JP7145610B2 - 積層コイル型電子部品 - Google Patents
積層コイル型電子部品 Download PDFInfo
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- JP7145610B2 JP7145610B2 JP2017252185A JP2017252185A JP7145610B2 JP 7145610 B2 JP7145610 B2 JP 7145610B2 JP 2017252185 A JP2017252185 A JP 2017252185A JP 2017252185 A JP2017252185 A JP 2017252185A JP 7145610 B2 JP7145610 B2 JP 7145610B2
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- 239000002923 metal particle Substances 0.000 claims description 91
- 229920005989 resin Polymers 0.000 claims description 89
- 239000011347 resin Substances 0.000 claims description 89
- 239000004020 conductor Substances 0.000 claims description 34
- 239000011229 interlayer Substances 0.000 claims description 31
- 239000005011 phenolic resin Substances 0.000 claims description 28
- 239000010410 layer Substances 0.000 claims description 27
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 17
- 229920001568 phenolic resin Polymers 0.000 claims description 17
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 239000003822 epoxy resin Substances 0.000 claims description 10
- 229920000647 polyepoxide Polymers 0.000 claims description 10
- 229910017082 Fe-Si Inorganic materials 0.000 claims description 9
- 229910017133 Fe—Si Inorganic materials 0.000 claims description 9
- 238000003475 lamination Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 31
- 229910052751 metal Inorganic materials 0.000 description 31
- 239000000203 mixture Substances 0.000 description 26
- 230000000052 comparative effect Effects 0.000 description 25
- 239000000843 powder Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 20
- 238000007747 plating Methods 0.000 description 19
- 239000002245 particle Substances 0.000 description 18
- 238000005452 bending Methods 0.000 description 16
- 239000011230 binding agent Substances 0.000 description 15
- 238000010304 firing Methods 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 14
- 239000002994 raw material Substances 0.000 description 14
- 238000001878 scanning electron micrograph Methods 0.000 description 13
- 239000012298 atmosphere Substances 0.000 description 12
- 238000011049 filling Methods 0.000 description 10
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 9
- 230000007423 decrease Effects 0.000 description 9
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000005470 impregnation Methods 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000009692 water atomization Methods 0.000 description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 5
- 238000000137 annealing Methods 0.000 description 5
- 235000019256 formaldehyde Nutrition 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 229920002050 silicone resin Polymers 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000010191 image analysis Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 229910008458 Si—Cr Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- WQPDQJCBHQPNCZ-UHFFFAOYSA-N cyclohexa-2,4-dien-1-one Chemical compound O=C1CC=CC=C1 WQPDQJCBHQPNCZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 208000033962 Fontaine progeroid syndrome Diseases 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000009689 gas atomisation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/33—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials mixtures of metallic and non-metallic particles; metallic particles having oxide skin
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/14766—Fe-Si based alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/20—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
- H01F1/22—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
- H01F1/24—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated
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- H—ELECTRICITY
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- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/20—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
- H01F1/22—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
- H01F1/24—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated
