JP6984812B2 - 液体隔離装置 - Google Patents

液体隔離装置 Download PDF

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Publication number
JP6984812B2
JP6984812B2 JP2018541576A JP2018541576A JP6984812B2 JP 6984812 B2 JP6984812 B2 JP 6984812B2 JP 2018541576 A JP2018541576 A JP 2018541576A JP 2018541576 A JP2018541576 A JP 2018541576A JP 6984812 B2 JP6984812 B2 JP 6984812B2
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JP
Japan
Prior art keywords
facing
slit
slits
isolation device
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018541576A
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English (en)
Japanese (ja)
Other versions
JP2018535831A (ja
JP2018535831A5 (enExample
Inventor
フィリップ アンドリュー リムン，ピーター
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB1519445.9A external-priority patent/GB201519445D0/en
Priority claimed from GBGB1600887.2A external-priority patent/GB201600887D0/en
Application filed by Individual filed Critical Individual
Publication of JP2018535831A publication Critical patent/JP2018535831A/ja
Publication of JP2018535831A5 publication Critical patent/JP2018535831A5/ja
Application granted granted Critical
Publication of JP6984812B2 publication Critical patent/JP6984812B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023—Cleaning travelling work
    • B08B5/026—Cleaning moving webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • B65H20/14—Advancing webs by direct action on web of moving fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements for supplying or controlling air or other gases for drying solid materials or objects
    • F26B21/50—Ducting arrangements from the source of air or other gases to the materials or objects being dried
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements for supplying or controlling air or other gases for drying solid materials or objects
    • F26B21/50—Ducting arrangements from the source of air or other gases to the materials or objects being dried
    • F26B21/55—Outlets for directing or distributing the air or other gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/511—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
    • B65H2301/5115—Cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/517—Drying material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/12—Means using fluid made only for exhausting gaseous medium producing gas blast
    • B65H2406/122—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2408/00—Specific machines
    • B65H2408/20—Specific machines for handling web(s)
    • B65H2408/21—Accumulators
    • B65H2408/217—Accumulators of rollers type, e.g. with at least one fixed and one movable roller

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Cleaning In General (AREA)
  • Drying Of Solid Materials (AREA)
JP2018541576A 2015-11-03 2016-11-02 液体隔離装置 Active JP6984812B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB1519445.9 2015-11-03
GBGB1519445.9A GB201519445D0 (en) 2015-11-03 2015-11-03 Liquid removal
GB1600887.2 2016-01-18
GBGB1600887.2A GB201600887D0 (en) 2016-01-18 2016-01-18 Liquid removal
PCT/GB2016/053395 WO2017077291A1 (en) 2015-11-03 2016-11-02 Liquid removal

Publications (3)

Publication Number Publication Date
JP2018535831A JP2018535831A (ja) 2018-12-06
JP2018535831A5 JP2018535831A5 (enExample) 2019-12-12
JP6984812B2 true JP6984812B2 (ja) 2021-12-22

Family

ID=57570083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018541576A Active JP6984812B2 (ja) 2015-11-03 2016-11-02 液体隔離装置

Country Status (5)

