JP7130667B2 - 構成部材が設けられた固体層を薄化する方法 - Google Patents
構成部材が設けられた固体層を薄化する方法 Download PDFInfo
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- 239000007787 solid Substances 0.000 title claims description 930
- 238000000034 method Methods 0.000 title claims description 266
- 230000004048 modification Effects 0.000 claims description 409
- 238000012986 modification Methods 0.000 claims description 409
- 239000000758 substrate Substances 0.000 claims description 382
- 239000000463 material Substances 0.000 claims description 334
- 239000013078 crystal Substances 0.000 claims description 133
- 230000008569 process Effects 0.000 claims description 121
- 238000004519 manufacturing process Methods 0.000 claims description 88
- 230000005855 radiation Effects 0.000 claims description 86
- 238000012545 processing Methods 0.000 claims description 77
- 238000002679 ablation Methods 0.000 claims description 75
- 229910052751 metal Inorganic materials 0.000 claims description 72
- 239000002184 metal Substances 0.000 claims description 71
- 238000001816 cooling Methods 0.000 claims description 68
- 230000003287 optical effect Effects 0.000 claims description 54
- 238000000926 separation method Methods 0.000 claims description 53
- 230000032798 delamination Effects 0.000 claims description 51
- 230000008859 change Effects 0.000 claims description 44
- 239000002131 composite material Substances 0.000 claims description 38
- 230000035939 shock Effects 0.000 claims description 32
- 238000011282 treatment Methods 0.000 claims description 26
- 238000004299 exfoliation Methods 0.000 claims description 22
- 238000009826 distribution Methods 0.000 claims description 20
- 239000000470 constituent Substances 0.000 claims description 18
- 230000009477 glass transition Effects 0.000 claims description 17
- 230000001902 propagating effect Effects 0.000 claims description 10
- 230000035515 penetration Effects 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 9
- 238000013500 data storage Methods 0.000 claims description 7
- 238000012876 topography Methods 0.000 claims description 6
- 230000003595 spectral effect Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 763
- 229920000642 polymer Polymers 0.000 description 144
- 235000012431 wafers Nutrition 0.000 description 136
- 230000035882 stress Effects 0.000 description 120
- 239000000945 filler Substances 0.000 description 105
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 80
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 62
- 239000007788 liquid Substances 0.000 description 61
- 229910010271 silicon carbide Inorganic materials 0.000 description 57
- 238000000576 coating method Methods 0.000 description 56
- 239000011248 coating agent Substances 0.000 description 48
- 230000007547 defect Effects 0.000 description 46
- 229910052757 nitrogen Inorganic materials 0.000 description 42
- 230000002093 peripheral effect Effects 0.000 description 36
- 230000006698 induction Effects 0.000 description 35
- 238000005498 polishing Methods 0.000 description 33
- 230000001939 inductive effect Effects 0.000 description 32
- 239000000243 solution Substances 0.000 description 32
- 230000002829 reductive effect Effects 0.000 description 31
- 239000011159 matrix material Substances 0.000 description 30
- 239000007858 starting material Substances 0.000 description 30
- 230000000087 stabilizing effect Effects 0.000 description 27
- 230000006378 damage Effects 0.000 description 24
- 239000002245 particle Substances 0.000 description 23
- 238000007654 immersion Methods 0.000 description 22
- 238000010521 absorption reaction Methods 0.000 description 21
- 230000000694 effects Effects 0.000 description 21
- 230000001419 dependent effect Effects 0.000 description 20
