CN112961726A - 金刚线切割大尺寸硅片用切割液及其制备工艺 - Google Patents
金刚线切割大尺寸硅片用切割液及其制备工艺 Download PDFInfo
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- C10M173/00—Lubricating compositions containing more than 10% water
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- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
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Abstract
本发明涉及切割液技术领域，公开了一种金刚线切割大尺寸硅片用切割液及其制备工艺。所述切割液以质量分数计，包括：
Description
技术领域
本发明涉及切割液技术领域，特别是涉及一种金刚线切割大尺寸硅片用切割液及其制备工艺。
背景技术
国内现有的金刚线切割液主要分为三种
A、—种是聚乙二醇体系的切割液，如专利申请CN 102352278A公开的，其主要以聚乙二醇为主，加入一定比例的防锈剂，乳化剂和消泡剂，这种冷却液优点是冷却效果较好，对于硅粉等杂质有一定的悬浮和螯合作用，缺点是成本较高，有一定的环境污染性。
B、—种是小分子醇、醚、酚类混合切割液，如专利申请CN 102433190 A公开的，其主要以丙二醇为主体，通过添加其他醚类和酚类添加剂配制而成的冷却液，这种冷却液的优点是对硅片表面的性能有一定的改善，但其缺点是冷却效果一般，成本高，对于硅粉等杂质的分散作用不是很理想。
C、一种是水基切割液，主要是以水为主，通过加入分散剂，螯合剤，表面活性剤，消泡剂，粘度调节剂而成的一种冷却液，这种冷却液成本低，环境友好，但要解决的问题就是如何分散硅粉等杂质。
以上现有的切割液对于大尺寸硅片切割过程中的硅粉分散情况均不理想，硅片尺寸越大，产生硅粉越多，参与切割面积越大，造成硅粉不能及时带出，造成切割效率低下，切割异常率、脏污率升高。
发明内容
本发明要解决的技术问题是：现有的切割液不能有效的分散大尺寸硅片切割过程中产生的硅粉造成的切割效率低以及异常率和脏污率升高的问题。
为了解决上述技术问题，本发明提供了一种金刚线切割大尺寸硅片用切割液，以质量分数计，包括：
优选的，水为去离子水，所述润滑剂为聚乙二醇、磷酸三乙酯、油酸、油酸化物中的至少一种，所述油酸化物包括油酸三乙醇胺或油酸三丁酯，以使切割液的粘附力增强，润滑性能提高。
优选的，所述极压剂为硼砂、硅酸钠中的至少一种，以使切割液的粘度增大，附着力提高，在切削区形成坚固的润滑膜。
优选的，所述防锈剂为三乙醇胺硼酸酯，以便在金属表面形成一层保护膜，防止生锈。
优选的，所述消泡剂为聚氧乙烯聚氧丙醇胺醚、二甲基硅油、丙二醇嵌段聚醚中的至少一种，以有效抑制硅片切割过程中的气泡性能，提高切割过程的稳定性。
优选的，所述润湿剂为脂肪醇聚氧乙烯醚、月桂醇醚磷酸酯、十二烷基苯磺酸钠中的至少一种，优选为脂肪醇聚氧乙烯醚和月桂醇醚磷酸酯的混合物。
所述防腐剂为十二烯基丁二酸二乙醇酰胺、苯甲酸钠中的至少一种，优选为苯甲酸钠。所述络合剂为氨三乙酸。
本发明还提供一种金刚线切割大尺寸硅片用切割液的制备工艺，按照如下步骤进行：
S1、向配置容器中加入预定比例的水，这里的水为去离子水，然后不断搅拌；
