A (ja) * 1992-12-17 1994-07-08 Furukawa Electric Co Ltd:The リングフレーム自動洗浄装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129638U (ja) * 1982-02-24 1983-09-02 富士通株式会社 ウエハ支持機構
JPS5994353A (ja) * 1982-11-19 1984-05-31 Toshiba Corp 半導体ウエハ保持装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129638U (ja) * 1982-02-24 1983-09-02 富士通株式会社 ウエハ支持機構
JPS5994353A (ja) * 1982-11-19 1984-05-31 Toshiba Corp 半導体ウエハ保持装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188304A (ja) * 1992-12-17 1994-07-08 Furukawa Electric Co Ltd:The リングフレーム自動洗浄装置

Also Published As

Publication number Publication date
JPH0248202Y2 ( ) 1990-12-18

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