JP6867382B2 - 共形及び間隙充填型のアモルファスシリコン薄膜の堆積 - Google Patents
共形及び間隙充填型のアモルファスシリコン薄膜の堆積 Download PDFInfo
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- 229910021417 amorphous silicon Inorganic materials 0.000 title claims description 34
- 238000000427 thin-film deposition Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 147
- 239000007789 gas Substances 0.000 claims description 135
- 238000000034 method Methods 0.000 claims description 81
- 238000012545 processing Methods 0.000 claims description 76
- 238000007872 degassing Methods 0.000 claims description 48
- 239000002243 precursor Substances 0.000 claims description 47
- 239000012528 membrane Substances 0.000 claims description 45
- 238000011282 treatment Methods 0.000 claims description 35
- 239000000376 reactant Substances 0.000 claims description 22
- 238000010943 off-gassing Methods 0.000 claims description 20
- 239000012686 silicon precursor Substances 0.000 claims description 14
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 10
- 239000013626 chemical specie Substances 0.000 claims description 9
- 231100000572 poisoning Toxicity 0.000 claims description 9
- 230000000607 poisoning effect Effects 0.000 claims description 9
- 238000003672 processing method Methods 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 239000002574 poison Substances 0.000 claims description 4
- 231100000614 poison Toxicity 0.000 claims description 4
- 229920000548 poly(silane) polymer Polymers 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- GCOJIFYUTTYXOF-UHFFFAOYSA-N hexasilinane Chemical compound [SiH2]1[SiH2][SiH2][SiH2][SiH2][SiH2]1 GCOJIFYUTTYXOF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- CVLHDNLPWKYNNR-UHFFFAOYSA-N pentasilolane Chemical compound [SiH2]1[SiH2][SiH2][SiH2][SiH2]1 CVLHDNLPWKYNNR-UHFFFAOYSA-N 0.000 claims description 3
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims description 2
- 241000212978 Amorpha <angiosperm> Species 0.000 claims 4
- 241000894007 species Species 0.000 claims 4
- 239000003795 chemical substances by application Substances 0.000 claims 2
- LICVGLCXGGVLPA-UHFFFAOYSA-N disilanyl(disilanylsilyl)silane Chemical compound [SiH3][SiH2][SiH2][SiH2][SiH2][SiH3] LICVGLCXGGVLPA-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 45
- 238000009826 distribution Methods 0.000 description 36
- 238000000151 deposition Methods 0.000 description 33
- 230000008021 deposition Effects 0.000 description 28
- 235000012431 wafers Nutrition 0.000 description 23
- 238000010926 purge Methods 0.000 description 16
- 239000011261 inert gas Substances 0.000 description 15
- 238000005530 etching Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 238000005229 chemical vapour deposition Methods 0.000 description 12
- 239000010410 layer Substances 0.000 description 12
- 238000000429 assembly Methods 0.000 description 11
- 230000000712 assembly Effects 0.000 description 11
- 238000000231 atomic layer deposition Methods 0.000 description 11
- 238000012546 transfer Methods 0.000 description 8
- 239000003153 chemical reaction reagent Substances 0.000 description 5
- 238000011049 filling Methods 0.000 description 5
