JP6908133B2 - プローブピン、検査治具、検査ユニットおよび検査装置 - Google Patents

プローブピン、検査治具、検査ユニットおよび検査装置 Download PDF

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Publication number
JP6908133B2
JP6908133B2 JP2019564209A JP2019564209A JP6908133B2 JP 6908133 B2 JP6908133 B2 JP 6908133B2 JP 2019564209 A JP2019564209 A JP 2019564209A JP 2019564209 A JP2019564209 A JP 2019564209A JP 6908133 B2 JP6908133 B2 JP 6908133B2
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Japan
Prior art keywords
inspection
probe pin
longitudinal direction
extending
contact
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JP2019564209A
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Japanese (ja)
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JPWO2019138505A1 (ja
Inventor
直哉 笹野
直哉 笹野
宏真 寺西
宏真 寺西
貴浩 酒井
貴浩 酒井
時薫 崔
時薫 崔
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Omron Corp
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Omron Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Connecting Device With Holders (AREA)
JP2019564209A 2018-01-11 2018-01-11 プローブピン、検査治具、検査ユニットおよび検査装置 Active JP6908133B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2018/000508 WO2019138505A1 (ja) 2018-01-11 2018-01-11 プローブピン、検査治具、検査ユニットおよび検査装置

Related Child Applications (1)

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JP2020021769A Division JP6699812B1 (ja) 2020-02-12 2020-02-12 プローブピン、検査治具、検査ユニットおよび検査装置

Publications (2)

Publication Number Publication Date
JPWO2019138505A1 JPWO2019138505A1 (ja) 2020-08-06
JP6908133B2 true JP6908133B2 (ja) 2021-07-21

Family

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JP2019564209A Active JP6908133B2 (ja) 2018-01-11 2018-01-11 プローブピン、検査治具、検査ユニットおよび検査装置

Country Status (4)

Country Link
JP (1) JP6908133B2 (ko)
KR (3) KR101903319B1 (ko)
CN (2) CN111033272B (ko)
WO (1) WO2019138505A1 (ko)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7354534B2 (ja) * 2018-11-08 2023-10-03 オムロン株式会社 プローブピンおよび検査治具
KR101999521B1 (ko) * 2019-01-17 2019-07-12 위드시스템 주식회사 핀 파손 방지형 다중 접촉 소켓
JP2020180889A (ja) * 2019-04-25 2020-11-05 オムロン株式会社 プローブピン、検査治具および検査ユニット
JP7318297B2 (ja) * 2019-04-25 2023-08-01 オムロン株式会社 プローブピン、検査治具および検査ユニット
CN110658364A (zh) * 2019-10-23 2020-01-07 柏成文 一种测试针
KR102086391B1 (ko) * 2019-11-05 2020-03-09 주식회사 플라이업 회로 검사장치
KR102086390B1 (ko) * 2019-11-05 2020-03-09 주식회사 플라이업 프로브 핀
KR102429358B1 (ko) * 2020-01-16 2022-08-04 주식회사 플라이업 프로브 핀 및 이를 구비하는 회로 검사장치
DE102020102302A1 (de) 2020-01-30 2021-08-05 Ingun Prüfmittelbau Gmbh Hochfrequenz-Prüfkontaktelement und Prüfstiftvorrichtung
JP2021128055A (ja) * 2020-02-13 2021-09-02 オムロン株式会社 検査ソケット
CN111579837B (zh) * 2020-05-18 2022-09-20 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器
CN111579833B (zh) * 2020-05-18 2022-12-23 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器
CN111579835B (zh) * 2020-05-18 2023-05-16 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器
CN111579836B (zh) * 2020-05-18 2023-01-17 武汉精毅通电子技术有限公司 一种适用于大电流高速信号测试的探针及连接器
KR102431964B1 (ko) * 2020-09-11 2022-08-12 주식회사 오킨스전자 멀티-레이어 콘택 핀
KR102606892B1 (ko) * 2021-06-15 2023-11-29 (주)포인트엔지니어링 검사 소켓용 지지 플레이트, 검사 소켓용 소켓핀 및 이들을 구비하는 검사 소켓
CN113507005A (zh) * 2021-08-10 2021-10-15 烟台艾睿光电科技有限公司 一种巡检机器人充电房及巡检机器人
CN113866465A (zh) * 2021-09-22 2021-12-31 深圳凯智通微电子技术有限公司 探针及集成电路测试设备
JP2023141024A (ja) * 2022-03-23 2023-10-05 株式会社日本マイクロニクス プローブ、プローブ保持装置およびプローブの製造方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434380A (ja) * 1990-05-30 1992-02-05 Toshiba Chem Corp Ｉｃソケット
JP3072071B2 (ja) * 1997-11-26 2000-07-31 日本航空電子工業株式会社 コンタクト
JP2002134202A (ja) 2000-10-27 2002-05-10 Otax Co Ltd 電子部品用ソケット
JP2002164134A (ja) * 2000-11-27 2002-06-07 Yamaichi Electronics Co Ltd Ｉｃパッケージ用ソケット
JP2004138405A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置測定用プローブ
JP5005195B2 (ja) * 2005-07-13 2012-08-22 東京エレクトロン株式会社 プローブカード製造方法
JP4842733B2 (ja) * 2006-08-18 2011-12-21 日本発條株式会社 導電性接触子および導電性接触子ユニット
WO2009084906A2 (en) 2008-01-02 2009-07-09 Nakamura, Toshiyuki The proble pin composed in one body and the method of making it
TWM350159U (en) * 2008-06-30 2009-02-01 Hon Hai Prec Ind Co Ltd Electrical connector
US20090326402A1 (en) * 2008-06-30 2009-12-31 Nellcor Puritan Bennett Ireland Systems and methods for determining effort
JP2010156595A (ja) * 2008-12-26 2010-07-15 Nhk Spring Co Ltd プローブユニット
JP2011191187A (ja) * 2010-03-15 2011-09-29 Nhk Spring Co Ltd コンタクトプローブおよびプローブユニット
US8970238B2 (en) * 2011-06-17 2015-03-03 Electro Scientific Industries, Inc. Probe module with interleaved serpentine test contacts for electronic device testing
JP2013007700A (ja) * 2011-06-27 2013-01-10 Japan Electronic Materials Corp 電気的接触子
JP2013142689A (ja) * 2012-01-06 2013-07-22 Isao Kimoto 複数チップ同時測定用プローブ組立体
JP6107234B2 (ja) * 2013-03-01 2017-04-05 山一電機株式会社 検査用プローブ、および、それを備えるｉｃソケット
KR102018784B1 (ko) * 2013-08-13 2019-09-05 (주)위드멤스 미세 전극 회로 검사용 핀 제조 방법 및 이의 방법으로 제조된 미세 전극 회로 검사용 핀
JP6515877B2 (ja) * 2016-06-17 2019-05-22 オムロン株式会社 プローブピン
JP6737002B2 (ja) * 2016-06-17 2020-08-05 オムロン株式会社 プローブピン

Also Published As

Publication number Publication date
KR20190141116A (ko) 2019-12-23
KR102058152B1 (ko) 2019-12-23
KR102103370B1 (ko) 2020-04-22
KR20190085830A (ko) 2019-07-19
CN111239447B (zh) 2022-07-08
CN111033272A (zh) 2020-04-17
KR101903319B1 (ko) 2018-10-01
CN111239447A (zh) 2020-06-05
WO2019138505A1 (ja) 2019-07-18
CN111033272B (zh) 2022-07-26
JPWO2019138505A1 (ja) 2020-08-06

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