JP7166132B2 - 基板洗浄部材および基板洗浄装置 - Google Patents
基板洗浄部材および基板洗浄装置 Download PDFInfo
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- JP7166132B2 JP7166132B2 JP2018193312A JP2018193312A JP7166132B2 JP 7166132 B2 JP7166132 B2 JP 7166132B2 JP 2018193312 A JP2018193312 A JP 2018193312A JP 2018193312 A JP2018193312 A JP 2018193312A JP 7166132 B2 JP7166132 B2 JP 7166132B2
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- 238000004140 cleaning Methods 0.000 title claims description 241
- 239000000758 substrate Substances 0.000 title claims description 211
- 239000007788 liquid Substances 0.000 claims description 55
- 230000007246 mechanism Effects 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 239000002245 particle Substances 0.000 description 9
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
- B08B1/143—Wipes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02096—Cleaning only mechanical cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
前記第1洗浄部材は、大径部および小径部を有する、基板洗浄装置が提供される。
前記基板支持機構は、前記基板の辺に沿う方向に基板を移動させ、前記第1洗浄部材が基板の辺に沿ったベベルおよび/またはエッジに接触するのが望ましい。
すなわち、図3ではロール型洗浄部材2aに角部211aが5か所あり、基板Wが1回転する間に基板Wの周縁部が角部211aに対する接触、離反を5回繰り返すことになる。ロール型洗浄部材2aによるパーティクル除去メカニズムにおいては、ロール型洗浄部材2aの角部211aが基板Wに接触して拭う際の物理力が大きな効果をもたらしていると考えられており、しかもパーティクルに対する物理力を周期的に繰り返し与えることができるので、高いパーティクル除去性能が得られる。
2a,2b ロール型洗浄部材
21a,21b 大径部
211a 角部
212a 側面
22a,22b 小径部
23a,23b 溝
24a,24b 芯
3a,3b モータ
4a,4b 洗浄液ノズル
5a,5b リンス液ノズル
6 アクチュエータ
Claims (7)
- 基板を支持する基板支持機構と、
前記基板の第1面のベベルおよび/またはエッジに接触しながら回転することにより、前記第1面を洗浄するロール型の第1洗浄部材と、
前記第1洗浄部材と対向して配置され、前記基板の第2面のベベルおよび/またはエッジに接触しながら回転することにより、前記第2面を洗浄するロール型の第2洗浄部材と、
前記基板のエッジおよび前記第1洗浄部材に向かう方向で、前記基板の第1面に洗浄液を供給する第1ノズルと、
前記基板のエッジおよび前記第2洗浄部材に向かう方向で、前記基板の第2面に洗浄液を供給する第2ノズルと、を備え、
前記第1洗浄部材および第2洗浄部材の回転軸は、前記基板と平行であり、
前記第1洗浄部材および第2洗浄部材は、複数の大径部および小径部を有し、
前記第1洗浄部材の大径部に対向して前記第2洗浄部材の小径部が位置し、かつ、前記第1洗浄部材の小径部に対向して前記第2洗浄部材の大径部が位置し、前記第1洗浄部材と前記第2洗浄部材は互いに非接触に回転し、
前記第1洗浄部材および前記第2洗浄部材の長手方向に沿って大径部と小径部が交互に配置されており、前記大径部と前記小径部が交互に配置されることによって周方向に複数の溝が形成され、それぞれの溝は前記大径部によって隣接する溝と隔てられ、独立した形状になっており、
前記第1ノズルからの洗浄液は、前記第1洗浄部材の溝を流れ、前記基板の外周方向に排出され、
前記第2ノズルからの洗浄液は、前記第2洗浄部材の溝を流れ、前記基板の外周方向に排出される、基板洗浄装置。 - 前記基板支持機構は、前記基板を保持して回転させる、請求項1に記載の基板洗浄装置。
- 前記第1洗浄部材の回転方向は、前記基板と接触する位置において前記基板の中心からエッジに向かう方向である、請求項1または2に記載の基板洗浄装置。
- 前記基板の洗浄時に、前記第1洗浄部材を、前記基板の接線方向、半径方向および/または鉛直方向に揺動させるアクチュエータを備える、請求項1乃至3のいずれかに記載の基板洗浄装置。
- 前記基板は多角形であり、
前記基板支持機構は、前記基板の辺に沿う方向に基板を移動させ、前記第1洗浄部材が基板の辺に沿ったベベルおよび/またはエッジに接触する、請求項1乃至4のいずれかに記載の基板洗浄装置。 - 前記基板は多角形であり、
前記第1洗浄部材を基板の辺に沿う方向に移動させる移動機構を含む、請求項1乃至4のいずれかに記載の基板洗浄装置。 - 基板を洗浄する基板洗浄部材であって、
基板の第1面のベベルおよび/またはエッジに接触しながら回転することにより、前記基板の第1面を洗浄するように構成され、複数の大径部および小径部を有する第1洗浄部材と、
前記第1洗浄部材と対向して配置され、基板の第2面のベベルおよび/またはエッジに接触しながら回転することにより、前記基板の第2面を洗浄するように構成され、複数の大径部および小径部を有する第2洗浄部材と、を備え、
