TWI796662B - 編碼器用反射型光學尺及反射型光學式編碼器 - Google Patents

編碼器用反射型光學尺及反射型光學式編碼器 Download PDF

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Publication number
TWI796662B
TWI796662B TW110111732A TW110111732A TWI796662B TW I796662 B TWI796662 B TW I796662B TW 110111732 A TW110111732 A TW 110111732A TW 110111732 A TW110111732 A TW 110111732A TW I796662 B TWI796662 B TW I796662B
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Taiwan
Prior art keywords
film
chromium
low
reflection
reflective optical
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TW110111732A
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English (en)
Chinese (zh)
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TW202142837A (zh
Inventor
中澤伸介
戶田剛史
哉
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日商大日本印刷股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
TW110111732A 2020-03-31 2021-03-31 編碼器用反射型光學尺及反射型光學式編碼器 TWI796662B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-063476 2020-03-31
JP2020063476 2020-03-31

Publications (2)

Publication Number Publication Date
TW202142837A TW202142837A (zh) 2021-11-16
TWI796662B true TWI796662B (zh) 2023-03-21

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TW110111732A TWI796662B (zh) 2020-03-31 2021-03-31 編碼器用反射型光學尺及反射型光學式編碼器
TW112112496A TWI856594B (zh) 2020-03-31 2021-03-31 編碼器用反射型光學尺及反射型光學式編碼器
TW113131410A TWI907024B (zh) 2020-03-31 2021-03-31 編碼器用反射型光學尺及反射型光學式編碼器

Family Applications After (2)

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TW112112496A TWI856594B (zh) 2020-03-31 2021-03-31 編碼器用反射型光學尺及反射型光學式編碼器
TW113131410A TWI907024B (zh) 2020-03-31 2021-03-31 編碼器用反射型光學尺及反射型光學式編碼器

Country Status (6)

Country Link
US (3) US12188795B2 (https=)
EP (2) EP4130683B1 (https=)
JP (3) JP7574845B2 (https=)
CN (2) CN114450553A (https=)
TW (3) TWI796662B (https=)
WO (1) WO2021201024A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3111979B1 (fr) * 2020-06-30 2023-03-24 Codechamp Revetement reflechissant des moyens de reflexion d’un codeur optique et codeur optique ainsi realise
US20240085219A1 (en) * 2021-02-09 2024-03-14 Renishaw Plc Rotary encoder
WO2024029490A1 (ja) * 2022-08-02 2024-02-08 大日本印刷株式会社 エンコーダ用反射型光学式スケール、反射型光学式エンコーダ、エンコーダ用反射型光学式スケールの製造方法、およびエンコーダ用反射型光学式スケール多面付け体
TWI895801B (zh) * 2022-09-22 2025-09-01 日商大日本印刷股份有限公司 反射型光學式編碼器及編碼器用反射型光學尺用積層體
DE102024002189A1 (de) * 2024-07-05 2026-01-08 Dr. Johannes Heidenhain Gmbh Maßverkörperung und optische Positionsmesseinrichtung mit dieser Maßverkörperung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001296146A (ja) * 2000-03-10 2001-10-26 Dr Johannes Heidenhain Gmbh 反射測定目盛およびこの測定目盛の製造方法
TW200730286A (en) * 2005-10-11 2007-08-16 Gsi Group Corp Optical metrological scale and laser-based manufacturing method therefor
TW201118350A (en) * 2009-11-20 2011-06-01 Everlight Electronics Co Ltd Reflective type optical encoder
JP2019158710A (ja) * 2018-03-15 2019-09-19 セイコーエプソン株式会社 エンコーダー用光学式スケールおよび光学式エンコーダー