S2、边搅拌边向步骤S1中的水中依次先后加入润滑剂、极压剂、防锈剂、防腐剂、润湿剂、消泡剂、络合剂，然后继续搅拌至加入的各物质均匀分散于水中；
S3、将完成步骤S2的混合液用滤纸进行过滤，以除去溶液中的固体杂质，避免固体杂质切割过程中对硅片的切割面造成损坏，制得所述的金刚线切割大尺寸硅片用切割液。
与现有技术相比，本发明具有以下优点：
1、本发明的金刚线切割大尺寸硅片用切割液，通过消泡剂和润湿剂与润滑剂的复配，提高了切割液的润滑性以及渗透力，使得切割液能够渗入金刚线的线网与硅片或者线网与硅片碎屑之间，形成一层润滑膜，减小了切割带来的损伤、应力以及微裂；同时能够快速冷却正在进行切割的大尺寸硅片表面，还使得切割过程中产生的微粉有效的分散到由水和润滑剂以及润湿剂组成的混合液中，防止在切割的局部有硅粉聚集，对硅片的切割造成影响或者损害；
2、本发明的金刚线切割大尺寸硅片用切割液制备工艺，通过将各种组分与水按照先后顺序依次复配，制得金刚线切割大尺寸硅片用切割液，使得切割液具有对硅粉和碎屑不同包覆能力的液滴，进而通过不同包覆能力的液滴将硅片切割工程中产生的碎屑或者硅粉分散到切割液中，防止硅粉或者碎屑聚集、划伤硅片表面产生划痕，或者避免影响硅片的切割精度。
具体实施方式
下面结合实施例，对本发明的技术方案进行清楚、完整的描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明的保护范围。
实施例1：本实施例优选实施例的一种金刚线切割大尺寸硅片用切割液，以质量分数计，包括：油酸三乙醇胺4.35kg，油酸三丁脂1.73kg，聚乙二醇8.70kg，油酸0.87kg，硼砂2.61kg，三乙醇胺硼酸酯13.04kg，苯甲酸钠0.87kg，脂肪醇聚氧乙烯醚2.61kg，月桂醇醚磷酸酯1.74kg，丙二醇嵌段聚醚1.74kg，氨三乙酸0.87kg，去离子水60kg。
实施例2：本实施例优选实施例的一种金刚线切割大尺寸硅片用切割液，以质量分数计，包括：油酸三乙醇胺2.33kg，油酸三丁脂0.93kg，聚乙二醇7.76kg，油酸0.66kg，硼砂0.52kg，三乙醇胺硼酸酯9.31kg，苯甲酸钠0.62kg，脂肪醇聚氧乙烯醚2.33kg，月桂醇醚磷酸酯1.65kg，丙二醇嵌段聚醚2.12kg，氨三乙酸0.57kg，去离子水71.2kg。
实施例3：本实施例优选实施例的一种金刚线切割大尺寸硅片用切割液，以质量分数计，包括：油酸三乙醇胺2.49kg，油酸三丁脂1.58kg，聚乙二醇12.88kg，油酸0.74kg，硼砂0.96kg，三乙醇胺硼酸酯8.39kg，苯甲酸钠0.73kg，脂肪醇聚氧乙烯醚4.94kg，丙二醇嵌段聚醚0.90kg，氨三乙酸1.00kg，去离子水65.40kg。
将实施例1至3的配方按照本发明的制备方法，分别配置成切割液，然后在相同的切割参数下，将本发明实施例1至3配制的环保型金刚线切割用冷却液与市售切割液A和B进行性能对比，并将性能对比结果记录于下表1中：
表1：实施例1至3制备的切割液与市售切割液性能对比表
表中，TTV均值表示的是total thickness variation，即硅片的总厚度偏差；TTV＞25表示的是硅片厚度最低点与最高点偏差值大于25μm硅片占切割总硅片数的比例；污片率表示的是砂浆、硅粉残留造成的脏污片、油片和水印片等被污染的硅片占切割总硅片数的比例；A+良率表示的是完全符合出货标准的硅片数量占总硅片数的比例；A级良率表示的是完全符合出货标准的硅片数量和有轻微瑕疵但并不影响出货的硅片数量占总硅片数的比例；A+为优等品，A级为合格品。
