JP7038897B2 - ナノ秒パルサーのバイアス補償 - Google Patents
ナノ秒パルサーのバイアス補償 Download PDFInfo
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- JP7038897B2 JP7038897B2 JP2021504458A JP2021504458A JP7038897B2 JP 7038897 B2 JP7038897 B2 JP 7038897B2 JP 2021504458 A JP2021504458 A JP 2021504458A JP 2021504458 A JP2021504458 A JP 2021504458A JP 7038897 B2 JP7038897 B2 JP 7038897B2
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- high voltage
- power supply
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- power system
- bias
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Classifications
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32146—Amplitude modulation, includes pulsing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32128—Radio frequency generated discharge using particular waveforms, e.g. polarised waves
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33507—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
- H02M3/33523—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters with galvanic isolation between input and output of both the power stage and the feedback loop
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
- H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
- H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
- H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device
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- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M1/00—Analogue/digital conversion; Digital/analogue conversion
- H03M1/12—Analogue/digital converters
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
- H05K7/20136—Forced ventilation, e.g. by fans
- H05K7/20154—Heat dissipaters coupled to components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
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- H05K7/20172—Fan mounting or fan specifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20254—Cold plates transferring heat from heat source to coolant
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20272—Accessories for moving fluid, for expanding fluid, for connecting fluid conduits, for distributing fluid, for removing gas or for preventing leakage, e.g. pumps, tanks or manifolds
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20281—Thermal management, e.g. liquid flow control
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2039—Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
- H05K7/20509—Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0048—Circuits or arrangements for reducing losses
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0064—Magnetic structures combining different functions, e.g. storage, filtering or transformation
