CN110637078A - 切割油组合物 - Google Patents

切割油组合物 Download PDF

Info

Publication number
CN110637078A
CN110637078A CN201880033099.1A CN201880033099A CN110637078A CN 110637078 A CN110637078 A CN 110637078A CN 201880033099 A CN201880033099 A CN 201880033099A CN 110637078 A CN110637078 A CN 110637078A
Authority
CN
China
Prior art keywords
cutting oil
oil composition
chemical formula
cutting
sawing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201880033099.1A
Other languages
English (en)
Other versions
CN110637078B (zh
Inventor
李昇勋
李昇炫
金胜焕
咸庆国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yc Chemical Products Co ltd
Original Assignee
Rongchang Chemical Products Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rongchang Chemical Products Corp filed Critical Rongchang Chemical Products Corp
Priority claimed from PCT/KR2018/006190 external-priority patent/WO2018221972A2/ko
Publication of CN110637078A publication Critical patent/CN110637078A/zh
Application granted granted Critical
Publication of CN110637078B publication Critical patent/CN110637078B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
    • C10M169/02—Mixtures of base-materials and thickeners
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
    • C10M105/02—Well-defined hydrocarbons
    • C10M105/04—Well-defined hydrocarbons aliphatic
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
    • C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
    • C10M105/10—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M113/00—Lubricating compositions characterised by the thickening agent being an inorganic material
    • C10M113/10—Clays; Micas
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
    • C10M169/04—Mixtures of base-materials and additives
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/10—Compounds containing silicon
    • C10M2201/102—Silicates
    • C10M2201/103—Clays; Mica; Zeolites
    • C10M2201/1036—Clays; Mica; Zeolites used as thickening agents
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2203/00—Organic non-macromolecular hydrocarbon compounds and hydrocarbon fractions as ingredients in lubricant compositions
    • C10M2203/02—Well-defined aliphatic compounds
    • C10M2203/0206—Well-defined aliphatic compounds used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/02—Hydroxy compounds
    • C10M2207/023—Hydroxy compounds having hydroxy groups bound to carbon atoms of six-membered aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/10—Carboxylix acids; Neutral salts thereof
    • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
    • C10M2207/127—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids polycarboxylic
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/28—Esters
    • C10M2207/283—Esters of polyhydroxy compounds
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/02—Pour-point; Viscosity index
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/04—Detergent property or dispersant property
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/70—Soluble oils
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2040/00—Specified use or application for which the lubricating composition is intended
    • C10N2040/20—Metal working
    • C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Engineering & Computer Science (AREA)
  • Lubricants (AREA)

Abstract

本发明涉及切割油组合物，用于提供一种分层、分散性、粘度、锯切后晶锭清洗时间、锯切后晶片弯曲程度相比于以往切割油组合物显著优异的切割油组合物，本发明的切割油组合物首先是高度氢化处理的以化学式1至化学式3表示的矿物油和增粘剂为膨润土(Bentonite clay)、分散剂为甘油三油酸酯(Glycerine trioleate)的切割油组合物，且涉及利用这种切割油组合物进行切割的方法。