- 238000005755 formation reaction Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005429 filling process Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000006459 hydrosilylation reaction Methods 0.000 description 1
- 230000033444 hydroxylation Effects 0.000 description 1
- 238000005805 hydroxylation reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- -1 silicon halide Chemical class 0.000 description 1
- 238000006884 silylation reaction Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 description 1
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76837—Filling up the space between adjacent conductive structures; Gap-filling properties of dielectrics
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Description
Claims (13)
- 処理方法であって、
水素を含むアウトガス可能な化学種を有するアモルファス膜を形成するために、基板表面を前駆体に曝露することと、
前記アモルファス膜から前記アウトガス可能な化学種を除去して脱ガスされたアモルファス膜を形成するために、前記アモルファス膜を不活性脱ガス環境に曝露することと
を含み、
前記前駆体への曝露と前記不活性脱ガス環境への曝露との間に、前記アモルファス膜を、前記アモルファス膜を高密度化する反応体に曝露することを更に含み、
前記アモルファス膜がアモルファスシリコン膜であり、前記前駆体がシリコン前駆体である、
方法。 - 処理方法であって、
処理チャンバ内に基板表面を配置することであって、前記基板表面が、該基板表面上に少なくとも1つのフィーチャを有し、前記少なくとも1つのフィーチャが、底部、上部、及び側壁を有する間隙を作り出す、基板表面を配置することと、
前記少なくとも1つのフィーチャ上に、水素を含むアウトガス可能な化学種を有するアモルファス膜を形成するために、前記基板表面を前駆体に曝露することと、
前記アモルファス膜から前記アウトガス可能な化学種を除去して脱ガスされたアモルファス膜を形成するために、前記基板表面を不活性脱ガス環境に曝露することと、
前記脱ガスされたアモルファス膜を所定の厚さに成長させるために、前記前駆体への曝露と前記不活性脱ガス環境への曝露とを反復することと
を含み、
前記前駆体への曝露と前記不活性脱ガス環境への曝露との間に、前記アモルファス膜を、前記アモルファス膜を高密度化する反応体に曝露することを更に含む、
方法。 - 処理方法であって、
処理チャンバ内に基板表面を配置することであって、前記基板表面が、該基板表面上に少なくとも1つのフィーチャを有し、前記少なくとも1つのフィーチャが、底部、上部、及び側壁を有する間隙を作り出す、基板表面を配置することと、
前記少なくとも1つのフィーチャ上に、水素を含むアウトガス可能な化学種を有するアモルファス膜を形成するために、前記基板表面を前駆体に曝露することと、
前記アモルファス膜から前記アウトガス可能な化学種を除去して脱ガスされたアモルファス膜を形成するために、前記基板表面を不活性脱ガス環境に曝露することと、
前記脱ガスされたアモルファス膜を所定の厚さに成長させるために、前記前駆体への曝露と前記不活性脱ガス環境への曝露とを反復することと
を含み、
前記前駆体への曝露と前記不活性脱ガス環境への曝露との間に、前記アモルファス膜を反応体に曝露することを更に含み、前記反応体が、前記基板表面の前記フィーチャの上部における前記アモルファス膜の成長を抑制するために、前記アモルファス膜の上側部分を毒化する毒化剤である、
方法。 - 処理方法であって、
処理チャンバ内に基板表面を配置することであって、前記基板表面が、該基板表面上に少なくとも1つのフィーチャを有し、前記少なくとも1つのフィーチャが、底部、上部、及び側壁を有する間隙を作り出す、基板表面を配置することと、
前記少なくとも1つのフィーチャ上に、水素を含むアウトガス可能な化学種を有するアモルファス膜を形成するために、前記基板表面を前駆体に曝露することと、
前記アモルファス膜から前記アウトガス可能な化学種を除去して脱ガスされたアモルファス膜を形成するために、前記基板表面を不活性脱ガス環境に曝露することと、
前記脱ガスされたアモルファス膜を所定の厚さに成長させるために、前記前駆体への曝露と前記不活性脱ガス環境への曝露とを反復することと
を含み、
前記前駆体への曝露と前記不活性脱ガス環境への曝露との間に、前記アモルファス膜を反応体に曝露することを更に含み、前記反応体により、前記基板表面の前記フィーチャの上部において、前記アモルファス膜の少なくとも一部がエッチングされる、
方法。 - 堆積された前記アモルファス膜が、約80%以上の共形性を有する、請求項2から4のいずれか一項に記載の方法。
- 前記基板表面の前記フィーチャの上部における前記アモルファス膜の成長を抑制するために、前記基板表面を毒化剤に曝露することを更に含む、請求項2から5のいずれか一項に記載の方法。
- 前記前駆体がポリシランを含む、請求項1から6のいずれか一項に記載の方法。
- 前記ポリシランが、ジシラン、トリシラン、テトラシラン、イソテトラシラン、ネオペンタシラン、シクロペンタシラン、ヘキサシラン、又はシクロヘキサシランのうちの一又は複数を含む、請求項7に記載の方法。
- 前記前駆体は、活性種の少なくとも95%がジシランである、請求項7に記載の方法。
- 前記不活性脱ガス環境が、アルゴン、ヘリウム、及び窒素のうちの一又は複数を含む、請求項1から9のいずれか一項に記載の方法。
- 前記前駆体と前記不活性脱ガス環境のそれぞれへの曝露が、約50mTorrから約200Torrの範囲内の圧力、及び、約350°Cから約700°Cの範囲内の温度において行われる、請求項1から10のいずれか一項に記載の方法。
- 前記前駆体と前記不活性脱ガス環境へのそれぞれの曝露が、約5Åから約20Åの範囲内の厚さだけ膜を成長させる、請求項1から11のいずれか一項に記載の方法。
- 前記前駆体への曝露と、前記反応体への曝露と、前記不活性脱ガス環境への曝露との各々が、互いにガスカーテンによって分離された、処理チャンバの異なる区域内において行われる、請求項1から12のいずれか一項に記載の方法。
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