CN113667529B - 一种大尺寸太阳能级硅片金刚线切割用冷却液 - Google Patents

一种大尺寸太阳能级硅片金刚线切割用冷却液 Download PDF

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CN113667529B
CN113667529B CN202110954399.7A CN202110954399A CN113667529B CN 113667529 B CN113667529 B CN 113667529B CN 202110954399 A CN202110954399 A CN 202110954399A CN 113667529 B CN113667529 B CN 113667529B
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王嘉
王艺澄
刘传君
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Baotou Meike Silicon Energy Co Ltd
Jiangsu Meike Solar Technology Co Ltd
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Abstract

本发明涉及一种大尺寸太阳能级硅片金刚线切割用冷却液,该冷却剂包括按质量分数计的组分:硅粉表面改性剂50%‑75%,润滑剂8%‑12%,稳定剂5%‑20%,余量为去离子水。将去离子水加入反应釜中;开启搅拌,在室温环境中,依次加入硅粉表面改性剂、润滑剂、硅粉活性抑制剂和稳定剂,搅拌2‑4小时,使其溶解完全;停止搅拌,进行陈化2小时至3小时,得大尺寸太阳能级硅片金刚线切割用冷却液。本发明具有极佳硅粉分散能力、优秀的润湿性能、出色的极压润滑性能、极强的冷却液带热性能、优异的泡沫控制性能,可以满足大尺寸硅片切割的工艺性能要求。

