CN113654694B - 压力传感器芯片封装系统及其封装方法 - Google Patents
压力传感器芯片封装系统及其封装方法 Download PDFInfo
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- CN113654694B CN113654694B CN202111218082.3A CN202111218082A CN113654694B CN 113654694 B CN113654694 B CN 113654694B CN 202111218082 A CN202111218082 A CN 202111218082A CN 113654694 B CN113654694 B CN 113654694B
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- Prior art keywords
- transmission block
- connecting plate
- motor
- chip
- groove
- Prior art date
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 10
- 230000005540 biological transmission Effects 0.000 claims abstract description 96
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 16
- 238000007789 sealing Methods 0.000 claims description 17
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 5
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 5
- 241001330002 Bambuseae Species 0.000 claims description 5
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 5
- 239000011425 bamboo Substances 0.000 claims description 5
- 230000005484 gravity Effects 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 2
- 238000000465 moulding Methods 0.000 abstract 1
- 238000010073 coating (rubber) Methods 0.000 description 5
- 239000003292 glue Substances 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Packaging Frangible Articles (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111218082.3A CN113654694B (zh) | 2021-10-20 | 2021-10-20 | 压力传感器芯片封装系统及其封装方法 |
Applications Claiming Priority (1)
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CN202111218082.3A CN113654694B (zh) | 2021-10-20 | 2021-10-20 | 压力传感器芯片封装系统及其封装方法 |
Publications (2)
Publication Number | Publication Date |
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CN113654694A CN113654694A (zh) | 2021-11-16 |
CN113654694B true CN113654694B (zh) | 2022-01-18 |
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CN202111218082.3A Active CN113654694B (zh) | 2021-10-20 | 2021-10-20 | 压力传感器芯片封装系统及其封装方法 |
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CN (1) | CN113654694B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114397059B (zh) * | 2022-01-18 | 2022-07-29 | 凯晟动力技术(嘉兴)有限公司 | 一种egr耐腐蚀压力传感器封装装置及其使用方法 |
CN114608732B (zh) * | 2022-04-22 | 2023-07-25 | 淄博市特种设备检验研究院 | 一种在线监测压力容器运行安全的监测设备 |
Citations (9)
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KR20050110901A (ko) * | 2004-05-20 | 2005-11-24 | 삼성전자주식회사 | 플립 칩 패키지, 그 패키지를 포함하는 이미지 센서 모듈및 그 제조방법 |
JP2006013131A (ja) * | 2004-06-25 | 2006-01-12 | Shinko Electric Co Ltd | Icチップ実装体の製造装置 |
CN108529553A (zh) * | 2017-09-22 | 2018-09-14 | 中北大学 | 一种石墨烯高温压力传感器封装方法 |
CN108766939A (zh) * | 2018-08-15 | 2018-11-06 | 江苏盐芯微电子有限公司 | 一种芯片封装装置及封装方法 |
CN109390249A (zh) * | 2017-08-10 | 2019-02-26 | 上海微电子装备(集团)股份有限公司 | 半导体制造装置 |
TW202006837A (zh) * | 2018-07-17 | 2020-02-01 | 奇景光電股份有限公司 | 封膠設備及封膠方法 |
CN111389653A (zh) * | 2020-04-13 | 2020-07-10 | 林汇轩 | 一种mems传感器蘸胶装置 |
CN112490155A (zh) * | 2020-11-27 | 2021-03-12 | 深圳名仕堂贸易有限公司 | 一种芯片的封装系统 |
CN112490200A (zh) * | 2020-11-30 | 2021-03-12 | 潍坊歌尔微电子有限公司 | 气压传感组件及其封装方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080284045A1 (en) * | 2007-05-18 | 2008-11-20 | Texas Instruments Incorporated | Method for Fabricating Array-Molded Package-On-Package |
JP2009068845A (ja) * | 2007-09-10 | 2009-04-02 | Toshiba Corp | 試料の測定方法、センサチップのチップパッケージ及びセンサチップの固定機構 |
-
2021
- 2021-10-20 CN CN202111218082.3A patent/CN113654694B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050110901A (ko) * | 2004-05-20 | 2005-11-24 | 삼성전자주식회사 | 플립 칩 패키지, 그 패키지를 포함하는 이미지 센서 모듈및 그 제조방법 |
JP2006013131A (ja) * | 2004-06-25 | 2006-01-12 | Shinko Electric Co Ltd | Icチップ実装体の製造装置 |
CN109390249A (zh) * | 2017-08-10 | 2019-02-26 | 上海微电子装备(集团)股份有限公司 | 半导体制造装置 |
CN108529553A (zh) * | 2017-09-22 | 2018-09-14 | 中北大学 | 一种石墨烯高温压力传感器封装方法 |
TW202006837A (zh) * | 2018-07-17 | 2020-02-01 | 奇景光電股份有限公司 | 封膠設備及封膠方法 |
CN108766939A (zh) * | 2018-08-15 | 2018-11-06 | 江苏盐芯微电子有限公司 | 一种芯片封装装置及封装方法 |
CN111389653A (zh) * | 2020-04-13 | 2020-07-10 | 林汇轩 | 一种mems传感器蘸胶装置 |
CN112490155A (zh) * | 2020-11-27 | 2021-03-12 | 深圳名仕堂贸易有限公司 | 一种芯片的封装系统 |
CN112490200A (zh) * | 2020-11-30 | 2021-03-12 | 潍坊歌尔微电子有限公司 | 气压传感组件及其封装方法 |
Non-Patent Citations (2)
Title |
---|
一种用于微惯性组合的新型微封装技术;陆玉姣 等;《压电与声光》;20190630;第41卷(第3期);全文 * |
用于三维封装的多层芯片键合对准技术;陈明祥 等;《华中科技大学学报(自然科学版)》;20150228;第43卷(第2期);全文 * |
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Effective date of registration: 20220330 Address after: 277300 Keda West Road, Yicheng Development Zone, Zaozhuang City, Shandong Province Patentee after: Shandong Jingxin Kechuang Semiconductor Co.,Ltd. Address before: 277300 south side of Keda West Road, Yicheng Development Zone, Zaozhuang City, Shandong Province Patentee before: Shandong Hanxin Technology Co.,Ltd. |
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Denomination of invention: Pressure sensor chip packaging system and packaging method Effective date of registration: 20220530 Granted publication date: 20220118 Pledgee: Zaozhuang rural commercial bank Limited by Share Ltd. Yicheng sub branch Pledgor: Shandong Jingxin Kechuang Semiconductor Co.,Ltd. Registration number: Y2022980006586 |
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Date of cancellation: 20230519 Granted publication date: 20220118 Pledgee: Zaozhuang rural commercial bank Limited by Share Ltd. Yicheng sub branch Pledgor: Shandong Jingxin Kechuang Semiconductor Co.,Ltd. Registration number: Y2022980006586 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Pressure sensor chip packaging system and its packaging method Effective date of registration: 20230609 Granted publication date: 20220118 Pledgee: Zaozhuang rural commercial bank Limited by Share Ltd. Yicheng sub branch Pledgor: Shandong Jingxin Kechuang Semiconductor Co.,Ltd. Registration number: Y2023980043266 |
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