CN114450553A - 编码器用反射型光学标尺和反射型光学式编码器 - Google Patents

编码器用反射型光学标尺和反射型光学式编码器 Download PDF

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Publication number
CN114450553A
CN114450553A CN202180005583.5A CN202180005583A CN114450553A CN 114450553 A CN114450553 A CN 114450553A CN 202180005583 A CN202180005583 A CN 202180005583A CN 114450553 A CN114450553 A CN 114450553A
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CN
China
Prior art keywords
film
chromium
optical scale
reflection
encoder
Prior art date
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Pending
Application number
CN202180005583.5A
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English (en)
Chinese (zh)
Inventor
中泽伸介
户田刚史
小田直哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to CN202210449227.9A priority Critical patent/CN114674233A/zh
Publication of CN114450553A publication Critical patent/CN114450553A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
CN202180005583.5A 2020-03-31 2021-03-30 编码器用反射型光学标尺和反射型光学式编码器 Pending CN114450553A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210449227.9A CN114674233A (zh) 2020-03-31 2021-03-30 编码器用反射型光学标尺和反射型光学式编码器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-063476 2020-03-31
JP2020063476 2020-03-31
PCT/JP2021/013676 WO2021201024A1 (ja) 2020-03-31 2021-03-30 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202210449227.9A Division CN114674233A (zh) 2020-03-31 2021-03-30 编码器用反射型光学标尺和反射型光学式编码器

Publications (1)

Publication Number Publication Date
CN114450553A true CN114450553A (zh) 2022-05-06

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CN202180005583.5A Pending CN114450553A (zh) 2020-03-31 2021-03-30 编码器用反射型光学标尺和反射型光学式编码器
CN202210449227.9A Pending CN114674233A (zh) 2020-03-31 2021-03-30 编码器用反射型光学标尺和反射型光学式编码器

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Country Link
US (3) US12188795B2 (https=)
EP (2) EP4130683B1 (https=)
JP (3) JP7574845B2 (https=)
CN (2) CN114450553A (https=)
TW (3) TWI796662B (https=)
WO (1) WO2021201024A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121297910A (zh) * 2022-09-22 2026-01-09 大日本印刷株式会社 编码器用反射型光学标尺、反射型光学式编码器及编码器用反射型光学标尺用层叠体

Families Citing this family (4)

* Cited by examiner, † Cited by third party
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FR3111979B1 (fr) * 2020-06-30 2023-03-24 Codechamp Revetement reflechissant des moyens de reflexion d’un codeur optique et codeur optique ainsi realise
US20240085219A1 (en) * 2021-02-09 2024-03-14 Renishaw Plc Rotary encoder
WO2024029490A1 (ja) * 2022-08-02 2024-02-08 大日本印刷株式会社 エンコーダ用反射型光学式スケール、反射型光学式エンコーダ、エンコーダ用反射型光学式スケールの製造方法、およびエンコーダ用反射型光学式スケール多面付け体
DE102024002189A1 (de) * 2024-07-05 2026-01-08 Dr. Johannes Heidenhain Gmbh Maßverkörperung und optische Positionsmesseinrichtung mit dieser Maßverkörperung

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JP2005241248A (ja) * 2004-01-30 2005-09-08 Aronshiya:Kk 光学式エンコーダに用いられる反射板及びその製造方法
CN101197355A (zh) * 2006-12-04 2008-06-11 索尼株式会社 电子器件及其制造方法、发光二极管显示单元及其制造方法
CN101329186A (zh) * 2007-06-19 2008-12-24 三丰株式会社 表面反射编码器标尺和使用该标尺的表面反射编码器
CN104236603A (zh) * 2013-06-14 2014-12-24 株式会社三丰 用于光电编码器的标尺

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JPH07113660A (ja) * 1993-10-13 1995-05-02 Matsushita Electric Ind Co Ltd 光学式エンコーダ
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JPH0836171A (ja) * 1994-07-22 1996-02-06 A G Technol Kk 液晶表示装置用遮光膜および液晶表示装置
JP2005241248A (ja) * 2004-01-30 2005-09-08 Aronshiya:Kk 光学式エンコーダに用いられる反射板及びその製造方法
CN101197355A (zh) * 2006-12-04 2008-06-11 索尼株式会社 电子器件及其制造方法、发光二极管显示单元及其制造方法
CN101329186A (zh) * 2007-06-19 2008-12-24 三丰株式会社 表面反射编码器标尺和使用该标尺的表面反射编码器
CN104236603A (zh) * 2013-06-14 2014-12-24 株式会社三丰 用于光电编码器的标尺

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121297910A (zh) * 2022-09-22 2026-01-09 大日本印刷株式会社 编码器用反射型光学标尺、反射型光学式编码器及编码器用反射型光学标尺用层叠体

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JP2026035718A (ja) 2026-03-04
EP4130683B1 (en) 2026-01-21
WO2021201024A1 (ja) 2021-10-07
JPWO2021201024A1 (https=) 2021-10-07
US20240393143A1 (en) 2024-11-28
EP4130683A4 (en) 2023-08-23
TWI796662B (zh) 2023-03-21
US20230126475A1 (en) 2023-04-27
US12188795B2 (en) 2025-01-07
CN114674233A (zh) 2022-06-28
TW202447177A (zh) 2024-12-01
EP4707746A2 (en) 2026-03-11
JP2025011275A (ja) 2025-01-23
EP4130683A1 (en) 2023-02-08
JP7782644B2 (ja) 2025-12-09
TWI856594B (zh) 2024-09-21
JP7574845B2 (ja) 2024-10-29
TWI907024B (zh) 2025-12-01
TW202332884A (zh) 2023-08-16
TW202142837A (zh) 2021-11-16
US20250116537A1 (en) 2025-04-10

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