Description

一种大尺寸太阳能级硅片金刚线切割用冷却液
技术领域
本发明涉及切割冷却技术领域,具体涉及一种大尺寸太阳能级硅片金刚线切割用冷却液。
背景技术
大硅片带来的PERC技术发展,HJT技术如何突破,是2020年深受光伏企业关注的问题。可以说,大尺寸硅片(210mm尺寸和182mm尺寸)给光伏行业带来一次震荡和艰难的选择,光伏企业严谨的考量,并选择自己要走的道路。不同尺寸的硅片对于电池、组件,及相关配套的材料设备有哪些新的技术要求?哪一尺寸更符合市场的需要?哪一尺寸是未来的主流与方向?同时,随着HJT技术的发展,主要电池企业都把HJT作为研究,储备的技术,而HJT电池组件的大规模量产也需要进一步的技术突破。
对于切片端而言,大尺寸的切割也是一项重要挑战。面对大尺寸硅片所产的硅粉含量增加了30%以上,金刚线的带液行程增加了15%以上,这就意味着切割过程中硅粉的浓度大幅增加,钢线的切割磨损程度加剧,再加之现在金刚线细线化和硅片片厚薄片化的技术推广速度,对切割过程辅材性能的要求越来越高,金刚线切割冷却液作为重要的硅片切割辅材,切割过程中起到悬浮分散硅粉、为降低金刚线切割过程的磨损,提供极压润滑性能、润湿渗透进行切割界面,带出切割产生的热量的作用。而面对现在更加苛刻的切割过程环境,对金刚线切割冷却液润湿、分散、润滑、冷却液等性能要求越来越高,目前适合166mm尺寸硅片的金刚线切割冷却液已经不能满足182mm和210mm尺寸硅片,大尺寸硅片切割过程断线率高、硅片表面脏污、升棒扭矩大、硅片表面有钢线划痕等问题成为制约大尺寸硅片产能和工艺优化提升的绊脚石。因此,大尺寸太阳能级硅片的金刚线切割冷却液亟待性能提升,匹配现有行业工艺发展需求。
发明内容
针对现有技术的不足,本发明提供了一种大尺寸太阳能级硅片金刚线切割用冷却液,该冷却液具有极佳的硅粉分散能力、优秀的润湿性能、出色的极压润滑性能、极强的冷却液带热性能、优异的泡沫控制性能,尤其是可以满足大尺寸硅片切割的工艺性能要求。
一种大尺寸太阳能级硅片金刚线切割用冷却液,包括以下按质量分数计的组分:硅粉表面改性剂50%-75%,润滑剂8%-12%,稳定剂5%-20%,余量为去离子水。
作为改进的是,所述硅粉表面改性剂为脂肪醇支链化聚醚,采用脂肪醇三元醇为起始醇,进行环氧乙烷环氧丙烷嵌段聚醚然后使用环氧丁烷封端。其结构如下所示:
Figure BDA0003219894240000021
其中,R=CnH2n+1(n=4~12),10≤a+b+c≤40,5≤x+y+z≤20。
作为改进的是,所述润滑剂为环氧乙烷和环氧丁烷反式嵌段聚醚双酯,结构如下所示:
Figure BDA0003219894240000022
其中,R1=CnH2n+1(n=6~12),20≤u+v+w≤50。
所述稳定剂为戊二醇、二丙酮醇、二丙二醇单丁醚、或三丙二醇单丁醚中一种或多种混合。
具体地,上述大尺寸太阳能级硅片金刚线切割用冷却液的制备方法,包括以下步骤:
1)将去离子水加入反应釜中;2)开启搅拌,在室温环境中,依次加入硅粉表面改性剂、润滑剂、硅粉活性抑制剂和稳定剂,搅拌2-4小时,使其溶解完全;3)停止搅拌,进行陈化2小时至3小时,得大尺寸太阳能级硅片金刚线切割用冷却液。
有益效果:
与现有技术相比,本发明一种大尺寸太阳能级硅片金刚线切割用冷却液,对切片良率提升2%以上,断线率下降1%。具体优势如下:
1)面对大尺寸硅片增加的硅粉浓度,本发明产品具有极佳的硅粉分散能力,保证硅片表面的无硅粉团聚和大面积沾附,可以有效缓解清洗工序的清洗压力;
2)对钢线具有极佳的保护性能,在切割过程中可以形成润滑膜层,降低切割阻力,减少切割过程中产生的线弓,降低金刚线断线率;
3)极佳的润湿渗透性能,可以在切割过程中快速润湿切割产生的硅粉、金刚线、硅片表面,能快速将切割产生的热量带出;
4)优异的泡沫控制性能;
5)与现有技术相比,本发明公开了一种大尺寸太阳能级硅片金刚线切割用冷却液及其制备方法,使用其生产的太阳能级182mm尺寸硅片能稳定在92%以上。太阳能级210mm尺寸硅片能稳定在90%以上。
具体实施方式
实施例1
一种大尺寸太阳能级硅片金刚线切割用冷却液,包括以下按质量分数计的组分:
硅粉表面改性剂55%
其结构如下所示:
Figure BDA0003219894240000031
其中,R=C8H17,a+b+c=24,a=b=c=8,x+y+z=9,x=y=z=3。
润滑剂8.5%
结构如下所示:
Figure BDA0003219894240000032
其中,R1=C6H13,u+v+w=40,u=w=6,v=28。
戊二醇10%
去离子水余量
制备方法:
1)将去离子水加入反应釜中;2)开启搅拌,在室温环境中,依次加入硅粉表面改性剂、润滑剂、硅粉活性抑制剂和稳定剂,搅拌2小时,使其溶解完全;3)停止搅拌,进行陈化2小时,即可。
实施例2
一种大尺寸太阳能级硅片金刚线切割用冷却液,包括以下按质量分数计的组分:
硅粉表面改性剂60%
其结构如下所示:
Figure BDA0003219894240000041
其中,R=C6H13,a+b+c=24,a=b=c=8,x+y+z=18,x=y=z=6。
润滑剂10%
结构如下所示:
Figure BDA0003219894240000042
其中,R1=C10H21,u+v+w=30,u=w=8,v=14。
二丙二醇单丁醚12%
去离子水余量。
制备方法同实施例1。
实施例3
一种大尺寸太阳能级硅片金刚线切割用冷却液,包括以下按质量分数计的组分:硅粉表面改性剂72%
其结构如下所示:
Figure BDA0003219894240000043
其中,R=C10H21,a+b+c=15,a=b=c=5,x+y+z=15,x=y=z=5。
润滑剂8%
结构如下所示:
Figure BDA0003219894240000051
其中,R1=C8H17,u+v+w=25,u=w=4,v=17。
二丙酮醇8%
去离子水余量
制备方法同实施例1。
实施例4
一种大尺寸太阳能级硅片金刚线切割用冷却液,包括以下按质量分数计的组分:
硅粉表面改性剂65%
其结构如下所示:
Figure BDA0003219894240000052
其中,R=C6H13,a+b+c=36,a=b=c=12,x+y+z=15,x=y=z=5。
润滑剂11%
结构如下所示:
Figure BDA0003219894240000053
其中,R1=C10H21,u+v+w=40,u=w=7,v=26。
稳定剂三丙二醇单丁醚10%
去离子水余量。
制备方法同实施例1。
Figure BDA0003219894240000054
Figure BDA0003219894240000061
以上实施例中未公开的技术手段和检测方法均为常规,不需要特别介绍。所用市售冷却液均为182系列,品牌为宜田。
从上述数据可以看出,本发明公开了一种大尺寸太阳能级硅片金刚线切割用冷却液及其制备方法,使用其生产的太阳能级182mm尺寸硅片能稳定在92%以上。太阳能级210mm尺寸硅片能稳定在90%以上
以上所述,仅为本发明较佳的具体实施方式,本发明的保护范围不限于此,任何熟悉本技术领域的技术人员在本发明披露的技术范围内,可显而易见地得到的技术方案的简单变化或等效替换均落入本发明的保护范围内。

