CN112342079A - 一种金刚石线锯水基切削液 - Google Patents

一种金刚石线锯水基切削液 Download PDF

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CN112342079A
CN112342079A CN202011254580.9A CN202011254580A CN112342079A CN 112342079 A CN112342079 A CN 112342079A CN 202011254580 A CN202011254580 A CN 202011254580A CN 112342079 A CN112342079 A CN 112342079A
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何虎林
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    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M173/00—Lubricating compositions containing more than 10% water
    • C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/08—Inorganic acids or salts thereof
    • C10M2201/084—Inorganic acids or salts thereof containing sulfur, selenium or tellurium
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/10—Carboxylix acids; Neutral salts thereof
    • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2207/121—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms
    • C10M2207/124—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms containing hydroxy groups; Ethers thereof
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
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    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
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    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
    • C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
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    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
    • C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
    • C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2229/00—Organic macromolecular compounds containing atoms of elements not provided for in groups C10M2205/00, C10M2209/00, C10M2213/00, C10M2217/00, C10M2221/00 or C10M2225/00 as ingredients in lubricant compositions
    • C10M2229/04—Siloxanes with specific structure
    • C10M2229/041—Siloxanes with specific structure containing aliphatic substituents

Abstract

本发明公开了一种金刚石线锯水基切削液，其质量百分比组成为：檬酸铵1％～5％、二氧化硫脲0.3％～1％、乙二胺四乙酸1％～5％、十二烷基酚聚氧乙烯醚1％～5％、三乙醇胺1％～5％、聚乙二醇0.5％～1.5％、二甲基硅油0.3％～1％、去离子水加至100％。本发明水基切削液专门适用于金刚石线锯切割硅锭工艺，具有低表面张力的特点，在切割过程中切削液能快速渗透到切割区域的缝隙中，起到润滑的作用，且对切屑具有良好的分散作用，防止了切屑的团聚；此切削液还具有冷却性强、对环境友好、成本低的优点。

Description

一种金刚石线锯水基切削液
技术领域
本发明属于半导体和光伏产业技术领域，具体涉及一种用于硅片加工过程中金刚石线锯切割工艺的水基切削液。
背景技术
硅片是半导体和光伏产业最重要最基础的原材料，大约90％的太阳能电池模组都要使用到硅片。在硅片加工的众多工序中，硅锭的切片是对其质量影响最大、消耗成本最高的工序。目前硅片切割方式以多线锯切割工艺为主，它具有效率高、切缝损失小、表面损伤层浅、表面质量好、能加工大尺寸硅片的优点，但由于其在固结磨料线锯切割工艺中，金刚石磨料是以特定的方式固定在钢线上，在切片过程中由于金刚线和硅锭高速研磨运转，会产生大量的热量以及硅粉颗粒，对硅片切割有很严重的影响，故需要使用切削液来降低金刚线切割温度以及清理附着在金刚线上的硅粉，增加切割效率，因此水基切削液是在该工艺过程中必不可少的辅材，其性能优良严重影响到硅片性能和生产质量。
水基切削液具有冷却性能好、对环境污染小的特点，但目前国内硅片加工企业目前大多采用国外进口水基切削液产品，切割成本较高，且切割效率效果一般、产生的切割废液难以降解、不可以通过压滤系统循环使用，切割过程中所产生的细小硅粉和氧气高温产生的硅酸盐以及砂浆罐中的硅泥难以清除，在切片过程中会有杂质掉落在切割线网上导致断线、跳线等。
发明内容
本发明所要解决的技术问题在于克服现有金刚石线锯切割工艺的水基切削液存在的切割效率低，切割成本高、硅片切片良率以及断线率一直不稳定等缺点，提供一种切割效率好，切割成本低、断线率低、硅片切片性能提升的环保无污染的水基切削液。
解决上述技术问题所采用的水基切削液由下述质量百分比的原料组成：
Figure BDA0002772690360000011
Figure BDA0002772690360000021
上述水基切削液优选由下述质量百分比的原料组成：
Figure BDA0002772690360000022
上述的聚乙二醇的数均分子量为20～600。
上述的切削液的制备方法为：按照上述原料的质量百分比，将柠檬酸铵、二氧化硫脲、乙二胺四乙酸、十二烷基酚聚氧乙烯醚、三乙醇胺、聚乙二醇、二甲基硅油加入去离子水中，在50～60℃下搅拌均匀，即得水基切削液。
本发明的有益效果如下：
1、本发明水基切削液在金刚石线锯切割过程中，能够快速渗透到切割区域，在硅锭的接触表面形成一层润滑膜，减少硅片表面的崩裂和凹痕，提高了硅片的切割质量和成品率。
2、本发明水基切削液对切屑具有很好的分散作用，防止了切屑的团聚，有效减少了硅片表面划痕的出现。
3、本发明水基切削液黏度小，流动性强，具有高冷却性的特点，在切割时能够快速带走切削热，使加工的硅片保持在较低的温度，减少了硅片表面的翘曲、错位和变形，同时大大提高了切割速度。
具体实施方式
下面结合实施例对本发明进一步详细说明，但本发明的保护范围不仅限于这些实施例。
实施例1
以制备1000g水基切削液为例，其质量组成如下：
Figure BDA0002772690360000031
其制备方法为：将柠檬酸铵、二氧化硫脲、乙二胺四乙酸、十二烷基酚聚氧乙烯醚、三乙醇胺、聚乙二醇、二甲基硅油加入去离子水中，在50～60℃下搅拌均匀，即得水基切削液。
实施例2
以制备1000g水基切削液为例，其质量组成如下：
Figure BDA0002772690360000032
其制备方法与实施例1相同。
实施例3
以制备1000g水基切削液为例，其质量组成如下：
Figure BDA0002772690360000041
其制备方法与实施例1相同。
实施例4
以制备1000g水基切削液为例，其质量组成如下：
Figure BDA0002772690360000042
其制备方法与实施例1相同。
实施例5
以制备1000g水基切削液为例，其质量组成如下：
Figure BDA0002772690360000043
Figure BDA0002772690360000051
其制备方法与实施例1相同。

