JPH01121931U - - Google Patents
Info
- Publication number
- JPH01121931U JPH01121931U JP95089U JP95089U JPH01121931U JP H01121931 U JPH01121931 U JP H01121931U JP 95089 U JP95089 U JP 95089U JP 95089 U JP95089 U JP 95089U JP H01121931 U JPH01121931 U JP H01121931U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafers
- wafer
- elevating plate
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 33
- 230000003028 elevating effect Effects 0.000 claims description 14
- 230000004308 accommodation Effects 0.000 claims description 6
- 238000004381 surface treatment Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000007654 immersion Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP95089U JPH0325405Y2 (enrdf_load_stackoverflow) | 1989-01-09 | 1989-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP95089U JPH0325405Y2 (enrdf_load_stackoverflow) | 1989-01-09 | 1989-01-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01121931U true JPH01121931U (enrdf_load_stackoverflow) | 1989-08-18 |
| JPH0325405Y2 JPH0325405Y2 (enrdf_load_stackoverflow) | 1991-06-03 |
Family
ID=31200415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP95089U Expired JPH0325405Y2 (enrdf_load_stackoverflow) | 1989-01-09 | 1989-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325405Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-01-09 JP JP95089U patent/JPH0325405Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325405Y2 (enrdf_load_stackoverflow) | 1991-06-03 |
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