Claims (2)

1.一种大尺寸太阳能级硅片金刚线切割用冷却液,其特征在于,包括以下按质量分数计的组分:硅粉表面改性剂50%-75%,润滑剂8%-12%,稳定剂5%-20%,余量为去离子水;所述硅粉表面改性剂为脂肪醇支链化聚醚,采用脂肪醇三元醇为起始醇,进行环氧乙烷环氧丙烷嵌段聚醚然后使用环氧丁烷封端,结构如下所示:
Figure FDA0003944182050000011
其中,R=CnH2n+1,n=4~12,10≤a+b+c≤40,5≤x+y+z≤20;
所述润滑剂为环氧乙烷和环氧丁烷反式嵌段聚醚双酯,结构如下所示:
Figure FDA0003944182050000012
其中,R1=CnH2n+1,n=6~12,20≤u+v+w≤50。
2.根据权利要求1所述的一种大尺寸太阳能级硅片金刚线切割用冷却液,其特征在于,所述稳定剂为戊二醇、二丙酮醇、二丙二醇单丁醚、或三丙二醇单丁醚中一种或多种混合。
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CN116751625B (zh) * 2023-07-10 2023-11-17 广东金湾高景太阳能科技有限公司 改善大尺寸硅片切割色差的金刚线切割液及其制备方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106118840A (zh) * 2016-06-24 2016-11-16 上海汉遥新材料科技有限公司 一种金刚石线切割液、其制备方法及使用方法
CN107523401A (zh) * 2017-08-29 2017-12-29 浙江华友电子有限公司 金刚线切割硅片的冷却液及降低发热量的切割工艺
CN107936241A (zh) * 2017-11-27 2018-04-20 山东诺威新材料有限公司 用于消泡剂的聚醚及其制备方法
CN108998188A (zh) * 2018-09-10 2018-12-14 洛阳阿特斯光伏科技有限公司 一种金刚线切割硅片冷却液及其制备方法和应用
CN109370760A (zh) * 2018-11-09 2019-02-22 上海都昱新材料科技有限公司 高润滑高稀释倍率金刚线切割液及其制备方法
CN109777588A (zh) * 2017-11-13 2019-05-21 苏州禾川化学技术服务有限公司 一种用于硅片的单组份金刚线切割液
CN112779079A (zh) * 2021-02-09 2021-05-11 常州时创能源股份有限公司 晶硅切割液及其制备方法和应用
CN112877124A (zh) * 2020-09-09 2021-06-01 武汉宜田科技发展有限公司 一种金刚石线线切割用水性切割液及其制备和使用方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106118840A (zh) * 2016-06-24 2016-11-16 上海汉遥新材料科技有限公司 一种金刚石线切割液、其制备方法及使用方法
CN107523401A (zh) * 2017-08-29 2017-12-29 浙江华友电子有限公司 金刚线切割硅片的冷却液及降低发热量的切割工艺
CN109777588A (zh) * 2017-11-13 2019-05-21 苏州禾川化学技术服务有限公司 一种用于硅片的单组份金刚线切割液
CN107936241A (zh) * 2017-11-27 2018-04-20 山东诺威新材料有限公司 用于消泡剂的聚醚及其制备方法
CN108998188A (zh) * 2018-09-10 2018-12-14 洛阳阿特斯光伏科技有限公司 一种金刚线切割硅片冷却液及其制备方法和应用
CN109370760A (zh) * 2018-11-09 2019-02-22 上海都昱新材料科技有限公司 高润滑高稀释倍率金刚线切割液及其制备方法
CN112877124A (zh) * 2020-09-09 2021-06-01 武汉宜田科技发展有限公司 一种金刚石线线切割用水性切割液及其制备和使用方法
CN112779079A (zh) * 2021-02-09 2021-05-11 常州时创能源股份有限公司 晶硅切割液及其制备方法和应用

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