- 230000008901 benefit Effects 0.000 description 19
- 238000010586 diagram Methods 0.000 description 18
- 230000005540 biological transmission Effects 0.000 description 17
- 230000001965 increasing effect Effects 0.000 description 17
- 238000001069 Raman spectroscopy Methods 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 16
- 239000010703 silicon Substances 0.000 description 16
- 230000007704 transition Effects 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 15
- 239000007789 gas Substances 0.000 description 15
- 238000005530 etching Methods 0.000 description 14
- 230000001976 improved effect Effects 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 14
- 238000007493 shaping process Methods 0.000 description 14
- 239000011343 solid material Substances 0.000 description 14
- 238000004381 surface treatment Methods 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 13
- 238000000151 deposition Methods 0.000 description 13
- 230000006870 function Effects 0.000 description 13
- 230000007246 mechanism Effects 0.000 description 13
- 229910052594 sapphire Inorganic materials 0.000 description 13
- 239000010980 sapphire Substances 0.000 description 13
- 230000003993 interaction Effects 0.000 description 12
- 230000033001 locomotion Effects 0.000 description 12
- 238000003754 machining Methods 0.000 description 12
- 230000000977 initiatory effect Effects 0.000 description 11
- 238000003475 lamination Methods 0.000 description 11
- 239000011241 protective layer Substances 0.000 description 11
- 239000011258 core-shell material Substances 0.000 description 10
- 230000008021 deposition Effects 0.000 description 10
- 239000012530 fluid Substances 0.000 description 10
- 238000000227 grinding Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 10
- 239000012782 phase change material Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 229910052799 carbon Inorganic materials 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 9
- 239000002800 charge carrier Substances 0.000 description 9
- 238000000407 epitaxy Methods 0.000 description 9
- 230000010287 polarization Effects 0.000 description 9
- 230000003746 surface roughness Effects 0.000 description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 230000035508 accumulation Effects 0.000 description 8
- 238000009825 accumulation Methods 0.000 description 8
- 230000004913 activation Effects 0.000 description 8
- 238000001994 activation Methods 0.000 description 8
- 238000009529 body temperature measurement Methods 0.000 description 8
- 239000006185 dispersion Substances 0.000 description 8
- 239000002048 multi walled nanotube Substances 0.000 description 8
- 238000012546 transfer Methods 0.000 description 8
- 229910002601 GaN Inorganic materials 0.000 description 7
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 7
- 230000009471 action Effects 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 7
- 238000005336 cracking Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 238000009832 plasma treatment Methods 0.000 description 7
- -1 polydimethylsiloxane Polymers 0.000 description 7
- 239000002861 polymer material Substances 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 230000004075 alteration Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 6
- 238000005452 bending Methods 0.000 description 6
- 229920001971 elastomer Polymers 0.000 description 6
- 230000005284 excitation Effects 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- 239000000376 reactant Substances 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- 239000002109 single walled nanotube Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 5
- 230000000712 assembly Effects 0.000 description 5
- 238000000429 assembly Methods 0.000 description 5
- 230000005495 cold plasma Effects 0.000 description 5