从表1的实验数据可以得出，实施例1至3的切割液的TTV均值基本小于市售切割液的TTV均值，表明本发明的金刚线切割大尺寸硅片用切割液的切割效果良好，硅片的总厚度偏差保持在7.25及以下，仅实施例3制备的切割液的TTV均值稍大于市售切割液B；TTV大于25的数值，实施例1至3除实施例3的污片率大于市售切割液A和B之外，实施例1和2的切割率均小于市售切割液0.1％，高、低点偏差大于25μm的硅片占比明显减小；污片率基本小于市售切割液的污片率，最大值仅与市售切割液的污片率相等；硅片的A+级良率和A级良率明显高于市售的切割液。本发明实施例配制的切割液与市售的切割液相比较，有效地降低了TTV均值、污片率，提高了成品率。
综上，本发明的金刚线切割大尺寸硅片用切割液，通过消泡剂和润湿剂与润滑剂的复配，提高了切割液的润滑性以及渗透力，使得切割液能够渗入金刚线的线网与硅片或者线网与硅片碎屑之间，形成一层润滑膜，减小了切割带来的损伤、应力以及微裂；同时能够快速冷却正在进行切割的大尺寸硅片表面，还使得切割过程中产生的微粉有效的分散到由水和润滑剂以及润湿剂组成的混合液中，防止在切割的局部有硅粉聚集，对硅片的切割造成影响或者损害；
本发明的金刚线切割大尺寸硅片用切割液制备工艺，通过将各种组分与水按照先后顺序依次复配，制得金刚线切割大尺寸硅片用切割液，使得切割液具有对硅粉和碎屑不同包覆能力的液滴，进而通过不同包覆能力的液滴将硅片切割工程中产生的碎屑或者硅粉分散到切割液中，防止硅粉或者碎屑聚集、划伤硅片表面产生划痕，或者避免影响硅片的切割精度。
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明技术原理的前提下，还可以做出若干改进和替换，这些改进和替换也应视为本发明的保护范围。
Claims (8)
1.金刚线切割大尺寸硅片用切割液，其特征在于，以质量分数计，包括以下组分：
2.根据权利要求1所述的金刚线切割大尺寸硅片用切割液，其特征在于：水为去离子水，所述润滑剂为聚乙二醇、磷酸三乙酯、油酸、油酸化物中的至少一种。
3.根据权利要求1所述的金刚线切割大尺寸硅片用切割液，其特征在于：所述极压剂为硼砂、硅酸钠中的至少一种。
4.根据权利要求1所述的金刚线切割大尺寸硅片用切割液，其特征在于：所述防锈剂为三乙醇胺硼酸酯。
5.根据权利要求1所述的金刚线切割大尺寸硅片用切割液，其特征在于：所述消泡剂为聚氧乙烯聚氧丙醇胺醚、二甲基硅油、丙二醇嵌段聚醚中的至少一种。
6.根据权利要求1所述的金刚线切割大尺寸硅片用切割液，其特征在于：所述润湿剂为脂肪醇聚氧乙烯醚、月桂醇醚磷酸酯、十二烷基苯磺酸钠中的至少一种。
7.根据权利要求1所述的金刚线切割大尺寸硅片用切割液，其特征在于：所述防腐剂为十二烯基丁二酸二乙醇酰胺、苯甲酸钠中的至少一种，优选为苯甲酸钠；所述络合剂为氨三乙酸。
8.金刚线切割大尺寸硅片用切割液的制备工艺，其特征在于，按照以下步骤进行：
S1、向配置容器中加入预定比例的水，然后不断搅拌；
S2、边搅拌边向步骤S1中的水中依次先后加入润滑剂、极压剂、防锈剂、防腐剂、润湿剂、消泡剂、络合剂，然后继续搅拌至加入的各物质均匀分散于水中；
S3、将完成步骤S2的混合液进行过滤，制得所述的金刚线切割大尺寸硅片用切割液。
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