JPWO2021201024A1 - - Google Patents

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Publication number
JPWO2021201024A1
JPWO2021201024A1 JP2022512584A JP2022512584A JPWO2021201024A1 JP WO2021201024 A1 JPWO2021201024 A1 JP WO2021201024A1 JP 2022512584 A JP2022512584 A JP 2022512584A JP 2022512584 A JP2022512584 A JP 2022512584A JP WO2021201024 A1 JPWO2021201024 A1 JP WO2021201024A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022512584A
Other languages
Japanese (ja)
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JP7574845B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JPWO2021201024A1 publication Critical patent/JPWO2021201024A1/ja
Priority to JP2024181536A priority Critical patent/JP7782644B2/ja
Application granted granted Critical
Publication of JP7574845B2 publication Critical patent/JP7574845B2/ja
Priority to JP2025205347A priority patent/JP2026035718A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
JP2022512584A 2020-03-31 2021-03-30 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ Active JP7574845B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024181536A JP7782644B2 (ja) 2020-03-31 2024-10-17 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP2025205347A JP2026035718A (ja) 2020-03-31 2025-11-27 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020063476 2020-03-31
JP2020063476 2020-03-31
PCT/JP2021/013676 WO2021201024A1 (ja) 2020-03-31 2021-03-30 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024181536A Division JP7782644B2 (ja) 2020-03-31 2024-10-17 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Publications (2)

Publication Number Publication Date
JPWO2021201024A1 true JPWO2021201024A1 (https=) 2021-10-07
JP7574845B2 JP7574845B2 (ja) 2024-10-29

Family

ID=77930008

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2022512584A Active JP7574845B2 (ja) 2020-03-31 2021-03-30 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP2024181536A Active JP7782644B2 (ja) 2020-03-31 2024-10-17 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP2025205347A Pending JP2026035718A (ja) 2020-03-31 2025-11-27 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2024181536A Active JP7782644B2 (ja) 2020-03-31 2024-10-17 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
JP2025205347A Pending JP2026035718A (ja) 2020-03-31 2025-11-27 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Country Status (6)

Country Link
US (3) US12188795B2 (https=)
EP (2) EP4130683B1 (https=)
JP (3) JP7574845B2 (https=)
CN (2) CN114450553A (https=)
TW (3) TWI796662B (https=)
WO (1) WO2021201024A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3111979B1 (fr) * 2020-06-30 2023-03-24 Codechamp Revetement reflechissant des moyens de reflexion d’un codeur optique et codeur optique ainsi realise
US20240085219A1 (en) * 2021-02-09 2024-03-14 Renishaw Plc Rotary encoder
WO2024029490A1 (ja) * 2022-08-02 2024-02-08 大日本印刷株式会社 エンコーダ用反射型光学式スケール、反射型光学式エンコーダ、エンコーダ用反射型光学式スケールの製造方法、およびエンコーダ用反射型光学式スケール多面付け体
TWI895801B (zh) * 2022-09-22 2025-09-01 日商大日本印刷股份有限公司 反射型光學式編碼器及編碼器用反射型光學尺用積層體
DE102024002189A1 (de) * 2024-07-05 2026-01-08 Dr. Johannes Heidenhain Gmbh Maßverkörperung und optische Positionsmesseinrichtung mit dieser Maßverkörperung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184908A (ja) * 1982-04-23 1983-10-28 Sotsukishiya:Kk 円板形光減衰器
JP2001296146A (ja) * 2000-03-10 2001-10-26 Dr Johannes Heidenhain Gmbh 反射測定目盛およびこの測定目盛の製造方法
WO2013100061A1 (ja) * 2011-12-28 2013-07-04 株式会社ニコン エンコーダ、エンコーダ用スケールの製造方法、エンコーダの製造方法及び駆動装置
JP2019158710A (ja) * 2018-03-15 2019-09-19 セイコーエプソン株式会社 エンコーダー用光学式スケールおよび光学式エンコーダー

