JP7170629B2 - 焼結体、基板、回路基板、および焼結体の製造方法 - Google Patents
焼結体、基板、回路基板、および焼結体の製造方法 Download PDFInfo
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- JP7170629B2 JP7170629B2 JP2019513649A JP2019513649A JP7170629B2 JP 7170629 B2 JP7170629 B2 JP 7170629B2 JP 2019513649 A JP2019513649 A JP 2019513649A JP 2019513649 A JP2019513649 A JP 2019513649A JP 7170629 B2 JP7170629 B2 JP 7170629B2
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- 239000000758 substrate Substances 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 64
- 239000011521 glass Substances 0.000 claims description 51
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 50
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 50
- 238000005245 sintering Methods 0.000 claims description 33
- 239000002491 polymer binding agent Substances 0.000 claims description 30
- 229920005596 polymer binder Polymers 0.000 claims description 29
- 239000000843 powder Substances 0.000 claims description 28
- 238000001069 Raman spectroscopy Methods 0.000 claims description 26
- 229910052731 fluorine Inorganic materials 0.000 claims description 26
- 239000011737 fluorine Substances 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 22
- 239000002994 raw material Substances 0.000 claims description 22
- 239000013078 crystal Substances 0.000 claims description 19
- 239000004094 surface-active agent Substances 0.000 claims description 18
- 239000003607 modifier Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000000243 solution Substances 0.000 claims description 11
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 9
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 8
- 238000013001 point bending Methods 0.000 claims description 8
- 239000002002 slurry Substances 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 8
- 238000001228 spectrum Methods 0.000 claims description 8
- 239000011259 mixed solution Substances 0.000 claims description 6
- 150000002894 organic compounds Chemical class 0.000 claims description 6
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 4
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 239000012071 phase Substances 0.000 description 90
- 238000000034 method Methods 0.000 description 29
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 25
- 238000005238 degreasing Methods 0.000 description 12
- 125000000524 functional group Chemical group 0.000 description 12
- 238000009413 insulation Methods 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 239000011230 binding agent Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 239000012298 atmosphere Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000007791 liquid phase Substances 0.000 description 7
- 239000004014 plasticizer Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000001237 Raman spectrum Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000007606 doctor blade method Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000000491 multivariate analysis Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001768 cations Chemical class 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000007822 coupling agent Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 3
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 150000003949 imides Chemical class 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 239000002736 nonionic surfactant Substances 0.000 description 2
- 238000006864 oxidative decomposition reaction Methods 0.000 description 2
- 238000005191 phase separation Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 150000003613 toluenes Chemical class 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical class OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009694 cold isostatic pressing Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004255 ion exchange chromatography Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical class OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- -1 silicon halide Chemical class 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000001330 spinodal decomposition reaction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000009283 thermal hydrolysis Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
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Description
表1に示す、窒化珪素粉末、表面改質剤、高分子バインダ、界面活性剤、可塑剤、溶媒、の組み合わせを用意して、溶媒中で混合することにより、混合溶液(試料1~4)を調製した。
Claims (12)
- 窒化珪素を含む結晶粒子と、粒界相と、を具備する焼結体であって、
前記粒界相は、
前記焼結体の断面の100μm×100μmの単位面積の領域に設けられ、互いに異なる組成を有する複数のガラス化合物相を含み、
前記焼結体に交流電圧を印加しながら前記交流電圧の周波数を50Hzから1MHzまで連続的に変化させて前記焼結体の誘電損失を測定するとき、800kHzないし1MHzの周波数帯域での前記誘電損失の平均値εAと、100Hzないし200Hzの周波数帯域での前記誘電損失の平均値εBは、式:|εA-εB|≦0.1を満たす、焼結体。 - 前記平均値εAおよび前記平均値εBのそれぞれは、0.1以下である、請求項1に記載の焼結体。
- 前記焼結体の3点曲げ強度は、600MPa以上である、請求項1または請求項2に記載の焼結体。
- 前記複数のガラス化合物相のラマン分光スペクトルの少なくとも一つは、
440cm-1ないし530cm-1のラマンシフトの範囲での第1のピークと、
990cm-1ないし1060cm-1のラマンシフトの範囲での第2のピークと、を有する、請求項1ないし請求項3のいずれか一項に記載の焼結体。 - 前記複数のガラス化合物相のラマン分光スペクトルのそれぞれの面積のうち、二番目に大きい面積SM2に対する一番目に大きい面積SM1の比は、1.1以上3.0以下である、請求項1ないし請求項4のいずれか一項に記載の焼結体。
- 前記粒界相は、フッ素を含有する、請求項1ないし請求項5のいずれか一項に記載の焼結体。
- 熱伝導率が50W/m・K以上である、請求項1ないし請求項6のいずれか一項に記載の焼結体。
- 請求項1ないし請求項7のいずれか一項に記載の焼結体を具備する基板。
- 厚さが0.4mm以下である、請求項8に記載の基板。
- 請求項8または請求項9に記載の基板と、
前記基板に接合された金属板と、を具備する、回路基板。 - 窒化珪素粉末と、シランカップリング剤である表面改質剤と、カルボキシル基を有するアクリル樹脂である高分子バインダと、カルボキシル基を有しかつ前記高分子バインダよりも平均分子量が小さい界面活性剤である有機化合物と、を溶媒中で混合して混合溶液を調製する工程と、
前記混合溶液に焼結助剤粉末を添加して原料溶液を調製する工程と、
前記原料溶液を脱泡処理して原料スラリーを調製する工程と、
前記原料スラリーを成形してシートを調製する工程と、
前記シートを1000℃以下の温度で加熱して脱脂体を調製する工程と、
前記脱脂体を1600℃以上2000℃以下の温度で焼結する工程と、
を具備する、焼結体の製造方法。 - 前記有機化合物は、前記高分子バインダの熱分解温度以下で前記表面改質剤と反応する、請求項11に記載の製造方法。
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