JP7239787B2 - 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法 - Google Patents

窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法 Download PDF

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Publication number
JP7239787B2
JP7239787B2 JP2022545936A JP2022545936A JP7239787B2 JP 7239787 B2 JP7239787 B2 JP 7239787B2 JP 2022545936 A JP2022545936 A JP 2022545936A JP 2022545936 A JP2022545936 A JP 2022545936A JP 7239787 B2 JP7239787 B2 JP 7239787B2
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silicon nitride
powder
mass
nitride powder
raw material
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Japanese (ja)
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JPWO2022202621A1 (zh
JPWO2022202621A5 (zh
Inventor
直嗣 野上
稔男 田中
豪 竹田
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Denka Co Ltd
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Denka Co Ltd
Denki Kagaku Kogyo KK
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/587—Fine ceramics

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP2022545936A 2021-03-25 2022-03-17 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法 Active JP7239787B2 (ja)

Applications Claiming Priority (3)

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JP2021051259 2021-03-25
JP2021051259 2021-03-25
PCT/JP2022/012341 WO2022202621A1 (ja) 2021-03-25 2022-03-17 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体及びその製造方法

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JPWO2022202621A1 JPWO2022202621A1 (zh) 2022-09-29
JPWO2022202621A5 JPWO2022202621A5 (zh) 2023-02-21
JP7239787B2 true JP7239787B2 (ja) 2023-03-14

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JP (1) JP7239787B2 (zh)
CN (1) CN117120397A (zh)
WO (1) WO2022202621A1 (zh)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000128511A (ja) 1998-10-28 2000-05-09 Denki Kagaku Kogyo Kk 窒化ケイ素粉末及びこれを用いたスラリー、充填材
JP2002029848A (ja) 2000-07-14 2002-01-29 Nissan Motor Co Ltd 高熱伝導性窒化珪素焼結体の製造方法
JP4243906B2 (ja) 2000-01-13 2009-03-25 日本精工株式会社 リテーニングピースの樹脂成形方法及び直動案内装置
JP6340709B2 (ja) 2013-10-18 2018-06-13 マッスル株式会社 ロボット
JP2018111637A (ja) 2017-01-13 2018-07-19 学校法人早稲田大学 金属シリコン製造用アーク炉
WO2018194052A1 (ja) 2017-04-17 2018-10-25 株式会社 東芝 焼結体、基板、回路基板、および焼結体の製造方法
JP2020090428A (ja) 2018-12-07 2020-06-11 国立研究開発法人産業技術総合研究所 シリコンの製造方法及び製造装置
JP2020090429A (ja) 2018-12-07 2020-06-11 国立研究開発法人産業技術総合研究所 シリコンの製造方法及び製造装置
WO2020186881A1 (zh) 2019-03-18 2020-09-24 青岛瓷兴新材料有限公司 一种超纯低放射性类球形β氮化硅粉体、其制造方法及应用
WO2020241700A1 (ja) 2019-05-30 2020-12-03 デンカ株式会社 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法
JP7206409B2 (ja) 2019-02-20 2023-01-17 ボブスト リヨン 印刷機における印刷ユニットのロール用ハンドリングキャリッジ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6340709A (ja) * 1986-08-05 1988-02-22 Showa Denko Kk 易焼結性高純度窒化ケイ素微粉体の製造方法
JPH04243906A (ja) * 1990-09-26 1992-09-01 Lonza Ag α−窒化ケイ素粉末の製造方法
JP3283292B2 (ja) * 1992-05-11 2002-05-20 電気化学工業株式会社 窒化珪素粉末の製造方法
JP3438928B2 (ja) * 1994-01-12 2003-08-18 電気化学工業株式会社 窒化珪素粉末の製造方法
JPH10218613A (ja) * 1997-02-03 1998-08-18 Shin Etsu Chem Co Ltd 窒化ケイ素粉末の高純化方法

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000128511A (ja) 1998-10-28 2000-05-09 Denki Kagaku Kogyo Kk 窒化ケイ素粉末及びこれを用いたスラリー、充填材
JP4243906B2 (ja) 2000-01-13 2009-03-25 日本精工株式会社 リテーニングピースの樹脂成形方法及び直動案内装置
JP2002029848A (ja) 2000-07-14 2002-01-29 Nissan Motor Co Ltd 高熱伝導性窒化珪素焼結体の製造方法
JP6340709B2 (ja) 2013-10-18 2018-06-13 マッスル株式会社 ロボット
JP2018111637A (ja) 2017-01-13 2018-07-19 学校法人早稲田大学 金属シリコン製造用アーク炉
WO2018194052A1 (ja) 2017-04-17 2018-10-25 株式会社 東芝 焼結体、基板、回路基板、および焼結体の製造方法
JP2020090428A (ja) 2018-12-07 2020-06-11 国立研究開発法人産業技術総合研究所 シリコンの製造方法及び製造装置
JP2020090429A (ja) 2018-12-07 2020-06-11 国立研究開発法人産業技術総合研究所 シリコンの製造方法及び製造装置
JP7206409B2 (ja) 2019-02-20 2023-01-17 ボブスト リヨン 印刷機における印刷ユニットのロール用ハンドリングキャリッジ
WO2020186881A1 (zh) 2019-03-18 2020-09-24 青岛瓷兴新材料有限公司 一种超纯低放射性类球形β氮化硅粉体、其制造方法及应用
JP2022522311A (ja) 2019-03-18 2022-04-15 青島瓷興新材料有限公司 超純度・低放射性類球形β窒化ケイ素粉体、その製造方法と用途
WO2020241700A1 (ja) 2019-05-30 2020-12-03 デンカ株式会社 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法

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CN117120397A (zh) 2023-11-24
JPWO2022202621A1 (zh) 2022-09-29
WO2022202621A1 (ja) 2022-09-29

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