前記第1洗浄部材および前記第2洗浄部材の回転軸は、前記基板と平行であり、
前記第1洗浄部材の大径部に対向して前記第2洗浄部材の小径部が位置し、かつ、前記第1洗浄部材の小径部に対向して前記第2洗浄部材の大径部が位置し、前記第1洗浄部材と前記第2洗浄部材は互いに非接触に回転するように構成され、
前記第1洗浄部材および前記第2洗浄部材の長手方向に沿って大径部と小径部が交互に配置されており、前記大径部と前記小径部が交互に配置されることによって周方向に複数の溝が形成され、それぞれの溝は前記大径部によって隣接する溝と隔てられ、独立した形状になっており、
前記基板のエッジおよび前記第1洗浄部材に向かう方向で第1ノズルから前記基板の第1面に供給される洗浄液は、前記第1洗浄部材の溝を流れ、前記基板の外周方向に排出され、
前記基板のエッジおよび前記第2洗浄部材に向かう方向で第2ノズルから前記基板の第2面に供給される洗浄液は、前記第2洗浄部材の溝を流れ、前記基板の外周方向に排出される、基板洗浄部材。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018193312A JP7166132B2 (ja) | 2018-10-12 | 2018-10-12 | 基板洗浄部材および基板洗浄装置 |
TW108132505A TWI820206B (zh) | 2018-10-12 | 2019-09-10 | 基板清洗構件及基板清洗裝置 |
KR1020190124316A KR20200041791A (ko) | 2018-10-12 | 2019-10-08 | 기판 세정 부재 및 기판 세정 장치 |
US16/598,728 US11501983B2 (en) | 2018-10-12 | 2019-10-10 | Substrate cleaning member and substrate cleaning apparatus |
CN201910964641.1A CN111048442A (zh) | 2018-10-12 | 2019-10-11 | 基板清洗部件及基板清洗装置 |
SG10201909509UA SG10201909509UA (en) | 2018-10-12 | 2019-10-11 | Substrate cleaning member and substrate cleaning apparatus |
EP19202831.4A EP3636356A1 (en) | 2018-10-12 | 2019-10-11 | Substrate cleaning member and substrate cleaning apparatus |
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JP2018193312A JP7166132B2 (ja) | 2018-10-12 | 2018-10-12 | 基板洗浄部材および基板洗浄装置 |
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JP2020061514A JP2020061514A (ja) | 2020-04-16 |
JP2020061514A5 JP2020061514A5 (ja) | 2021-07-29 |
JP7166132B2 true JP7166132B2 (ja) | 2022-11-07 |
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US (1) | US11501983B2 (ja) |
EP (1) | EP3636356A1 (ja) |
JP (1) | JP7166132B2 (ja) |
KR (1) | KR20200041791A (ja) |
CN (1) | CN111048442A (ja) |
SG (1) | SG10201909509UA (ja) |
TW (1) | TWI820206B (ja) |
Families Citing this family (2)
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EP4131623A4 (en) | 2020-04-06 | 2023-11-22 | LG Energy Solution, Ltd. | ELECTROCHEMICAL ELEMENT SEPARATOR AND METHOD FOR PRODUCING THE SAME |
JP6892176B1 (ja) * | 2020-11-19 | 2021-06-23 | 不二越機械工業株式会社 | ワーク洗浄装置 |
Citations (3)
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US20050000652A1 (en) | 2003-07-02 | 2005-01-06 | Chaqng-Hyeon Nam | Apparatus and method for treating edge of substrate |
JP2007272236A (ja) | 2007-04-11 | 2007-10-18 | Advanced Display Inc | 基板端面洗浄装置、基板端面洗浄方法及び半導体装置の製造方法 |
JP2011181644A (ja) | 2010-03-01 | 2011-09-15 | Ebara Corp | 基板洗浄方法及び基板洗浄装置 |
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GB772599A (en) | 1954-01-23 | 1957-04-17 | Service Eng Ltd | Improvements relating to brushing machines |