Country Link
JP (1) JP6984812B2 (enExample)
KR (1) KR20180078278A (enExample)
CN (1) CN108449936B (enExample)
TW (1) TWI760316B (enExample)
WO (1) WO2017077291A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114877666A (zh) * 2022-02-25 2022-08-09 南京华易泰电子科技有限公司 一种适用于面板干燥用的双缝气刀结构及其加工工艺
CN114713563B (zh) * 2022-03-01 2023-03-07 长沙振安机电设备有限公司 马达清洁设备
CN115682649B (zh) * 2022-10-24 2023-08-08 深圳市行知行机器人技术有限公司 抹干机构及清洗装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE241981C (enExample) * 1910-05-24
US2423768A (en) * 1943-01-13 1947-07-08 Warren S D Co Apparatus for coating flexible webs
US3002700A (en) * 1958-07-26 1961-10-03 Mohring Gustav Nozzle on heat-treatment machines for textile fabrics and the like
JPS5425066A (en) * 1977-07-28 1979-02-24 Chugai Ro Kogyo Kaisha Ltd Nonncontact type shape correcting and holding method of beltlike material and its device
US4551926A (en) * 1984-05-23 1985-11-12 C. Keller Gmbh U. Co. Kg Maschinenfabrik Nozzle box for heat treatment of veneering
US4848633A (en) * 1986-02-28 1989-07-18 Thermo Electron Web Systems, Inc. Non-contact web turning and drying apparatus
EP0513632B1 (de) * 1991-05-17 1995-07-19 SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. Vorrichtung zum Entfernen von Flüssigkeit von der Oberfläche eines bewegten Bandes
JP2528669Y2 (ja) * 1991-08-19 1997-03-12 三菱重工業株式会社 テンタオーブン用プレナムダクト
JP2552595B2 (ja) * 1991-09-17 1996-11-13 株式会社東京機械製作所 走行ウエブの制振方法及び制振装置
CH687957A5 (de) * 1994-09-06 1997-04-15 Schneider Consulting & Dev Verfahren zum Entfernen von Staubpartikeln von einer bewegten Materialbahn sowie Vorrichtung hierzu.
US6726777B1 (en) * 1999-06-24 2004-04-27 Sumitomo Heavy Industries Ltd. Cleaning method and apparatus using fluid spraying
JP4352194B2 (ja) * 2000-04-04 2009-10-28 株式会社日立ハイテクノロジーズ 基板乾燥装置及び基板乾燥方法
JP2001335205A (ja) * 2000-05-24 2001-12-04 Mitsubishi Heavy Ind Ltd 両面フロータ式乾燥機，両面フロータ式冷却機及び両面フロータ式加湿機
TWI236944B (en) * 2001-12-17 2005-08-01 Tokyo Electron Ltd Film removal method and apparatus, and substrate processing system
ES2355640T3 (es) * 2004-08-05 2011-03-29 Kabushiki Kaisha Kobe Seiko Sho Dispositivo de extracción de depósito.
GB2459055B (en) 2007-01-11 2012-05-23 Peter Philip Andrew Lymn Liquid treatment apparatus
KR20080090070A (ko) * 2007-04-04 2008-10-08 삼성전자주식회사 에어나이프 및 이를 포함하는 기판 건조 장치
KR101020779B1 (ko) * 2008-07-31 2011-03-09 주식회사 디엠에스 에어나이프 장치
NL2006389A (en) * 2010-04-15 2011-10-18 Asml Netherlands Bv Fluid handling structure, lithographic apparatus and a device manufacturing method.
EP2381310B1 (en) * 2010-04-22 2015-05-06 ASML Netherlands BV Fluid handling structure and lithographic apparatus
GB2500564A (en) * 2012-01-26 2013-10-02 Peter Philip Andrew Lymn Web processing machine
JP2013256384A (ja) * 2012-06-14 2013-12-26 Japan Steel Works Ltd:The エア噴出ノズル
CN103851887B (zh) * 2012-12-07 2016-01-27 深南电路有限公司 Pcb干燥机
CN104043613B (zh) * 2014-06-19 2016-01-06 张家港市超声电气有限公司 风切吹干装置
CN104117504A (zh) * 2014-06-26 2014-10-29 苏州一合光学有限公司 玻璃风刀清洗机的风刀装置
CN104990383A (zh) * 2015-07-31 2015-10-21 北京七星华创电子股份有限公司 一种在线风刀吹干装置

Also Published As

Publication number Publication date
WO2017077291A1 (en) 2017-05-11
CN108449936A (zh) 2018-08-24
JP2018535831A (ja) 2018-12-06
CN108449936B (zh) 2022-03-11
TW201728242A (zh) 2017-08-01
TWI760316B (zh) 2022-04-11
KR20180078278A (ko) 2018-07-09

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