JP6865864B2 - 埋め込み型電力レール - Google Patents
埋め込み型電力レール Download PDFInfo
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- JP6865864B2 JP6865864B2 JP2019570902A JP2019570902A JP6865864B2 JP 6865864 B2 JP6865864 B2 JP 6865864B2 JP 2019570902 A JP2019570902 A JP 2019570902A JP 2019570902 A JP2019570902 A JP 2019570902A JP 6865864 B2 JP6865864 B2 JP 6865864B2
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- rail
- power rail
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Description
この本開示は、2017年6月22日に出願された米国仮出願第62/523,704号「Method to Self−align Buried Power Rails and Below−device Wiring for Random and Non−random Logic Applications and Designs」の利点を主張するものであり、この仮出願は、その全体が参照によって本明細書に組み込まれる。
Claims (20)
- 第1の分離トレンチ内の第1のレール開口内に形成された第1の電力レールと、
前記第1のレール開口内の前記第1の電力レール上の第1の誘電体キャップであって、前記第1の電力レールを当該第1の誘電体キャップの上の導電パターン構造から分離する第1の誘電体キャップと、
第2の分離トレンチ内の第2のレール開口内に形成され、前記第1の電力レールと実質的に同じ厚さを持つ第2の電力レールと、
前記第2のレール開口内の前記第2の電力レール上の第2の誘電体キャップであって、前記第2のレール開口の側面材料に対してエッチング選択性である第2の誘電体キャップと、
前記第2のレール開口の前記側面材料に対してエッチング選択性である前記第2の誘電体キャップをエッチングすることによって形成され、その結果として前記第2の電力レールとアライメントされた側面を持つ開口であって、前記導電パターン構造を前記第2の電力レールと接続する導電材料で充填されている開口と、
を含む半導体デバイス。 - 前記第1の電力レールが前記第1の分離トレンチ内部に形成され、且つ前記第2の電力レールが前記第2の分離トレンチ内部に形成されている、請求項1に記載の半導体デバイス。
- 前記第1の電力レールが前記第1の分離トレンチを抜けてバルクシリコン基材の中まで形成され、且つ前記第2の電力レールが前記第2の分離トレンチを抜けて前記バルクシリコン基材の中まで形成されている、請求項1に記載の半導体デバイス。
- 前記第2の誘電体キャップが、前記第2の電力レールと前記第2の分離トレンチ及び前記第2の分離トレンチ内の酸化物との間のSiOライナーに対してエッチング選択性の材料である、請求項1に記載の半導体デバイス。
- 前記第1の誘電体キャップが前記第1の電力レールの上に選択的に堆積されている、請求項1に記載の半導体デバイス。
- 前記第1及び第2の電力レールは、700℃以上で熱的安定性を有する金属材料で形成される、請求項1に記載の半導体デバイス。
- 前記金属材料が高融点金属である、請求項6に記載の半導体デバイス。
- 前記金属材料がルテニウムを含む、請求項6に記載の半導体デバイス。
- 前記第1及び第2の電力レールの抵抗率要件を満たすように前記第1及び第2の電力レールのアスペクト比が既定される、請求項1に記載の半導体デバイス。
- 前記アスペクト比と共に前記第1及び第2の電力レールの限界寸法幅が既定される、請求項9に記載の半導体デバイス。
- 前記第1及び第2の電力レールは、前記第1及び第2のレール開口を前記高融点金属で充填し、前記高融点金属を特定の深さまでエッチングバックすることによって形成されている、請求項7に記載の半導体デバイス。
- 半導体デバイスの製造方法であって、
第1の分離トレンチ内の第1のレール開口内に第1の電力レールを形成し、且つ第2の分離トレンチ内の第2のレール開口内に、前記第1の電力レールと実質的に同じ厚さを持つ第2の電力レールを形成し、