- 239000002826 coolant Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000004205 dimethyl polysiloxane Substances 0.000 description 5
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 5
- 239000000806 elastomer Substances 0.000 description 5
- 238000003682 fluorination reaction Methods 0.000 description 5
- 230000008014 freezing Effects 0.000 description 5
- 238000007710 freezing Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 5
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 4
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000003851 corona treatment Methods 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 238000011049 filling Methods 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000000608 laser ablation Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229920001223 polyethylene glycol Polymers 0.000 description 4
- 229920006254 polymer film Polymers 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 4
- 229910052984 zinc sulfide Inorganic materials 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- 239000010431 corundum Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000013532 laser treatment Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 229910052574 oxide ceramic Inorganic materials 0.000 description 3
- 239000011224 oxide ceramic Substances 0.000 description 3
- 238000006385 ozonation reaction Methods 0.000 description 3
- 230000036961 partial effect Effects 0.000 description 3
- 230000037361 pathway Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 230000001698 pyrogenic effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910005540 GaP Inorganic materials 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 238000005234 chemical deposition Methods 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000002079 double walled nanotube Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000572 ellipsometry Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 2
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(iii) oxide Chemical compound O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000543 intermediate Substances 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 239000012454 non-polar solvent Substances 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 238000002407 reforming Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical group [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229920002748 Basalt fiber Polymers 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000005374 Kerr effect Effects 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- BZLVMXJERCGZMT-UHFFFAOYSA-N Methyl tert-butyl ether Chemical compound COC(C)(C)C BZLVMXJERCGZMT-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical group [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 230000005697 Pockels effect Effects 0.000 description 1
- 238000003841 Raman measurement Methods 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910004217 TaSi2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- FKSZLDCMQZJMFN-UHFFFAOYSA-N [Mg].[Pb] Chemical compound [Mg].[Pb] FKSZLDCMQZJMFN-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920006231 aramid fiber Polymers 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 238000000418 atomic force spectrum Methods 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000002134 carbon nanofiber Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 125000003636 chemical group Chemical group 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000000254 damaging effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 229910000154 gallium phosphate Inorganic materials 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 238000001036 glow-discharge mass spectrometry Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000026030 halogenation Effects 0.000 description 1