Description

切割油组合物
技术领域
本发明涉及在线锯(wiresaw)切割工序期间使用的切割油组合物。本发明尤其涉及一种包含高度氢化处理的烃蒸馏液、增粘剂及分散剂的线锯切割油组合物。
背景技术
线锯切割是为了制造在集成电路及光电池产业中使用的薄晶片而对晶锭(ingot)进行切片的主要方法。
并且，该方法也是在将其他物质的基板，例如蓝宝石、碳化硅或陶瓷基板制造成晶片方面通常使用的方法。
线锯典型地具有微细金属线的网(web)或线网(wireweb)，其中个别线具有约0.15mm的直径，通过一系列的线轴(spool)、皮带轮及线导，在0.1至1.0mm距离内彼此平行地排列。切割是通过将基板等工件与已采用切割油组合物的移动线接触而实现的。
在通常的线锯切割过程中，利用一种组合物，所述组合物是在包含矿物油、增粘剂、分散剂等的切割油组合物中，大致按1:1重量比率混合由诸如碳化硅颗粒的硬质物质形成的研磨剂颗粒而制造的。
切割油组合物是提供润滑及冷却，且通过将研磨剂保持在线上而使得研磨剂可以与被切割的工件接触的液体。
为了使得切割油发挥最佳性能，需要润滑性与粘性的适当均衡。当润滑性过大时，微细研磨颗粒无法附着于加工件而滑落，从而切割能力减小，如果润滑性不足，则各个微细研磨颗粒无法发挥充分的切割能力。
作为切割油组合物，可以为非水性物质，例如矿物油、煤油、聚乙二醇、聚丙二醇或其他聚亚烷基二醇，亲水性物质也可以在线锯切割工序中使用。
发明内容
要解决的问题
本发明涉及在线锯(wiresaw)切割工序期间使用的切割油组合物。就现有切割油组合物而言，往往具有分层的缺点，或分散性下降，或表现出粘度过低或过高的缺点，或具有锯切(sawing)后晶锭清洗时间过长的缺点，或表现出锯切后晶片弯曲程度大的缺点。
即，在以往的切割油组合物的情况下，当综合评价分层、分散性、粘度、锯切后清洗时间、锯切后晶片弯曲程度时，这些特性中的一种以上特性不良，从而属于不适合的切割油组合物。
本发明可以提供一种切割油组合物，就所述切割油组合物而言，在评价关于分层、分散性、粘度、锯切后清洗时间、锯切后晶片弯曲程度的所有特性时，不仅一种以上的特性不会不良，而且综合评价这些特性时，与以往的切割油组合物相比，所有特性显著优异。
解决问题的手段
本发明是为了达到所述目的而完成的，本发明中，首先，发明了以下述化学式1表示的高度氢化处理的烃，然后，在以化学式1至化学式3表示的高度氢化处理的烃中混合增粘剂及分散剂，从而发明了具有分层、分散性、粘度、锯切后晶锭清洗时间、锯切后晶片弯曲程度综合性地显著优异的特性的切割油组合物。
根据一个体现例的本发明的切割油组合物，首先包含作为高度氢化处理的以下述化学式1至化学式3表示的烃的矿物油。
[化学式1]
R1-(CnH2n-4)a-R2
[化学式2]
R3-(CnH2n-2)b-R4
[化学式3]
R5-(CnH2n)c-R6
在所述化学式1至化学式3中，n为5或6，R1、R2、R3、R4、R5及R6分别为H或OH。
根据一个体现例的本发明的切割油组合物可以是作为矿物油的切割油组合物，所述矿物油是高度氢化处理的烃，其特征在于，在所述化学式中，化学式1的a为7至20，化学式2的b为39至52，化学式3的c为39至41。
根据一个体现例的本发明的切割油组合物可以是还包含增粘剂及分散剂的切割油组合物。
根据一个体现例的本发明切割油组合物可以是增粘剂为膨润土(Bentoniteclay)、分散剂为甘油三油酸酯(Glycerine trioleate)的切割油组合物。
根据一个体现例的本发明的切割油组合物可以是矿物油为65至93重量％、膨润土为0.7至3重量％、甘油三油酸酯为5至35重量％的切割油组合物，更优选的切割油组合物可以是矿物油为70至90重量％、膨润土为1至2重量％、甘油三油酸酯为9至29重量％的切割油组合物。
根据一个体现例的本发明的切割方法是利用所述切割油组合物进行切割的方法。
发明的效果
本发明显示提供一种分层、分散性、粘度、锯切后晶片清洗时间、锯切后晶片弯曲程度综合性地显著优异的切割油组合物的效果。
具体实施方式
只要未以其他方式定义，本说明书中使用的所有技术性及科学性术语具有与本发明所属技术领域的熟练专家通常所理解的意思相同的意思。一般而言，本说明书中使用的命名法是本技术领域熟知和通常使用的。
在本申请通篇说明书中，当提到某部分“包括”某种构成要素时，只要没有特别反对的记载，则意味着可以还包括其他构成要素，而不除外其他构成要素。
[实施例]
在下述A、B、C、D项目中进行的实施例及比较例中，按如下基准实施了评价。
1)粘度测量：
粘度测量使用了博勒飞(BROOKFIELD)公司的DV-II+专业型(Promodel)，使用转子No.62，在50rpm下进行了评价。此时，粘度在25℃下为90至140mPa.s范围时，适合作为切割油组合物。
2)分层测量：
分层测量是在切割油中混合碳化硅(silicon carbide：SiC)来评价了是否发生分层，切割油:SiC混合比按重量比1:1混合后，在常温下放置24小时时间后，以肉眼观测的方式评价了在液体上端是否出现分层，从而区分为无分层及有分层。此时，未发生分层的适合作为切割油组合物。
3)分散性测量：
分散性是在切割油中混合碳化硅(silicon carbide：SiC)来评价的，以肉眼观测的方式评价了在切割油中SiC分散的程度，从而区分为良好及不良。此时，被评价为良好的适合作为切割油组合物。
4)锯切后晶片清洗时间测量：
锯切后晶片清洗时间测量是在锯切后将晶片浸于清洗液后，评价了随着时间经过而曾在晶片之间存在的切割油和SiC的大部分洗出的时间。此时，被评价为60分钟以下的作为切割油组合物是优异的。
5)锯切后晶片弯曲程度测量：
锯切后晶片弯曲程度测量是在完成清洗后，针对个别晶片，利用装备评价了弯曲程度。此时，锯切后晶片弯曲程度评价为10μm以下的作为切割油组合物是优异的。
实施方式
A.实施例1至3及比较例1、2：化学式1的a、化学式2的b、化学式3的c的数值范围评 价
针对包含以下述化学式1至3表示的矿物油的切割油组合物，进行了用于确定化学式1的a、化学式2的b、化学式3的c的数值范围的评价并记载于表1中。
[化学式1]
R1-(CnH2n-4)a-R2
[化学式2]
R3-(CnH2n-2)b-R4
[化学式3]
R5-(CnH2n)c-R6
在所述化学式1至化学式3中，n为5或6，R1、R2、R3、R4、R5及R6分别为H或OH。
[表1]
如上表1所示，综合评价分层、分散性、粘度、锯切后晶片清洗时间、锯切后晶片弯曲程度的结果，评价为化学式1的a为7至20、化学式2的b为39至52、化学式3的c为39至41的实施例1至3相比于比较例1及2显著优异。
B.实施例4至6及比较例3、4：矿物油的组成比评价
针对包含以化学式1至化学式3表示的矿物油的切割油组合物，固定化学式1的a值、化学式2的b值、化学式3的c值后，进行用于确定矿物油含量的数值范围的评价并记载于表2。
[表2]
如上表2所示，综合评价分层、分散性、粘度的结果，评价为矿物油为70至90重量％的实施例1至3相比于比较例3及4显著优异。
C.实施例7、8及比较例5至7：膨润土的组成比评价
针对包含以化学式1至化学式3表示的矿物油的切割油组合物，固定化学式1的a值、化学式2的b值、化学式3的c值后，进行用于确定膨润土含量的数值范围的评价并记载于表3。
[表3]
如上表3所示，综合评价分层、分散性、粘度的结果，评价为膨润土含量为1至2重量％的实施例7及8相比于比较例5至7显著优异。
D.实施例9至11及比较例8、9：甘油三油酸酯的组成比评价
针对包含以化学式1至化学式3表示的矿物油的切割油组合物，固定化学式1的a值、化学式2的b值、化学式3的c值后，进行用于确定甘油三油酸酯(Glycerine trioleate)含量的数值范围的评价并记载于表4。
[表4]
如表4所示，综合评价分层、分散性、粘度的结果，评价为甘油三油酸酯(Glycerinetrioleate)含量为9至20重量％的实施例9至11相比于比较例8及9显著优异。
从这种结果可知，在化学式1的a为7至20、化学式2的b为39至52、化学式3的c是39至41的矿物油为70至90重量％、膨润土为1至2重量％、甘油三油酸酯(Glycerinetrioleate)为9至20重量％的情况下，综合评价分层、分散性、粘度、锯切后晶片清洗时间、锯切后晶片弯曲程度时，表现出显著优异。
本发明的单纯变形或变更均可以由该领域的技术人员容易地实施，这种变形或变更可以视为均包括在本发明的领域中。

