JP7106681B2 - デュアルロードロックチャンバ - Google Patents
デュアルロードロックチャンバ Download PDFInfo
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- JP7106681B2 JP7106681B2 JP2020564518A JP2020564518A JP7106681B2 JP 7106681 B2 JP7106681 B2 JP 7106681B2 JP 2020564518 A JP2020564518 A JP 2020564518A JP 2020564518 A JP2020564518 A JP 2020564518A JP 7106681 B2 JP7106681 B2 JP 7106681B2
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- chamber
- substrate
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- support surfaces
- load lock
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/30—End effector
- Y10S901/31—Gripping jaw
- Y10S901/36—Actuating means
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (15)
- 第1の内部容積と、該第1の内部容積内に配置された第1の基板支持体とを有する第1のロードロックチャンバであって、前記第1の基板支持体が、対応する第1の複数の基板を支持するように垂直方向に離間された第1の複数の支持面を含み、前記第1の複数の支持面のうちの隣接する支持面同士が第1の所定の距離だけ離間される、第1のロードロックチャンバ;
前記第1の基板支持体内に配置されて、前記第1の複数の基板を加熱又は冷却する少なくとも1つの伝熱装置;及び
前記第1のロードロックチャンバに隣接して配置され、かつ第2の内部容積と、該第2の内部容積内に配置された第2の基板支持体とを有する第2のロードロックチャンバであって、前記第2の基板支持体が、対応する第2の複数の基板を支持するように垂直方向に離間された第2の複数の支持面を含み、前記第2の複数の支持面のうちの隣接する支持面同士が、前記第1の所定の距離より短い第2の所定の距離だけ離間される、第2のロードロックチャンバ
を備えている、デュアルロードロックチャンバ。 - 前記第2の所定の距離が前記第1の所定の距離の半分である、請求項1に記載のデュアルロードロックチャンバ。
- 前記第1の複数の支持面が2つの第1の支持面であり、前記第2の複数の支持面が2つの第2の支持面である、請求項1に記載のデュアルロードロックチャンバ。
- 前記少なくとも1つの伝熱装置が、前記第1の複数の支持面のうちの最下部の支持面に隣接して配置される、請求項3に記載のデュアルロードロックチャンバ。
- 前記第1の複数の支持面のうちの最上部の支持面に隣接して配置された第2の伝熱装置をさらに含む、請求項4に記載のデュアルロードロックチャンバ。
- 前記第1のロードロックチャンバが、前記第1の複数の支持面から離すようにまたは前記第1の複数の支持面上に載せるように、前記第1の複数の基板を昇降させるように構成されたリフトアセンブリをさらに含む、請求項1から5のいずれか一項に記載のデュアルロードロックチャンバ。
- 前記少なくとも1つの伝熱装置が抵抗加熱素子である、請求項1から5のいずれか一項に記載のデュアルロードロックチャンバ。
- 前記少なくとも1つの伝熱装置が冷却プレートである、請求項1から5のいずれか一項に記載のデュアルロードロックチャンバ。
- 前記第1のロードロックチャンバに結合して前記第1の内部容積にガスを供給するガス供給源をさらに含む、請求項1から5のいずれか一項に記載のデュアルロードロックチャンバ。
- ファクトリインターフェース;
基板移送チャンバ;
前記基板移送チャンバに結合した1つ以上のマルチチャンバ処理システム;
前記ファクトリインターフェースを前記基板移送チャンバに結合するデュアルロードロックチャンバであって、請求項1から5のいずれか一項に記載のデュアルロードロックチャンバ;及び
前記基板移送チャンバ内に配置され、前記デュアルロードロックチャンバと前記1つ以上のマルチチャンバ処理システムとの間で基板を移送するように構成された真空ロボット
を備えている、処理システム。 - 前記真空ロボットが、複数のブレードを含み、前記複数のブレードの各々が、隣接するブレードから垂直距離だけ離間されている、請求項10に記載の処理システム。
- 前記第2の所定の距離が前記垂直距離に等しい、請求項11に記載の処理システム。
- 前記第1の所定の距離が前記垂直距離の2倍の大きさである、請求項11に記載の処理システム。
- 前記少なくとも1つの伝熱装置が抵抗加熱素子又は冷却プレートのいずれかである、請求項10に記載の処理システム。
- 前記第1のロードロックチャンバが、前記第1の複数の支持面から離すようにまたは前記第1の複数の支持面上に載せるように、前記第1の複数の基板を昇降させるように構成されたリフトアセンブリをさらに含む、請求項10に記載の処理システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/983,683 | 2018-05-18 | ||
US15/983,683 US10720348B2 (en) | 2018-05-18 | 2018-05-18 | Dual load lock chamber |
PCT/US2019/031257 WO2019221986A1 (en) | 2018-05-18 | 2019-05-08 | Dual load lock chamber |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021524159A JP2021524159A (ja) | 2021-09-09 |
JP7106681B2 true JP7106681B2 (ja) | 2022-07-26 |
Family
ID=68533424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020564518A Active JP7106681B2 (ja) | 2018-05-18 | 2019-05-08 | デュアルロードロックチャンバ |
Country Status (6)
Country | Link |
---|---|
US (2) | US10720348B2 (ja) |
JP (1) | JP7106681B2 (ja) |
KR (1) | KR102458173B1 (ja) |
CN (1) | CN112074942A (ja) |
TW (2) | TWI753655B (ja) |
WO (1) | WO2019221986A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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US10541157B2 (en) * | 2007-05-18 | 2020-01-21 | Brooks Automation, Inc. | Load lock fast pump vent |
JP7394554B2 (ja) * | 2019-08-07 | 2023-12-08 | 東京エレクトロン株式会社 | 基板処理システム |
KR102515863B1 (ko) * | 2020-03-24 | 2023-03-31 | 주식회사 히타치하이테크 | 진공 처리 장치 |
US11581203B2 (en) * | 2020-09-02 | 2023-02-14 | Applied Materials, Inc. | Systems for integrating load locks into a factory interface footprint space |
CN112151431B (zh) * | 2020-09-25 | 2023-07-11 | 北京北方华创微电子装备有限公司 | 预装载腔室及半导体工艺平台 |
US20230113673A1 (en) * | 2021-10-12 | 2023-04-13 | Applied Materials, Inc. | Factory interface robots usable with integrated load locks |
WO2024166739A1 (ja) * | 2023-02-09 | 2024-08-15 | 東京エレクトロン株式会社 | 基板処理装置 |
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KR102458173B1 (ko) | 2022-10-25 |
US20200350191A1 (en) | 2020-11-05 |
TWI714085B (zh) | 2020-12-21 |
TWI753655B (zh) | 2022-01-21 |
CN112074942A (zh) | 2020-12-11 |
WO2019221986A1 (en) | 2019-11-21 |
US20190355600A1 (en) | 2019-11-21 |
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