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/32—Means for protecting converters other than automatic disconnection
- H02M1/327—Means for protecting converters other than automatic disconnection against abnormal temperatures
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/003—Constructional details, e.g. physical layout, assembly, wiring or busbar connections
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33507—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Description
本出願は、2018年7月27日に出願された、「ナノ秒パルサーシステム(NANOSECOND PULSER SYSTEM)」という名称の米国仮特許出願第62/711,464号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2018年7月27日に出願された、「ナノ秒パルサー熱管理(NANOSECOND PULSER THERMAL MANAGEMENT)」という名称の米国仮特許出願第62/711,334号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2018年7月27日に出願された、「ナノ秒パルサーパルス発生(NANOSECOND PULSER PULSE GENERATION)」という名称の米国仮特許出願第62/711,457号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2018年7月27日に出願された、「ナノ秒パルサーADCシステム(NANOSECOND PULSER ADC SYSTEM)」という名称の米国仮特許出願第62/711,347号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2018年7月27日に出願された、「エッジリングパワーシステム(EDGE RING POWER SYSTEM)」という名称の米国仮特許出願第62/711,467号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2018年7月27日に出願された、「ナノ秒パルサーバイアス補償(NANOSECOND PULSER BIAS COMPENSATION)」という名称の米国仮特許出願第62/711,406号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2018年7月27日に出願された、「ナノ秒パルサー制御モジュール(NANOSECOND PULSER CONTROL MODULE)」という名称の米国仮特許出願第62/711,468号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2018年8月10日に出願された、「RFプラズマ反応器の為のプラズマシース制御(PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS)」という名称の米国仮特許出願第62/711,523号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2019年1月1日に出願された、「プラズマ制御用途向けのソース及びシンク能力を備えた効率的ナノ秒パルサー(EFFICIENT NANOSECOND PULSER WITH SOURCE AND SINK CAPABILITY FOR PLASMA CONTROL APPLICATIONS)」という名称の米国仮特許出願第62/789,523号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2019年1月1日に出願された、「ナノ秒パルサー回路における効率的なエネルギー回収(EFFICIENT ENERGY RECOVERY IN A NANOSECOND PULSER CIRCUIT)」という名称の米国仮特許出願第62/789,526号の優先権を主張するものであり、この仮特許出願の全体が参照により本明細書に組み込まれる。
本出願は、2019年7月26日に出願された、「ナノ秒パルサーバイアス補償(NANOSECOND PULSER BIAS COMPENSATION)」という名称の米国特許出願第16/523,840号の優先権を主張すると共に、その一部継続出願であり、この特許出願の全体が参照により本明細書に組み込まれる。
〔付記1〕
高電圧電力システムであって、
高電圧パルス電源と、
前記高電圧パルス電源に電気的に結合されたトランスと、
前記トランスと電気的に結合され、振幅が1kVを超え、パルスの繰返し周波数が1kHzを超える高電圧パルスを出力するように構成された出力と、
前記出力と並列に配置されたバイアス補償回路とを備え、前記バイアス補償回路が、
バイアス補償ダイオードと、
前記バイアス補償ダイオードと直列に配置された直流電源とを備えている、高電圧電力システム。
〔付記2〕
更に、少なくとも前記直流電源を跨いで配置され、約10μF未満のキャパシタンスを有するバイアス補償コンデンサを含む、付記1に記載の高電圧電力システム
〔付記3〕
前記高電圧パルス電源がナノ秒パルサーとトランスを含む、付記1に記載の高電圧電力システム。
〔付記4〕
前記高電圧電源が、直列に配置された複数のスイッチと1つのトランスを含む、付記1に記載の高電圧電力システム。
〔付記5〕
前記バイアス補償回路が、前記バイアス補償ダイオードを跨いで配置された高電圧スイッチを含み、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしているときに開状態になるように構成され、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしていないときに閉状態になるように構成されている、付記1に記載の高電圧電力システム。