Claims (7)

1.一种切割油组合物，包含以下述化学式1、化学式2及化学式3表示的矿物油，
[化学式1]
R1-(CnH2n-4)a-R2
[化学式2]
R3-(CnH2n-2)b-R4
[化学式3]
R5-(CnH2n)c-R6
在所述化学式中，n为5或6，R1、R2、R3、R4、R5及R6分别为H或OH。
2.根据权利要求1所述的切割油组合物，其特征在于，
a为7至20，b为39至52，c为39至41。
3.根据权利要求1所述的切割油组合物，其中，
还包含增粘剂及分散剂。
4.根据权利要求3所述的切割油组合物，其特征在于，
增粘剂为膨润土，分散剂为甘油三油酸酯。
5.根据权利要求4所述的切割油组合物，其特征在于，
矿物油为65至93重量％，膨润土为0.7至3重量％，甘油三油酸酯为5至35重量％。
6.根据权利要求5所述的切割油组合物，其特征在于，
矿物油为70至90重量％，膨润土为1至2重量％，甘油三油酸酯为9至29重量％。
7.一种切割方法，所述切割方法中利用权利要求1至6中任一项的切割油组合物。
CN201880033099.1A 2017-06-01 2018-05-31 切割油组合物 Active CN110637078B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
KR20170068590 2017-06-01
KR10-2017-0068590 2017-06-01
KR1020180061490A KR102062341B1 (ko) 2017-06-01 2018-05-30 절삭유 조성물 및 그를 이용한 절삭방법
KR10-2018-0061490 2018-05-30
PCT/KR2018/006190 WO2018221972A2 (ko) 2017-06-01 2018-05-31 절삭유 조성물

