CN108449936B - 液体清除装置 - Google Patents
液体清除装置 Download PDFInfo
- Publication number
- CN108449936B CN108449936B CN201680076531.6A CN201680076531A CN108449936B CN 108449936 B CN108449936 B CN 108449936B CN 201680076531 A CN201680076531 A CN 201680076531A CN 108449936 B CN108449936 B CN 108449936B
- Authority
- CN
- China
- Prior art keywords
- opposing
- isolation device
- liquid
- slit
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
- B08B5/026—Cleaning moving webs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H20/00—Advancing webs
- B65H20/14—Advancing webs by direct action on web of moving fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/50—Auxiliary process performed during handling process
- B65H2301/51—Modifying a characteristic of handled material
- B65H2301/511—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
- B65H2301/5115—Cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/50—Auxiliary process performed during handling process
- B65H2301/51—Modifying a characteristic of handled material
- B65H2301/517—Drying material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2406/00—Means using fluid
- B65H2406/10—Means using fluid made only for exhausting gaseous medium
- B65H2406/12—Means using fluid made only for exhausting gaseous medium producing gas blast
- B65H2406/122—Nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2408/00—Specific machines
- B65H2408/20—Specific machines for handling web(s)
- B65H2408/21—Accumulators
- B65H2408/217—Accumulators of rollers type, e.g. with at least one fixed and one movable roller
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Cleaning In General (AREA)
- Drying Of Solid Materials (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1519445.9 | 2015-11-03 | ||
| GBGB1519445.9A GB201519445D0 (en) | 2015-11-03 | 2015-11-03 | Liquid removal |
| GB1600887.2 | 2016-01-18 | ||
| GBGB1600887.2A GB201600887D0 (en) | 2016-01-18 | 2016-01-18 | Liquid removal |
| PCT/GB2016/053395 WO2017077291A1 (en) | 2015-11-03 | 2016-11-02 | Liquid removal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108449936A CN108449936A (zh) | 2018-08-24 |
| CN108449936B true CN108449936B (zh) | 2022-03-11 |
Family
ID=57570083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680076531.6A Active CN108449936B (zh) | 2015-11-03 | 2016-11-02 | 液体清除装置 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6984812B2 (enExample) |
| KR (1) | KR20180078278A (enExample) |
| CN (1) | CN108449936B (enExample) |
| TW (1) | TWI760316B (enExample) |
| WO (1) | WO2017077291A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114877666A (zh) * | 2022-02-25 | 2022-08-09 | 南京华易泰电子科技有限公司 | 一种适用于面板干燥用的双缝气刀结构及其加工工艺 |
| CN114713563B (zh) * | 2022-03-01 | 2023-03-07 | 长沙振安机电设备有限公司 | 马达清洁设备 |
| CN115682649B (zh) * | 2022-10-24 | 2023-08-08 | 深圳市行知行机器人技术有限公司 | 抹干机构及清洗装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1993188A (zh) * | 2004-08-05 | 2007-07-04 | 株式会社神户制钢所 | 附着物除去装置 |
| CN103851887A (zh) * | 2012-12-07 | 2014-06-11 | 深南电路有限公司 | Pcb干燥机 |
| CN104043613A (zh) * | 2014-06-19 | 2014-09-17 | 张家港市超声电气有限公司 | 风切吹干装置 |
| CN104117504A (zh) * | 2014-06-26 | 2014-10-29 | 苏州一合光学有限公司 | 玻璃风刀清洗机的风刀装置 |
| CN104990383A (zh) * | 2015-07-31 | 2015-10-21 | 北京七星华创电子股份有限公司 | 一种在线风刀吹干装置 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE241981C (enExample) * | 1910-05-24 | |||
| US2423768A (en) * | 1943-01-13 | 1947-07-08 | Warren S D Co | Apparatus for coating flexible webs |
