CN108449936B - 液体清除装置 - Google Patents

液体清除装置 Download PDF

Info

Publication number
CN108449936B
CN108449936B CN201680076531.6A CN201680076531A CN108449936B CN 108449936 B CN108449936 B CN 108449936B CN 201680076531 A CN201680076531 A CN 201680076531A CN 108449936 B CN108449936 B CN 108449936B
Authority
CN
China
Prior art keywords
opposing
isolation device
liquid
slit
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201680076531.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN108449936A (zh
Inventor
P·P·A·林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB1519445.9A external-priority patent/GB201519445D0/en
Priority claimed from GBGB1600887.2A external-priority patent/GB201600887D0/en
Application filed by Individual filed Critical Individual
Publication of CN108449936A publication Critical patent/CN108449936A/zh
Application granted granted Critical
Publication of CN108449936B publication Critical patent/CN108449936B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023Cleaning travelling work
    • B08B5/026Cleaning moving webs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/005Nozzles or other outlets specially adapted for discharging one or more gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00Advancing webs
    • B65H20/14Advancing webs by direct action on web of moving fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00Handling processes for sheets or webs
    • B65H2301/50Auxiliary process performed during handling process
    • B65H2301/51Modifying a characteristic of handled material
    • B65H2301/511Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
    • B65H2301/5115Cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00Handling processes for sheets or webs
    • B65H2301/50Auxiliary process performed during handling process
    • B65H2301/51Modifying a characteristic of handled material
    • B65H2301/517Drying material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00Means using fluid
    • B65H2406/10Means using fluid made only for exhausting gaseous medium
    • B65H2406/12Means using fluid made only for exhausting gaseous medium producing gas blast
    • B65H2406/122Nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2408/00Specific machines
    • B65H2408/20Specific machines for handling web(s)
    • B65H2408/21Accumulators
    • B65H2408/217Accumulators of rollers type, e.g. with at least one fixed and one movable roller

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Cleaning In General (AREA)
  • Drying Of Solid Materials (AREA)
CN201680076531.6A 2015-11-03 2016-11-02 液体清除装置 Active CN108449936B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB1519445.9 2015-11-03
GBGB1519445.9A GB201519445D0 (en) 2015-11-03 2015-11-03 Liquid removal
GB1600887.2 2016-01-18
GBGB1600887.2A GB201600887D0 (en) 2016-01-18 2016-01-18 Liquid removal
PCT/GB2016/053395 WO2017077291A1 (en) 2015-11-03 2016-11-02 Liquid removal

Publications (2)

Publication Number Publication Date
CN108449936A CN108449936A (zh) 2018-08-24
CN108449936B true CN108449936B (zh) 2022-03-11

Family

ID=57570083

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680076531.6A Active CN108449936B (zh) 2015-11-03 2016-11-02 液体清除装置

Country Status (5)

Country Link
JP (1) JP6984812B2 (enExample)
KR (1) KR20180078278A (enExample)
CN (1) CN108449936B (enExample)
TW (1) TWI760316B (enExample)
WO (1) WO2017077291A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114877666A (zh) * 2022-02-25 2022-08-09 南京华易泰电子科技有限公司 一种适用于面板干燥用的双缝气刀结构及其加工工艺
CN114713563B (zh) * 2022-03-01 2023-03-07 长沙振安机电设备有限公司 马达清洁设备
CN115682649B (zh) * 2022-10-24 2023-08-08 深圳市行知行机器人技术有限公司 抹干机构及清洗装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1993188A (zh) * 2004-08-05 2007-07-04 株式会社神户制钢所 附着物除去装置
CN103851887A (zh) * 2012-12-07 2014-06-11 深南电路有限公司 Pcb干燥机
CN104043613A (zh) * 2014-06-19 2014-09-17 张家港市超声电气有限公司 风切吹干装置
CN104117504A (zh) * 2014-06-26 2014-10-29 苏州一合光学有限公司 玻璃风刀清洗机的风刀装置
CN104990383A (zh) * 2015-07-31 2015-10-21 北京七星华创电子股份有限公司 一种在线风刀吹干装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE241981C (enExample) * 1910-05-24
US2423768A (en) * 1943-01-13 1947-07-08 Warren S D Co Apparatus for coating flexible webs
US3002700A (en) * 1958-07-26 1961-10-03 Mohring Gustav Nozzle on heat-treatment machines for textile fabrics and the like
JPS5425066A (en) * 1977-07-28 1979-02-24 Chugai Ro Kogyo Kaisha Ltd Nonncontact type shape correcting and holding method of beltlike material and its device
US4551926A (en) * 1984-05-23 1985-11-12 C. Keller Gmbh U. Co. Kg Maschinenfabrik Nozzle box for heat treatment of veneering
US4848633A (en) * 1986-02-28 1989-07-18 Thermo Electron Web Systems, Inc. Non-contact web turning and drying apparatus
ES2077284T3 (es) * 1991-05-17 1995-11-16 Sundwiger Eisen Maschinen Dispositivo para eliminar liquido de la superficie de un fleje transportado desde una maquina de mecanizacion de flejes.
JP2528669Y2 (ja) * 1991-08-19 1997-03-12 三菱重工業株式会社 テンタオーブン用プレナムダクト
JP2552595B2 (ja) * 1991-09-17 1996-11-13 株式会社東京機械製作所 走行ウエブの制振方法及び制振装置
CH687957A5 (de) * 1994-09-06 1997-04-15 Schneider Consulting & Dev Verfahren zum Entfernen von Staubpartikeln von einer bewegten Materialbahn sowie Vorrichtung hierzu.
US6726777B1 (en) * 1999-06-24 2004-04-27 Sumitomo Heavy Industries Ltd. Cleaning method and apparatus using fluid spraying
JP4352194B2 (ja) * 2000-04-04 2009-10-28 株式会社日立ハイテクノロジーズ 基板乾燥装置及び基板乾燥方法
JP2001335205A (ja) * 2000-05-24 2001-12-04 Mitsubishi Heavy Ind Ltd 両面フロータ式乾燥機,両面フロータ式冷却機及び両面フロータ式加湿機
TWI236944B (en) * 2001-12-17 2005-08-01 Tokyo Electron Ltd Film removal method and apparatus, and substrate processing system
WO2008084224A2 (en) * 2007-01-11 2008-07-17 Peter Philip Andrew Lymn Liquid treatment apparatus
KR20080090070A (ko) * 2007-04-04 2008-10-08 삼성전자주식회사 에어나이프 및 이를 포함하는 기판 건조 장치
KR101020779B1 (ko) * 2008-07-31 2011-03-09 주식회사 디엠에스 에어나이프 장치
NL2006389A (en) * 2010-04-15 2011-10-18 Asml Netherlands Bv Fluid handling structure, lithographic apparatus and a device manufacturing method.
EP2381310B1 (en) * 2010-04-22 2015-05-06 ASML Netherlands BV Fluid handling structure and lithographic apparatus
GB2500564A (en) 2012-01-26 2013-10-02 Peter Philip Andrew Lymn Web processing machine
JP2013256384A (ja) * 2012-06-14 2013-12-26 Japan Steel Works Ltd:The エア噴出ノズル

