JPH0234823Y2 - - Google Patents

Info

Publication number
JPH0234823Y2
JPH0234823Y2 JP1985055244U JP5524485U JPH0234823Y2 JP H0234823 Y2 JPH0234823 Y2 JP H0234823Y2 JP 1985055244 U JP1985055244 U JP 1985055244U JP 5524485 U JP5524485 U JP 5524485U JP H0234823 Y2 JPH0234823 Y2 JP H0234823Y2
Authority
JP
Japan
Prior art keywords
substrate
tank
surface treatment
grooves
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985055244U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61171244U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985055244U priority Critical patent/JPH0234823Y2/ja
Publication of JPS61171244U publication Critical patent/JPS61171244U/ja
Application granted granted Critical
Publication of JPH0234823Y2 publication Critical patent/JPH0234823Y2/ja
Expired legal-status Critical Current

Links

JP1985055244U 1985-04-12 1985-04-12 Expired JPH0234823Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Publications (2)

Publication Number Publication Date
JPS61171244U JPS61171244U (enrdf_load_stackoverflow) 1986-10-24
JPH0234823Y2 true JPH0234823Y2 (enrdf_load_stackoverflow) 1990-09-19

Family

ID=30577735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985055244U Expired JPH0234823Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPH0234823Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0626210B2 (ja) * 1989-06-29 1994-04-06 東邦化成株式会社 ウェット処理マシン

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817894U (enrdf_load_stackoverflow) * 1971-07-12 1973-02-28
JPS544668U (enrdf_load_stackoverflow) * 1977-06-14 1979-01-12
JPS5494274A (en) * 1978-01-10 1979-07-25 Toshiba Corp Liquid terating device of semiconductor wafers
JPS5929804Y2 (ja) * 1980-08-15 1984-08-27 ニチデン機械株式会社 溶接機
JPS5752138A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Etching device for semiconductor substrate
JPS5764740A (en) * 1980-10-09 1982-04-20 Nippon Telegr & Teleph Corp <Ntt> Developing device
JPS584143A (ja) * 1981-06-30 1983-01-11 Fujitsu Ltd ポジ・レジスト膜の現像方法
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Also Published As

Publication number Publication date
JPS61171244U (enrdf_load_stackoverflow) 1986-10-24

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