CN113528097A - 一种金刚线细线化切割太阳能级硅片用冷却液及其制备方法 - Google Patents
一种金刚线细线化切割太阳能级硅片用冷却液及其制备方法 Download PDFInfo
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- CN113528097A CN113528097A CN202110954412.9A CN202110954412A CN113528097A CN 113528097 A CN113528097 A CN 113528097A CN 202110954412 A CN202110954412 A CN 202110954412A CN 113528097 A CN113528097 A CN 113528097A
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- 238000005520 cutting process Methods 0.000 title claims abstract description 44
- 239000000110 cooling liquid Substances 0.000 title claims abstract description 35
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 32
- 239000010432 diamond Substances 0.000 title claims abstract description 32
- 229910021422 solar-grade silicon Inorganic materials 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 33
- 239000002270 dispersing agent Substances 0.000 claims abstract description 31
- 238000001338 self-assembly Methods 0.000 claims abstract description 27
- 239000003112 inhibitor Substances 0.000 claims abstract description 21
- 239000000080 wetting agent Substances 0.000 claims abstract description 14
- 239000008367 deionised water Substances 0.000 claims abstract description 12
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000006243 chemical reaction Methods 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 claims description 33
- 235000012431 wafers Nutrition 0.000 claims description 30
- 238000003756 stirring Methods 0.000 claims description 26
- 239000000314 lubricant Substances 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 230000032683 aging Effects 0.000 claims description 6
- -1 alkyl glycoside Chemical class 0.000 claims description 6
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical group CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 claims description 6
- 229930182470 glycoside Natural products 0.000 claims description 6
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 6
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 claims description 3
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 claims description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 7
- 239000010703 silicon Substances 0.000 abstract description 7
- 239000006185 dispersion Substances 0.000 abstract description 3
- 238000009736 wetting Methods 0.000 abstract description 3
- 238000005461 lubrication Methods 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 239000006260 foam Substances 0.000 abstract 1
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 238000001556 precipitation Methods 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 239000002173 cutting fluid Substances 0.000 description 5
- 239000002826 coolant Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 125000003827 glycol group Chemical group 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
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- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
对比 | 入库片数 | 切片A | 一次A | 色差A | 色差B | 硅落 | 亮边 | 掉渣 | 线痕 | TTV | 脏污 | 断线放弃 |
实施例1 | 1235463 | 93.69% | 93.01% | 0.00% | 0.00% | 0.79% | 0.64% | 0.72% | 0.44% | 0.20% | 0.42% | 0.00% |
实施例2 | 1432785 | 94.93% | 94.60% | 0.08% | 0.55% | 0.64% | 0.02% | 0.05% | 0.22% | 0.34% | 0.90% | 0.56% |
实施例3 | 1359821 | 96.54% | 95.41% | 1.08% | 0.00% | 0.80% | 0.79% | 0.03% | 0.26% | 0.54% | 0.35% | 0.00% |
实施例4 | 1328781 | 94.97% | 94.55% | 0.00% | 0.00% | 0.27% | 0.49% | 0.23% | 0.04% | 0.00% | 0.90% | 0.56% |
市售冷却液1# | 1354281 | 90.79% | 90.23% | 0.48% | 0.00% | 0.30% | 1.49% | 0.99% | 2.11% | 0.09% | 0.93% | 0.91% |
市售冷却液2# | 1543167 | 92.69% | 92.61% | 0.08% | 0.55% | 0.64% | 1.08% | 0.05% | 0.22% | 0.34% | 0.90% | 0.56% |
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CN202110954412.9A CN113528097A (zh) | 2021-08-19 | 2021-08-19 | 一种金刚线细线化切割太阳能级硅片用冷却液及其制备方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116376626A (zh) * | 2021-12-23 | 2023-07-04 | 武汉宜田科技发展有限公司 | 一种金刚线多线切割单晶大尺寸硅片用切割液 |
WO2023179650A1 (zh) * | 2022-03-25 | 2023-09-28 | 高景太阳能股份有限公司 | 一种薄片细线化大尺寸太阳能级硅片用切割液 |
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CN112961726A (zh) * | 2021-03-16 | 2021-06-15 | 广东高景太阳能科技有限公司 | 金刚线切割大尺寸硅片用切割液及其制备工艺 |
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Patent Citations (11)
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CN102041137A (zh) * | 2009-10-12 | 2011-05-04 | 上海洗霸科技有限公司 | 一种钼酸盐添加剂及含其的多晶硅或单晶硅切割液 |
CN107129858A (zh) * | 2016-02-29 | 2017-09-05 | 镇江荣德新能源科技有限公司 | 一种用于金刚石线切割硅片的冷却液 |
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CN108504289A (zh) * | 2018-04-03 | 2018-09-07 | 苏州晶瑞化学股份有限公司 | 一种金刚线切割多晶硅片制绒抛光调控剂 |
CN108559609A (zh) * | 2018-06-04 | 2018-09-21 | 保定良合新材料科技有限公司 | 一种用于太阳能硅片加工的金刚线切割液 |
CN108998188A (zh) * | 2018-09-10 | 2018-12-14 | 洛阳阿特斯光伏科技有限公司 | 一种金刚线切割硅片冷却液及其制备方法和应用 |
CN110577636A (zh) * | 2019-09-25 | 2019-12-17 | 淮安巴德聚氨酯科技有限公司 | 一种聚合物多元醇用分散剂和聚合物多元醇的制备方法 |
CN111154094A (zh) * | 2019-12-29 | 2020-05-15 | 南京尚勤新材料科技有限公司 | 一种新型双端反应性聚醚分散剂合成方法 |
CN111909772A (zh) * | 2020-08-31 | 2020-11-10 | 中科孚迪科技发展有限公司 | 一种用于蓝宝石切割的金刚线切割液的制备方法 |
CN111979033A (zh) * | 2020-08-31 | 2020-11-24 | 中科孚迪科技发展有限公司 | 一种用于蓝宝石切割的金刚线切割液 |
CN112961726A (zh) * | 2021-03-16 | 2021-06-15 | 广东高景太阳能科技有限公司 | 金刚线切割大尺寸硅片用切割液及其制备工艺 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN116376626A (zh) * | 2021-12-23 | 2023-07-04 | 武汉宜田科技发展有限公司 | 一种金刚线多线切割单晶大尺寸硅片用切割液 |
WO2023179650A1 (zh) * | 2022-03-25 | 2023-09-28 | 高景太阳能股份有限公司 | 一种薄片细线化大尺寸太阳能级硅片用切割液 |
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Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Applicant after: BAOTOU MEIKE SILICON ENERGY Co.,Ltd. Address before: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant before: Jiangsu Meike Solar Energy Technology Co.,Ltd. Applicant before: BAOTOU MEIKE SILICON ENERGY Co.,Ltd. |
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