US5375291A (en) | 1992-05-18 | 1994-12-27 | Tokyo Electron Limited | Device having brush for scrubbing substrate |
US5937469A (en) | 1996-12-03 | 1999-08-17 | Intel Corporation | Apparatus for mechanically cleaning the edges of wafers |
JPH11283952A (ja) * | 1998-03-30 | 1999-10-15 | Shibaura Mechatronics Corp | ブラシ洗浄装置 |
US6299698B1 (en) * | 1998-07-10 | 2001-10-09 | Applied Materials, Inc. | Wafer edge scrubber and method |
US6467120B1 (en) * | 1999-09-08 | 2002-10-22 | International Business Machines Corporation | Wafer cleaning brush profile modification |
US20040040576A1 (en) | 2002-08-29 | 2004-03-04 | Yuxia Sun | Wafer cleaning brush |
JP3933670B2 (ja) | 2005-03-29 | 2007-06-20 | 東京エレクトロン株式会社 | 基板洗浄方法及び基板洗浄装置 |
JP4768556B2 (ja) | 2006-09-15 | 2011-09-07 | Nec液晶テクノロジー株式会社 | 基板洗浄装置及び基板洗浄方法 |
JP2008282865A (ja) | 2007-05-08 | 2008-11-20 | Fuji Electric Device Technology Co Ltd | スクラブ洗浄装置及びそれに用いられるロールスポンジアセンブリ |
KR101020676B1 (ko) * | 2008-11-26 | 2011-03-09 | 세메스 주식회사 | 기판 세정 장치 |
WO2010125663A1 (ja) * | 2009-04-30 | 2010-11-04 | アイオン株式会社 | 洗浄用スポンジローラ |
JP5645752B2 (ja) * | 2011-05-25 | 2014-12-24 | 株式会社荏原製作所 | 基板洗浄方法及びロール洗浄部材 |
US9704729B2 (en) * | 2013-06-13 | 2017-07-11 | K.C. Tech Co., Ltd. | Substrate cleaning apparatus and method and brush assembly used therein |
JP7224128B2 (ja) | 2018-08-09 | 2023-02-17 | 株式会社荏原製作所 | 基板用洗浄具、基板洗浄装置、基板処理装置、基板処理方法および基板用洗浄具の製造方法 |
-
2018
- 2018-10-12 JP JP2018193312A patent/JP7166132B2/ja active Active
-
2019
- 2019-09-10 TW TW108132505A patent/TWI820206B/zh active
- 2019-10-08 KR KR1020190124316A patent/KR20200041791A/ko not_active Application Discontinuation
- 2019-10-10 US US16/598,728 patent/US11501983B2/en active Active
- 2019-10-11 CN CN201910964641.1A patent/CN111048442A/zh active Pending
- 2019-10-11 SG SG10201909509UA patent/SG10201909509UA/en unknown
- 2019-10-11 EP EP19202831.4A patent/EP3636356A1/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050000652A1 (en) | 2003-07-02 | 2005-01-06 | Chaqng-Hyeon Nam | Apparatus and method for treating edge of substrate |
JP2007272236A (ja) | 2007-04-11 | 2007-10-18 | Advanced Display Inc | 基板端面洗浄装置、基板端面洗浄方法及び半導体装置の製造方法 |
JP2011181644A (ja) | 2010-03-01 | 2011-09-15 | Ebara Corp | 基板洗浄方法及び基板洗浄装置 |
Also Published As
Publication number | Publication date |
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TWI820206B (zh) | 2023-11-01 |
US11501983B2 (en) | 2022-11-15 |
CN111048442A (zh) | 2020-04-21 |
TW202017030A (zh) | 2020-05-01 |
KR20200041791A (ko) | 2020-04-22 |
JP2020061514A (ja) | 2020-04-16 |
US20200118843A1 (en) | 2020-04-16 |
EP3636356A1 (en) | 2020-04-15 |
SG10201909509UA (en) | 2020-05-28 |
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