前記第1の電力レールを第1の誘電体キャップで、及び前記第2の電力レールを第2の誘電体キャップで上面被覆し、前記第2の誘電体キャップは、前記第2のレール開口の側面材料に対してエッチング選択性であり、
前記第2のレール開口の前記側面材料に対してエッチング選択性である前記第2の誘電体キャップ内に開口をエッチングし、その結果として該開口の側面が前記第2のレール開口とアライメントされることをもたらし、そして、
前記開口を導電材料で充填して、該充填された開口を介して導電パターン構造を前記第2の電力レールと接続し、前記第1の誘電体キャップが前記第1の電力レールを前記導電パターン構造から分離する、
ことを含む方法。 - 前記第1の分離トレンチ内の前記第1のレール開口内に前記第1の電力レールを形成し、且つ前記第2の分離トレンチ内の前記第2のレール開口内に前記第2の電力レールを形成することが、
前記第1の分離トレンチ内部に前記第1のレール開口を、及び前記第2の分離トレンチ内部に前記第2のレール開口をエッチングすることと、
前記第1の分離トレンチ内部の前記第1のレール開口内に前記第1の電力レールを、及び前記第2の分離トレンチ内部の前記第2のレール開口内に前記第2の電力レールを形成することと
を更に含む、請求項12に記載の方法。 - 前記第1の分離トレンチ内の前記第1のレール開口内に前記第1の電力レールを形成し、且つ前記第2の分離トレンチ内の前記第2のレール開口内に前記第2の電力レールを形成することが、
前記第1の分離トレンチを抜けてバルクシリコン基材の中まで前記第1のレール開口を、及び前記第2の分離トレンチを抜けて前記バルクシリコン基材の中まで前記第2のレール開口をエッチングすることと、
前記第1の分離トレンチと前記バルクシリコン基材との中にある前記第1のレール開口内に前記第1の電力レールを、及び前記第2の分離トレンチと前記バルクシリコン基材との中にある前記第2のレール開口内に前記第2の電力レールを形成することと
を更に含む、請求項12に記載の方法。 - 前記第1の分離トレンチ内で前記第1の電力レールを前記第1の誘電体キャップで上面被覆することが、
前記第1の電力レールと前記第1の分離トレンチとの間のSiOライナーに対してエッチング選択性である前記第1の誘電体キャップとして誘電体材料を選択的に堆積させることを更に含む、請求項12に記載の方法。 - 前記第1の分離トレンチ内の前記第1のレール開口内に前記第1の電力レールを形成し、且つ前記第2の分離トレンチ内の前記第2のレール開口内に前記第2の電力レールを形成することが、
700以上で熱的安定性を有する金属材料を使用して前記第1の電力レール及び前記第2の電力レールを形成することを更に含む、請求項12に記載の方法。 - 700℃以上で前記熱的安定性を有する前記金属材料を使用して前記第1の電力レール及び前記第2の電力レールを形成することが、
ルテニウムを使用して前記第1の電力レール及び前記第2の電力レールを形成することを更に含む、請求項16に記載の方法。 - ルテニウムを使用して前記第1の電力レール及び前記第2の電力レールを形成することが、
前記第1の分離トレンチ内の前記第1のレール開口を、及び前記第2の分離トレンチ内の前記第2のレール開口を、前記ルテニウムで充填することと、
前記ルテニウムを特定の深さまでエッチングバックすることと
を更に含む、請求項17に記載の方法。 - 前記第1の分離トレンチ内の前記第1のレール開口内に前記第1の電力レールを形成し、且つ前記第2の分離トレンチ内の前記第2のレール開口内に前記第2の電力レールを形成することが、
2つのレール線を含む電力レールを形成することを更に含む、請求項12に記載の方法。 - 前記2つのレール線を含む前記電力レールを形成することが、
分離トレンチ内のレール開口の側壁及び底部の上にスペーサ層を共形的に堆積させることと、
前記レール開口を誘電体材料で充填することと、
前記レール開口の側壁に形成された前記スペーサ層を除去して2つのスペーサトレンチを形成することと、
前記2つのスペーサトレンチをルテニウムで充填することと、
前記ルテニウムを特定の深さまでエッチングバックすることと
を更に含む、請求項19に記載の方法。
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TWI734919B (zh) | 2021-08-01 |
CN110800113A (zh) | 2020-02-14 |
WO2018237106A1 (en) | 2018-12-27 |
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