JP6968701B2 - 低誘電率かつ低湿式エッチング速度の誘電体薄膜を堆積させるための方法 - Google Patents
低誘電率かつ低湿式エッチング速度の誘電体薄膜を堆積させるための方法 Download PDFInfo
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Description
種々のプラズマガスを使用して、いくつかのSiCN膜が形成された。膜の各々は、約6.5Torrの圧力及び約6rpm回転スピードを用いて、約550oCで形成された。ジクロロシランが、約400sccmの流量で第1区画内に流し込まれた。エチレンジアミンが、約250sccmの流量で第2区画内に流し込まれた。第4区画内に生成されたプラズマは、表1に示すように変動した。第3区画はパージガス流を有した。
Claims (15)
- 第1ケイ素含有膜を形成するために、処理チャンバの、第1ガスポートを備える第1区画内で基板表面の少なくとも一部分をケイ素含有前駆体に曝露することと、
炭素を含む第2ケイ素含有膜を形成するために、前記処理チャンバの、第2ガスポートを備える第2区画内で前記第1ケイ素含有膜を炭素含有前駆体に曝露することと、
ケイ素−炭素膜を形成するために、前記処理チャンバの第3区画内で前記第2ケイ素含有膜をプラズマに曝露することとを含み、
前記処理チャンバの隣接する区画は、不活性ガスにより分離され、
前記第1ガスポート及び前記第2ガスポートのそれぞれは、それぞれの真空ポートによって取り囲まれる、処理方法。 - 前記ケイ素含有前駆体がハロゲン化ケイ素を含む、請求項1に記載の処理方法。
- 前記ケイ素含有前駆体が実質的にハロゲン化ケイ素からなる、請求項2に記載の処理方法。
- 前記炭素含有前駆体が炭素原子及び窒素原子を有する化合物を含む、請求項1に記載の処理方法。
- 前記炭素含有前駆体が実質的に酸素原子を含まない、請求項4に記載の処理方法。
- 前記炭素含有前駆体が、アルキルアミン、ジアミン、ポリアミン、及び/又は環状アミン[一級アミン、二級アミン、三級アミン、ヘテロ環]のうちの一又は複数を含む、請求項4に記載の処理方法。
- 前記炭素含有前駆体が炭素原子及び酸素原子を有する化合物を含む、請求項1に記載の処理方法。
- 前記炭素含有前駆体が実質的に窒素原子を含まない、請求項7に記載の処理方法。
- 前記炭素含有前駆体が、CO2、アルコール、及び/又はエーテルのうちの一又は複数を含む、請求項7に記載の処理方法。
- 前記炭素含有前駆体が炭素原子、酸素原子、及び窒素原子を含む、請求項1に記載の処理方法。
- 前記炭素含有前駆体が、アルキルアミノ−アルコール、或いは、炭素原子と窒素原子、及び/又は、炭素原子と酸素原子を有する複数の化合物の混合物、のうちの一又は複数を含む、請求項10に記載の処理方法。
- 約200℃〜約650℃の範囲内の温度で実施される、請求項1に記載の処理方法。
- ケイ素−炭素−酸素膜を形成するために、前記第2ケイ素含有膜を、前記プラズマへの曝露に先立って酸素源に曝露することを更に含む、請求項1に記載の処理方法。
- 前記プラズマが少なくとも1つの不活性種と酸素種とを含み、前記ケイ素−炭素膜は酸素を更に含む、請求項1に記載の処理方法。
- 前記プラズマが少なくとも1つの不活性種と窒素含有前駆体とを含み、前記ケイ素−炭素膜は窒素を更に含む、請求項1に記載の処理方法。
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US201562156257P | 2015-05-02 | 2015-05-02 | |
US62/156,257 | 2015-05-02 | ||
PCT/US2016/030095 WO2016178991A1 (en) | 2015-05-02 | 2016-04-29 | Methods for depositing low k and low wet etch rate dielectric thin films |
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US (2) | US9799511B2 (ja) |
JP (1) | JP6968701B2 (ja) |
KR (1) | KR20180002774A (ja) |
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WO (1) | WO2016178991A1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US10550469B2 (en) * | 2015-09-04 | 2020-02-04 | Lam Research Corporation | Plasma excitation for spatial atomic layer deposition (ALD) reactors |
KR102378021B1 (ko) * | 2016-05-06 | 2022-03-23 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 박막의 형성 |
KR102646828B1 (ko) * | 2017-04-13 | 2024-03-11 | 어플라이드 머티어리얼스, 인코포레이티드 | 저-k 막들의 증착을 위한 방법 및 장치 |
US10847529B2 (en) | 2017-04-13 | 2020-11-24 | Asm Ip Holding B.V. | Substrate processing method and device manufactured by the same |
KR20240010760A (ko) | 2017-05-05 | 2024-01-24 | 에이에스엠 아이피 홀딩 비.브이. | 산소 함유 박막의 형성을 제어하기 위한 플라즈마 강화 증착 공정 |
CN115233183A (zh) * | 2017-05-16 | 2022-10-25 | Asm Ip 控股有限公司 | 电介质上氧化物的选择性peald |
KR102155281B1 (ko) * | 2017-07-28 | 2020-09-11 | 주성엔지니어링(주) | 기판처리장치의 가스분사장치, 기판처리장치, 및 기판처리방법 |
KR102649084B1 (ko) * | 2018-09-21 | 2024-03-20 | 어플라이드 머티어리얼스, 인코포레이티드 | 알루미늄 함유 막들을 이용한 갭충전 |
US11359281B2 (en) * | 2020-01-26 | 2022-06-14 | Applied Materials, Inc. | Selective deposition of SiCON by plasma ALD |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6410462B1 (en) * | 2000-05-12 | 2002-06-25 | Sharp Laboratories Of America, Inc. | Method of making low-K carbon doped silicon oxide |
KR100468847B1 (ko) | 2002-04-02 | 2005-01-29 | 삼성전자주식회사 | 알콜을 이용한 금속산화물 박막의 화학기상증착법 |
US20040058293A1 (en) * | 2002-08-06 | 2004-03-25 | Tue Nguyen | Assembly line processing system |
US7129187B2 (en) | 2004-07-14 | 2006-10-31 | Tokyo Electron Limited | Low-temperature plasma-enhanced chemical vapor deposition of silicon-nitrogen-containing films |
US20060228903A1 (en) | 2005-03-30 | 2006-10-12 | Mcswiney Michael L | Precursors for the deposition of carbon-doped silicon nitride or silicon oxynitride films |
