JPS6265142U - - Google Patents
Info
- Publication number
- JPS6265142U JPS6265142U JP15579285U JP15579285U JPS6265142U JP S6265142 U JPS6265142 U JP S6265142U JP 15579285 U JP15579285 U JP 15579285U JP 15579285 U JP15579285 U JP 15579285U JP S6265142 U JPS6265142 U JP S6265142U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- receiving
- vacuum chuck
- jig
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding Of Workpieces (AREA)
Description
第1図は、本考案の一実施例を示す受出し治具
の側面断面図、第2図は、従来の受出し方法を示
す側面断面図である。
1……真空チヤツク、4……ウエハ、9……受
出し治具、10……溝、11……受板、12……
回転軸。
FIG. 1 is a side sectional view of a receiving jig showing an embodiment of the present invention, and FIG. 2 is a side sectional view showing a conventional receiving method. 1...Vacuum chuck, 4...Wafer, 9...Receiving jig, 10...Groove, 11...Success plate, 12...
Axis of rotation.
Claims (1)
加工物を真空チヤツクから受出すための治具であ
つて、真空チヤツクの下方に回転可能に配量され
た回転軸と、この回転軸に結合され、回転軸側の
端部に被加工物の一端を収容するコの字形の溝が
形成され、かつ被加工物に接したとき、被加工物
の全面に接するように形成された受板を設けたこ
とを特徴とする被加工物の受出し治具。 This is a jig for receiving a thin plate-shaped workpiece supported approximately vertically on the vacuum chuck from the vacuum chuck, and is connected to a rotary shaft rotatably disposed below the vacuum chuck and connected to this rotary shaft. A U-shaped groove is formed at the end on the rotating shaft side to accommodate one end of the workpiece, and a receiving plate is formed so as to contact the entire surface of the workpiece when it comes into contact with the workpiece. A workpiece receiving jig characterized by being provided with a workpiece receiving jig.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985155792U JPH0248202Y2 (en) | 1985-10-14 | 1985-10-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985155792U JPH0248202Y2 (en) | 1985-10-14 | 1985-10-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6265142U true JPS6265142U (en) | 1987-04-22 |
JPH0248202Y2 JPH0248202Y2 (en) | 1990-12-18 |
Family
ID=31076813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985155792U Expired JPH0248202Y2 (en) | 1985-10-14 | 1985-10-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0248202Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06188304A (en) * | 1992-12-17 | 1994-07-08 | Furukawa Electric Co Ltd:The | Automatic cleaning apparatus of ring frame |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58129638U (en) * | 1982-02-24 | 1983-09-02 | 富士通株式会社 | Wafer support mechanism |
JPS5994353A (en) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | Semiconductor wafer holding device |
-
1985
- 1985-10-14 JP JP1985155792U patent/JPH0248202Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58129638U (en) * | 1982-02-24 | 1983-09-02 | 富士通株式会社 | Wafer support mechanism |
JPS5994353A (en) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | Semiconductor wafer holding device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06188304A (en) * | 1992-12-17 | 1994-07-08 | Furukawa Electric Co Ltd:The | Automatic cleaning apparatus of ring frame |
Also Published As
Publication number | Publication date |
---|---|
JPH0248202Y2 (en) | 1990-12-18 |
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