- 238000005658 halogenation reaction Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000012497 inhomogeneous sample Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000012784 inorganic fiber Substances 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 230000001795 light effect Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000678 plasma activation Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000013047 polymeric layer Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000011165 process development Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
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- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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- B28—WORKING CEMENT, CLAY, OR STONE
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- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- B23K2103/00—Materials to be soldered, welded or cut
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- C30B29/10—Inorganic compounds or compositions
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
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- H01L29/872—Schottky diodes
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Description
6 HCl+2 Al+12 H2O → 2[AlCl3 * 6 H2O]+3 H2
低濃度のドーピング:7μJ-21mOhmcm
高濃度のドーピング:8μJ-16mOhmcm
低濃度のドーピング:9.5μJ-21mOhmcm
高濃度のドーピング:12μJ-16mOhmcm
E 単位μJのエネルギー
E0 最低濃度のドーピングのときのオフセットエネルギー
K エネルギースケーリングの係数
R 測定されたドーピング濃度
B 基本ドーピング濃度(21mOhmcm)
E=E0+(B-R)*K
ここで
K=1/(21-16)μJ/mOhmcm=0.2μJ/mOhmcm
E0=7μJ
B=21mOhmcm
例:測定されたドーピング濃度が19mOhmcm:E=7.4μJ
E 単位μJのエネルギー
E0 最低濃度のドーピングのときのオフセットエネルギー
K エネルギースケーリングの係数
R 測定されたドーピング濃度
B 基本ドーピング濃度(21mOhmcm)
E=E0+(B-R)*K
ここで
K=2.5/(21-16)μJ/mOhmcm=0.5μJ/mOhmcm
E0=9.5μJ
B=21mOhmcm
例:測定されたドーピング濃度が19mOhmcm:E=10.5μJ
Claims (15)
- 少なくとも1つの固体物(1)から少なくとも1つの固体層(4)を分離する方法であって、
レーザビームを用いて複数の改質(9)を固体物(1)の内部に形成して、剥離領域(8)を形成するステップと、
最初は露出している前記固体物(1)の表面(5)に、または前記表面(5)の上方に、少なくとも1つの金属層および/または電気的な構成部材(150)を配置または形成することによって、複合構造物を形成するステップであって、露出している前記表面(5)は、分離すべき前記固体層(4)の構成部分であるステップと、
前記固体物(1)に外部からの力を及ぼして、前記固体物(1)に応力を生成する、または前記固体物(1)に内部の力を生成するステップであって、前記外部からの力または前記内部の力は、前記力によって、前記剥離領域(8)に沿って亀裂伝播が生じるような強さであるステップと、
を少なくとも含む方法において、
相前後して続く2つの改質の間に伝播する亀裂は、第1の改質の中心の下方にある領域から、第2の改質の中心の上方にある領域へと延在し、鋸歯パターンを形成し、
前記剥離領域(8)を形成するための前記改質を、前記複合構造物の前に形成することを特徴とする、
方法。 - 前記外部からの力を及ぼすために、前記複合構造物または分離すべき前記固体層(4)の露出した表面(5)に受容層(140)を配置し、
前記受容層(140)は、ポリマー材料を有し、特に機械的に、前記固体物(1)に応力を生成するために、前記受容層(140)に熱的衝撃を印加し、
ここで前記熱的衝撃印加とは、前記受容層(140)を周囲温度よりも低い温度まで冷却することであり、前記冷却を、前記受容層(140)のポリマー材料がガラス転移を引き起こすようにして行い、
前記応力によって、前記剥離領域(8)に沿って前記固体物(1)内に亀裂が伝播し、前記亀裂によって、第1の前記固体層(4)を前記固体物(1)から分離する、
請求項1記載の方法。 - レーザ放射の経路において、ドナー基板(1)にレーザ放射を導入する前に回折光学素子(DOE)が配置されており、複数の焦点を生成するために前記レーザ放射を前記回折光学素子によって複数の光路に分割し、
前記回折光学素子は、好ましくは、200μmの長さにわたり像面湾曲を引き起こし、前記像面湾曲は、50μm以下であり、特に30μm以下であり、または10μm以下であり、または5μm以下であり、または3μm以下であり、
前記ドナー基板の材料特性を変化させるために前記回折光学素子によって、少なくとも2つの焦点を同時に生成し、好ましくは少なくともまたは厳密に3つの、あるいは少なくともまたは厳密に4つの、あるいは少なくともまたは厳密に5つまたは5つまでの、あるいは少なくともまたは厳密に10個または10個までの、あるいは少なくともまたは厳密に20個または20個までの、あるいは少なくともまたは厳密に50個または50個までの、あるいは100個までの焦点を同時に生成する、
請求項1または2記載の方法。 - 前記固体物をレーザ印加装置に対し相対的に移動させるステップであって、そのつど少なくとも1つの改質を生成するために、前記レーザ印加装置を用いて複数のレーザビームを相前後して生成するステップを含み、前記ステップにおいて、前記レーザビームを規定どおりに集束するために、かつ/またはレーザエネルギーを整合させるために、特に連続的に、少なくとも1つのパラメータ、特に複数のパラメータに依存して、前記レーザ印加装置を調整する、
請求項1から3までのいずれか1項記載の方法。 - 前記レーザビームは、ドナー基板の平坦な表面を介して前記ドナー基板(2)中に侵入し、前記レーザビームは前記ドナー基板の平坦な表面に対し、前記レーザビームが前記ドナー基板の長手軸線に対し0°または180°とは異なる角度で前記ドナー基板に侵入するように傾斜しており、前記レーザビームを、前記改質を前記ドナー基板に生成するために集束させるステップ、または
前記ドナー基板の材料を、前記ドナー基板の周方向で延在する表面から出発して、前記ドナー基板の中心に向かう方向で切除するステップであって、前記材料を好ましくは研磨工具またはアブレーションレーザビームによって切除するステップ、
を含む、
請求項1から4までのいずれか1項記載の方法。 - 前記固体物は、平坦な主表面に対し傾斜した結晶格子面を有し、前記固体物の前記主表面は、前記固体物の長手方向において一方の側で境界を成し、結晶格子面法線は、主表面法線に対し第1の方向で傾斜し、前記改質は、ドナー基板の材料特性の変化であり、