US7732342B2 (en) | 2005-05-26 | 2010-06-08 | Applied Materials, Inc. | Method to increase the compressive stress of PECVD silicon nitride films |
US7648927B2 (en) | 2005-06-21 | 2010-01-19 | Applied Materials, Inc. | Method for forming silicon-containing materials during a photoexcitation deposition process |
JP2007221039A (ja) * | 2006-02-20 | 2007-08-30 | National Institute For Materials Science | 絶縁膜および絶縁膜材料 |
JP4820864B2 (ja) | 2006-03-30 | 2011-11-24 | 三井造船株式会社 | プラズマ原子層成長方法及び装置 |
US8080282B2 (en) | 2006-08-08 | 2011-12-20 | Asm Japan K.K. | Method for forming silicon carbide film containing oxygen |
US7727864B2 (en) | 2006-11-01 | 2010-06-01 | Asm America, Inc. | Controlled composition using plasma-enhanced atomic layer deposition |
US20100081293A1 (en) | 2008-10-01 | 2010-04-01 | Applied Materials, Inc. | Methods for forming silicon nitride based film or silicon carbon based film |
KR20110069852A (ko) * | 2008-10-10 | 2011-06-23 | 알타 디바이씨즈, 인크. | 연속적인 공급 화학 기상 증착 |
US8557702B2 (en) | 2009-02-02 | 2013-10-15 | Asm America, Inc. | Plasma-enhanced atomic layers deposition of conductive material over dielectric layers |
JP5547418B2 (ja) * | 2009-03-19 | 2014-07-16 | 株式会社Adeka | 化学気相成長用原料及びこれを用いたシリコン含有薄膜形成方法 |
US9076646B2 (en) | 2010-04-15 | 2015-07-07 | Lam Research Corporation | Plasma enhanced atomic layer deposition with pulsed plasma exposure |
US20110256734A1 (en) | 2010-04-15 | 2011-10-20 | Hausmann Dennis M | Silicon nitride films and methods |
US8466073B2 (en) * | 2011-06-03 | 2013-06-18 | Applied Materials, Inc. | Capping layer for reduced outgassing |
US9165761B2 (en) * | 2011-08-25 | 2015-10-20 | Hitachi Kokusai Electric Inc. | Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording medium |
US8569184B2 (en) * | 2011-09-30 | 2013-10-29 | Asm Japan K.K. | Method for forming single-phase multi-element film by PEALD |
JP6150506B2 (ja) * | 2011-12-27 | 2017-06-21 | 東京エレクトロン株式会社 | 成膜方法 |
JP5806612B2 (ja) | 2011-12-27 | 2015-11-10 | 東京エレクトロン株式会社 | シリコン酸炭窒化膜の形成方法 |
US8728955B2 (en) | 2012-02-14 | 2014-05-20 | Novellus Systems, Inc. | Method of plasma activated deposition of a conformal film on a substrate surface |
JP5882777B2 (ja) * | 2012-02-14 | 2016-03-09 | 東京エレクトロン株式会社 | 成膜装置 |
TWI522490B (zh) * | 2012-05-10 | 2016-02-21 | 應用材料股份有限公司 | 利用微波電漿化學氣相沈積在基板上沈積膜的方法 |
WO2013177326A1 (en) | 2012-05-25 | 2013-11-28 | Advanced Technology Materials, Inc. | Silicon precursors for low temperature ald of silicon-based thin-films |
US9234276B2 (en) | 2013-05-31 | 2016-01-12 | Novellus Systems, Inc. | Method to obtain SiC class of films of desired composition and film properties |
US9243324B2 (en) | 2012-07-30 | 2016-01-26 | Air Products And Chemicals, Inc. | Methods of forming non-oxygen containing silicon-based films |
JP6022276B2 (ja) * | 2012-09-20 | 2016-11-09 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置およびプログラム |
SG2013083654A (en) * | 2012-11-08 | 2014-06-27 | Novellus Systems Inc | Methods for depositing films on sensitive substrates |
JP5971144B2 (ja) * | 2013-02-06 | 2016-08-17 | 東京エレクトロン株式会社 | 基板処理装置及び成膜方法 |
JP6146160B2 (ja) * | 2013-06-26 | 2017-06-14 | 東京エレクトロン株式会社 | 成膜方法、記憶媒体及び成膜装置 |
JP6154215B2 (ja) * | 2013-06-28 | 2017-06-28 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置およびプログラム |
JP6246558B2 (ja) * | 2013-10-29 | 2017-12-13 | 東京エレクトロン株式会社 | シリコン酸炭窒化物膜、シリコン酸炭化物膜、シリコン酸窒化物膜の成膜方法および成膜装置 |
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US9799511B2 (en) | 2017-10-24 |
TW201702416A (zh) | 2017-01-16 |
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JP2018515921A (ja) | 2018-06-14 |
WO2016178991A1 (en) | 2016-11-10 |
TWI715572B (zh) | 2021-01-11 |
US20160322214A1 (en) | 2016-11-03 |
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