JPH0325405Y2 - - Google Patents
Info
- Publication number
- JPH0325405Y2 JPH0325405Y2 JP95089U JP95089U JPH0325405Y2 JP H0325405 Y2 JPH0325405 Y2 JP H0325405Y2 JP 95089 U JP95089 U JP 95089U JP 95089 U JP95089 U JP 95089U JP H0325405 Y2 JPH0325405 Y2 JP H0325405Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- wafers
- processing
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 169
- 238000012545 processing Methods 0.000 claims description 79
- 230000003028 elevating effect Effects 0.000 claims description 59
- 238000012546 transfer Methods 0.000 claims description 56
- 238000004381 surface treatment Methods 0.000 claims description 32
- 238000003860 storage Methods 0.000 claims description 14
- 230000004308 accommodation Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 230000032258 transport Effects 0.000 description 50
- 238000007781 pre-processing Methods 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 238000007654 immersion Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP95089U JPH0325405Y2 (enrdf_load_stackoverflow) | 1989-01-09 | 1989-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP95089U JPH0325405Y2 (enrdf_load_stackoverflow) | 1989-01-09 | 1989-01-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01121931U JPH01121931U (enrdf_load_stackoverflow) | 1989-08-18 |
| JPH0325405Y2 true JPH0325405Y2 (enrdf_load_stackoverflow) | 1991-06-03 |
Family
ID=31200415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP95089U Expired JPH0325405Y2 (enrdf_load_stackoverflow) | 1989-01-09 | 1989-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325405Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-01-09 JP JP95089U patent/JPH0325405Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01121931U (enrdf_load_stackoverflow) | 1989-08-18 |
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