前記材料特性の変化は、前記固体物におけるレーザ放射の侵入箇所の変化により、少なくとも部分的に線状造形物を形成し、
前記材料特性の変化を、生成面上に、特に少なくとも1つの生成面上に、または厳密に1つの生成面上に、または前記剥離領域内に、生成し、
前記固体物の前記結晶格子面は、前記生成面または前記剥離領域に対し、傾斜して配向されており、
前記線状造形物は、前記生成面または前記剥離領域と前記結晶格子面との間の界面に生じる分割線に対し傾斜しており、
変化させられた材料特性によって、前記固体物(1)に臨界未満の亀裂の形態で亀裂が入り、
前記ドナー基板に外部からの力を及ぼして、前記臨界未満の亀裂を結合させることにより、前記固体層を分離させ、または前記臨界未満の亀裂を結合させながら前記固体層が前記ドナー基板から剥離する程度の量だけ、前記生成面上または前記剥離領域内の材料をレーザ放射により変化させる、
請求項1から5までのいずれか1項記載の方法。 - レーザ放射を、5ns未満の、または2ns未満の、または1ns未満の、特に700ps未満の、または500ps未満の、または400ps未満の、または300ps未満の、または200ps未満の、または150ps未満の、または100ps未満の、または50ps未満の、または10ps未満のパルス長で生成し、かつ
前記レーザ放射を、100nJ~1mJ、または500nJ~100μJ、または1μJ~50μJ、または0.1μJ~50μJにあるパルスエネルギーで生成する、
請求項1から6までのいずれか1項記載の方法。 - 前記改質は、少なくとも1つの剥離領域を予め定め、ここで前記剥離領域は、少なくとも1つの3次元輪郭を表し、または
前記固体物の内部に、非平坦な、特に湾曲した、剥離領域を形成するために、複数の改質を生成する、
請求項1から7までのいずれか1項記載の方法。 - 第1のパラメータは、前記固体物(1)の材料の平均屈折率であり、または規定された改質(2)を生成するためにレーザビーム(10)を横断させるべき前記固体物(1)の領域内の前記固体物(1)の材料の屈折率であり、
第2のパラメータは、規定された改質(2)を生成するためにレーザビーム(10)を横断させるべき前記固体物(1)の領域内の加工処理深さであり、
前記第1のパラメータを、屈折率特定手段を用いて、特に分光反射を用いて、特定し、かつ/または
前記第2のパラメータを、トポグラフィ特定手段を用いて、特にクロマティック共焦点距離センサを用いて、特定し、
前記パラメータのためのデータを、特に前記第1のパラメータおよび前記第2のパラメータのためのデータを、データ記憶装置(12)において準備し、少なくとも前記改質(2)の生成前に制御装置(14)に供給し、前記制御装置(14)は、生成すべき前記改質(2)の個々の箇所に応じて、レーザ印加装置(8)を調整し、
前記制御装置(14)は、前記レーザ印加装置(8)を調整するために、距離パラメータに関する距離データも処理し、前記距離パラメータは、個々の前記改質(2)を前記固体物(1)中に生成するために改質生成時点にレーザビーム(10)が導入される個々の箇所から前記レーザ印加装置(8)までの間隔を表し、前記距離データを、センサ装置(16)を用いて捕捉し、
前記レーザ印加装置(8)の調整を、それぞれ1つのセンサ手段を用いて、特に屈折率特定手段とトポグラフィ特定手段とを用いて、改質生成中に行われる前記第1のパラメータおよび前記第2のパラメータの特定に応じて行う、
請求項8記載の方法。 - 少なくとも1つの、特に複数の第2の剥離面を予め定めるために、レーザビームを用いて第2のグループの改質を生成し、第1の剥離面と第2の剥離面とは互いに直交して配向されており、
前記固体物から分離された前記固体層を、前記第2の剥離面に沿って分割して固体素子を個別化する、
請求項1から9までのいずれか1項記載の方法。 - 前記表面に応力生成層を押圧するために、圧力印加装置の少なくとも1つの圧力印加部材を、前記応力生成層の少なくとも1つの予め定められた部分に押圧するステップを含み、
前記圧力印加部材を、少なくとも、前記応力生成層への熱的衝撃印加中および/または亀裂伝播中、前記応力生成層に押圧する、
請求項1から10までのいずれか1項記載の方法。 - 前記固体物へ導入する前に前記レーザビームのビーム特性を変化させるステップを含み、前記ビーム特性は、焦点における強度分布であり、前記ビーム特性の変化または整合を、少なくともまたは厳密に1つの空間光変調器によって、かつ/または少なくともまたは厳密に1つの回折光学素子によってもたらし、前記空間光変調器および/または前記回折光学素子は、レーザ放射のビーム路において前記固体物と放射源との間に配置されている、
請求項1から11までのいずれか1項記載の方法。 - 前記固体物中の改質を、金属コンタクト層を生成または配置する前に生成する、
請求項1から12までのいずれか1項記載の方法。 - 請求項1から13までのいずれか1項記載の方法に従い製造された固体物(1)であって、
前記固体物(1)は、少なくとも、
レーザ放射により生成された改質(9)から成る、前記固体物(1)内部の剥離領域(8)と、
高温処理法により結果として生じた領域(145)と、
を有し、
前記領域(145)に、前記少なくとも1つの金属層および/または前記電気的な構成部材(150)が配置または形成されている、
固体物。 - マルチコンポーネント集成体であって、
前記マルチコンポーネント集成体は、少なくとも、固体層と、前記固体層の第1の表面に形成された金属層および/または前記固体層の第1の表面に形成された電気的な構成部材(150)と、を有し、
前記固体層は、(質量の点で)50%よりも多くが、特に(質量の点で)75%よりも多くが、または(質量の点で)90%よりも多くが、または(質量の点で)95%よりも多くが、または(質量の点で)98%よりも多くが、または(質量の点で)99%よりも多くが、SiCから成り、
前記固体層は第1の表面の領域において、圧縮応力を生成する改質または改質構成部分を有し、
前記改質は、前記固体層の非晶化された構成部分であり、
前記改質は、第2の表面よりも前記第1の表面の近くに離間されており、または前記第1の表面をいっしょに形成し、前記第2の表面は、前記第1の表面に対し平行にまたは実質的に平行に形成されており、
前記第1の表面は平坦または実質的に平坦であり、
相前後して続く2つの改質の間に伝播する亀裂は、第1の改質の中心の下方にある領域から、第2の改質の中心の上方にある領域へと延在し、鋸歯パターンを形成する、
マルチコンポーネント集成体。
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Also Published As
Publication number | Publication date |
---|---|
US11869810B2 (en) | 2024-01-09 |
TWI706453B (zh) | 2020-10-01 |
TW201933453A (zh) | 2019-08-16 |
WO2018192691A1 (de) | 2018-10-25 |
KR20200008566A (ko) | 2020-01-28 |
CN110691671A (zh) | 2020-01-14 |
JP2020520087A (ja) | 2020-07-02 |
EP3612342A1 (de) | 2020-02-26 |
EP3612342B1 (de) | 2024-02-28 |
EP3612343A1 (de) | 2020-02-26 |
US20200388538A1 (en) | 2020-12-10 |
WO2018192689A1 (de) | 2018-10-25 |
JP2020518130A (ja) | 2020-06-18 |
KR20220153127A (ko) | 2022-11-17 |
CN110691671B (zh) | 2023-10-10 |
CN110769967A (zh) | 2020-02-07 |
JP7250695B2 (ja) | 2023-04-03 |
KR102551442B1 (ko) | 2023-07-06 |
US20210197314A1 (en) | 2021-07-01 |
KR20200010256A (ko) | 2020-01-30 |
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