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151945A (en) * 1981-03-17 1982-09-20 Hoya Corp Photomask blank and its manufacture
JPS58184908A (ja) * 1982-04-23 1983-10-28 Sotsukishiya:Kk 円板形光減衰器
JPS61197510U (https=) 1985-05-31 1986-12-10
JPH04211202A (ja) * 1990-03-19 1992-08-03 Canon Inc 反射型回折格子および該回折格子を用いた装置
CN1032745C (zh) * 1991-06-17 1996-09-11 深圳伟兴镀膜玻璃有限公司 四层膜系镀膜玻璃
JPH07113660A (ja) * 1993-10-13 1995-05-02 Matsushita Electric Ind Co Ltd 光学式エンコーダ
JPH07305163A (ja) * 1994-05-10 1995-11-21 Itochu Fine Chem Kk 低反射クロム系膜
JPH0836171A (ja) * 1994-07-22 1996-02-06 A G Technol Kk 液晶表示装置用遮光膜および液晶表示装置
DE19935709A1 (de) * 1999-07-29 2001-02-01 Leybold Systems Gmbh Schichtsystem für Substrate
JP2004301826A (ja) * 2003-03-14 2004-10-28 Omron Corp 光学式エンコーダ
JP2005241248A (ja) * 2004-01-30 2005-09-08 Aronshiya:Kk 光学式エンコーダに用いられる反射板及びその製造方法
JP2008141026A (ja) * 2006-12-04 2008-06-19 Sony Corp 電子機器及びその製造方法、並びに、発光ダイオード表示装置及びその製造方法
JP4971047B2 (ja) * 2007-06-19 2012-07-11 株式会社ミツトヨ 表面反射型エンコーダ用スケール及びそれを用いた表面反射型エンコーダ
CN102980602B (zh) * 2007-09-05 2016-07-06 株式会社尼康 光学编码器用反射板及其制造方法、以及光学编码器
GB2468263B (en) * 2008-08-28 2013-04-03 Faro Tech Inc Indexed optical encoder method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder
CN104094087B (zh) * 2011-12-28 2016-07-20 株式会社尼康 编码器、编码器用标尺制造方法、编码器制造方法及驱动装置
JP6425875B2 (ja) * 2013-06-14 2018-11-21 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法
EP3207339B1 (en) * 2014-10-13 2019-07-24 Zygo Corporation Interferometric encoder systems
CN107479116B (zh) * 2017-09-07 2019-12-03 武汉正源高理光学有限公司 一种双面低反射铬膜系及其制备方法
JP6958237B2 (ja) * 2017-10-30 2021-11-02 セイコーエプソン株式会社 エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001296146A (ja) * 2000-03-10 2001-10-26 Dr Johannes Heidenhain Gmbh 反射測定目盛およびこの測定目盛の製造方法
TW200730286A (en) * 2005-10-11 2007-08-16 Gsi Group Corp Optical metrological scale and laser-based manufacturing method therefor
TW201118350A (en) * 2009-11-20 2011-06-01 Everlight Electronics Co Ltd Reflective type optical encoder
JP2019158710A (ja) * 2018-03-15 2019-09-19 セイコーエプソン株式会社 エンコーダー用光学式スケールおよび光学式エンコーダー

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JP2026035718A (ja) 2026-03-04
EP4130683B1 (en) 2026-01-21
WO2021201024A1 (ja) 2021-10-07
JPWO2021201024A1 (https=) 2021-10-07
US20240393143A1 (en) 2024-11-28
EP4130683A4 (en) 2023-08-23
US20230126475A1 (en) 2023-04-27
US12188795B2 (en) 2025-01-07
CN114674233A (zh) 2022-06-28
TW202447177A (zh) 2024-12-01
EP4707746A2 (en) 2026-03-11
JP2025011275A (ja) 2025-01-23
EP4130683A1 (en) 2023-02-08
JP7782644B2 (ja) 2025-12-09
TWI856594B (zh) 2024-09-21
JP7574845B2 (ja) 2024-10-29
TWI907024B (zh) 2025-12-01
TW202332884A (zh) 2023-08-16
TW202142837A (zh) 2021-11-16
US20250116537A1 (en) 2025-04-10
CN114450553A (zh) 2022-05-06

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