JP7029520B2 - 半導体製造装置 - Google Patents
半導体製造装置 Download PDFInfo
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Description
Claims (11)
- 複数のチップを提供するためのチップ供給モジュールと、
キャリア板及び前記キャリア板を載置するためのキャリア板移動ステージを含むキャリア板供給モジュールと、
前記複数のチップを吸着するためのチップ移送ステージを含み、前記チップ移送ステージは第1位置で前記チップ供給モジュールから前記複数のチップを受け渡すために用いられ、前記チップ移送ステージは第2位置まで前記複数のチップを載置して前記複数のチップを同時に前記キャリア板上にボンディングしてボンディングシートを形成するチップ移送モジュールと、
前記キャリア板移動ステージ上の前記ボンディングシートをパッケージングして、パッケージチップを形成するパッケージモジュールと、を含み、
前記キャリア板移動ステージは、前記チップ移送ステージに向かって移動してドッキングし、前記チップ移送ステージに載置された前記複数のチップを同時に前記キャリア板にボンディングする、
ことを特徴とする半導体製造装置。 - 前記チップ供給モジュールはチップ供給ステージを含み、前記チップ移送ステージは前記チップ供給ステージの上方に設けられ、前記チップ移送ステージは前記チップ供給ステージ上のチップと対向して設けられる前記複数のチップを吸着するためのチップ吸着面を有し、
前記半導体製造装置は、前記チップ移送ステージと前記チップ供給ステージとの間に位置されるチップピッカーをさらに含み、前記チップピッカーは前記チップ供給ステージからチップをピックアップして、軸方向に180度回転させた後、前記チップ移送ステージのチップ吸着面に引き渡すことを特徴とする請求項1に記載の半導体製造装置。 - 前記チップ供給モジュールは、ブルーフィルム保管庫、ロードマニピュレーター、及びシンブル機構をさらに含み、前記ブルーフィルム保管庫は複数のブルーフィルムを格納し、前記ブルーフィルム上に前記複数のチップが放置されており、前記ロードマニピュレーターは前記ブルーフィルム保管庫から前記ブルーフィルムをピックアップして前記チップ供給ステージ上に放置し、前記シンブル機構は前記ブルーフィルム上のチップを押し上げることを特徴とする請求項2に記載の半導体製造装置。
- 前記キャリア板供給モジュールは、パッケージチップ保管庫とアンロードマニピュレーターをさらに含み、前記アンロードマニピュレーターは前記キャリア板移動ステージから前記パッケージチップをピックアップした後前記パッケージチップ保管庫に放置し、
前記キャリア板供給モジュールは、前記チップ移送ステージが前記第2位置に到達したかどうかを検出するための検出ユニットをさらに含む、
ことを特徴とする請求項1に記載の半導体製造装置。 - 位置調整モジュールをさらに含み、前記位置調整モジュールは前記チップ供給モジュールと前記キャリア板供給モジュールとの間に位置して前記チップ移送ステージ上のチップの位置を調整し、
前記チップ供給モジュール、位置調整モジュール及びキャリア板供給モジュールは、前記チップ移送ステージの移動方向に平行な方向に沿って配置されており、
前記位置調整モジュールはアライメントユニット及び調整ユニットを含み、
前記調整ユニットは、前記アライメントユニットが前記チップの位置ズレを検出すると、前記チップを取り外し正確な位置に再配置することを特徴とする請求項1に記載の半導体製造装置。 - 前記パッケージモジュールはパッケージ材料供給ユニット及び一つ以上の射出ユニットを含み、
前記パッケージ材料供給ユニットはパッケージ材料を格納し、また、パッケージ材料を加熱した後、前記射出ユニットに供給するために用いられ、前記射出ユニットはパッケージ材料を処理して前記ボンディングシート上に移送するために用いられることを特徴とする請求項1に記載の半導体製造装置。 - 前記パッケージモジュールは前記キャリア板の両側に対称的に分布された2つの射出ユニットを含むことを特徴とする請求項6に記載の半導体製造装置。
- 各前記射出ユニットは前記パッケージ材料が流れるための流路を有し、前記射出ユニットの流路と前記移送ステージ及び前記キャリア板の間の隙間が互いに連通されることを特徴とする請求項6または7に記載の半導体製造装置。
- 前記パッケージモジュールは前記射出ユニットの下方に設けられる接着剤貯蔵供給ユニットと、前記接着剤貯蔵供給ユニットの上方に設けられる接着剤塗布ユニットとを含み、
前記接着剤貯蔵供給ユニットは接着剤を前記接着剤塗布ユニットに供給し、前記接着剤塗布ユニットは前記キャリア板の表面に接着剤を塗布することを特徴とする請求項6に記載の半導体製造装置。 - 前記キャリア板移動ステージは接着剤を一層コーティングされた前記キャリア板を加熱することができることを特徴とする請求項9に記載の半導体製造装置。
- 前記チップ移送モジュールは搬送機構をさらに含み、前記チップ移送ステージは前記搬送機構上に設けられ、前記搬送機構は前記チップ移送ステージが移動するように駆動することを特徴とする請求項9に記載の半導体製造装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710682504.XA CN109390249A (zh) | 2017-08-10 | 2017-08-10 | 半导体制造装置 |
CN201710682504.X | 2017-08-10 | ||
PCT/CN2018/099545 WO2019029602A1 (zh) | 2017-08-10 | 2018-08-09 | 半导体制造装置 |
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Publication Number | Publication Date |
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JP2020530208A JP2020530208A (ja) | 2020-10-15 |
JP7029520B2 true JP7029520B2 (ja) | 2022-03-03 |
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JP2020506865A Active JP7029520B2 (ja) | 2017-08-10 | 2018-08-09 | 半導体製造装置 |
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Country | Link |
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US (1) | US11551948B2 (ja) |
JP (1) | JP7029520B2 (ja) |
KR (1) | KR102358962B1 (ja) |
CN (1) | CN109390249A (ja) |
SG (1) | SG11202001118WA (ja) |
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CN110783238B (zh) * | 2019-11-18 | 2020-07-21 | 嘉兴德基机械设计有限公司 | 一种半导体封装装片装置 |
CN111816591B (zh) * | 2020-07-24 | 2023-05-16 | 长电科技(滁州)有限公司 | 一种装片系统及装片方法 |
CN112103210B (zh) * | 2020-08-13 | 2023-03-31 | 上饶市广丰时代科技有限公司 | 一种用于半导体芯片封装的芯片粘接工艺设备 |
CN113314438B (zh) * | 2021-04-22 | 2023-08-15 | 浙江晶引电子科技有限公司 | 一种定位准确的芯片制造用成品封装设备 |
CN113654694B (zh) * | 2021-10-20 | 2022-01-18 | 山东汉芯科技有限公司 | 压力传感器芯片封装系统及其封装方法 |
CN115966492B (zh) * | 2022-12-28 | 2023-08-18 | 方泰(广东)科技有限公司 | 一种半导体ic载板自动组合机的封装工具 |
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