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1993188A (zh) * 2004-08-05 2007-07-04 株式会社神户制钢所 附着物除去装置
CN103851887A (zh) * 2012-12-07 2014-06-11 深南电路有限公司 Pcb干燥机
CN104043613A (zh) * 2014-06-19 2014-09-17 张家港市超声电气有限公司 风切吹干装置
CN104117504A (zh) * 2014-06-26 2014-10-29 苏州一合光学有限公司 玻璃风刀清洗机的风刀装置
CN104990383A (zh) * 2015-07-31 2015-10-21 北京七星华创电子股份有限公司 一种在线风刀吹干装置

Also Published As

Publication number Publication date
TW201728242A (zh) 2017-08-01
JP2018535831A (ja) 2018-12-06
CN108449936A (zh) 2018-08-24
TWI760316B (zh) 2022-04-11
KR20180078278A (ko) 2018-07-09
WO2017077291A1 (en) 2017-05-11
JP6984812B2 (ja) 2021-12-22

Similar Documents

Publication Publication Date Title
CN108449936B (zh) 液体清除装置
KR101284197B1 (ko) 처리될 평면 재료를 처리하는 방법 및 어셈블리, 및 처리액을 제거하거나 억제하는 디바이스
JP6258892B2 (ja) 基板処理装置及び基板処理方法
US20230304735A1 (en) Drying device and method for drying a substrate
KR20110126506A (ko) 여과막모듈
KR20060130174A (ko) 처리 매체로 처리 대상을 처리하는 노즐 장치 및 방법
ITUA20164038A1 (it) Apparecchiatura per l'impregnazione di tessuti
KR102663445B1 (ko) 물체를 처리하기 위한 방법 및 이 방법을 수행하기 위한 장치
JP5935982B2 (ja) 浸漬型膜分離装置
JP5963992B1 (ja) 処理対象の平坦材料を湿式化学処理する装置および方法
CN217345862U (zh) 电路板用的沉浸式水刀处理设备
US5239327A (en) Processor for light sensitive material
TWI603421B (zh) 溼式製程設備
CN107849695B (zh) 包括清除刀片的幅材输送系统
JP2007117953A (ja) 搬送処理装置
US9206514B2 (en) Liquid treatment apparatus
EP0564598A1 (en) PHOTOGRAPHIC PROCESSING APPARATUS.
TW201515974A (zh) 用於濕化學或電化學處理之方法與裝置
JP3962657B2 (ja) 真空処理装置
CN1751154B (zh) 造纸机的成形网支承元件
JPWO2022224886A5 (enExample)
KR101048824B1 (ko) 에어 나이프 세팅 장치 및 그를 포함하는 기판 처리 장치
JPH05281688A (ja) 感光材料の処理装置
JP2015180489A (ja) 含浸装置および含浸方法
JP2015044277A (ja) クーラントタンク

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant