JP2018535831A5 - - Google Patents

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Publication number
JP2018535831A5
JP2018535831A5 JP2018541576A JP2018541576A JP2018535831A5 JP 2018535831 A5 JP2018535831 A5 JP 2018535831A5 JP 2018541576 A JP2018541576 A JP 2018541576A JP 2018541576 A JP2018541576 A JP 2018541576A JP 2018535831 A5 JP2018535831 A5 JP 2018535831A5
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JP
Japan
Prior art keywords
opposing
groove
slits
slit
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2018541576A
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English (en)
Japanese (ja)
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JP6984812B2 (ja
JP2018535831A (ja
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Publication date
Priority claimed from GBGB1519445.9A external-priority patent/GB201519445D0/en
Priority claimed from GBGB1600887.2A external-priority patent/GB201600887D0/en
Application filed filed Critical
Priority claimed from PCT/GB2016/053395 external-priority patent/WO2017077291A1/en
Publication of JP2018535831A publication Critical patent/JP2018535831A/ja
Publication of JP2018535831A5 publication Critical patent/JP2018535831A5/ja
Application granted granted Critical
Publication of JP6984812B2 publication Critical patent/JP6984812B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018541576A 2015-11-03 2016-11-02 液体隔離装置 Active JP6984812B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB1519445.9 2015-11-03
GBGB1519445.9A GB201519445D0 (en) 2015-11-03 2015-11-03 Liquid removal
GB1600887.2 2016-01-18
GBGB1600887.2A GB201600887D0 (en) 2016-01-18 2016-01-18 Liquid removal
PCT/GB2016/053395 WO2017077291A1 (en) 2015-11-03 2016-11-02 Liquid removal

Publications (3)

Publication Number Publication Date
JP2018535831A JP2018535831A (ja) 2018-12-06
JP2018535831A5 true JP2018535831A5 (enExample) 2019-12-12
JP6984812B2 JP6984812B2 (ja) 2021-12-22

Family

ID=57570083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018541576A Active JP6984812B2 (ja) 2015-11-03 2016-11-02 液体隔離装置

Country Status (5)

Country Link
JP (1) JP6984812B2 (enExample)
KR (1) KR20180078278A (enExample)
CN (1) CN108449936B (enExample)
TW (1) TWI760316B (enExample)
WO (1) WO2017077291A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114877666A (zh) * 2022-02-25 2022-08-09 南京华易泰电子科技有限公司 一种适用于面板干燥用的双缝气刀结构及其加工工艺
CN114713563B (zh) * 2022-03-01 2023-03-07 长沙振安机电设备有限公司 马达清洁设备
CN115682649B (zh) * 2022-10-24 2023-08-08 深圳市行知行机器人技术有限公司 抹干机构及清洗装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
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DE241981C (enExample) * 1910-05-24
US2423768A (en) * 1943-01-13 1947-07-08 Warren S D Co Apparatus for coating flexible webs
US3002700A (en) * 1958-07-26 1961-10-03 Mohring Gustav Nozzle on heat-treatment machines for textile fabrics and the like
JPS5425066A (en) * 1977-07-28 1979-02-24 Chugai Ro Kogyo Kaisha Ltd Nonncontact type shape correcting and holding method of beltlike material and its device
US4551926A (en) * 1984-05-23 1985-11-12 C. Keller Gmbh U. Co. Kg Maschinenfabrik Nozzle box for heat treatment of veneering
US4848633A (en) * 1986-02-28 1989-07-18 Thermo Electron Web Systems, Inc. Non-contact web turning and drying apparatus
EP0513632B1 (de) * 1991-05-17 1995-07-19 SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. Vorrichtung zum Entfernen von Flüssigkeit von der Oberfläche eines bewegten Bandes
JP2528669Y2 (ja) * 1991-08-19 1997-03-12 三菱重工業株式会社 テンタオーブン用プレナムダクト
JP2552595B2 (ja) * 1991-09-17 1996-11-13 株式会社東京機械製作所 走行ウエブの制振方法及び制振装置
CH687957A5 (de) * 1994-09-06 1997-04-15 Schneider Consulting & Dev Verfahren zum Entfernen von Staubpartikeln von einer bewegten Materialbahn sowie Vorrichtung hierzu.
US6726777B1 (en) * 1999-06-24 2004-04-27 Sumitomo Heavy Industries Ltd. Cleaning method and apparatus using fluid spraying
JP4352194B2 (ja) * 2000-04-04 2009-10-28 株式会社日立ハイテクノロジーズ 基板乾燥装置及び基板乾燥方法
JP2001335205A (ja) * 2000-05-24 2001-12-04 Mitsubishi Heavy Ind Ltd 両面フロータ式乾燥機，両面フロータ式冷却機及び両面フロータ式加湿機
TWI236944B (en) * 2001-12-17 2005-08-01 Tokyo Electron Ltd Film removal method and apparatus, and substrate processing system
ES2355640T3 (es) * 2004-08-05 2011-03-29 Kabushiki Kaisha Kobe Seiko Sho Dispositivo de extracción de depósito.
GB2459055B (en) 2007-01-11 2012-05-23 Peter Philip Andrew Lymn Liquid treatment apparatus
KR20080090070A (ko) * 2007-04-04 2008-10-08 삼성전자주식회사 에어나이프 및 이를 포함하는 기판 건조 장치
KR101020779B1 (ko) * 2008-07-31 2011-03-09 주식회사 디엠에스 에어나이프 장치
NL2006389A (en) * 2010-04-15 2011-10-18 Asml Netherlands Bv Fluid handling structure, lithographic apparatus and a device manufacturing method.
EP2381310B1 (en) * 2010-04-22 2015-05-06 ASML Netherlands BV Fluid handling structure and lithographic apparatus
GB2500564A (en) * 2012-01-26 2013-10-02 Peter Philip Andrew Lymn Web processing machine
JP2013256384A (ja) * 2012-06-14 2013-12-26 Japan Steel Works Ltd:The エア噴出ノズル
CN103851887B (zh) * 2012-12-07 2016-01-27 深南电路有限公司 Pcb干燥机
CN104043613B (zh) * 2014-06-19 2016-01-06 张家港市超声电气有限公司 风切吹干装置
CN104117504A (zh) * 2014-06-26 2014-10-29 苏州一合光学有限公司 玻璃风刀清洗机的风刀装置
CN104990383A (zh) * 2015-07-31 2015-10-21 北京七星华创电子股份有限公司 一种在线风刀吹干装置

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