JP7574845B2 - エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ - Google Patents

エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ Download PDF

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JP7574845B2
JP7574845B2 JP2022512584A JP2022512584A JP7574845B2 JP 7574845 B2 JP7574845 B2 JP 7574845B2 JP 2022512584 A JP2022512584 A JP 2022512584A JP 2022512584 A JP2022512584 A JP 2022512584A JP 7574845 B2 JP7574845 B2 JP 7574845B2
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film
chromium
reflective optical
encoder
optical scale
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JPWO2021201024A1 (https=
Inventor
伸介 中澤
剛史 戸田
直哉 小田
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
JP2022512584A 2020-03-31 2021-03-30 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ Active JP7574845B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024181536A JP7782644B2 (ja) 2020-03-31 2024-10-17 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP2025205347A JP2026035718A (ja) 2020-03-31 2025-11-27 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020063476 2020-03-31
JP2020063476 2020-03-31
PCT/JP2021/013676 WO2021201024A1 (ja) 2020-03-31 2021-03-30 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

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JP2024181536A Division JP7782644B2 (ja) 2020-03-31 2024-10-17 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Publications (2)

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JPWO2021201024A1 JPWO2021201024A1 (https=) 2021-10-07
JP7574845B2 true JP7574845B2 (ja) 2024-10-29

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JP2022512584A Active JP7574845B2 (ja) 2020-03-31 2021-03-30 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP2024181536A Active JP7782644B2 (ja) 2020-03-31 2024-10-17 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP2025205347A Pending JP2026035718A (ja) 2020-03-31 2025-11-27 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

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JP2025205347A Pending JP2026035718A (ja) 2020-03-31 2025-11-27 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Country Status (6)

Country Link
US (3) US12188795B2 (https=)
EP (2) EP4130683B1 (https=)
JP (3) JP7574845B2 (https=)
CN (2) CN114450553A (https=)
TW (3) TWI796662B (https=)
WO (1) WO2021201024A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3111979B1 (fr) * 2020-06-30 2023-03-24 Codechamp Revetement reflechissant des moyens de reflexion d’un codeur optique et codeur optique ainsi realise
US20240085219A1 (en) * 2021-02-09 2024-03-14 Renishaw Plc Rotary encoder
WO2024029490A1 (ja) * 2022-08-02 2024-02-08 大日本印刷株式会社 エンコーダ用反射型光学式スケール、反射型光学式エンコーダ、エンコーダ用反射型光学式スケールの製造方法、およびエンコーダ用反射型光学式スケール多面付け体
TWI895801B (zh) * 2022-09-22 2025-09-01 日商大日本印刷股份有限公司 反射型光學式編碼器及編碼器用反射型光學尺用積層體
DE102024002189A1 (de) * 2024-07-05 2026-01-08 Dr. Johannes Heidenhain Gmbh Maßverkörperung und optische Positionsmesseinrichtung mit dieser Maßverkörperung

Citations (3)

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JP2001296146A (ja) 2000-03-10 2001-10-26 Dr Johannes Heidenhain Gmbh 反射測定目盛およびこの測定目盛の製造方法
WO2013100061A1 (ja) 2011-12-28 2013-07-04 株式会社ニコン エンコーダ、エンコーダ用スケールの製造方法、エンコーダの製造方法及び駆動装置
JP2019158710A (ja) 2018-03-15 2019-09-19 セイコーエプソン株式会社 エンコーダー用光学式スケールおよび光学式エンコーダー

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JPS57151945A (en) * 1981-03-17 1982-09-20 Hoya Corp Photomask blank and its manufacture
JPS58184908A (ja) * 1982-04-23 1983-10-28 Sotsukishiya:Kk 円板形光減衰器
JPS61197510U (https=) 1985-05-31 1986-12-10
JPH04211202A (ja) * 1990-03-19 1992-08-03 Canon Inc 反射型回折格子および該回折格子を用いた装置
CN1032745C (zh) * 1991-06-17 1996-09-11 深圳伟兴镀膜玻璃有限公司 四层膜系镀膜玻璃
JPH07113660A (ja) * 1993-10-13 1995-05-02 Matsushita Electric Ind Co Ltd 光学式エンコーダ
JPH07305163A (ja) * 1994-05-10 1995-11-21 Itochu Fine Chem Kk 低反射クロム系膜
JPH0836171A (ja) * 1994-07-22 1996-02-06 A G Technol Kk 液晶表示装置用遮光膜および液晶表示装置
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Publication number Priority date Publication date Assignee Title
JP2001296146A (ja) 2000-03-10 2001-10-26 Dr Johannes Heidenhain Gmbh 反射測定目盛およびこの測定目盛の製造方法
WO2013100061A1 (ja) 2011-12-28 2013-07-04 株式会社ニコン エンコーダ、エンコーダ用スケールの製造方法、エンコーダの製造方法及び駆動装置
JP2019158710A (ja) 2018-03-15 2019-09-19 セイコーエプソン株式会社 エンコーダー用光学式スケールおよび光学式エンコーダー

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Publication number Publication date
JP2026035718A (ja) 2026-03-04
EP4130683B1 (en) 2026-01-21
WO2021201024A1 (ja) 2021-10-07
JPWO2021201024A1 (https=) 2021-10-07
US20240393143A1 (en) 2024-11-28
EP4130683A4 (en) 2023-08-23
TWI796662B (zh) 2023-03-21
US20230126475A1 (en) 2023-04-27
US12188795B2 (en) 2025-01-07
CN114674233A (zh) 2022-06-28
TW202447177A (zh) 2024-12-01
EP4707746A2 (en) 2026-03-11
JP2025011275A (ja) 2025-01-23
EP4130683A1 (en) 2023-02-08
JP7782644B2 (ja) 2025-12-09
TWI856594B (zh) 2024-09-21
TWI907024B (zh) 2025-12-01
TW202332884A (zh) 2023-08-16
TW202142837A (zh) 2021-11-16
US20250116537A1 (en) 2025-04-10
CN114450553A (zh) 2022-05-06

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