JPS61171244U - - Google Patents

Info

Publication number
JPS61171244U
JPS61171244U JP5524485U JP5524485U JPS61171244U JP S61171244 U JPS61171244 U JP S61171244U JP 5524485 U JP5524485 U JP 5524485U JP 5524485 U JP5524485 U JP 5524485U JP S61171244 U JPS61171244 U JP S61171244U
Authority
JP
Japan
Prior art keywords
processing
substrate
tank
holding rod
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5524485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234823Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985055244U priority Critical patent/JPH0234823Y2/ja
Publication of JPS61171244U publication Critical patent/JPS61171244U/ja
Application granted granted Critical
Publication of JPH0234823Y2 publication Critical patent/JPH0234823Y2/ja
Expired legal-status Critical Current

Links

JP1985055244U 1985-04-12 1985-04-12 Expired JPH0234823Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Publications (2)

Publication Number Publication Date
JPS61171244U true JPS61171244U (enrdf_load_stackoverflow) 1986-10-24
JPH0234823Y2 JPH0234823Y2 (enrdf_load_stackoverflow) 1990-09-19

Family

ID=30577735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985055244U Expired JPH0234823Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPH0234823Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332023A (ja) * 1989-06-29 1991-02-12 Toho Kasei Kk ウェット処理マシン

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817894U (enrdf_load_stackoverflow) * 1971-07-12 1973-02-28
JPS544668U (enrdf_load_stackoverflow) * 1977-06-14 1979-01-12
JPS5494274A (en) * 1978-01-10 1979-07-25 Toshiba Corp Liquid terating device of semiconductor wafers
JPS5744685U (enrdf_load_stackoverflow) * 1980-08-15 1982-03-11
JPS5752138A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Etching device for semiconductor substrate
JPS5764740A (en) * 1980-10-09 1982-04-20 Nippon Telegr & Teleph Corp <Ntt> Developing device
JPS584143A (ja) * 1981-06-30 1983-01-11 Fujitsu Ltd ポジ・レジスト膜の現像方法
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817894U (enrdf_load_stackoverflow) * 1971-07-12 1973-02-28
JPS544668U (enrdf_load_stackoverflow) * 1977-06-14 1979-01-12
JPS5494274A (en) * 1978-01-10 1979-07-25 Toshiba Corp Liquid terating device of semiconductor wafers
JPS5744685U (enrdf_load_stackoverflow) * 1980-08-15 1982-03-11
JPS5752138A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Etching device for semiconductor substrate
JPS5764740A (en) * 1980-10-09 1982-04-20 Nippon Telegr & Teleph Corp <Ntt> Developing device
JPS584143A (ja) * 1981-06-30 1983-01-11 Fujitsu Ltd ポジ・レジスト膜の現像方法
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332023A (ja) * 1989-06-29 1991-02-12 Toho Kasei Kk ウェット処理マシン

Also Published As

Publication number Publication date
JPH0234823Y2 (enrdf_load_stackoverflow) 1990-09-19

Similar Documents

Publication Publication Date Title
JPS61171244U (enrdf_load_stackoverflow)
JPS59126835U (ja) カ−ドホルダ−付き容器
JPH0178945U (enrdf_load_stackoverflow)
JPS6127785U (ja) コンテナ船
JPS5835967U (ja) 粘着剤の塗布装置
JPS61165104U (enrdf_load_stackoverflow)
JPS5913249U (ja) 液体容器
JPS59156619U (ja) 液体混和皿
JPS60142017U (ja) 切断機の刃物交換装置
JPS5815866U (ja) 爪揚子容器を附設した携帯用ライタ−
JPS6351745U (enrdf_load_stackoverflow)
JPS6081840U (ja) チユ−ブ押出し口
JPS60178729U (ja) 空気清浄乃至加湿器の駆動システム
JPS63106657U (enrdf_load_stackoverflow)
JPS621853U (enrdf_load_stackoverflow)
JPS5933666U (ja) 蓄電池
JPS5940833U (ja) テ−プ状物体固着具
JPS58171074U (ja) 液体用容器
JPS5959194U (ja) トイレツトペ−パロ−ルのホルダ−
JPS62153242U (enrdf_load_stackoverflow)
JPS62164165U (enrdf_load_stackoverflow)
JPS5836896U (ja) 尿器
JPS6291193U (enrdf_load_stackoverflow)
JPS5855039U (ja) トイレツトペ−パ−ホルダ−
JPS6322750U (enrdf_load_stackoverflow)