- H01F1/26—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated by macromolecular organic substances
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- H—ELECTRICITY
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- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
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- H—ELECTRICITY
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- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
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- H—ELECTRICITY
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- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
- H01F27/255—Magnetic cores made from particles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C2202/00—Physical properties
- C22C2202/02—Magnetic
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- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
- H01F2017/048—Fixed inductances of the signal type with magnetic core with encapsulating core, e.g. made of resin and magnetic powder
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- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
- H01F2027/2809—Printed windings on stacked layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/29—Terminals; Tapping arrangements for signal inductances
- H01F27/292—Surface mounted devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/32—Composite [nonstructural laminate] of inorganic material having metal-compound-containing layer and having defined magnetic layer
Description
前記磁性素体は軟磁性金属粒子および樹脂を含み、
前記樹脂は前記軟磁性金属粒子間の隙間スペースに充填され、
前記軟磁性金属粒子は軟磁性金属粒子本体および前記軟磁性金属粒子本体を被覆する酸化被膜からなり、
前記酸化被膜のうち前記軟磁性金属粒子本体と接する層がSiを含む酸化物からなることを特徴とする。
前記磁性素体は軟磁性金属粒子および樹脂を含み、
前記樹脂は前記軟磁性金属粒子間の隙間スペースに充填され、
前記軟磁性金属粒子におけるFeの含有量が92.5質量%以上97.0質量%以下、Siの含有量が3.0質量%以上7.5質量%以下であり、Crを実質的に含有しないことを特徴とする。
前記隙間スペースの面積比率が前記SEM観察画像全体に対して10.0%以上35.0%以下であってもよい。
まず、原料として、Fe単体およびSi単体をそれぞれ準備した。次に、それらを混合して、水アトマイズ装置内に配置されたルツボに収容した。続いて、不活性雰囲気下において、ルツボ外部に設けたワークコイルを用いて、ルツボを高周波誘導により1600℃以上まで加熱し、ルツボ中のインゴット、チャンクまたはショットを溶融、混合して溶湯を得た。なお、リンの含有量の調整は、軟磁性金属粉末の原料を溶融、混合する際に、Fe単体の原料に含まれるリンの量を調整することで行った。
実験例2では、実施例1~3および3aの積層インダクタ(めっき品)について、220~340℃で5分間熱処理を行った。そして、実験例1と同様にしてショート数、L、Qおよび抗折強度を評価した。結果を表3に示す。
2… 素子
2a…表面部
2b…中央部
3… 端子電極
4… 磁性素体
4a… 層間部
5… コイル導体
5a,5b…引出電極
11…軟磁性金属粒子
11a…軟磁性金属粒子本体
11b…酸化被膜
12…隙間スペース
13…樹脂
14…空隙
Claims (7)
- コイル導体と磁性素体とが積層された素子を有する積層コイル型電子部品であって、
前記磁性素体は軟磁性金属粒子および樹脂を含み、
前記樹脂は前記軟磁性金属粒子間の隙間スペースに充填され、
前記軟磁性金属粒子は軟磁性金属粒子本体および前記軟磁性金属粒子本体を被覆する酸化被膜からなり、
前記軟磁性金属粒子本体は、Pを含むFe-Si系合金であり、
前記軟磁性金属粒子本体におけるPの含有量が、Feの含有量とSiの含有量との合計100質量%に対して、0.011質量%以上0.065質量%以下であり、
前記酸化被膜のうち前記軟磁性金属粒子本体と接する層がSiを含む酸化物からなり、
前記酸化被膜の平均厚みが5nm以上60nm以下であり、
前記磁性素体は、前記コイル導体が埋設されている中央部と、前記中央部の積層方向の上下に存在し前記コイル導体が埋設されていない表面部と、を有し、
前記中央部は、前記コイル導体同士の積層方向の中間部である層間部を含み、
前記中央部における前記軟磁性金属粒子のD50が、前記表面部における前記軟磁性金属粒子のD50よりも小さく、
前記中央部における前記軟磁性金属粒子が、0.5μm≦(D50-D10)≦3.0μm、および、1.5μm≦(D90-D50)≦4.5μmを満たし、
前記表面部における前記軟磁性金属粒子が、4.0μm≦(D50-D10)≦6.0μm、および、7.0μm≦(D90-D50)≦12.0μmを満たす積層コイル型電子部品。 - 前記Siを含む酸化物が実質的に前記酸化被膜のみに含まれる請求項1に記載の積層コイル型電子部品。
- コイル導体と磁性素体とが積層された素子を有する積層コイル型電子部品であって、
前記磁性素体は軟磁性金属粒子および樹脂を含み、
前記樹脂は前記軟磁性金属粒子間の隙間スペースに充填され、
前記軟磁性金属粒子は、軟磁性金属粒子本体、および、前記軟磁性金属粒子本体を被覆する酸化被膜からなり、
前記軟磁性金属粒子本体におけるFeの含有量とSiの含有量の合計を100質量%として、Feの含有量が92.5質量%以上97.0質量%以下、Siの含有量が3.0質量%以上7.5質量%以下、Pの含有量が0.011質量%以上0.065質量%以下であり、Crを実質的に含有しておらず、
前記酸化被膜の平均厚みが5nm以上60nm以下であり、
前記磁性素体は、前記コイル導体が埋設されている中央部と、前記中央部の積層方向の上下に存在し前記コイル導体が埋設されていない表面部と、を有し、
前記中央部は、前記コイル導体同士の積層方向の中間部である層間部を含み、
前記中央部における前記軟磁性金属粒子のD50が、前記表面部における前記軟磁性金属粒子のD50よりも小さく、
前記中央部における前記軟磁性金属粒子が、0.5μm≦(D50-D10)≦3.0μm、および、1.5μm≦(D90-D50)≦4.5μmを満たし、
前記表面部における前記軟磁性金属粒子が、4.0μm≦(D50-D10)≦6.0μm、および、7.0μm≦(D90-D50)≦12.0μmを満たす積層コイル型電子部品。 - 前記積層コイル型電子部品の前記層間部の断面をSEMで観察することで得られるSEM観察画像において、
前記層間部における前記隙間スペースの面積比率が前記SEM観察画像全体に対して10.0%以上35.0%以下である請求項1~3のいずれかに記載の積層コイル型電子部品。 - 前記積層コイル型電子部品の前記層間部において、前記軟磁性金属粒子のD50-D10が3.0μm以下であり、D90-D50が4.5μm以下である請求項1~4のいずれかに記載の積層コイル型電子部品。
- 前記樹脂がフェノール樹脂またはエポキシ樹脂である請求項1~5のいずれかに記載の積層コイル型電子部品。
- 前記コイル導体と前記磁性素体との合計質量に対する前記樹脂の質量比率が0.5質量%以上3.0質量%以下である請求項1~6のいずれかに記載の積層コイル型電子部品。
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