JP6875588B1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6875588B1 JP6875588B1 JP2020157444A JP2020157444A JP6875588B1 JP 6875588 B1 JP6875588 B1 JP 6875588B1 JP 2020157444 A JP2020157444 A JP 2020157444A JP 2020157444 A JP2020157444 A JP 2020157444A JP 6875588 B1 JP6875588 B1 JP 6875588B1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 170
- 239000004020 conductor Substances 0.000 claims description 88
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 11
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 230000005669 field effect Effects 0.000 claims description 6
- 230000004888 barrier function Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 description 15
- 229910000679 solder Inorganic materials 0.000 description 10
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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Abstract
Description
以下、本開示の実施形態について詳細に説明するが、本実施形態はこれらに限定されるものではない。なお、本明細書及び図面において、実質的に同一の機能構成を有する構成要素については、同一の符号を付することにより重複した説明を省くことがある。
まず、第1実施形態について説明する。図1は、第1実施形態に係る半導体装置を示す斜視図である。図2は、第1実施形態に係る半導体装置を示す上面図である。ただし、図2では、ケースを透視している。図3は、第1実施形態に係る半導体装置における放熱板と、第1絶縁基板と、第2絶縁基板との関係を示す断面図である。図3は、図2中のIII-III線に沿った断面図に相当する。
次に、第2実施形態について説明する。図14は、第2実施形態に係る半導体装置における第1絶縁基板及び第2絶縁基板の構成を示す模式図である。
2:放熱板
2A:第1主面
2B:第2主面
3:P端子
4:N端子
5:第1O端子
6:第2O端子
7、8:接合材
9:ケース
10:第1絶縁基板
10A:第3絶縁基板
10B:第4絶縁基板
11、11A、11B、12A、12B、12C、13A、13B、14A、14B、18、18A、18B、19:導電層
12:第2導体、第7導体(導電層)
13:第1導体(導電層)
14:第8導体(導電層)
20:第2絶縁基板
20A:第5絶縁基板
20B:第6絶縁基板
21、21A、21B、22A、22B、23A、23B、24A、24B、25A、25B、26、27、28、28A、28B、29:導電層
22:第6導体(導電層)
23:第5導体(導電層)
24:第4導体(導電層)
25:第3導体(導電層)
31:第1接続部材(ワイヤ)
32:第2接続部材(ワイヤ)
41:第5接続部材(ワイヤ)
42:第6接続部材(ワイヤ)
51、53、55:ワイヤ
52:第3接続部材(ワイヤ)
54:第8接続部材(ワイヤ)
61、62、63、64、65:ワイヤ
71、73、75:ワイヤ
72:第7接続部材(ワイヤ)
74:第4接続部材(ワイヤ)
81、82、83、85、86、87:ワイヤ
91、92:側壁部
93、94:端壁部
95、96:端子台
100:上アーム
110:第1トランジスタ
110A:第1トランジスタ群
111:第1ゲート電極
112:第1ソース電極
113:第1ドレイン電極
120:第1ダイオード
120A:第1ダイオード群
121:第1アノード電極
122:第1カソード電極
131:第1ゲート端子
132:第1センスソース端子
133:センスドレイン端子
200:下アーム
210:第2トランジスタ
210A:第2トランジスタ群
211:第2ゲート電極
212:第2ソース電極
213:第2ドレイン電極
220:第2ダイオード
220A:第2ダイオード群
221:第2アノード電極
222:第2カソード電極
231:第2ゲート端子
232:第2センスソース端子
330:サーミスタ
331:第1サーミスタ端子
332:第2サーミスタ端子
411、412、413、414、415、418:ワイヤ
421、422、423、424、425、428:ワイヤ
I1、I2、I3、I4:電流
Claims (17)