〔付記6〕
前記高電圧スイッチが、直列に配置された複数のスイッチを含む、付記5に記載の高電圧電力システム。
〔付記7〕
更に、前記高電圧スイッチと直列に配置され、約1mH未満のインダクタンスを有するインダクタを含む、付記5に記載の高電圧電力システム。
〔付記8〕
前記出力が、プラズマと容量的に結合された電極と結合されている、付記1に記載の高電圧電力システム。
〔付記9〕
高電圧電力システムであって、
高電圧パルス電源と、
前記高電圧パルス電源と電気的に結合され、振幅が1kVを超え、パルスの繰返し周波数が2kHzを超える高電圧パルスを出力するように構成された出力と、
バイアス補償ダイオードと、
前記バイアス補償ダイオードと直列に配置された直流電源を備え、前記バイアス補償ダイオードと前記直流電源は前記出力と並列に配置されており、更に、
前記バイアス補償ダイオードを跨いで結合された高電圧スイッチを備え、前記高電圧スイッチは、前記高電圧スイッチング電源がパルシングしているときにオフになるように構成され、前記高電圧スイッチは、前記高電圧スイッチング電源がパルシングしていないときにオンになるように構成されている、高電圧電力システム。
〔付記10〕
更に、少なくとも前記直流電源を跨いで配置されたバイアス補償コンデンサを含む、付記9に記載の高電圧電力システム。
〔付記11〕
前記バイアス補償ダイオード、前記直流電源、及び前記高電圧スイッチが、前記出力を跨いで高電圧電力システムに配置されたバイアス補償回路を含む、付記9に記載の高電圧電力システム。
〔付記12〕
前記出力がプラズマと容量的に結合された電極と結合される、付記9に記載の高電圧電力システム。
〔付記13〕
前記高電圧スイッチが、前記高電圧パルス電源がパルシングしているときに開状態であるように構成され、前記高電圧スイッチが、前記高電圧パルス電源がパルシングしていないときに閉状態であるように構成されている、付記9に記載の高電圧電力システム。
〔付記14〕
前記直流電源が-5kV~+5kVを供給するように構成されている、付記9に記載の高電圧電力システム。
〔付記15〕
前記高電圧スイッチがスナバ回路を含む、付記9に記載の高電圧電力システム。
〔付記16〕
前記高電圧スイッチが、直列に配置された複数のスイッチを含み、又、複数の電圧共有抵抗器を有し、その結果、前記複数の電圧共有抵抗器の各電圧共有抵抗器が前記複数のスイッチの対応するスイッチを跨いで配置される、付記9に記載の高電圧電力システム。
〔付記17〕
前記バイアス補償ダイオードが、10Hz~10kHzの周波数で10A~1kAの電流を伝導するように構成されている、付記9に記載の高電圧電力システム。
〔付記18〕
前記高電圧パルス電源と前記バイアス補償ダイオードとに電気的に結合されたバイアスコンデンサを更に備え、前記バイアスコンデンサは約10μF未満の値を有する、付記9に記載の高電圧電力システム。
〔付記19〕
前記高電圧スイッチと直列に配置され、約1mH未満のインダクタンスを有するインダクタを更に備えた付記9に記載の高電圧電力システム。
〔付記20〕
更に、前記高電圧スイッチと直列に配置され、約1,000オーム未満の抵抗値を有する抵抗器を備えた付記9に記載の高電圧電力システム。
〔付記21〕
方法であって、
直流電源と直列に配置されたバイアス補償スイッチを開き、前記バイアス補償スイッチと前記直流電源は負荷を跨いで配置され、
1kVを超える電圧と20kHZを超えるパルス繰返し周波数を有する高電圧電源を負荷にパルシングし、
前記バイアス補償スイッチを閉じ、
前記高電圧電源をパルシングしないことを含む方法。
〔付記22〕
前記負荷が、プラズマと容量的に結合された電極を含む、付記21に記載の方法。
101 パルサー段
102 抵抗出力段
103 リード段
104 直流バイアス回路
106 負荷段
505 バイアス補償ダイオード
510 バイアス補償コンデンサ
701 第2のパルサー
705 第2のパルサー回路
710 スイッチ
905 高電圧スイッチ
1214、1314、1414 バイアス補償回路
1220、1225、1230、1235 スイッチ
1420 バイアス補償インダクタ
1505 スイッチモジュール
1510 スイッチ
1520 スナバコンデンサ
1525 フリーホイールダイオード
1530 ゲートドライバ回路
1540 電源
1560 高電圧源
1565 負荷
1905 エネルギー回収回路
1910 ダイオード
1915 インダクタ
C1 漂遊キャパシタンス
C2、C3、C4、C9、C11、C14 コンデンサ
C5 ソーススナバコンデンサ
C12 バイアスコンデンサ
C15 スナバコンデンサ
D2 ソースフリーホイールダイオード
D4 ソーススナバダイオード
D7 ブロッキングダイオード
D8 スナバダイオード
L9 インダクタ
R1、R2、R6、R9、R11、R13 抵抗器
R10 スナバ抵抗器
R15、R16、R17、R18 電圧共有抵抗器
S1、S4 スイッチ
T1、T2 トランス
Claims (22)
- 高電圧電力システムであって、
高電圧パルス電源と、
前記高電圧パルス電源に電気的に結合されたトランスと、
前記トランスと電気的に結合され、振幅が1kVを超え、パルスの繰返し周波数が1kHzを超える高電圧パルスを出力するように構成された出力と、
前記出力と並列に配置されたバイアス補償回路と、を備え、
前記バイアス補償回路は、
バイアス補償ダイオードと、
前記バイアス補償ダイオードと直列に配置された直流電源と、
プラズマチャンバ内に配置された電極であって、前記電極は前記出力と電気的に結合され、前記電極は前記バイアス補償回路と電気的に結合され、前記電極は前記プラズマチャンバ内でプラズマが形成されたときに前記プラズマと容量的に結合される、前記電極と、を備える、
高電圧電力システム。 - 更に、少なくとも前記直流電源を跨いで配置されたバイアス補償コンデンサであって、約10μF未満のキャパシタンスを有する前記バイアス補償コンデンサを含む、請求項1に記載の高電圧電力システム。