Publications (2)

Publication Number Publication Date
CN110637078A true CN110637078A (zh) 2019-12-31
CN110637078B CN110637078B (zh) 2022-03-08

Family

ID=64671625

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880033099.1A Active CN110637078B (zh) 2017-06-01 2018-05-31 切割油组合物

Country Status (5)

Country Link
US (1) US11001780B2 (zh)
JP (1) JP6899449B2 (zh)
KR (1) KR102062341B1 (zh)
CN (1) CN110637078B (zh)
TW (1) TWI671394B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230028109A (ko) 2021-08-20 2023-02-28 주식회사 원솔루텍 반도체 소자 가공용 절삭첨가제
KR102547095B1 (ko) * 2022-12-15 2023-06-23 와이씨켐 주식회사 절삭유 조성물

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1946834A (zh) * 2004-04-28 2007-04-11 出光兴产株式会社 金属加工油组合物
US20150315513A1 (en) * 2012-12-06 2015-11-05 Dow Global Technologies Llc Aqueous Cutting Fluid Composition
CN105176647A (zh) * 2015-10-14 2015-12-23 苏州市晶协高新电子材料有限公司 一种线切割油及其制备方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5072067A (en) * 1988-11-15 1991-12-10 Idemitsu Kosan Company Limited Lubricating oil composition
JP3949200B2 (ja) * 1996-08-12 2007-07-25 エヌ・エス ルブリカンツ株式会社 ワイヤソーによる切断加工のための切削油、切削油組成物およびそれを用いた物品の切断方法
JPH1053789A (ja) * 1996-08-12 1998-02-24 Nippei Toyama Corp ワイヤー切断加工機用水性加工液組成物
WO1999051711A1 (fr) * 1998-04-03 1999-10-14 Kao Corporation Composition pour huile de coupe
US6602834B1 (en) * 2000-08-10 2003-08-05 Ppt Resaerch, Inc. Cutting and lubricating composition for use with a wire cutting apparatus
JP4808855B2 (ja) * 2001-03-23 2011-11-02 協同油脂株式会社 潤滑剤組成物
JP4601221B2 (ja) * 2001-09-06 2010-12-22 ユシロ化学工業株式会社 固定砥粒ワイヤソー用不水溶性加工油剤組成物
JP4601220B2 (ja) * 2001-09-06 2010-12-22 ユシロ化学工業株式会社 固定砥粒ワイヤソー用不水溶性加工油剤組成物
JP2004315669A (ja) 2003-04-16 2004-11-11 Nippon Oil Corp アルミニウム加工用潤滑油
KR100418258B1 (ko) * 2003-06-25 2004-02-14 주식회사 이득 나노실버메탈 콜로이드 첨가의 수용성절삭유제 구성물
JP2006111728A (ja) 2004-10-14 2006-04-27 Palace Chemical Co Ltd ワイヤソー用切削油剤
KR100665790B1 (ko) 2005-03-31 2007-01-09 주식회사 비아이티범우연구소 수용성 절삭유 조성물
US20080102735A1 (en) * 2006-08-30 2008-05-01 Saint-Gobain Ceramics & Plastics, Inc. Concentrated abrasive slurry compositions, methods of production, and methods of use thereof
KR100821589B1 (ko) 2006-11-14 2008-04-14 이순제 내부패성 금속 절삭유제의 조성물
KR100845740B1 (ko) * 2007-02-26 2008-07-11 강릉대학교산학협력단 세라믹 수계 절삭액 조성물
KR20090065847A (ko) * 2007-12-18 2009-06-23 주식회사 실트론 웨이퍼 연마용 슬러리 분산제
JP5259215B2 (ja) * 2008-02-29 2013-08-07 出光興産株式会社 脆性材料用加工油
US9023960B2 (en) * 2008-12-26 2015-05-05 Idemitsu Kosan Co., Ltd. Process for producing α-olefin polymer, α-olefin polymer, and lubricating oil composition
EP2441550B1 (en) 2009-06-12 2016-09-07 Nissin Chemical Industry Co., Ltd. Aqueous cutting fluid and aqueous cutting agent
KR20110039725A (ko) * 2009-10-12 2011-04-20 동우 화인켐 주식회사 와이어 쏘우용 수용성 절삭액 조성물
JP5571795B2 (ja) * 2009-10-16 2014-08-13 ダウ グローバル テクノロジーズ エルエルシー ダイヤモンドワイヤーソーと共に使用する水性切削液
KR101680383B1 (ko) * 2010-08-16 2016-11-28 동우 화인켐 주식회사 와이어 쏘우용 수성 절삭액 조성물
JP2012077279A (ja) * 2010-10-05 2012-04-19 Katsuo Matsuzawa 新規の切削油剤
JP5764505B2 (ja) * 2012-02-02 2015-08-19 Ｊｘ日鉱日石エネルギー株式会社 油剤組成物
JP5832462B2 (ja) * 2013-02-21 2015-12-16 Ｊｘ日鉱日石エネルギー株式会社 研削加工又は研磨加工用油剤組成物、及びその油剤組成物を用いた研削加工又は研磨加工方法
SG11201602660WA (en) * 2013-10-07 2016-05-30 Jx Nippon Oil & Energy Corp Water-soluble cutting fluid stock solution composition, cutting fluid composition, and cutting method
JP6175038B2 (ja) * 2014-08-12 2017-08-02 三和油化工業株式会社 金属加工用ＳｉＣ分散油