- 第1絶縁基板と、
第2絶縁基板と、
第1アームと、
を有し、
前記第1アームは、
前記第1絶縁基板に設けられた第1トランジスタと、
前記第2絶縁基板に設けられ、前記第1トランジスタに並列に接続された第1ダイオードと、
を有する半導体装置。 - 前記第1絶縁基板に設けられ、前記第1トランジスタの第1電極に接続された第1導体と、
前記第1絶縁基板に設けられ、前記第1トランジスタの第2電極に接続された第2導体と、
前記第2絶縁基板に設けられ、前記第1ダイオードの第1カソード電極に接続された第3導体と、
前記第2絶縁基板に設けられ、前記第1ダイオードの第1アノード電極に接続された第4導体と、
前記第1導体と前記第3導体とを接続する第1接続部材と、
前記第2導体と前記第4導体とを接続する第2接続部材と、
を有する請求項1に記載の半導体装置。 - 前記第1接続部材及び前記第2接続部材はワイヤである請求項2に記載の半導体装置。
- 前記第1接続部材及び前記第2接続部材は金属板である請求項2に記載の半導体装置。
- 前記第2電極と前記第2導体とを接続する第3接続部材と、
前記第1アノード電極と前記第4導体とを接続する第4接続部材と、
を有する請求項2から請求項4のいずれか1項に記載の半導体装置。 - 前記第1アームに直列に接続された第2アームを有し、
前記第2アームは、
前記第2絶縁基板に設けられた第2トランジスタと、
前記第1絶縁基板に設けられ、前記第2トランジスタに並列に接続された第2ダイオードと、
を有する請求項1から請求項5のいずれか1項に記載の半導体装置。 - 前記第2絶縁基板に設けられ、前記第2トランジスタの第3電極に接続された第5導体と、
前記第2絶縁基板に設けられ、前記第2トランジスタの第4電極に接続された第6導体と、
前記第1絶縁基板に設けられ、前記第2ダイオードの第2カソード電極に接続された第7導体と、
前記第1絶縁基板に設けられ、前記第2ダイオードの第2アノード電極に接続された第8導体と、
前記第5導体と前記第7導体とを接続する第5接続部材と、
前記第6導体と前記第8導体とを接続する第6接続部材と、
を有する請求項6に記載の半導体装置。 - 前記第5接続部材及び前記第6接続部材はワイヤである請求項7に記載の半導体装置。
- 前記第5接続部材及び前記第6接続部材は金属板である請求項7に記載の半導体装置。
- 前記第4電極と前記第6導体とを接続する第7接続部材と、
前記第2アノード電極と前記第8導体とを接続する第8接続部材と、
を有する請求項7から請求項9のいずれか1項に記載の半導体装置。 - 前記第1トランジスタの第1制御電極に接続された第1制御端子と、
前記第2トランジスタの第2制御電極に接続された第2制御端子と、
を有し、
平面視で、
前記第1制御端子と前記第2ダイオードとの間に前記第1トランジスタが配置され、
前記第2制御端子と前記第1ダイオードとの間に前記第2トランジスタが配置される請求項6から請求項10のいずれか1項に記載の半導体装置。 - 複数の前記第1トランジスタを有し、
前記第1制御端子には、複数の前記第1トランジスタの前記第1制御電極が接続され、
複数の前記第2トランジスタを有し、
前記第2制御端子には、複数の前記第2トランジスタの前記第2制御電極が接続され、
前記第1制御端子と前記第2ダイオードとの間に複数の前記第1トランジスタが配置され、
前記第2制御端子と前記第1ダイオードとの間に複数の前記第1トランジスタが配置される請求項11に記載の半導体装置。 - 複数の前記第2ダイオードを有し、
前記第1絶縁基板は、
複数の前記第1トランジスタのうちの一部と、複数の前記第2ダイオードのうちの一部とが配置された第3絶縁基板と、
複数の前記第1トランジスタのうちの他の一部と、複数の前記第2ダイオードのうちの他の一部とが配置された第4絶縁基板と、
を有する請求項12に記載の半導体装置。 - 複数の前記第1ダイオードを有し、
前記第2絶縁基板は、
複数の前記第2トランジスタのうちの一部と、複数の前記第1ダイオードのうちの一部とが配置された第5絶縁基板と、
複数の前記第2トランジスタのうちの他の一部と、複数の前記第1ダイオードのうちの他の一部とが配置された第6絶縁基板と、
を有する請求項12または請求項13に記載の半導体装置。 - 前記第2トランジスタは、炭化珪素を用いて構成された電界効果トランジスタであり、
前記第2ダイオードは、炭化珪素を用いて構成されたショットキーバリアダイオードである請求項6から請求項14のいずれか1項に記載の半導体装置。 - 前記第1トランジスタは、炭化珪素を用いて構成された電界効果トランジスタであり、
前記第1ダイオードは、炭化珪素を用いて構成されたショットキーバリアダイオードである請求項1から請求項15のいずれか1項に記載の半導体装置。 - 第1主面と、前記第1主面とは反対側の第2主面とを備えた放熱板を有し、
前記第1主面に前記第1絶縁基板及び前記第2絶縁基板が搭載され、
前記第2主面が凸状に湾曲している請求項1から請求項16のいずれか1項に記載の半導体装置。
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