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JPS57151945A (en) * 1981-03-17 1982-09-20 Hoya Corp Photomask blank and its manufacture
JPS61197510U (https=) 1985-05-31 1986-12-10
JPH04211202A (ja) * 1990-03-19 1992-08-03 Canon Inc 反射型回折格子および該回折格子を用いた装置
CN1032745C (zh) * 1991-06-17 1996-09-11 深圳伟兴镀膜玻璃有限公司 四层膜系镀膜玻璃
JPH07113660A (ja) * 1993-10-13 1995-05-02 Matsushita Electric Ind Co Ltd 光学式エンコーダ
JPH07305163A (ja) * 1994-05-10 1995-11-21 Itochu Fine Chem Kk 低反射クロム系膜
JPH0836171A (ja) * 1994-07-22 1996-02-06 A G Technol Kk 液晶表示装置用遮光膜および液晶表示装置
DE19935709A1 (de) * 1999-07-29 2001-02-01 Leybold Systems Gmbh Schichtsystem für Substrate
JP2004301826A (ja) * 2003-03-14 2004-10-28 Omron Corp 光学式エンコーダ
JP2005241248A (ja) * 2004-01-30 2005-09-08 Aronshiya:Kk 光学式エンコーダに用いられる反射板及びその製造方法
US7903336B2 (en) * 2005-10-11 2011-03-08 Gsi Group Corporation Optical metrological scale and laser-based manufacturing method therefor
JP2008141026A (ja) * 2006-12-04 2008-06-19 Sony Corp 電子機器及びその製造方法、並びに、発光ダイオード表示装置及びその製造方法
JP4971047B2 (ja) * 2007-06-19 2012-07-11 株式会社ミツトヨ 表面反射型エンコーダ用スケール及びそれを用いた表面反射型エンコーダ
CN102980602B (zh) * 2007-09-05 2016-07-06 株式会社尼康 光学编码器用反射板及其制造方法、以及光学编码器
GB2468263B (en) * 2008-08-28 2013-04-03 Faro Tech Inc Indexed optical encoder method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder
TWI447357B (zh) * 2009-11-20 2014-08-01 Everlight Electronics Co Ltd 反射式光編碼器
JP6425875B2 (ja) * 2013-06-14 2018-11-21 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法
EP3207339B1 (en) * 2014-10-13 2019-07-24 Zygo Corporation Interferometric encoder systems
CN107479116B (zh) * 2017-09-07 2019-12-03 武汉正源高理光学有限公司 一种双面低反射铬膜系及其制备方法
JP6958237B2 (ja) * 2017-10-30 2021-11-02 セイコーエプソン株式会社 エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184908A (ja) * 1982-04-23 1983-10-28 Sotsukishiya:Kk 円板形光減衰器
JP2001296146A (ja) * 2000-03-10 2001-10-26 Dr Johannes Heidenhain Gmbh 反射測定目盛およびこの測定目盛の製造方法
WO2013100061A1 (ja) * 2011-12-28 2013-07-04 株式会社ニコン エンコーダ、エンコーダ用スケールの製造方法、エンコーダの製造方法及び駆動装置
JP2019158710A (ja) * 2018-03-15 2019-09-19 セイコーエプソン株式会社 エンコーダー用光学式スケールおよび光学式エンコーダー

Also Published As

Publication number Publication date
JP2026035718A (ja) 2026-03-04
EP4130683B1 (en) 2026-01-21
WO2021201024A1 (ja) 2021-10-07
US20240393143A1 (en) 2024-11-28
EP4130683A4 (en) 2023-08-23
TWI796662B (zh) 2023-03-21
US20230126475A1 (en) 2023-04-27
US12188795B2 (en) 2025-01-07
CN114674233A (zh) 2022-06-28
TW202447177A (zh) 2024-12-01
EP4707746A2 (en) 2026-03-11
JP2025011275A (ja) 2025-01-23
EP4130683A1 (en) 2023-02-08
JP7782644B2 (ja) 2025-12-09
TWI856594B (zh) 2024-09-21
JP7574845B2 (ja) 2024-10-29
TWI907024B (zh) 2025-12-01
TW202332884A (zh) 2023-08-16
TW202142837A (zh) 2021-11-16
US20250116537A1 (en) 2025-04-10
CN114450553A (zh) 2022-05-06

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