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1946834A (zh) * 2004-04-28 2007-04-11 出光兴产株式会社 金属加工油组合物
US20150315513A1 (en) * 2012-12-06 2015-11-05 Dow Global Technologies Llc Aqueous Cutting Fluid Composition
CN105176647A (zh) * 2015-10-14 2015-12-23 苏州市晶协高新电子材料有限公司 一种线切割油及其制备方法

Also Published As

Publication number Publication date
KR20180131977A (ko) 2018-12-11
CN110637078B (zh) 2022-03-08
TWI671394B (zh) 2019-09-11
US11001780B2 (en) 2021-05-11
KR102062341B1 (ko) 2020-01-03
JP6899449B2 (ja) 2021-07-07
TW201903137A (zh) 2019-01-16
US20200190423A1 (en) 2020-06-18
JP2020518687A (ja) 2020-06-25

Similar Documents

Publication Publication Date Title
CN103184093B (zh) 一种用于金刚石线切割蓝宝石的切割液
JP5430650B2 (ja) ワイヤ切断装置を使用するための切断及び潤滑性組成物
JP5079508B2 (ja) シリコンウェハの製造方法
TWI460267B (zh) Water - based cutting fluid and water - based cutting agent
CN102787005B (zh) 用于切削硬脆材料的加工组成物及切削组成物
CN110637078B (zh) 切割油组合物
TW201441361A (zh) 水性加工液
KR20100133907A (ko) 수성 절삭액 및 수성 절삭제
JPH10110180A (ja) ワイヤソーによる切断加工のための切削油、切削油組成物およびそれを用いた物品の切断方法
JPH03181598A (ja) 切断加工用油剤
US8597538B2 (en) Composition for improving dryness during wire sawing
JP6854634B2 (ja) ビトリファイドボンド砥石
JP2012214638A (ja) 含水切削液組成物およびその製造方法
KR20110039725A (ko) 와이어 쏘우용 수용성 절삭액 조성물
TW201240723A (en) Stable aqueous slurry suspensions
EP2625240B1 (en) A method for production of photovoltaic wafers and abrasive slurry
JP2009062426A (ja) 遊離砥粒ワイヤソー用水溶性加工油剤、スラリー及び切断加工方法
TWI640619B (zh) 一種切割製程用的水性切割液的添加劑及其製備方法
KR20110015192A (ko) 와이어 쏘우용 수용성 절삭액 조성물
KR20110038340A (ko) 와이어 쏘우용 수용성 절삭액 조성물

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: Gyeongbuk, South Korea

Patentee after: YC Chemical Products Co.,Ltd.

Address before: Gyeongbuk, South Korea

Patentee before: YOUNG CHANG CHEMICAL CO.,LTD.