| US3002700A (en) * | 1958-07-26 | 1961-10-03 | Mohring Gustav | Nozzle on heat-treatment machines for textile fabrics and the like |
| JPS5425066A (en) * | 1977-07-28 | 1979-02-24 | Chugai Ro Kogyo Kaisha Ltd | Nonncontact type shape correcting and holding method of beltlike material and its device |
| US4551926A (en) * | 1984-05-23 | 1985-11-12 | C. Keller Gmbh U. Co. Kg Maschinenfabrik | Nozzle box for heat treatment of veneering |
| US4848633A (en) * | 1986-02-28 | 1989-07-18 | Thermo Electron Web Systems, Inc. | Non-contact web turning and drying apparatus |
| ES2077284T3 (es) * | 1991-05-17 | 1995-11-16 | Sundwiger Eisen Maschinen | Dispositivo para eliminar liquido de la superficie de un fleje transportado desde una maquina de mecanizacion de flejes. |
| JP2528669Y2 (ja) * | 1991-08-19 | 1997-03-12 | 三菱重工業株式会社 | テンタオーブン用プレナムダクト |
| JP2552595B2 (ja) * | 1991-09-17 | 1996-11-13 | 株式会社東京機械製作所 | 走行ウエブの制振方法及び制振装置 |
| CH687957A5 (de) * | 1994-09-06 | 1997-04-15 | Schneider Consulting & Dev | Verfahren zum Entfernen von Staubpartikeln von einer bewegten Materialbahn sowie Vorrichtung hierzu. |
| US6726777B1 (en) * | 1999-06-24 | 2004-04-27 | Sumitomo Heavy Industries Ltd. | Cleaning method and apparatus using fluid spraying |
| JP4352194B2 (ja) * | 2000-04-04 | 2009-10-28 | 株式会社日立ハイテクノロジーズ | 基板乾燥装置及び基板乾燥方法 |
| JP2001335205A (ja) * | 2000-05-24 | 2001-12-04 | Mitsubishi Heavy Ind Ltd | 両面フロータ式乾燥機,両面フロータ式冷却機及び両面フロータ式加湿機 |
| TWI236944B (en) * | 2001-12-17 | 2005-08-01 | Tokyo Electron Ltd | Film removal method and apparatus, and substrate processing system |
| WO2008084224A2 (en) * | 2007-01-11 | 2008-07-17 | Peter Philip Andrew Lymn | Liquid treatment apparatus |
| KR20080090070A (ko) * | 2007-04-04 | 2008-10-08 | 삼성전자주식회사 | 에어나이프 및 이를 포함하는 기판 건조 장치 |
| KR101020779B1 (ko) * | 2008-07-31 | 2011-03-09 | 주식회사 디엠에스 | 에어나이프 장치 |
| NL2006389A (en) * | 2010-04-15 | 2011-10-18 | Asml Netherlands Bv | Fluid handling structure, lithographic apparatus and a device manufacturing method. |
| EP2381310B1 (en) * | 2010-04-22 | 2015-05-06 | ASML Netherlands BV | Fluid handling structure and lithographic apparatus |
| GB2500564A (en) | 2012-01-26 | 2013-10-02 | Peter Philip Andrew Lymn | Web processing machine |
| JP2013256384A (ja) * | 2012-06-14 | 2013-12-26 | Japan Steel Works Ltd:The | エア噴出ノズル |
-
2016
- 2016-11-02 KR KR1020187015107A patent/KR20180078278A/ko not_active Ceased
- 2016-11-02 JP JP2018541576A patent/JP6984812B2/ja active Active
- 2016-11-02 WO PCT/GB2016/053395 patent/WO2017077291A1/en not_active Ceased
- 2016-11-02 CN CN201680076531.6A patent/CN108449936B/zh active Active
- 2016-11-03 TW TW105135698A patent/TWI760316B/zh active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1993188A (zh) * | 2004-08-05 | 2007-07-04 | 株式会社神户制钢所 | 附着物除去装置 |
| CN103851887A (zh) * | 2012-12-07 | 2014-06-11 | 深南电路有限公司 | Pcb干燥机 |
| CN104043613A (zh) * | 2014-06-19 | 2014-09-17 | 张家港市超声电气有限公司 | 风切吹干装置 |
| CN104117504A (zh) * | 2014-06-26 | 2014-10-29 | 苏州一合光学有限公司 | 玻璃风刀清洗机的风刀装置 |
| CN104990383A (zh) * | 2015-07-31 | 2015-10-21 | 北京七星华创电子股份有限公司 | 一种在线风刀吹干装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201728242A (zh) | 2017-08-01 |
| JP2018535831A (ja) | 2018-12-06 |
| CN108449936A (zh) | 2018-08-24 |
| TWI760316B (zh) | 2022-04-11 |
| KR20180078278A (ko) | 2018-07-09 |
| WO2017077291A1 (en) | 2017-05-11 |
| JP6984812B2 (ja) | 2021-12-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |