JP6899449B2 - 切削油組成物 - Google Patents
切削油組成物 Download PDFInfo
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- JP6899449B2 JP6899449B2 JP2019558739A JP2019558739A JP6899449B2 JP 6899449 B2 JP6899449 B2 JP 6899449B2 JP 2019558739 A JP2019558739 A JP 2019558739A JP 2019558739 A JP2019558739 A JP 2019558739A JP 6899449 B2 JP6899449 B2 JP 6899449B2
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- cutting oil
- oil composition
- chemical formula
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- 239000010730 cutting oil Substances 0.000 title claims description 45
- 239000000203 mixture Substances 0.000 title claims description 43
- 239000000126 substance Substances 0.000 claims description 47
- 239000002480 mineral oil Substances 0.000 claims description 16
- 235000010446 mineral oil Nutrition 0.000 claims description 14
- 238000005520 cutting process Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 6
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 2
- 235000011187 glycerol Nutrition 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 20
- 238000000926 separation method Methods 0.000 description 15
- 238000011156 evaluation Methods 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- PHYFQTYBJUILEZ-IUPFWZBJSA-N triolein Chemical group CCCCCCCC\C=C/CCCCCCCC(=O)OCC(OC(=O)CCCCCCC\C=C/CCCCCCCC)COC(=O)CCCCCCC\C=C/CCCCCCCC PHYFQTYBJUILEZ-IUPFWZBJSA-N 0.000 description 8
- 229910000278 bentonite Inorganic materials 0.000 description 7
- 239000000440 bentonite Substances 0.000 description 7
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical group O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 239000004215 Carbon black (E152) Substances 0.000 description 5
- 239000002270 dispersing agent Substances 0.000 description 5
- 229930195733 hydrocarbon Natural products 0.000 description 5
- 150000002430 hydrocarbons Chemical class 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- 239000002562 thickening agent Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000009958 sewing Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
- C10M169/02—Mixtures of base-materials and thickeners
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/02—Well-defined hydrocarbons
- C10M105/04—Well-defined hydrocarbons aliphatic
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/10—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M113/00—Lubricating compositions characterised by the thickening agent being an inorganic material
- C10M113/10—Clays; Micas
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
- C10M169/04—Mixtures of base-materials and additives
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/10—Compounds containing silicon
- C10M2201/102—Silicates
- C10M2201/103—Clays; Mica; Zeolites
- C10M2201/1036—Clays; Mica; Zeolites used as thickening agents
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2203/00—Organic non-macromolecular hydrocarbon compounds and hydrocarbon fractions as ingredients in lubricant compositions
- C10M2203/02—Well-defined aliphatic compounds
- C10M2203/0206—Well-defined aliphatic compounds used as base material
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/023—Hydroxy compounds having hydroxy groups bound to carbon atoms of six-membered aromatic rings
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
- C10M2207/127—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids polycarboxylic
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/28—Esters
- C10M2207/283—Esters of polyhydroxy compounds
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/02—Pour-point; Viscosity index
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/04—Detergent property or dispersant property
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/70—Soluble oils
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
Landscapes
- Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Lubricants (AREA)
Description
R1−(CnH2n−4)a−R2
R3−(CnH2n−2)b−R4
R5−(CnH2n)c−R6
前記化学式1乃至化学式3中、nは5または6であり、R1、R2、R3、R4、R5及びR6はそれぞれHまたはOHである。
粘度測定にはBROOKFIELD社のDV−II+Pro modelを使用したが、粘度はSpindle No.62を用いて50rpmで評価した。この時、粘度が25℃で90乃至140mPa.sの範囲であるものが切削油組成物に適している。
層分離は、切削油に炭化ケイ素(silicon carbide;SiC)を混合して層分離が生じるか否かを評価した。切削油:SiCの混合比は、1:1の重量比で混合し、常温で24時間放置した後、液の上端で層分離が起こるかを肉眼で評価し、層分離なしと層分離ありに区分した。この時、層分離が生じないものが切削油組成物に適している。
分散性は、切削油に炭化ケイ素(silicon carbide;SiC)を混合して評価したが、切削油にSiCが分散する程度を肉眼で評価して良好と不良に区分した。この時、良好と評価されたものが切削油組成物に適している。
ソーイング(Sawing)後のウエハー洗浄時間は、ソーイング(Sawing)後のウエハーを洗浄液に浸した後、時間が経過するにつれて、ウエハーの間に存在していた切削油とSiCのほとんどが抜け出す時間を評価した。この時、60分以下と評価されたものが切削油組成物として優れている。
ソーイング(Sawing)後のウエハー反り程度は、洗浄の完了後に、個別ウエハーに対して反り程度を装備を用いて評価した。この時、ソーイング(Sawing)後のウエハー反り程度が10μm以下と評価されたものが切削油組成物として優れている。
下記化学式1乃至3で表される鉱油を含む切削油組成物において、化学式1のa、化学式2のb、化学式3のcの数値範囲を決定するための評価を行い、表1に示した。
R1−(CnH2n−4)a−R2
R3−(CnH2n−2)b−R4
R5−(CnH2n)c−R6
前記化学式1乃至化学式3中、nは5または6であり、R1、R2、R3、R4、R5及びR6はそれぞれHまたはOHである。
化学式1乃至化学式3で表される鉱油を含む切削油組成物において、化学式1のa値、化学式2のb値、化学式3のc値を固定した後、鉱油含有量の数値範囲を決定するための評価を行い、表2に示した。
化学式1乃至化学式3で表される鉱油を含む切削油組成物において、化学式1のa値、化学式2のb値、化学式3のc値を固定した後、ベントナイト含有量の数値範囲を決定するための評価を行い、表3に示した。
化学式1乃至化学式3で表される鉱油を含む切削油組成物において、化学式1のa値、化学式2のb値、化学式3のc値を固定した後、トリオレイン酸グリセリン(Glycerine trioleate)含有量の数値範囲を決定するための評価を行い、表4に示した。
本発明の単純な変形または変更はいずれも、当該分野における通常の知識を有する者によって容易に実施でき、それらの変形や変更も全て本発明の範囲に含まれると理解すべきである。
Claims (2)
- 下記化学式1、化学式2及び化学式3で表される鉱油(mineral oil)を一つ以上含む切削油組成物において、鉱油が70乃至90重量%であり、ベントナイトが1乃至2重量%であり、トリオレイン酸グリセリンが9乃至29重量%であることを特徴とする 切削油組成物。
[化学式1]
R1−(CnH2n−4)a−R2
[化学式2]
R3−(CnH2n−2)b−R4
[化学式3]
R5−(CnH2n)c−R6
(式中、nは5または6であり、aは7乃至20であり、bは39乃至52であり、cは39乃至41であり、R1、R2、R3、R4、R5及びR6はそれぞれHまたはOHである。) - 請求項1に記載の切削油組成物を用いる切削方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2017-0068590 | 2017-06-01 | ||
KR20170068590 | 2017-06-01 | ||
KR1020180061490A KR102062341B1 (ko) | 2017-06-01 | 2018-05-30 | 절삭유 조성물 및 그를 이용한 절삭방법 |
KR10-2018-0061490 | 2018-05-30 | ||
PCT/KR2018/006190 WO2018221972A2 (ko) | 2017-06-01 | 2018-05-31 | 절삭유 조성물 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020518687A JP2020518687A (ja) | 2020-06-25 |
JP6899449B2 true JP6899449B2 (ja) | 2021-07-07 |
Family
ID=64671625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2019558739A Active JP6899449B2 (ja) | 2017-06-01 | 2018-05-31 | 切削油組成物 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11001780B2 (ja) |
JP (1) | JP6899449B2 (ja) |
KR (1) | KR102062341B1 (ja) |
CN (1) | CN110637078B (ja) |
TW (1) | TWI671394B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20230028109A (ko) | 2021-08-20 | 2023-02-28 | 주식회사 원솔루텍 | 반도체 소자 가공용 절삭첨가제 |
KR102547095B1 (ko) | 2022-12-15 | 2023-06-23 | 와이씨켐 주식회사 | 절삭유 조성물 |
Family Cites Families (30)
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SG11201602660WA (en) | 2013-10-07 | 2016-05-30 | Jx Nippon Oil & Energy Corp | Water-soluble cutting fluid stock solution composition, cutting fluid composition, and cutting method |
JP6175038B2 (ja) * | 2014-08-12 | 2017-08-02 | 三和油化工業株式会社 | 金属加工用SiC分散油 |
CN105176647B (zh) * | 2015-10-14 | 2018-01-09 | 苏州市晶协高新电子材料有限公司 | 一种线切割油及其制备方法 |
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