Claims (3)

1.一种金刚石线锯水基切削液，其特征在于所述水基切削液由下述质量百分比的原料组成：
Figure FDA0002772690350000011
2.根据权利要求1所述的水基切削液，其特征在于所述水基切削液由下述质量百分比的原料组成：
Figure FDA0002772690350000012
3.根据权利要求1或2所述的水基切削液，其特征在于：所述的聚乙二醇的数均分子量为20～600。
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CN1393406A (zh) * 2001-07-04 2003-01-29 川化集团有限责任公司 一种亚硫酸铵用抗氧化剂
CN102212412A (zh) * 2011-05-10 2011-10-12 天津理工大学 一种磨料经过表面活性剂处理的水基切削液及其制备方法
CN102851109A (zh) * 2012-09-21 2013-01-02 蒙特集团（香港）有限公司 一种用于金刚线切割太阳能硅片的冷却液
CN102851108A (zh) * 2012-08-03 2013-01-02 江西赛维Ldk太阳能高科技有限公司 一种金刚石线切割液及其制备方法
WO2014086024A1 (en) * 2012-12-06 2014-06-12 Dow Global Technologies Llc Aqueous cutting fluid composition
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CN106635362A (zh) * 2016-09-13 2017-05-10 天津工业大学 一种金刚石线锯水基切削液
CN107129858A (zh) * 2016-02-29 2017-09-05 镇江荣德新能源科技有限公司 一种用于金刚石线切割硅片的冷却液
CN110511811A (zh) * 2019-08-20 2019-11-29 山东大海新能源发展有限公司 一种光伏硅片水性切削液及其制备方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1393406A (zh) * 2001-07-04 2003-01-29 川化集团有限责任公司 一种亚硫酸铵用抗氧化剂
CN102212412A (zh) * 2011-05-10 2011-10-12 天津理工大学 一种磨料经过表面活性剂处理的水基切削液及其制备方法
CN102851108A (zh) * 2012-08-03 2013-01-02 江西赛维Ldk太阳能高科技有限公司 一种金刚石线切割液及其制备方法
CN102851109A (zh) * 2012-09-21 2013-01-02 蒙特集团（香港）有限公司 一种用于金刚线切割太阳能硅片的冷却液
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CN110511811A (zh) * 2019-08-20 2019-11-29 山东大海新能源发展有限公司 一种光伏硅片水性切削液及其制备方法

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Application publication date: 20210209