- 前記高電圧パルス電源がナノ秒パルサーとトランスを含む、請求項1に記載の高電圧電力システム。
- 前記高電圧パルス電源が、直列に配置された複数のスイッチと1つのトランスを含む、請求項1に記載の高電圧電力システム。
- 前記バイアス補償回路が、前記バイアス補償ダイオードを跨いで配置された高電圧スイッチを含み、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしているときに開状態になるように構成され、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしていないときに閉状態になるように構成されている、請求項1に記載の高電圧電力システム。
- 前記高電圧スイッチが、直列に配置された複数のスイッチを含む、請求項5に記載の高電圧電力システム。
- 更に、前記高電圧スイッチと直列に配置されたインダクタであって、約1mH未満のインダクタンスを有する前記インダクタを含む、請求項5に記載の高電圧電力システム。
- 高電圧電力システムであって、
高電圧パルス電源と、
前記高電圧パルス電源と電気的に結合され、振幅が1kVを超え、パルスの繰返し周波数が2kHzを超える高電圧パルスを出力するように構成された出力と、
バイアス補償ダイオードと、
前記バイアス補償ダイオードと直列に配置された直流電源を備え、前記バイアス補償ダイオードと前記直流電源は前記出力と並列に配置されており、更に、
前記バイアス補償ダイオードを跨いで結合された高電圧スイッチを備え、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしているときにオフになるように構成され、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしていないときにオンになるように構成されており、
前記出力がプラズマと容量的に結合された電極と結合される、
高電圧電力システム。 - 更に、少なくとも前記直流電源を跨いで配置されたバイアス補償コンデンサを含む、請求項8に記載の高電圧電力システム。
- 前記バイアス補償ダイオード、前記直流電源、及び前記高電圧スイッチが、前記出力を跨いで高電圧電力システムに配置されたバイアス補償回路を含む、請求項8に記載の高電圧電力システム。
- 前記高電圧スイッチが、前記高電圧パルス電源がパルシングしているときに開状態であるように構成され、前記高電圧スイッチが、前記高電圧パルス電源がパルシングしていないときに閉状態であるように構成されている、請求項8に記載の高電圧電力システム。
- 前記直流電源が-5kV~+5kVを供給するように構成されている、請求項8に記載の高電圧電力システム。
- 前記高電圧スイッチがスナバ回路を含む、請求項8に記載の高電圧電力システム。
- 前記高電圧スイッチが、直列に配置された複数のスイッチを含み、複数の電圧共有抵抗器を有し、その結果、前記複数の電圧共有抵抗器の各電圧共有抵抗器が前記複数のスイッチの対応するスイッチを跨いで配置される、請求項8に記載の高電圧電力システム。
- 前記バイアス補償ダイオードが、10Hz~10kHzの周波数で10A~1kAの電流を伝導するように構成されている、請求項8に記載の高電圧電力システム。
- 前記高電圧パルス電源と前記バイアス補償ダイオードとに電気的に結合されたバイアスコンデンサを更に備え、前記バイアスコンデンサは約10μF未満の値を有する、請求項8に記載の高電圧電力システム。
- 前記高電圧スイッチと直列に配置されたインダクタであって、約1mH未満のインダクタンスを有する前記インダクタを更に備えた請求項8に記載の高電圧電力システム。
- 更に、前記高電圧スイッチと直列に配置された抵抗器であって、約1,000オーム未満の抵抗値を有する前記抵抗器を備えた請求項8に記載の高電圧電力システム。
- 方法であって、
直流電源と直列に配置されたバイアス補償スイッチを開き、前記バイアス補償スイッチと前記直流電源はプラズマと容量的に結合された電極を跨いで配置され、
1kVを超える電圧と20kHZを超えるパルス繰返し周波数を有する高電圧電源を負荷にパルシングし、
前記バイアス補償スイッチを閉じ、
前記高電圧電源をパルシングしないことを含む方法。 - 前記負荷が、プラズマと容量的に結合された電極を含む、請求項19に記載の方法。
- 高電圧電力システムであって、
高電圧パルス電源と、
前記高電圧パルス電源に電気的に結合されたトランスと、
前記トランスと電気的に結合され、振幅が1kVを超え、パルスの繰返し周波数が1kHzを超える高電圧パルスを出力するように構成された出力と、
前記出力と並列に配置されたバイアス補償回路と、を備え、
前記バイアス補償回路は、
バイアス補償ダイオードと、
前記バイアス補償ダイオードと直列に配置された直流電源と、
少なくとも前記直流電源を跨いで配置されたバイアス補償コンデンサであって、約10μF未満のキャパシタンスを有する前記バイアス補償コンデンサと、を備え、
前記出力がプラズマと容量的に結合された電極と結合される、
高電圧電力システム。 - 高電圧電力システムであって、
高電圧パルス電源と、
前記高電圧パルス電源に電気的に結合されたトランスと、
前記トランスと電気的に結合され、振幅が1kVを超え、パルスの繰返し周波数が1kHzを超える高電圧パルスを出力するように構成された出力と、
前記出力と並列に配置されたバイアス補償回路と、を備え、
前記バイアス補償回路は、
バイアス補償ダイオードと、
前記バイアス補償ダイオードと直列に配置された直流電源と、
前記バイアス補償ダイオードを跨いで配置された高電圧スイッチであって、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしているときに開状態になるように構成され、前記高電圧スイッチは、前記高電圧パルス電源がパルシングしていないときに閉状態になるように構成されている、前記高電圧スイッチと、
前記高電圧スイッチと直列に配置されたインダクタであって、約1mH未満のインダクタンスを有する前記インダクタと、を備え、
前記出力がプラズマと容量的に結合された電極と結合される、
高電圧電力システム。
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